• 한국재료학회지
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• 제11권7호
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• pp.575-579
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• 2001

Metal organic chemical vapor deposition (MOCVB)법을 사용하여 sapphire (0001) 기판 위에 GaN 환충층을 성장하고, 그 위에 GaN 에피층을 성장하였다. GaN 완충층은 55$0^{\circ}C$에서 약 26 nm에서 130 nm까지 각각 다른 두께로 성장하였고, GaN 에피층은 110$0^{\circ}C$에서 약 4 $\mu\textrm{m}$의 두께로 성장하였다. GaN 완충층 성장 후 atomic force microscopy (AFM)으로 표면 형상을 측정하였다. GaN 완충층의 두께가 두꺼워질수록 GaN 에피층의 표면이 매끈해지는 것을 scanning electron microscopy (SEM)으로 관찰하였다. 이것으로 GaN 에피층의 표면은 완충층의 두께와 표면 거칠기와 관계가 있다는 것을 알 수 있었다. GaN 에피층의 결정학적 특성을 double crystal X-ray diffraction (DCXRD)와 Raman spectroscopy로 측정하였다. 성장된 GaN 에퍼층의 광학적 특성을 photoluminescence (PL)로 조사한 결과 두께가 두꺼운 완충층 위에 성장된 에퍼층의 결정성이 더 좋은 반면, 내부 잔류응력은 증가하는 결과를 보였다. 이러한 사실들로부터 완충층의 두께가 두꺼워짐에 따라 내부 자유에너지가 감소하여 에피층 성장시 측면성장을 도와 표면이 매끈해지고, 결정성이 좋아졌다.

• 한국진공학회지
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• 제6권4호
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• pp.364-371
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• 1997

MERIE 플라즈마 장비를 사용하여 실리콘의 트렌치 식각을 HBr, He-$O_2,SiF_4,CF_4$ 등의 가스를 주입하여 수행하였으며 식각 속도, 식각 프로파일 변화, 잔류물 생성 및 표면 상태 등을 관찰하였다. HBr만을 이용한 플라즈마 식각시에는 트렌치 하부 영역에 상당한 횡방향 식각이 일어나 항아리 모양의 식각 프로파일이 관찰되었으며, HBr에 He-$O_2$가스와 $SiF_4$나 $CF_4$등의 주입량을 변화시켜 벽면 기울기와 횡방향 식각의 정도를 제어할 수 있었다. 표면 잔류물 특성 및 표면 거칠기(roughness)등은 HBr/He-$O_2$/$SiF_4$가스를 동시에 주입하여 식각하였을 때 가장 양호한 식각 특성을 나타내었으며, 첨가 가스로 $SiF_4$를 이용함으로써 기존의 C-F계 플라즈마를 이용한 트렌치 식각 특성들보다 우수한 공정 결과를 얻었다. 또 한 $SiF_4$를 이용함으로써 $CF_4$ 첨가시보다 C의 잔류물을 크게 줄이고 표면 손상을 개선할 수 잇음을 X-선 광전자 분석과 주사전자현미경(scanning electron microscopy) 및 AFM(atomic force microscopy)의 결과로써 확인하였다.

• 대한화장품학회지
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• 제34권4호
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• pp.269-274
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• 2008

본 연구를 통해 반도체 산업에서 유래된 마이크로웨이브 증폭 에칭기술(MEE)을 이용하여, 마이카의 표면 구조를 변화시키고 오일 흡유량을 조절할 수 있었다. 마이크로웨이브 에너지가 마이카에 조사되면, 마이카 표면이 몇 분 이내에 에칭이 된다. 에칭의 결과로 마이카의 오일 흡유량이 증가되고, 마이카 $SiO_2$층의 표면 변화에 의해 백색도가 증가한다. 추가적으로, 땀을 흡수한 이후에도 높은 백색도가 유지된다. 마이카의 표면구조의 변화는 불산에 슬러리화된 마이카에 마이크로웨이브 조사를 통해서 이루어졌다. 에칭의 정도는 산의 농도, 조사 시간, 조사 에너지의 양, 슬러리의 농도에 의해 조절되었다. 에칭된 마이카의 표면 구조는 '달' 표면 모양과 유사하게 보인다. 표면적과 거칠기 등의 특성은 Brunauer-Emmett-Teller (BET), atomic force microscopy (AFM), scanning electron microscopy (SEM), Spectrophotometer, goniophometer로 측정되었다.

• 한국진공학회지
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• 제7권s1호
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• pp.57-77
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• 1998

Heteroepitaxial $Y_2O_3$ films were grown on a Si(111) substrate by ionized cluster beam deposition(ICBD) in ultra high vacuum, and its qualities such as crystllitnity, film stress, and morphological characteristics were investigated using the various measurement methods. The crystallinity was investigated by x-ray diffraction (XRD) and reflection high energy electron diffraction (RHEED). Interface crystallinity was also examined by Rutherford backscattering spectroscopy(RBS) channeling, transmission electron microscopy(TEM). The stress of the films was measured by RBS channeling and XRD. Surface and interface morphological characteristics were investigated by atomic force microscopy (AFM) and x-ray scattering method. Comparing the interface with the surface characteristics, we can conclude that many defects at the interface region were generated by interface reaction between the yttrium metal and SiO2 layer and by ion beam characteristic such as shallow implantation, so that they influenced the film qualities. The film quality was dominantly depended on the characteristic temperature range. In the temperature range from $500^{\circ}C$ to $600^{\circ}C$, the crystallinity was mainly improved and the surface roughness was drastically decreased. On the other hand, in the temperature range from $600^{\circ}C$ to $700^{\circ}C$, the compressive stress and film density were dominantly increased, and the island size was more decreased. Also the surface morphological shape was transformed from elliptical shape to triangular. The film stress existed dominantly at the interface region due to the defects generation.

• 대한기계학회논문집A
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• 제26권10호
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• pp.2180-2186
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• 2002

In a micro-scale contact, capillary force and van der Waals interaction significantly influence the contact between asperities of rough surfaces. Little is, however, known about the variation of these surface forces as a function of chemical property of the surface (wet angle), relative humidity and deformation of asperities in the real area of contact. A better understanding of these surface forces is of great necessity in order to find a solution for reducing friction and adhesion of micro surfaces. The objective of this study is to investigate the surface forces in micro-scale rough surface contact. We proposed an effective method to analyze capillary and van der Waals forces in micro-scale contact. In this method, Winkler spring model was employed to analyze the contact of rough surfaces that were obtained from atomic force microscopy (AFM) height images. Self-mated contact of DLC(diamond like carbon) coatings was analyzed, as an example, by the proposed model. It was shown that the capillary force was significantly influenced by relative humidity and wet angle of the DLC surface. The deformation of asperities to a critical magnitude by external loading led to a considerable increase of both capillary and van der Waals forces.

• 한국전기전자재료학회논문지
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• 제13권11호
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• pp.969-975
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• 2000

Laser direct writing of micro-patterned copper lines has been achieved by pyrolytic decomposition of copper formate films (Cu(HCOO)$_2$.4$H_2O$), as a metallo-organic precursor, using a focused CW Ar$^{+}$ laser beam (λ=514nm) on PCB boards and glass substrates. The linewidth and thickness of the lines wee investigated as a functin of laser power and scan speed. The profiles of the lines were measured by scanning electron microscope (SEM), surface profiler ($\alpha$-step) and atomic force measured by scanning electron microscope (SEM), surface profiler ($\alpha$-step) and atomic force microscopy (AFM). The electrical resistivities of the patterned lines were also investigated as a function of laser parameters using probe station and semiconductor analyzer. We compared resistivities of the patterned copper lines with these of the Cu bulk. Resistivities decreased due to changes in morphology and porosity of the deposit, which were about 3.8 $\mu$$\Omega$cm and 12$\mu$$\Omega$cm on PCB and glass substrates after annealing at 30$0^{\circ}C$ for 5 minutes.s.

• Bulletin of the Korean Chemical Society
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• 제21권6호
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• pp.623-627
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• 2000

Aggregation of hydrophobically end-capped poly(ethylene oxide)s: HEURs, denoted as $C_8$$EO_{380}$$C_8$, $C_12$$CO_{600}$$C_{12}$, and $C_{18}$$EO_{860}$$C_{18}$,are described using static fluorescence, dynamic light scattering, and atomic force microscope (AFM) techniques. The CAC (critical aggregation concentration) was determined by com-paring two fluorescent peaks which were influenced by the polarity of the probe dye molecules, pyrene. The aggregation occurs in concentrations higher than 10 g/L of $C_8$$EO_{380}$$C_8$ and the CAC decreases by increasing the side chain length. The dynamic light scattering experiment shows fast mode and slow mode decays, and both are diffusive. The fast mode does not depend on the concentration, but the slow mode shows concentration dependence influenced by the formation of an aggregated structure. The hydrophobic end groups effect more dominantly than the main chains for the formation of HEUR micelles. By increasing the concentration, the HEUR micelles change their structure from spheres to rodlike micelles, and finally make fused structures, which were visualized with atomic force microscopy.

• Current Applied Physics
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• 제18권11호
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• pp.1294-1299
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• 2018

In this paper, we demonstrate the feasibility of constructing DNA nanostructures (i.e. DNA rings and double-crossover (DX) DNA lattices) with appropriate doxorubicin hydrochloride (DOX) concentration and reveal significant characteristics for specific applications, especially in the fields of biophysics, biochemistry and medicine. DOX-intercalated DNA rings and DX DNA lattices are fabricated on a given substrate using the substrateassisted growth method. For both DNA rings and DX DNA lattices, phase transitions from crystalline to amorphous, observed using atomic force microscopy (AFM) occurred above a certain concentration of DOX (at a critical concentration of DOX, $30{\mu}M$ of $[DOX]_C$) at a fixed DNA concentration. Additionally, the coverage percentage of DNA nanostructures on a given substrate is discussed in order to understand the crystal growth mechanism during the course of annealing. Lastly, we address the significance of optical absorption and photoluminescence characteristics for determining the appropriate DOX binding to DNA molecules and the energy transfer between DOX and DNA, respectively. Both measurements provide evidence of DOX doping and $[DOX]_C$ in DNA nanostructures.

• 한국산학기술학회논문지
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• 제16권3호
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• pp.2131-2134
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• 2015

본 논문에서는 종이를 기판으로 사용하고 용액공정이 가능한 강유전체 메모리 소자의 제작 가능성을 검토하였다. 유기물 강유전체인 "폴리비닐리덴트리플루오르에틸렌" 용액을 하부전극이 형성된 종이기판 위에 스핀코핑 방법을 이용하여 도포하였다. 하부전극으로는 진공증착법을 이용하여 알루미늄을 증착하였고, 도포된 "폴리비닐리덴트리플루오르에틸렌" 용액은 열처리 과정을 통해 결정화하였다. 제작된 "폴리비닐리덴트리플루오르에틸렌" 박막은 주사 전자 현미경법(SEM), 원자간력 현미경(AFM)을 이용하여 박막의 단면 및 표면의 특성을 평가하였다. 전압에 따른 분극특성 측정을 통해, 종이기판 위에 형성된 "폴리비닐리덴트리플루오르에틸렌" 박막이 매우 훌륭한 강유전체 특성을 보여주고 있음을 확인하였다. 또한, 종이기판의 응용가능성을 검토하기 위하여, 실리콘 기판위에 제작한 "폴리비닐리덴트리플루오르에틸렌" 박막과의 비교에 있어서도 손색없는 강유전체 특성을 보여주고 있음을 알 수 있었다. 이러한 결과들은 종이를 기판으로 이용하여 전자소자들을 제작 할 수 있음을 시사하며, 또한 용액공정으로 고밀도의 저렴한 강유전체 메모리 소자를 손쉽게 제작 할 수 있다는 것을 의미한다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.397-397
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• 2010

Bone is considered as hierarchically organized biocomposites of organic (collagen) and inorganic (hydroxyapatite) materials. The precise structural dependence between hydroxyapatite (HAp, $Ca_{10}(PO_4)_6(OH)_2)$ crystals and collagen fibril is critical to unique characteristics of bone. To meet those conditions and obtain optimal properties, it is essential to understand and control the initial growth mechanisms of hydroxyapatite at the molecular level, such as other nano-structured materials. In this study, collagen fibrils were prepared by adsorbing native type I collagen molecules onto hydrophobic surface. Hydrophobicity was introduced on the Si wafer surface by using PECVD (plasma enhanced chemical vapor deposition) method and cyclohexane as a precursor. Biomimetic nucleation and growth of HAp on the self-assembled collagen nanofibrils were occurred through incubation of the sample in SBF (simulated body fluid). Chemical and morphological evolution of HAp nanocrystals was investigated by surface-sensitive analytical techniques such as ToF-SIMS (Time-of-Flight Secondary Ion Mass Spectrometry) and AFM (Atomic Force Microscopy) in the early growth stages (< 24 hrs). The very initial stages (< 12 hrs) of mineralization could be clearly demonstrated by ToF-SIMS chemical mapping of surface. In addition to ToF-SIMS and AFM measurement, scanning electron microscopy, energy dispersive spectroscopy and X-ray diffraction analysis were conducted to characterize the HAp layer in the late stages. This study is of great importance in the growth of real bone-like materials with a structure analogous to that of natural bones and the development of biomimetic nanomaterials.