• Title/Summary/Keyword: Back scattered electron

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The Microstructure and physical properties of electroplated Cu films (열처리에 따른 Cu 전해도금막의 미세구조 및 물리적성질 변화)

  • 권덕렬;박현아;김충모;이종무
    • Journal of the Korean Vacuum Society
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    • v.13 no.2
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    • pp.72-78
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    • 2004
  • Cu seed layers deposited by magnetron sputtering onto tantalum nitride barrier films were treated with ECR plasma and then the copper films were electroplated and rapid thermal annealed in an argon or nitrogen atmosphere at various temperatures ranging from 200 to $500^{\circ}C$. Changes in the microstructure and physical properties of the copper films electroplated on the hydrogen ECR plasma cleaned copper seed layers were investigated using X-ray diffraction (XRD), electron back-scattered diffraction (EBSD), and atomic force microscopy (AFM) analyses. It was found that the copper film undergoes complete recrystallization during annealing at a temperature higher than $400^{\circ}C$. The resistivity of the Cu film tends to decrease and the degree of (111) preferred orientation tends to increase as the annealing temperature increases. Theoptimum annealing condition for obtaining the film with the lowest resistivity, the smoothest surface and the highest degree of the (111) preferred orientation is rapid thermal annealing in a nitrogen atmosphere at $400^{\circ}C$ for 120 s. The resistivity and the surface roughness of the electroplated copper film annealed under this condition are 1.98 $\mu$O-cm and 17.77 nm, respectively.

The Microstructure and Microwave Dielectric Properties of Ceramics in the System CaTiO3-Li0.5Nd0.5TiO3

  • Lowe, Tristan;Azough, Feridoon;Freer, Robert
    • Journal of the Korean Ceramic Society
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    • v.40 no.4
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    • pp.328-332
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    • 2003
  • Ceramics of xCaTiO$_3$-(1-x)Li$_{0.5}$Nd$_{0.5}$TiO$_3$(xCT-(1-x)LNT) series have been prepared by the mixed oxide route. Powders were calcined at 110$0^{\circ}C$ ; cylindrical specimens were fired at temperatures in the range 1300-150$0^{\circ}C$. Sintered products were typically 90-95% dense. The microstructures were dominated by angular grains typically 1.3${\mu}{\textrm}{m}$ to 3.5 ${\mu}{\textrm}{m}$ in size. Twinning in the microstructures was analysed using Electron Back Scattered Diffraction (EBSD). Microwave dielectric properties of xCT-(1-x)LNT at 2.1 GHz ($\varepsilon$$_{r}$, Qxf, and $\tau$r) were 170,3800 GHz and 744 ppm/$^{\circ}C$ for pure CaTiO$_3$ and 80,2000 GHz and -240 ppm/$^{\circ}C$ for LNT. The $\tau$r decreases almost linearly from 744 for pure CaTiO$_3$ to -240 for pure LNT.LNT.T.

Effect of Aluminium and Boron on Formability for Cu Bearing Extra Low Carbon Steel Sheets (Cu첨가 극저탄소 고 강도강의 가공성에 미치는 Al과 B의 영향)

  • Kim, S.I.;Chung, K.H.;Hong, M.H.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2009.05a
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    • pp.302-305
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    • 2009
  • This paper examines the effect of nitride formation on formability for Cu bearing high strength extra low carbon (ELC) steel sheets. For this purpose, we have investigated the effect of addition of aluminium (Al) and boron (B) on texture and precipitation behavior of the ELC steel during continuous annealing. Mechanical properties and microstructures of the ELC steel sheets were analyzed as well using uni-axial tensile test, electron back-scattered diffraction (EBSD) technique and transmission electron microscopy (TEM) following pilot rolling and continuous annealing. It has been found that the addition of Al and B increases the precipitation of AlN and BN. What is more, the scavange of solute nitrogen is effective in increasing the formability of the ELC steels. In addition, the Al and B addition improves the aging property of the ELC steel.

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Microstructure analyses of aluminum nitride (AlN) using transmission electron microscopy (TEM) and electron back-scattered diffraction (EBSD) (투과전자현미경과 전자후방산란회절을 이용한 AlN의 미세구조 분석)

  • Joo, Young Jun;Park, Cheong Ho;Jeong, Joo Jin;Kang, Seung Min;Ryu, Gil Yeol;Kang, Sung;Kim, Cheol Jin
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.25 no.4
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    • pp.127-134
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    • 2015
  • Aluminum nitride (AlN) single crystals have attracted much attention for a next-generation semiconductor application because of wide bandgap (6.2 eV), high thermal conductivity ($285W/m{\cdot}K$), high electrical resistivity (${\geq}10^{14}{\Omega}{\cdot}cm$), and high mechanical strength. The bulk AlN single crystals or thin film templates have been mainly grown by PVT (sublimation) method, flux method, solution growth method, and hydride vapor phase epitaxy (HVPE) method. Since AlN suffers difficulty in commercialization due to the defects that occur during single crystal growth, crystalline quality improvement via defects analyses is necessary. Etch pit density (EPD) analysis showed that the growth misorientations and the defects in the AlN surface exist. Transmission electron microscopy (TEM) and electron back-scattered diffraction (EBSD) analyses were employed to investigate the overall crystalline quality and various kinds of defects. TEM studies show that the morphology of the AlN is clearly influenced by stacking fault, dislocation, second phase, etc. In addition EBSD analysis also showed that the zinc blende polymorph of AlN exists as a growth defects resulting in dislocation initiator.

Effects of Rolling and Cooling Conditions on Microstructures and Mechanical Properties of High-Deformable Pipeline Steels (고변형능 라인파이프강의 미세조직과 기계적 특성에 미치는 압연 및 냉각 조건의 영향)

  • Lee, S.I.;Hwang, B.
    • Journal of the Korean Society for Heat Treatment
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    • v.27 no.5
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    • pp.235-241
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    • 2014
  • Effects of rolling and cooling conditions on microstructures and mechanical properties of high-deformable pipeline steels were investigated in this study. Six kinds of pipeline steels were fabricated by varying rolling and cooling conditions, and their microstructures were analyzed by scanning electron microscopy, electron back-scattered diffraction, and transmission electron microscopy. Tensile and Charpy impact tests were conducted on the steels in order to examine the mechanical properties. The steels rolled in the two-phase region showed better low-temperature toughness than those in the single-phase region due to the larger amount of ferrites having high-angle boundaries, although they have lower strength and absorbed energy. The steel rolled in single-phase and finish-cooled at higher temperature showed a good combination of high strength and good low-temperature toughness as well as excellent deformability of the lowest yield ratio and the highest uniform elongation because of the presence of fine ferrite and a mixture of various low-temperature transformation phases.

Effects of Alloying Elements on the Characteristics of Microstructure and High Temperature Oxidation of Cast Austenitic Stainless Steel (오스테나이트 스테인리스 주강의 미세 조직 및 고온 산화 특성에 미치는 합금원소의 영향)

  • Lee, In-Sung;Jeon, Soon-Hyeok;Kim, Soon-Tae;Lee, Jung-Suk;Ko, Young-Sang;Kim, Jong-Myoung
    • Journal of Korea Foundry Society
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    • v.30 no.5
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    • pp.179-186
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    • 2010
  • To elucidate the effects of alloying elements on the characteristics of microstructure and high temperature oxidation of cast austenitic stainless steel, a thermodynamic calculation, a cyclic oxidation test, a X-ray diffraction, a scanning electron microscopy-back scattered electron, a electron probe microanalysis were conducted. The thermodynamic calculation for the effect of vanadium (V) addition on the formation of various precipitates leads to a decrease of chromium (Cr)-rich $M_{23}C_6$ carbides due to the formation of M (C, N) carbo-nitrides containing V and / or niobium (Nb). The V added alloy increased the resistance to high temperature oxidation due to a decrease of Cr-depleted zone deteriorating the oxidation resistance and due to the V-enriched oxide layer formed in inner oxide layer blocking the outward transport of cations.

Alteration Textures and Mineral Chemistry of Margarite from Miwon Area, Chungcheongbukdo (충북미원지역에서 산출하는 마카라이트의 변질양상 및 광물화학)

  • 이승준;안중호;김현철;조문섭
    • Journal of the Mineralogical Society of Korea
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    • v.15 no.1
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    • pp.69-77
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    • 2002
  • Margarite, which occurs in the Unkyori Formation of Miwon area, Chungcheongbukdo, South Korea, was investigated using the petrographic microscope, back-scattered electron images (BSEI), and electron probe microanalyzer (EPMA) to characterize the alteration textures and mineral chemistries. Most margarite crystals are inhomogeneous, and chlorite was commonly observed to occur at the boundaries parallel to the rim of margarite. Cracks occur across the basal plane of the margarite, and margarite is partly replaced by chlorite along the cracks. In additon, muscovite and biotite are intergrown in margarite and chlorite crystals, suggesting that margarite was partially altered to chlorite as well as to muscovite and biotite. Chemical analysis data show that paragonite solid solution in the margarite is approximately 19.6 mol%, but clintonite solid solution is negligible. Margarite crystals in the Unkyori Formation cut or penetrate other metamorphic minerals In the same thin sections and are oriented randomly without any relationship with the foliation of host rocks, indicating that formed as a secondary mineral after peak metamorphism. Furthermore, it seems that hydrothermal fluids associated with the Mesozoic intrusions developed near the sample are closely related to the margarite formation.

Shear Texture Development and Grain Refinement in Asymmetrically Rolled Aluminum Alloy Sheets : Effects of Shear Combinations (비대칭압연한 알루미늄합금판재의 전단집합조직발달과 결정립미세화 : 전단변형 조합의 영향)

  • 이종국;이동녕
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2003.10a
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    • pp.132-135
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    • 2003
  • Asymmetric rolling, in which the ratio of the rotation rates of the upper and lower rolls was 2, has been used to introduce an intense plastic shear strain for the purpose of grain refinement and developing shear deformation textures through the sheet thickness to improve the strength and plastic strain ratio of AA1050 aluminum alloy sheets. The alloy sheets were rolled at room temperature without lubrication. The textures and microstructures of the sheets were investigated by x-ray diffraction and electron back-scattered diffraction (EBSD) analyses with emphasis on effects of combinations of rot ling directions.

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Effect of Initial Orientation and Austenitic Phase on Texture Evolution in Ferritic Stainless Steels (페라이트계 스테인레스강의 집합조직 형성에 미치는 초기 방위 및 오스테나이트사의 영향)

  • 이용득
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 1999.03a
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    • pp.149-152
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    • 1999
  • The effect of initial orientation on the microstructure and texture evolution of two ferritic stainless steels was investigated. the columnar and equiaxed crystal specimens which were prepared from continuous casting slab were hot rolled annealed cold rolled and annealed respectively. The rolling and recrystallization textures at each process stage were examined by orientation distribution function (ODF) and electron back-scattered diffraction (EBSD); The observation showed that the orientation density of the $\alpha$-fibre of hot rolled band of columnar crystal specimen was more pronounced than that of the equaxed one at the center layer. Nevertheless the cold rolled textures of Type 430 steel have demonstrated a rather similar development . Compared to Type 430 steel the development of the $\alpha$-fibre in the center layer of Type 409L steel was much more pronounced. The relation between texture evolution and ridging behaviour has been discussed.

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Superplastic Deformation Behavior of ECA dressed 7010 Al Alloy (ECAP가공된 7010 Al 합금의 초소성 변형 특성)

  • 김지식
    • Transactions of Materials Processing
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    • v.11 no.3
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    • pp.255-261
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    • 2002
  • The grain size of 7010 Al alloy was refined to submicrometer level by using equal channel angular pressing (ECAP) and additional warm rolling. The mechanisms of grain refinement in ECAP process were fragmentation of coarse grain to ultra fine subgrains after a few passes and continuous recrystallization of the subgrains with the increase o( passes. Because of ultrafine grain size, essentially low temperature and high strain rate superplasticity was observed after ECAP process and warm rolling to form a sheet metal. The maximum elongation of 700% was obtained for an ECA pressed specimen after IS passes without warm rolling at $450^{\circ}C$ with strain rate of 5x$10^{-3}$/sec.