• 제목/요약/키워드: BOE

검색결과 165건 처리시간 0.022초

Investigation of characteristic on Solution-Processed Al-Zn-Sn-O Pseudo Metal-Oxide-Semiconductor Field-Effect-Transistor using microwave annealing

  • 김승태;문성완;조원주
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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    • pp.206.2-206.2
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    • 2015
  • 최근 비정질 산화물 반도체 thin film transistor(TFT)는 차세대 투명 디스플레이로 많은 관심을 받고 있으며 활발한 연구가 진행되고 있다. 산화물 반도체 TFT는 기존의 비정질 실리콘 반도체에 비하여 큰 on/off 전류비, 높은 이동도 그리고 낮은 구동전압으로 인하여 차세대 투명 디스플레이 산업에 적용 가능하다는 장점이 있다. 한편 기존의 sputter나 evaporator를 이용한 증착 방식은 우수한 막의 특성에도 불구하고 많은 시간과 제작비용이 든다는 단점을 가지고 있다. 따라서 본 연구에서는 별도의 고진공 시스템이 필요하지 않을 뿐만 아니라 대면적화에도 유리한 용액공정 방식을 이용하여 박막 트렌지스터를 제작하였으며 thermal 열처리와 microwave 열처리 방식에 따른 전기적 특성을 비교 및 분석하고 각 열처리 방식의 열처리 온도 및 조건을 최적화 하였다. 제작된 박막 트렌지스터는 p-type bulk silicon 위에 산화막이 100 nm 형성된 기판에 spin coater을 이용하여 Al-Zn-Sn-O 박막을 형성하였다. 연속해서 photolithography 공정과 BOE (30:1) 습식 식각 과정을 이용해 활성화 영역을 형성하여 소자를 제작하였다. 제작 된 소자는 Pseudo-MOS FET구조이며, 프로브 탐침을 증착 된 채널층 표면에 직접 접촉시켜 소스와 드레인 역할을 대체하여 동작시킬 수 있어 전기적 특성평가가 용이하다는 장점을 가지고 있다. 그 결과, microwave를 통해 열처리한 소자는 100oC 이하의 낮은 열처리 온도에도 불구하고 furnace를 이용하여 열처리한 소자와 비교하여 subthreshold swing(SS), Ion/off ratio, field-effectmobility 등이 개선되는 것을 확인하였다. 따라서, microwave 열처리 공정은 향후 저온 공정을 요구하는 MOSFET 제작 시의 훌륭한 대안으로 사용 될 것으로 기대된다.

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Electro-Optical Characteristics of the Ion-Beam-Aligned FFS-LCD on a Diamond-like-Carbon Thin Film

  • Hwang, J.Y.;Park, C.J.;Seo, D.S.;Jeong, Y.H.;Kim, K.C.;Ahn, H.J.;Baik, H.K.
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
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    • pp.1132-1136
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    • 2004
  • In this paper, we intend to make FFS mode cell with LC alignment used non-rubbing method, ion beam alignment method on the a-C:H thin film, to analyze electro-optical characteristics in this cell. We studied on the suitable inorganic thin film for FFS-LCD and the aligning capabilities of nematic liquid crystal (NLC) using the new alignment material of a-C:H thin film as working gas at rf bias condition. A high pretilt angle of about 5$^{\circ}$ by ion beam(IB) exposure on the a-C:H thin film surface was measured. An excellent voltage-transmittance (V-T) and response time curve of the ion-beam-aligned FFS-LCD was observed with oblique ion beam exposure on the DLC thin films.

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$CCL_4$의 간장독작용(肝臟毒作用)에 미치는 Guanethidine과 ${\alpha}$-Methyl-paratyrosine 의 영향(影響) (Influences of Guanethidine and ${\alpha}$-Methyl-para-tyrosine on the hepatotoxicity of Carbon tetrachloride)

  • 김수경;김양숙;전보권
    • 대한약리학회지
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    • 제17권1호
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    • pp.33-39
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    • 1981
  • In this paper, the influences of adrenergic neuronal blockades of different mode: guanethidine and ${\alpha}$-methyl-para-tyrosine on the changes induced by carbon tetrachloride $(CCl_4)$ of hepatic total lipid, glycogen, and lipid peroxide contents and serum lactic dehydrogenase activity were investigated in male mice. The results obtained were summarized as follows: 1) The hepatic total lipid and lipid peroxide contents and serum lactic dehydrogenase activity were markedly increased by $CCl_4$, but hepatic glycogen content were decreased. 2) The hepatic total lipid and lipid peroxide contents and serum lactic dehydrogenase activity were not significantly changed by guanethidine(20mg/kg) or ${\alpha}$-methyl-para-tyrosine (5 mg/kg) injection. 3) The increase of hepatic total lipid induced by $CCl_4$ was inhibited by the pretreatment of guanethidine or ${\alpha}$-methyl-para-tyrosine, and the increase of hepatic lipid peroxide content induced by $CCl_4$ was slightly inhibited by them. But the decrease of hepatic glycogen content and the increase of serum lactic dehydrogenase activity induced by $CCl_4$ were not affected by them.

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발생 부위에 따른 단순성 골낭종의 치료방법에 대한 연구 (The Treatment's Modality of Simple Bone cyst According to the Location)

  • 이석현;서승우;정현일
    • 대한골관절종양학회지
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    • 제2권1호
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    • pp.65-71
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    • 1996
  • Twenty-nine cases of unicameral bone cyst developed in long bone of children have been treated and followed up for 4.5 years in average form Department of Orthopaedic Surgery, Guro Hospital, Korea University, College of Medicine since September, 1983, Treatment for those lesions differed to form largely two groups, one of which consised of insillation of Methyl-prednisolone for non-weight bearing bones(12 humeri) and the other of curettage and autogenous bone graft for weight-bearing bones(7 femur). Methl-prednisolone group required repetition of instillation for 3.5 time in average spanning over 4 years until cloudy obliteration occurs. Curettage and bone graft had healed in 3 year 6 months' time in average. There were neither recurrence nor pathologic fractures of the lesions with the latter group. Immobilization period was virtually non with Methyl-prednisolone group and 4-6 weeks by hip spica with curettage and bone graft group. As conclusions, It seems confirmed that treatment strategy of unicameral bone cyst consisted of Methyl-prednisolone instillation for humerus lesions and early curettage and bone graft for femur lesions is applicable as guideline having solid ground in clinical experiences.

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Epinephrine의 dose-response에 미치는 ${\alpha}-$${\beta}-receptor$ blocking agents의 영향(影響) (Influences of Adrenoreceptor Blockades on the Dose Response to Epinephrine)

  • 천연숙;전보권;신만련
    • 대한약리학회지
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    • 제13권2호
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    • pp.49-59
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    • 1977
  • Adrenergic receptors are now classified into alpha type and beta type These adrenergic receptors are distributed in various tissue in different patterns. Therefore, the adrenergic response of a certain tissue may be different from those of the other tissues, and such differences may exist among various species of animals. In this paper, the authors attempt to reevaluate the effect of epinephrine on the isolated atria, aortic strips, and vas deferenses of rabbits preincubated with alpha receptor blockades (ergotamine and dibenamine) and beta receptor blockades (propranolol and dichloroisoproterenol) in Locke-Ringer bathing medium. The results obtained were summarized as follows; 1) The dose dependent responses of isolated atria to epinephrine were significantly inhibited by propranolol and dichloroisoproterenol, and slightly inhibited by dibenamine, but not affected by ergotamine. 2) The dose dependent responses of excised aortic strips to epinephrine were significantly inhibited by ergotamine and dibenamine, but the responses were slightly potentiated by propranolol, and significantly by dichloroisoproterenol. 3) The dose dependent responses of isolated vas deferenses to epinephrine were significantly inhibited by ergotamine and dibenamine, but slightly potentiated by propranolol and dichloroisoproterenol.

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유전율 이방성이 양인 액정을 이용한 Fringe-Field Driven 수평 배향셀의 위상지연값 연구 (Study on Retardation Value of Fringe-Field Driven Homogeneously Aligned Nematic Liquid Crystal Cell using Liquid Crystals with Positive Dielectric Anisotropy)

  • 정송희;김향율;송성훈;이승희
    • 한국전기전자재료학회논문지
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    • 제17권3호
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    • pp.305-310
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    • 2004
  • We have studied the optimal phase retardation value of a homogeneously aligned liquid crystal (LC) driven by fringe-field when using the LC with positive dielectric anisotropy. In general, the transmittance of a homogeneous aligned LC cell under crossed polarizer is maximum when a twist angle of LC by in-plane rotation is 45$^{\circ}$ with polarizer and the cell retardation becomes λ/2. However, the device using the LC with positive dielectric anisotropy does not follow this since the degree of rotation of the LC is dependent on electrode position and in addition the LCs tilt up along the fringe-field. At the center of common and pixel electrode, the LC is most twisted around a middle position of a cell whereas at the edge position of pixel electrode, the LC is most twisted near bottom surface of a cell. Consequently, the optimal phase retardation of the device becomes much larger than λ/2 and the transmittance can be described using the combination of the in-plane switching and twisted nematic mode.

고려수지기맥 레이저 자극의 압통 역치상승 효과 (Increasing Effect of Laser Stimulation to Koryo-Hand Acupuncture Points on Experimental Pressure Threshold)

  • 박보경;이종은;송병철;이진복;안덕현
    • 한국전문물리치료학회지
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    • 제5권2호
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    • pp.1-14
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    • 1998
  • This study was conducted to examine the increasing effects of Ga-As-Al laser Koryo-hand acupuncture on experimental pressure threshold. Forty healthy subjects (female=20. male=20) aged 21 to 30 years were randomly assigned to two treatment groups with same ratio in sex. The subjects in the experimental group (n=20) received Ga-As-Al laser stimulation, and those in the control group (n=20) received sham stimulation on appropriate Koryo-hand acupuncture points M10 on the left hand which is reflex point of upper trapezius portion. Experimental pressure threshold at the contralateral upper trapezius was determined with a pressure algometer and Galvanic Skin Response (GSR) before and after treatment. The change of pressure threshold between pretreatment and posttreatment in the experimental group was greater than that in the control group (p<0.05). The result indicates that Ga-As-Al laser Koryo-hand acupuncture increases experimental pressure threshold and suggests that it is an effective noninvasive pain management technique.

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폴리이미드 표면에서의 네마틱 액정의 틸트 제어를 이용한 High Tilted OCB(HTOCB) 모드 (A Hight Tilted OCB(HTOCB) Mode using Control of Tilt Angle for Hematic Liquid Crystal on Polyimide Surface)

  • 황정연;정연학;서대식
    • 한국전기전자재료학회논문지
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    • 제18권7호
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    • pp.635-640
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    • 2005
  • In this paper, we have improved a novel high tilted optically compensated bend (OCB) (HTOCB) mode by using high tilt angle that was generated by the unique baking condition on the homeotropic alignment layer. The high tilt angle of liquid crystal (LC) was generated by new alignment process that tilt angle changed homeotropic state to homeogenous state using Hot-plate equipment; we obtained about $40\~50^{\circ}$ tilt angle with negative and positive dielectric anisotropy on the homeotropic polyimide (PI), and then LC tilt angle decreased as increasing baking temperature and time. At last, we obtained about $10^{\circ}$ with positive type NLC $({\Delta}n>0)$. Also, the LC tilt angle of positive type NLC $({\Delta}n>0)$ decreased as increasing rubbing strength at the same baking temperature and time. The novel LC operating mode (HTOCB) that used the high tilt angle by the new alignment method was improved. The response time of the novel HTOCB cell was faster than that of conventional OCB cell. We suggest that the developed the novel HTOCB cell using control of tilt angle on the homeotropic surface is a promising technique for the achievement of a fast response time and a high contrast ratio.

에칭에 따른 단일 나노선의 전압-전류 특성 변화 (Voltage-Current Characteristics of a Single Nanowire with an Etching process)

  • 임찬영;김강현;원부운;강해용;김규태;김상식;강원
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
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    • pp.151-154
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    • 2004
  • 화합물 반도체 단일 나노선의 에칭 효과를 보기 위하여 에칭 용액과 시간을 달리하면서 전류-전압 특성을 측정하였다. 측정을 위한 단일 나노선 소자는 Electron beam lithography를 이용하여 전극을 top contact 방식으로 만들었다. 에칭은 식각과정에서 현상된 상태의 패턴에서 수행하며 금속 전극과 나노선 접합 부분만을 에칭 하였다. 에칭용액은 Buffered Oxide Etchant(BOE)을 이용하였으며 에칭 시간은 수 십초에서 수 십분까지 다양하게 하였다. 전압-전류 특성 측정결과에서 에칭 용액과 에칭 시간에 따라 전류가 증가하는 것을 확인 할 수 있었다. 이러한 효과는 나노선 외곽에 비정질 산화층의 제거 효과로 인한 것으로 설명할 수 있다.

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폴리이미드 표면에서의 네마틱 액정의 틸트 제어를 이용한 새로운 ECB 모드 (A novel ECB mode using control of tilt angle for nematic liquid crystal on polyimide surface)

  • 황정연;김강우;정연학;김영환;서대식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
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    • pp.116-119
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    • 2004
  • In this paper, we have improved a novel (ECB) mode using tilt angle in the unique condition by hot-plate equipment. The new control of tilt angle for nematic liquid crystal (NLC) with negative and positive dielectric anisotropy on the rubbed homeotropic polyimide (PI) using baking method by Hot-plate equipment was investigated. LC tilt angle decreased with increasing baking temperature and time. Especially, the low LC tilt angle of positive type NLC $({\Delta}n>0)$ on the rubbed homeotropic PI surface by increasing temperature and time was measured. The EO characteristics of the novel ECB mode using control of tilt angle on the homeotropic surface than that of conventional OCB cell can be improved. We suggest that the developed the Novel ECB cell using control of tilt angle on the homeotropic surface is a promising technique for the achievement of a fast response time and a high contrast ratio.

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