• 제목/요약/키워드: BOE

검색결과 165건 처리시간 0.025초

Optoelectronic properties of p-n hetero-junction array of networked p-CNTs and aligned $n-SnO_2$ nanowires

  • 민경훈;윤장열;하정숙
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2010년도 제39회 하계학술대회 초록집
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    • pp.274-274
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    • 2010
  • 최근 들어 나노선을 이용한 pn 접합 소자 연구 결과가 매우 활발하게 보고되고 있다. 그러나, 서로 다른 두 종류의 나노선으로 pn 접합 어레이 구조의 소자를 제작할 때, 나노선을 원하는 위치에 정렬하는 기술상의 어려움이 큰 걸림돌이 된다. 본 연구에서는 p-CNT와 n-$SnO_2$ 나노선을 이용한 pn 접합 어레이 구조를 제작할 수 있는 독창적인 공정기술을 제안한다. 먼저 $SiO_2$가 300 nm 성장된 Si 기판을 선택적으로 패터닝하여 BOE (6:1) 용액으로 $SiO_2$ 층을 80 nm 정도 선택적으로 에칭한 후, 선택적으로 에칭된 표면에 슬라이딩 장비를 이용하여 화학기상증착법(chemical vapor deposition: CVD)으로 성장된 n-$SnO_2$ 나노선을 전이시킨다. 그 다음 thermal tape를 이용하여 CVD 법으로 성장된 랜덤 네트워크 형태의 CNT를 $SnO_2$ 나노선이 전이된 기판 위에 전이 시킨다. 이때 성장된 CNT 필름 중 금속성 나노선을 통한 전하 이동을 감소시키기 위해, 촉매로 사용되는 페리틴의 농도를 낮춰서 전체적인 CNT의 농도를 줄이는 방법을 이용하였다. 따라서, 성장된 CNT 필름은 별도의 후처리 없이 p-형의 반도체성을 보였다. 제작된 pn-소자는 정류비가 ~103 인 정류특성을 보였으며, 254 nm 파장의 UV lamp를 조사하여 광전류가 발생하는 것을 확인하였다. 연구결과는 이종의 나노선 접합에 의한 다이오드 응용과 UV 센서응용 가능성을 보여준다.

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$\textrm{O}_3$/TEOS를 이용한 후막 $\textrm{SiO}_2$의 성장특성 연구 (Growth Characteristics of Thick $\textrm{SiO}_2$ Using $\textrm{O}_3$/TEOS APCVD)

  • 이우형;최진경;김현수;유지범
    • 한국재료학회지
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    • 제9권2호
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    • pp.144-148
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    • 1999
  • We have studied the deposition characteristics of thick silicon dioxide film on Si substrate by $O_3$/TEOS APCVD(Atmospheric Pressure Chemical Vapor Deposition). The effect of deposition parameters such as the distance between showerhead and substrate, deposition temperature, TEOS flow rate and $O_3$/TEOS ratio on deposition rate, surface morphology, and properties of films as investigated. As deposition temperature increased, deposition rate decreased but the surface morphology and adhesion of film to substrate improved. As the distance between showerhead and substrate decreased, the deposition rate increased. Etching rate using the BOE increased as TEOS flow rate increased, but was independent of$ O_3$/TEOS ratio. Deposition rate of $5\mu\textrm{m}$/hour was obtained under the condition that the distance between showerhead and substrate was 5mm and the deposition temperature was $370^{\circ}C$.

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Association of Dexamethasone-induced Apoptosis and $G_l-Arrest$ of Human Leukemic CEM Cells with Polyamine Deficit

  • Choi, Sang-Hyun;Lee, Jung-Ae;Chae, Yang-Seok;Min, Bon-Hong;Chun, Yeon-Sook;Chun, Boe-Gwun
    • The Korean Journal of Physiology and Pharmacology
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    • 제1권4호
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    • pp.457-466
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    • 1997
  • The effects of DFMO or/and putrescine on the dexamethasone-induced apoptosis of CEM cells were studied to investigate the role of polyamines in anti-leukemic glucocorticoid action. Dexamethasone- induced apoptosis was preceded by significant decreases of cellular polyamine contents and putrescine uptake activity. But DFMO produced decreases of putrescine and spermidine contents and marked increase of putrescine uptake activity, but did not induce apoptosis. However, dexamethasone and DFMO, respectively, induced $G_1-arrest$ in cell cycle and hypophosphorylation of pRb, resulting in the increase of $G_1$ to S ratio and decrease of CEM cell count. DFMO enhanced the dexamethasone-induced apoptosis and $G_1-arrest$. On the other hand, putrescine little affected the apoptotic and $G_1-arresting$ activities of dexamethasone, but almost suppress the effects of DFMO and also the DFMO-dependent enhancement of dexamethasone effects. These results suggested that the dexamethasone-induced apoptosis to be associated with pRb hypophosphorylation and $G_1-arrest$ in CEM cells might be ascribed to the concomitant decreases of cellular polyamine contents and putrescine uptake activity.

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고굴절률 PECVD SiNx 박막의 성장 및 그 표면특성 분석

  • 추성중;정재욱;정의석;박정호
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.121-122
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    • 2011
  • 광도파로 기반 센서의 성능을 개선시키기 위해서는 코어와 클래딩 층의 굴절률 차를 크게 하여 표면감도를 향상시켜야 한다. 이를 위해 센서용 광도파로 코어 층을 위한 고굴절률 SiNx 박막을 플라즈마 화학기상증착(PECVD, plasma enhanced chemical vapor deposition)법을 이용하여 성장한 후 그 표면특성을 분석하였다. 이 때 플라즈마 화학기상증착 공정 조건 중 NH3 가스를 제외하여 Si 성분이 많은 고굴절률 SiNx 박막의 성장을 유도하고 He/SiH4 가스유량비를 0에서 100까지 변화시켜 SiNx 박막의 표면거칠기를 제어하였다. Si기판 위에 SiNx 박막을 10분 성장 후 BOE(buffered oxide etchant)로 선택식각하여 그 박막두께를 alpha step으로 측정하는 방법으로 He/SiH4 가스유량비 조건별 박막성장률을 계산하였다. 그 결과 He/SiH4 가스유량비 증가함에 따라 박막성장률이 33 nm/min에서 19 nm/min으로 선형적인 감소함을 알 수 있었다. 박막두께가 190 nm가 되도록 He/SiH4 가스유량비 조건별 SiNx 박막을 성장한 후 그 표면특성을 AFM (atomic force microscope)으로 관찰하였다. 이를 통해 He/SiH4 가스유량비가 50일 때 SiNx 박막의 표면거칠기가 최소가 됨을 알 수 있었다.

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Picrotoxin의 과혈당작용(過血糖作用)과 그에 대(對)한 몇 약물(藥物)의 영향(影響) (Picrotoxin-induced Hyperglycemia and the Influences of Several Drugs on the Hyperglycemia)

  • 전보권
    • 대한약리학회지
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    • 제14권1_2호
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    • pp.55-62
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    • 1978
  • Ban formulated the concept of 'sympathetic center' and 'parasympathetic center' in the central nervous system, and Folkow et al. reported that the electric stimulation of the posterior part of hypothalamus induced the marked liberation of catecholamines from the adrenal medulla. Tatum reported that the hyperglycemic action of picrotoxin is contributed to the cathecholamines liberation from adrenal medulla by the excitation of hypothalamus via splanchnic nervous plexus. In this paper, the relationship between the convulsive action and the hyperglycemic effect of picrotoxin was investigated, with references to the influences of several drugs related with adrenergic function and two intravenous anesthetics on the picrotoxin hyperglycemia. The results obtained were summarized as follows; 1) There was no difference between the convulsive dose(1. 5mg/kg) and the subconvulsive dose (0.75mg/kg) of picrotoxin in its hyperglycemic effect that was not affected with the phenobarbital pretreatment, but the efficacy of its hyperglycemic action was more prominent than that of strychnine. 2) The hyperglycemic effect of picrotoxin was markedly suppressed by the pretreatment of thiopental or ketamine. 3) The hyperglycemic effect was not affected by the reserpine pretreatment, but the effect was markedly suppressed by the pretreatment of iproniazid or chlorpromazine. 4) The hyperglycemic effect of picrotoxin was significantly suppressed by the pretreatment of hexamethonium, propranolol or guanethidine, and the order of those suppressing efficacy was propranolol> hexamethonium> guanethidine.

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내장형 위상자를 이용한 반사형 45˚ 비틀린 네마틱 액정 디스플레이의 전기광학 특성에 관한 연구 (Study on Electro-optic Characteristics of 45˚ Reflective Twisted Nematic Mode using an In-cell Retarder)

  • 최민오;임영진;송제훈;장원근;이승희
    • 한국전기전자재료학회논문지
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    • 제19권5호
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    • pp.427-431
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    • 2006
  • We have studied electro-optic characteristics of reflective $45^{\circ}$ twisted nematic liquid crystal display which implement the new LC orientation using of in-cell retarder film. For the embodiment of reflective liquid crystal display, essentially the optic compensation films was always needed and attached to the outside of glass substrate. In our study, these optic compensation film were not employed in reflective LC cell. On other hand we have employed the in-cell retarder to substitute the optic compensation film and were able to orient the LC molecules using this in-cell retarder. So we have developed the reflective LC cell that has good optical performances without any additional coating process on the in-cell retarder.

Aperture를 이용한 MLA의 효율 개선 (Efficiency Improvement of MLA (Micro Lens Array) using Aperture)

  • 서현우;남민우;오해관;안효찬;김태준;위창현;이기근;양상식;송요탁
    • 반도체디스플레이기술학회지
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    • 제10권1호
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    • pp.91-94
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    • 2011
  • This paper presents light transmission efficiency by optical adhesive thickness between MLA and aperture layer and by aperture hole size. The gap between MLA and Aperture layer is adjusted by the shim. The more optical adhesive thickness increases, the better light transmission efficiency increases up to a point. After that, the light transmission efficiency decreases because stray lights cannot transmit through the aperture layer owing to cut-off by aperture layer. And as a result of light transmission efficiency with changing aperture hole size, the light transmission efficiency is proportional to area of aperture hole. The more specified process is made, the better data and sample will be got.

Photoluminescence analysis of patterned light emitting diode structure

  • 홍은주;변경재;박형원;이헌
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2009년도 춘계학술발표대회
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    • pp.21.2-21.2
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    • 2009
  • 발광다이오드는 에너지 변환 효율이 높고 친환경적인 장점으로 인하여 차세대 조명용 광원으로 각광받고 있다. 하지만 현재 발광다이오드는 낮은 광추출효율로 인하여 미래의 수요를 충족시킬 수 있을 만큼 충분한 성능의 효율을 나타내지 못하고 있다. 발광다이오드의 낮은 광추출효율은 반도체소재와 외부 공기와의 큰 굴절률 차이로 인하여 발생하는 전반사 현상에 기인한 것으로 이 문제를 해결하기 위하여 발광다이오드 소자의 발광면 및 기판을 텍스처링하는 방법이 중요하게 인식되고 있다. 하지만 현재까지 패턴의 구조에 따른 광추출 특성을 분석한 연구는 미진한 상황이다. 본 연구에서는 임프린팅 및 건식식각 공정을 이용하여 다양한 구조의 나노 및 micron 급 패턴을 발광다이오드의 p-GaN층에 형성하였다. 발광다이오드 기판 위에 하드마스크로 사용하기 위한 SiO2를 50nm 증착한 후 그 위에 UV 임프린팅 공정을 진행하여 폴리머 패턴을 형성시켰다. 임프린팅 공정으로 형성된 폴리머 패턴을 CF4CHF3 플라즈마를 이용하여 SiO2를 건식식각하였고, 이후에 SiCl4와 Ar 플라즈마를 이용한 ICP 식각 공정을 진행하여 p-GaN층을 100nm 식각하였다. 마지막으로 BOE를 이용한 습식식각 공정으로 p-GaN층에 남아있는 SiO2층을 제거하여 p-GaN층에 sub-micron에서 micron급의 홀 패턴을 형성하였다. Photoluminescence(PL) 측정을 통해서 발광다이오드 소자에 형성된 패턴의 구조에 따른 광추출 특성을 분석하였다.

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중풍후견증(中風後遣症)으로 인한 견비통(肩譬痛) 환자(患者)의 봉약침치료(蜂藥鍼治療)에 대한 임상적(臨床的) 고찰(考察) (A Clinical Study of Bee Venom Acupuncture Therapy on Shoulder Pain Patients in Stroke Sequelae)

  • 이대용;염승철;김도호;김대중;이건목
    • Journal of Acupuncture Research
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    • 제23권4호
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    • pp.69-80
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    • 2006
  • Objectives : The occurrence of shoulder pain after attack of stroke varies from 15% to about 80% in patients. Hemiplegic shoulder pain has been shown to affect stroke outcome in a negative way that it interferes with recovery after a stroke. These following processes have been all postulated as causes of a shoulder pain: glenohumeral subluxation, spasticity, impingement, soft tissue trauma, glenohumeral capsulitis, shoulder hand syndrome. And stroke patients may suffer from pain caused by stroke itself(central post-stroke pain). The aim of this study is to investigate the effectiveness of Bee venom therapy for shoulder pain in stroke patients. Methods : To evaluate the effectiveness of Bee Venom Acupuncture Therapy, 40 patients were allocated into control and treatment group. They were monitored for 3 weeks and followed up with VAS score(with the interval of Initial(YAS1)), 1 week later(VAS2), 2 weeks later(VAS3), 3 weeks later(VAS4), Motor Grade and Passive ROM. Results : VAS score decrease in treatment group compared to control group. Bee Venom Acupuncture Therapy seems to decrease hemiplegic shoulder pain and this effect was statistically significant after 3 weeks. Therefore this therapy could be recommended for the treatment of patients with shoulder pain after stroke and further extensive clinical studies are expected. Conclusion : We suggest that GDS oral administration and electro-acupuncture at $BL_{52}$ & $GB_{39}$ are available for prevention and curing about the postmenopausal osteoporosis.

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a-C:H 박막을 이용한 이온빔 배향 TN 셀의 Electro-Optical 특성에 관한 연구 (A Study on Electro-Optical Characteristics of the Ion Beam Aligned TN Cell on the a-C:H Thin Film)

  • 박창준;조용민;황정연;서대식;노순준;백홍구;정연학
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 제5회 학술대회 논문집 일렉트렛트 및 응용기술연구회
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    • pp.57-60
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    • 2003
  • Electro-Optical (EO) performances for the ion beam (IB) aligned twisted-nematic (TN)-liquid crystal display (LCD) with ion beam exposure on the new of diamond like carbon (DLC) thin film surface were investigated. Voltage-transmittance (V-T) curve and response time without backflow bounce in the ion beam aligned TN-LCD with ion beam exposure for 0.5 and 1min on the DLC thin film was observed. Also. the fast response time of ion beam aligned TN-LCD with ion beam exposure for 1min on the DLC thin film surface can be achieved. The residual DC voltage of the ion beam aligned TN-LCD on the DLC thin film surface was almost the same as that of the rubbing aligned TN-LCD on the polyimide(PI) surface.

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