• Journal of the Semiconductor & Display Technology
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• v.21 no.3
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• pp.74-79
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• 2022

In this study, the plasma corrosion resistance and the change in the number of contamination particles generated using the plasma etching process and cleaning process of coating parts for semiconductor plasma etching equipment were investigated. As the coating method, atmospheric plasma spray (APS) was used, and the powder materials were Y₂O₃ and Y₃Al₅O₁₂ (YAG). There was a clear difference in the densities of the coatings due to the difference in solubility due to the melting point of the powdered material. As a plasma environment, a mixed gas of CF₄, O₂, and Ar was used, and the etching process was performed at 200 W for 60 min. After the plasma etching process, a fluorinated film was formed on the surface, and it was confirmed that the plasma resistance was lowered and contaminant particles were generated. We performed a surface cleaning process using piranha solution(H₂SO₄(3):H₂O₂(1)) to remove the defect-causing surface fluorinated film. APS-Y₂O₃ and APS-YAG coatings commonly increased the number of defects (pores, cracks) on the coating surface by plasma etching and cleaning processes. As a result, it was confirmed that the generation of contamination particles increased and the breakdown voltage decreased. In particular, in the case of APS-YAG under the same cleaning process conditions, some of the fluorinated film remained and surface defects increased, which accelerated the increase in the number of contamination particles after cleaning. These results suggest that contaminating particles and the breakdown voltage that causes defects in semiconductor devices can be controlled through the optimization of the APS coating process and cleaning process.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2002.05a
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• pp.10-11
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• 2002

• Journal of Welding and Joining
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• v.21 no.4
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• pp.39-45
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• 2003

Nano-TiO$_2$ photocatalytic coatings were deposited on the stainless steel 304(50$\times$70$\times$3mm) by the APS(Atmospheric Plasma Spraying). Photocatlytic reaction was tested in MB(methylene blue) aqueous solution. For applying nano-TiO$_2$ powders by thermal spray, the starting nano-TiO$_2$ powder with 100% anatase crystalline was agglomerated by spray drying. Plasma second gas(H$_2$) flow rate and spraying distance were used as principal process parameters which are known to control heat enthalpy(heat input). The relationship between process parameters and the characteristics of microstructure such as the anatase phase fraction and grain size of the TiO$_2$ coatings were investigated. The photo-decomposition efficiency of TiO$_2$ coatings was evaluated by the kinetics of MB aqueous solution decomposition. It was found that the TiO$_2$ coating with a lower heat input condition had a higher anatase fraction, smaller anatase grain size and a better photo-decomposition efficiency.

• Journal of the Korean Ceramic Society
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• v.55 no.2
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• pp.178-184
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• 2018

In the present study, $TiB_2-Co$ composite coatings were thermally sprayed onto the surface of a 304 stainless steel substrate using an atmospheric plasma spray (APS). The phase analysis of the powders and plasma-sprayed coatings was performed using X-ray diffractometry analysis. The microstructures of the coatings were studied by a scanning electron microscope (SEM). The average particle size and flowability of the feedstocks were also measured. Both $TiB_2-32Co$ and $TiB_2-45Co$ (wt.%) coatings possessed typical dense lamellar structures and high-quality adhesion to the substrate. The oxidation behaviors of the coatings were studied at $900^{\circ}C$ in an atmospheric environment. In addition, the cross-sectional images of the oxidized coatings were analyzed by SEM. A thin and well-adhered layer was formed on the surface of both $TiB_2-Co$ coatings, confirming satisfactory high-temperature oxidation resistance. The kinetic curves corresponding to the isothermal oxidation of the coatings illustrated a short transient stage from rapid to slow oxidation during the early portion of the oxidation experiment.

• Journal of Welding and Joining
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• v.26 no.4
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• pp.50-54
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• 2008

In this research, anode for SOFC has been manufactured from two different kinds of feedstock materials through thermal spraying process and the properties of the coatings were characterized and compared. One kind of feedstock was manufactured from spray drying method which includes nano-components of NiO, YSZ (300 nm) and graphite. And the other is manufactured by blending the micron size NiO coated graphite, YSZ and graphite powders as feedstock materials. Microstructure, mechanical properties and electrical conductivity of the coatings as-sprayed, after oxidation and after hydrogen reduction containing nano composite which is prepared from spray-dried powders were evaluated and compared with the same properties of the coatings prepared from blended powder feedstock. The coatings prepared from the spray dried powders has better properties as they provide larger triple phase boundaries for hydrogen oxidation reaction and is expected to have lower polarization loss for SOFC anode applications than that of the coatings prepared from blended feedstock. A maximum electrical conductivity of 651 S/cm at $800^{\circ}C$ was achieved for the coatings from spray dried powders which much more than that of the average value.

• Journal of Welding and Joining
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• v.12 no.1
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• pp.94-101
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• 1994

In this study, plasma spraying has been used to produce $TiO_2$ polycrystalline coatings from $TiO_2$ powders. The physical and chemical properties of plasma sprayed $TiO_2$ coatings depend greatly on plasma spraying conditions. The electrical resistivity, oxygen concentration, photocurrent and crystal structure of plasma sprayed $TiO_2$ coating has been studied. The results are as follows: 1. The oxygen loss and electrical conductivity of $TiO_2$ plasma sprayed coatings increased by low pressure and high amount of auxiliary gas, hydrogen in plasma spraying. 2. Oxygen loss increase electrical conductivity, and decrease photocurrent of $TiO_2$ plasma sprayed coatings. 3. Photocurrent of $TiO_2$ plasma sprayed coatings manufactured in atmospheric pressure is higher than that of low pressure.

• Journal of ILASS-Korea
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• v.13 no.4
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• pp.193-199
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• 2008

Spray coating is a versatile surface modification technology in which coating is built-up based on the successive deposition of micron-scaled particles. Depending on the coating materials, the coatings can meet the required mechanical properties, corrosion resistance, and other properties of base materials. Spraying processes are mainly classified into thermal and kinetic spraying according to their bonding mechanism and deposition characteristics. Specifically, thermal spraying process can be further classified into many categories based on the design and mechanism of the process, such as frame spraying, arc spraying, atmospheric plasma spraying (APS), and high velocity oxygen-fuel (HVOF) spraying, etc. Kinetic spraying or cold gas dynamic spraying is a newly emerging coating technique which is low-temperature and high-pressure coating process. In this paper, overall view of thermal and kinetic spray coating technologies is discussed in terms of fundamentals and industrial applications. The technological characteristics and bonding mechanism of each process are introduced. Deposition behavior and properties of technologically remarkable materials are reviewed. Furthermore, industrial applications of spray coating technology and its potentials are prospected.

• Journal of the Korean institute of surface engineering
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• v.48 no.6
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• pp.315-321
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• 2015

Rare-earth zirconates, such as $La_2Zr_2O_7$ and $Gd_2Zr_2O_7$, have been investigated as one of the candidates for replacing conventional yttria-stabilized zirconia (YSZ) for thermal barrier coating (TBC) applications at higher turbine inlet temperatures. In this study, double-ceramic-layer (DCL) TBCs of YSZ 1st layer and $La_2Zr_2O_7$ top coat layer are fabricated by suspension plasma spray with serial liquid feeders. Microstructures, hardness profiles, and thermal durability of DCL-TBCs are also characterized. Fabricated DCL-TBCs of YSZ/$La_2Zr_2O_7$ exhibit excellent properties, such as adhesion strength (>25 MPa) and electrical thermal fatigue (~1429 cycles), which are comparable with TBCs fabricated by atmospheric plasma spray.

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2006.09b
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• pp.1313-1314
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• 2006

For improvement of wear resistance property of atmospheric thermal plasma sprayed molybdenum (Mo) coating, diamond deposition on the atmospheric plasma sprayed molybdenum coating by the combustion flame chemical vapor deposition (CFCVD) has been operated. In this study, to diminish the thermal damage of the substrate during operation, a thermal insulator was equipped between substrate and water-cooled substrate holder. Consequently, diamond particles could be created on the Mo coating without fracture and peeling off. From these results, it was found that this process had a high potential in order to improve wear resistance of thermal sprayed coating.

• Journal of the Korean institute of surface engineering
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• v.54 no.6
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• pp.365-370
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• 2021

In this research, we proceeded with research on plasma resistance of the cleaning process of APS(Atmospheric Plasma Spray)-Y₂O₃ coated parts used for semiconductor and display plasma process equipment. CF₄, O₂, and Ar mixed gas were used for the plasma environment, and respective alconox, surfactant, and piranha solution was used for the cleaning process. After APS-Y₂O₃ was exposed to CF₄ plasma, the surface changed from Y₂O₃ to YF₃ and a large amount of carbon was deposited. For this reason, the plasma corrosion resistance was lowered and contamination particles were generated. We performed a cleaning process to remove the defect-inducing surface YF₃ layer and carbon layer. Among three cleaning solutions, the piranha cleaning process had the highest detergency and the alconox cleaning process had the lowest detergency. Such results could be confirmed through the etching amount, morphology, composition, and accumulated contamination particle analysis results. Piranha cleaning process showed the highest detergency, but due to the very large thickness reduction, the base metal was exposed and a large number of contaminated particles were generated. In contrast, the surfactant cleaning process exhibit excellent properties in terms of surface detergency, etching amount, and accumulated contamination particle analysis.