• Journal of Korean Society of Environmental Engineers
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• v.37 no.8
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• pp.492-497
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• 2015

VOCs (Volatile Organic Compounds) are generally generated in the painting process, or at the company and laundry where use organic solvents. The VOCs consist of various hydrocarbons and has low calorific value due to its dilution with atmospheric air. Therefore, the VOCs are difficult to burn by a conventional fuel combustor. In this study, a novel plasma dump combustor was proposed for the treatment of low calorific VOC gases. This combustor was designed a combination of the characteristics in a plasma burner, a dump combustor and a 3D matrix burner. The combustor has good structure for maintaining enough residence time and reaction temperature for stable flame formation and VOC destruction. For investigating the performance characteristics of the plasma dump combustor, an experiment was achieved for VOC feed rate, VOC injector position, etc. Toluene was used as a surrogate of VOC. The novel combustor gave better performance than a conventional combustor, showing that VOC destruction rate and energy efficiency were 89.64% and 12.27 kg/kWh respectively, at feeding rate of 450 L/min of VOC of 3,000 ppm of toluene concentration.

• Applied Chemistry for Engineering
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• v.25 no.2
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• pp.174-180
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• 2014

A plasma hydrophobic coating on commercial fish feed was conducted to prolong the floating time of feed, thereby enhancing the feed consumption rate and reducing the contamination of water in fish farms. The hydrophobic coating on the fish feed was prepared using an atmospheric-pressure dielectric barrier discharge (DBD) plasma with hexamethyldisiloxane (HMDSO), toluene and n-hexane as the precursors. The effect of the parameters such as input power, precursor type and coating time on the coating performance were examined. The physicochemical properties of the coating layer were analyzed using a Fourier transform infrared (FTIR) spectrometer and a contact angle (CA) analyzer. The water CA increased after the coating preparation, indicating that the surface changed from hydrophilic to hydrophobic. The FTIR characterization revealed that the hydrophobic layer was comprised of functional groups such as $CH_3$, Si-O-Si and Si-C. As a result of the hydrophobic coating, the floating time of the fish feed increased from several seconds to 3 minutes, which suggested that the plasma coating method could be a viable means for practical applications. Compared to the water CA measured as soon as the coating layer was prepared, the 6-day aged sample exhibited a substantial CA increase, confirming the aging effect on the improvement of the hydrophobicity.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.251-251
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• 2015

현재 주로 쓰이는 표면 텍스쳐링 공정은 주로 진공에서 진행하기 때문에 높은 비용과 및 생산성의 한계, 비교적 낮은 효율 등의 단점을 가지고 있다. 그러므로 비용을 줄이고 생산성을 높이기 위해 기존의 공정 방법과 달리 진공을 사용하지 않는 대기압 플라즈마를 연구하고 대기압 플라즈마의 특성을 분석하였다. 위 연구를 통해 대기압 플라즈마를 반도체, 디스플레이, 태양전지에 쓰이는 공정에 적용시킨다면 새로운 공정 방향을 제시 할 수 있으며 사회 및 산업분야에 긍정적 영향을 미칠 것으로 예상한다. 본 연구에서는 대기압 플라즈마 특성을 OES(Optical Emission Spectroscopy)를 이용하여 광학적으로 분석하였다. RF전극과 웨이퍼 사이 간격, 가스 종류, 가스 유량, 스테이지의 움직이는 속도, RF 인가전압에 따라 어느 플라즈마의 광학적 특성이 나오는지 알아보았다.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2013.05a
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• pp.67-67
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• 2013

그래핀과 탄소나노튜브와 같은 탄소나노재료는 우수한 물성으로 인하여 다양한 분야에 응용이 가능할 것으로 예측되고 있으며, 더욱이 이러한 특성은 구조변형, 화학적 도핑뿐만 아니라 표면처리를 통해서 제어가 가능하다고 알려져 있다. 본 연구에서는 기존의 진공 공정이 아닌 상온 상압 환경에서 그래핀과 탄소나노튜브를 효율적으로 표면 처리하기 위하여 대기압 플라즈마장치를 제작하였고, 질소플라즈마를 이용하여 그래핀과 탄소나노튜브의 표면을 처리하였다. 대표적인 결과로는 소수성이었던 그래핀 및 탄소나노튜브의 표면을 친수성으로 개질하였으며, 플라즈마 처리에 의한 결함을 최소화시킬 수 있는 최적의 표면처리 조건을 도출하였다.

• Proceedings of the KIEE Conference
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• 2011.07a
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• pp.1523-1524
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• 2011

본 연구에서는 대기압 하에서 평판형의 금속전극 양단에 펄스전압을 인가하여 대기압/저온 마이크로 플라즈마를 지속적으로 발생시키는 방법을 제안하고 구동전원 특성 및 플라즈마의 전기, 광학적 특성에 관한 연구를 수행하였다. 또한 Comsol 프로그램을 사용하여 이론적 해석을 하였으며, OES(Optical Emission Spectrometer)를 사용하여 측정 및 분석을 하였다.

• Journal of Environmental Science International
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• v.6 no.5
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• pp.451-459
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• 1997

This paper alms to describe the indoor-outdoor air quality in school environment through the analyses of heavy metal concentration by inductively Coupled Plasma(ICPI, which were observed at some school environment, such as traffic area, industrial area seme-industrial area, and residence area. The results are as follows : (1) Regardless Indoor and outdoor, the area with the highest concentration of heavy metal is industrial area followed by traffic area, residence area and semi-industrial area in descending order of magnitude. And the heavy metal concentration of indoor is higher than that of outdoor. (2) The main heavy metal components with more high level concentration of Indoor than those of outdoor are Zn, Al, Ca and these heavy metal concentrations are higher in class than In corridor and outdoor.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 2009.10a
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• pp.323-326
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• 2009

본 연구에서는 대기압 플라즈마의 처리 조건에 따른 ITO 필름의 접착력 향상을 위한 접촉각 및 표면에너지의 변화를 관찰하였다. 대기압 플라즈마의 처리 변수로는 반응 가스, 처리 속도 방전 전압 및 시료와 플라즈마 헤드 사이의 방전 캡이며, 측정된 접촉각을 이용하여 ITO 필름의 표면을 분석하였다. 그 결과는 방전 전압이 증가할수록 접촉각은 낮아졌으며, 시료와 플라즈마 헤드 사이의 방전 간격은 2.5[mm]에서 접촉각이 낮게 나타나 ITO 필름의 접착력 향상을 위한 친수성 물질로 표면 개질됨을 확인할 수 있었다.

• Journal of Electrical Engineering and Technology
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• v.13 no.6
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• pp.2421-2424
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• 2018

A direct measurement of an initiation carrier injection for a low voltage discharge is presented. A self-sustained pulsed discharge is utilized to characterize electrical responses of a glow discharge for varying amounts of injected initiation carriers. It is clearly demonstrated that the initiation carrier injection affects the ignition time and the breakdown voltage of the primary discharge. An abrupt reduction in the breakdown voltage for a $300{\mu}m$ gap pin-plate discharge is observed when a threshold carrier density of $3{\times}10^{11}cm^{-3}$ is injected and the breakdown voltage continues to decrease to 250 V with increasing the initiation carrier injection beyond the threshold density.

• Vacuum Magazine
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• v.2 no.3
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• pp.11-15
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• 2015

Particle characteristics diagnosis system (PCDS) was developed to measure submicron particle characteristics by modulation of particle beam mass spectrometry (PBMS) with scanning electron microscopy (SEM) and energy dispersive x-ray spectroscopy (EDS). It is possible to measure the particle size distribution in real-time, and the shape, composition can be measured in sequence keeping vacuum condition. Apparatus was calibrated by measuring the size classified NaCl particle which generated at atmospheric pressure. After the calibration, particles were sampled from the exhaust line of plasma enhanced chemical vapor deposition (PECVD) process and measured. Result confirms that PCDS is capable for analyzing particles in vacuum condition.

• Journal of ILASS-Korea
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• v.13 no.4
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• pp.193-199
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• 2008

Spray coating is a versatile surface modification technology in which coating is built-up based on the successive deposition of micron-scaled particles. Depending on the coating materials, the coatings can meet the required mechanical properties, corrosion resistance, and other properties of base materials. Spraying processes are mainly classified into thermal and kinetic spraying according to their bonding mechanism and deposition characteristics. Specifically, thermal spraying process can be further classified into many categories based on the design and mechanism of the process, such as frame spraying, arc spraying, atmospheric plasma spraying (APS), and high velocity oxygen-fuel (HVOF) spraying, etc. Kinetic spraying or cold gas dynamic spraying is a newly emerging coating technique which is low-temperature and high-pressure coating process. In this paper, overall view of thermal and kinetic spray coating technologies is discussed in terms of fundamentals and industrial applications. The technological characteristics and bonding mechanism of each process are introduced. Deposition behavior and properties of technologically remarkable materials are reviewed. Furthermore, industrial applications of spray coating technology and its potentials are prospected.