• Proceedings of the KSME Conference
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• 2001.06e
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• pp.125-130
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• 2001

Experimental and analytical researches have been conducted on the twin-fluid atomizers for better droplet breakup during the past decades. But, the studies on the disintegration mechanism still present a great challenge to understand the drop behavior and breakup structure. In an effort to describe the aerodynamic behavior of the sprays issuing from the internal mixing counter-swirling nozzle, the spatial distribution of axial (U) radial (V) and tangential (W) components of droplet velocities are investigated across the radial distance at several axial locations of Z=30, 50, 80, 120 and 170mm, respectively. Experiments were conducted for the liquid flow rates which was kept constant at 7.95 g/s and the air injection pressures were varied from 20 kPa to 140 kPa. Counter-swirling internal mixing nozzles manufactured at angles of $15^{\circ},\;30^{\circ},\;45^{\circ}$ and $60^{\circ}$ the central axis with axi-symmetric tangential-drilled holes was considered. The distributions of velocities and turbulence intensities are comparatively analyzed. PDPA is installed to specify spray flows, which have been conducted along the axial downstream distance from the nozzle exit. Ten thousand of sampling data was collected at each point with time limits of 30 second. 3-D automatic traversing system is used to control the exact measurement. It is observed that the sprays with all swirl angle have the maximum SMD for on air injection pressure of 20 kPa and 140 kPa with centerline, respectively. The nozzle with swirl angle of $60^{\circ}$ has vest performance.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 1999.10a
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• pp.27-27
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• 1999

To illustrate the global variation of the droplet mean diameters and the turbulent flow characteristics in counterflowing internal mixing pneumatic nozzle, the experimental measurements at five axial downstream locations(i.e., at Z=30, 50, 80, 120, and 170mm) were made using a PDPA(Phase Doppler Particle Analyzer) under the different air injection pressures ranging from 40 ㎪ to 120 ㎪. A nozzle with axi-symmetric tangential-drilled four holes at an angle of 15$^{\circ}$ has been designed and manufactured. The distributions of velocities, turbulence intensities, turbulence kinetic energy, turbulent correlation coefficients, spray angle, droplet mean diameters, volume flux, number density are quantitatively analyzed. It is possible to discern the effects of increasing air pressure. It indicates that the strong axial momentum in spite of more or less disparity between the velocity components means more reluctant to disperse radially, and that axial fluctuating velocities are substantially higher than those of radial and tangential ones, suggesting that the disintegration process is enhanced under higher air assist. The larger droplets are detected in the spray centerline at the near stations and smaller ones are generated due to further subsequent breakup at farther axial locations are attributed to the internal mixing type nozzle characteristics. Despite of the strong axial momentum, the poor atomization around the centre close to the nozzle exit is attributed to the lower rates of spherical particles which are not subject to instantaneous breakup. As it goes downstream, however, substantial increases in SMD(Sauter Mean Diameter) from the central part toward spray periphery are understandable because the droplet relative velocity is too low to bring about any subsequent disintegration.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.221-221
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• 2014

The present work proposes an improved numerical simulator for design and modification of large area capacitively coupled plasma (CCP) processing chamber. CCP, as notoriously well-known, demands the tremendously huge computational cost for carrying out transient analyses in realistic multi-dimensional models, because electron dissociations take place in a much smaller time scale (${\Delta}t{\approx}10-8{\sim}10-10$) than time scale of those happened between neutrals (${\Delta}t{\approx}10-1{\sim}10-3$), due to the rf drive frequencies of external electric field. And also, for spatial discretization of electron flux (Je), exponential scheme such as Scharfetter-Gummel method needs to be used in order to alleviate the numerical stiffness and resolve exponential change of spatial distribution of electron temperature (Te) and electron number density (Ne) in the vicinity of electrodes. Due to such computational intractability, it is prohibited to simulate CCP deposition in a three-dimension within acceptable calculation runtimes (<24 h). Under the situation where process conditions require thickness non-uniformity below 5%, however, detailed flow features of reactive gases induced from three-dimensional geometric effects such as gas distribution through the perforated plates (showerhead) should be considered. Without considering plasma chemistry, we therefore simulated flow, temperature and species fields in three-dimensional geometry first, and then, based on that data, boundary conditions of two-dimensional plasma discharge model are set. In the particular case of SiH4-NH3-N2-He CCP discharge to produce deposition of SiNxHy thin film, a cylindrical showerhead electrode reactor was studied by numerical modeling of mass, momentum and energy transports for charged particles in an axi-symmetric geometry. By solving transport equations of electron and radicals simultaneously, we observed that the way how source gases are consumed in the non-isothermal flow field and such consequences on active species production were outlined as playing the leading parts in the processes. As an example of application of the model for the prediction of the deposited thickness uniformity in a 300 mm wafer plasma processing chamber, the results were compared with the experimentally measured deposition profiles along the radius of the wafer varying inter-electrode gap. The simulation results were in good agreement with experimental data.