• Journal of information and communication convergence engineering
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• v.10 no.3
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• pp.295-299
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• 2012

Defect generation during organic bottom anti-reflective coating (BARC) in the photo lithography process is closely related to humidity control in the BARC coating unit. Defects are related to the water component due to the humidity and act as a blocking material for the etching process, resulting in an extreme pattern bridging in the subsequent BARC etching process of the poly etch step. In this paper, the lower limit for the humidity that should be stringently controlled for to prevent defect generation during BARC coating is proposed. Various images of defects are inspected using various inspection tools utilizing optical and electron beams. The mechanism for defect generation only in the specific BARC coating step is analyzed and explained. The BARC defect-induced gate pattern bridging mechanism in the lithography process is also well explained in this paper.

• Wind and Structures
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• v.34 no.1
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• pp.101-113
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• 2022

We experimentally investigate the high-Reynolds flow around a rectangular cylinder of aspect ratio 5:1. This configuration is the object of the international BARC benchmark. Wind tunnel tests have been carried out for the flow at zero angle of attack and a Reynolds number, based on the crossflow cylinder length and on the freestream velocity, equal, to 40 000. Velocity measurements are obtained by using hot-wire anemometry along 50 different cross-flow traverses on the cylinder side and in the near wake. Differential pressure measurements are acquired on multiple streamwise sections of the model. The obtained measurements are in a good agreement with the state-of-the-art experiments. For the first time among the several contributions to the BARC benchmark, detailed flow measurements are acquired in the region near the cylinder side and in the near-wake flow. The edges and the thickness of the shear layers detaching from the upstream edges are derived from velocity measurements. Furthermore, we compute the flow frequencies characterizing the roll-up of the shear layers, the evolution of vortical structures near the cylinder side and the vortex shedding in the wake.

• Earthquakes and Structures
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• v.10 no.4
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• pp.829-847
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• 2016

Generally seismic isolation is achieved by supporting the structure on laminated rubber bearings, friction pendulum bearings, roller bearings etc. Very little work has been performed using soil as a base isolation media. Experiments and analytical work has been performed on a structural model with isolated footing and found encouraging results. Details of this work are presented in this paper.

• Wind and Structures
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• v.34 no.1
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• pp.43-58
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• 2022

The BARC flow is studied via Direct Numerical Simulation at a relatively low turbulent Reynolds number, with focus on the geometrical representation of the leading-edge (LE) corners. The study contributes to further our understanding of the discrepancies between existing numerical and experimental BARC data. In a first part, rounded LE corners with small curvature radii are considered. Results show that a small amount of rounding does not lead to abrupt changes of the mean fields, but that the effects increase with the curvature radius. The shear layer separates from the rounded LE at a lower angle, which reduces the size of the main recirculating region over the cylinder side. In contrast, the longitudinal size of the recirculating region behind the trailing edge (TE) increases, as the TE shear layer is accelerated. The effect of the curvature radii on the turbulent kinetic energy and on its production, dissipation and transport are addressed. The present results should be contrasted with the recent work of Rocchio et al. (2020), who found via implicit Large-Eddy Simulations at larger Reynolds numbers that even a small curvature radius leads to significant changes of the mean flow. In a second part, the LE corners are fully sharp and the exact analytical solution of the Stokes problem in the neighbourhood of the corners is used to locally restore the solution accuracy degraded by the singularity. Changes in the mean flow reveal that the analytical correction leads to streamlines that better follow the corners. The flow separates from the LE with a lower angle, resulting in a slightly smaller recirculating region. The corner-correction approach is valuable in general, and is expected to help developing high-quality numerical simulations at the high Reynolds numbers typical of the experiments with reasonable meshing requirements.

• Journal of the Korean Vacuum Society
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• v.8 no.4A
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• pp.490-495
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• 1999

In 0.18 $\mu \textrm m$ LOGIC device, the etch rate of NMOS polysilicons is different from that of PMOS polysilicons due to the state of polysilicon to manufacture gate line. To control the etch profile, we tested the ratio of $Cl_2$/HBr gas and the total chamber pressure, and also we reduced Back He pressure to get the vertical profile. In the case of manufacturing the gate photoresist line, we used Bottom Anti-Reflective Coating (BARC) to protect refrection of light. As a result we found that $CF_4O_2$ gas is good to etch BARC, because of high selectivity and good photoresist line profile after etching BARC. in the results of the characterization of plasma damage to the antenna effect of gate oxide, NO type thin film(growing gate oxide in 0, ambient followed by an NO anneal) is better than wet type thin film(growing gate oxide in $0_2+H_2$ ambient).

• Transactions on Electrical and Electronic Materials
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• v.15 no.3
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• pp.159-163
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• 2014

More accurate CD (Critical Dimension) control is required for the nanometer-scaled devices. However, since the reflectivity between substrate and PR (Photoresist) becomes higher, the CD (Critical Dimension) swing curve was intensified. The higher reflectivity also causes PR notching due to the pattern of sub-layer. For this device requirement, it was optimized for the thickness, refractive index(n) and absorption coefficient(k) in the bottom anti-reflective coating(BARC; SiON) and photoresist with the minimum reflectivity. The computational simulated conditions, which were determined with the thickness of 33 nm, n of 1.89 and k of 0.369 as the optimum condition, were successfully applied to the experiments with no standing wave for the 0.13um-device. At this condition, the lowest reflectivity was 0.44%. This optimum condition for BARC SiON film was applied to the process for 0.13um-device. The optimum SiON film as BARC to PR and sub-layer could be formed with the accurate CD control and no standing waver for the nanometer-scaled semiconductor manufacturing process.

• Wind and Structures
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• v.34 no.1
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• pp.151-159
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• 2022

The aerodynamics of blunt bodies with separation at the sharp corner of the leading edge and reattachment on the body side are particularly important in civil engineering applications. In recent years, a number of experimental and numerical studies have become available on the aerodynamics of a rectangular cylinder with chord-to-thickness ratio equal to 5 (BARC). Despite the interest in the topic, a widely accepted set of guidelines for grid generation about these blunt bodies is still missing. In this work a new, well resolved Direct Numerical Simulation (DNS) around the BARC body at Re=3000 is presented and its results compared to previous DNSs of the same case but with different numerical approaches and mesh. Despite the simulations use different numerical approaches, mesh and domain dimensions, the main discrepancies are ascribed to the different grid spacings employed. While a more rigorous analysis is envisaged, where the order of accuracy of the schemes are kept the same while grid spacings are varied alternately along each spatial direction, this represents a first attempt in the study of the influence of spatial resolution in the Direct Numerical Simulation of flows around elongated rectangular cylinders with sharp corners.

• Nuclear Engineering and Technology
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• v.55 no.10
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• pp.3549-3558
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• 2023

The jet pump can be used in a test device of a nuclear reactor for high flow amplification as it reduces inlet flow requirement and thereby size of the process components. In the present work, a miniature jet pump was designed to meet high flow amplification greater than 3. Subsequently, experiments were carried out using a test setup for design validation and performance evaluation of the jet pump for different parameters. It was observed that a minimum pressure of 0.6 bar (g) was required for the secondary fluid inside the jet pump to ensure cavitation free performance at high amplification. Spacing between the nozzle tip and the mixing chamber entry point had significant effect on the performance of the jet pump. Variation in primary flow, temperature and area ratio also affected the performance. It was observed that at high flow amplification, the analytical solution differed significantly from experimental results due to very large velocities encountered in the miniature size jet pump.

• Nuclear Engineering and Technology
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• v.49 no.3
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• pp.484-494
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• 2017

In industrial plants such as nuclear power plants, system operations are performed by embedded controllers orchestrated by Supervisory Control and Data Acquisition (SCADA) software. A targeted attack (also termed a control aware attack) on the controller/SCADA software can lead a control system to operate in an unsafe mode or sometimes to complete shutdown of the plant. Such malware attacks can result in tremendous cost to the organization for recovery, cleanup, and maintenance activity. SCADA systems in operational mode generate huge log files. These files are useful in analysis of the plant behavior and diagnostics during an ongoing attack. However, they are bulky and difficult for manual inspection. Data mining techniques such as least squares approximation and computational methods can be used in the analysis of logs and to take proactive actions when required. This paper explores methodologies and algorithms so as to develop an effective monitoring scheme against control aware cyber attacks. It also explains soft computation techniques such as the computational geometric method and least squares approximation that can be effective in monitor design. This paper provides insights into diagnostic monitoring of its effectiveness by attack simulations on a four-tank model and using computation techniques to diagnose it. Cyber security of instrumentation and control systems used in nuclear power plants is of paramount importance and hence could be a possible target of such applications.

• Wind and Structures
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• v.34 no.1
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• pp.29-42
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• 2022

Following the BARC initiative, wind tunnel measurements have been performed on a 5:1 rectangular cylinder. Pressure distribution has been measured in several sections, checking the two-dimensionality of the flow around the model. Mean values compare well with previous data. These measurements have been processed using the standard Proper Orthogonal Decomposition (POD) and the snapshot POD to obtain phase-resolved cycles. This decomposition has been used to analyze the characteristics of the flow around the cylinder, in particular, the behavior of the recirculation bubble in the upper/lower surfaces. The effect of the angle of attack, the turbulence intensity and the Reynolds number has been studied. First and second modes extracted from POD have been found to be related to the reattachment of the flow in the upper surface. Increasing the angle of attack is related to a delay in the reattachment position, while an increase in turbulence intensity makes the reattachment point to move towards the windward face.