• Applied Chemistry for Engineering
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• v.20 no.4
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• pp.402-406
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• 2009

$TiO_2$ thin films were surface-modified with atmospheric plasma and their photocatalytic activities were evaluated. The films were deposited on glass plates by dip-coating in a $TiO_2$ sol-gel solution and sintered at various temperatures for various times. Nitrogen plasma was used for the modification and the experiments were carried out varying operational parameters such as discharge power and treatment time. Photocatalytic activity was evaluated based on the degradation efficiency of methylene blue (MB) under irradiation of UV-A and fluorescent light. According to XPS analysis, a little amount of nitrogen was found to be doped in the film surface after the modification. As a result, photocatalytic activity increased under irradiation of UV-A and fluorescent light, especially fluorescent light.

• Journal of the Korean Vacuum Society
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• v.15 no.4
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• pp.374-379
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• 2006

In this study, carbon nanotubes (CNTs) were grown on glass substrates coated with Ni/Cr by an atmospheric pressure plasma enhanced chemical vapor deposition(AP-PECVD) and their structural and electrical characteristics were investigated as a possible application to the field emitter of field emission display (FED) devices. The substrate temperature ($400{\sim}500^{\circ}C$) were varied and the grown CNTs were multi wall CNTs (at $500^{\circ}C$, 15 - 20 layers of graphene sheets, distance of each layer : 0.3nm, inner diameter: 10 - 15nm, outer diameter: 30 - 40nm). The ratio of defective carbon peak to graphite carbon peak of the CNTs grown at $500^{\circ}C$ (C measured by fourier transform(FT)-Raman was 0.772 $I_D / I_G$ ratio. When field emission properties were measured, the turn-on field was $2.92V/{\mu}m$ and the emission field at $1mA/cm^2$ was $5.325V /{\mu}m$.

• Journal of Environmental Science International
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• v.11 no.8
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• pp.801-810
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• 2002

The current paper describes the indoor/outdoor air quality in school environments through analyses of the heavy metal concentrations using Inductive Coupled Plasma(ICP). School environments in a heavy traffic area, two industrial areas, quasi-industrial area, and residential area were evaluated. The results were as follows: (1) The locations with the highest indoor and outdoor concentrations of heavy metals were the industrial areas followed by the heavy traffic area, residential area, and quasi-industrial area in a descending order of magnitude. Plus, the indoor heavy metal concentrations were higher then the outdoor ones. (2) The main heavy metal components were Zn, Al and Ca. Higher concentration levels were found indoors than outdoors. The heavy metal concentrations were also higher in the classrooms than in the corridor or outdoors. (3) The total heavy metal concentrations in the studied areas were highly dependent on the weather elements. including the relative humidity, mixing ratio, and wet-bulb depression. Accordingly, special ventilation systems are recommended to reduce air pollution in school environments.

• Journal of Korean Society for Atmospheric Environment
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• v.26 no.6
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• pp.683-689
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• 2010

Reforming of methane with carbon dioxide has been carried out using a bipolar pulse driven elongated arc reactor operating at atmospheric pressure and non-equilibrium regime. This plasma reactor is driven by two kinds of power supply, characterized by different voltage-current characteristics under the same operating power and frequency. Varying the $CO_2/CH_4$ ratio and the discharge power, the conversion rate, yield, and reforming efficiency for the two power supplies are investigated in conjunction with the static and dynamic behaviors of voltage and current. It is found that not only the values of voltage and current but also their shapes give an influence on the reforming performances. Finally, a better electrical operation regime for the efficient plasma reforming is proposed based on the relationship between the voltage-current characteristics and the reforming performance.

• Journal of the Semiconductor & Display Technology
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• v.15 no.2
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• pp.26-31
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• 2016

The Townsend to glow discharge mode transition was investigated in the dielectric barrier discharge (DBD) helium plasma source which was powered by 20 kHz / $4.5 kV_{rms}$ high voltage at atmospheric pressure. The spatial profile of the electric field strength at each modes was measured by using the intensity ratio method of two helium emission lines (667.8 nm ($3^1D{\rightarrow}2^1P$) and 728.1 nm ($3^1S{\rightarrow}2^1P$)) and the Stark effect. ICCD images were analyzed with consideration for the electric field property. The Townsend discharge (TD) mode at the initial stage of breakdown has the light emission region located in the vicinity of the anode. The electric field of the light emitting region is close to the applied field in the system. Immediately, the light emitting region moves to the cathode and the discharge transits to the glow discharge (GD) mode. This mode transition can be understood with the ionization wave propagation. The electric field of the emitting region of GD near cathode is higher than that of TD near anode because of the cathode fall formation. This observation may apply to designing a DBD process system and to analysis of the process treatment results.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.48 no.10
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• pp.710-715
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• 1999

The purpose of this work is to develop a high-efficiency air cleaning system for air pollutants such as particulate and gaseous state in indoor environments. In order to enhance a removal efficiency of gaseous state pollutants, we suggested that pulsed discharge plasma be combined with $TiO_2$ photocatalyst (photocatalytic plasma air cleaning unit). We investigated experimentally the basic characteristics of photocatalytic plasma air cleaning unit and measured air pollutants removal efficiency. The wavelength of light radiated from pulsed discharge plasma under the atmospheric condition was 310~380nm. Its energy is enough to excite the $TiO_2$ photocatalyst and it makes a photochemical reaction in the surface of $TiO_2$ photocatalyst. The removal quantity of trimethylamine$((CH_3)_3N)\; was\; 130mg/m^34 which is twice quantity of pulsed discharge plasma without $TiO_2$ phtocatalyst unit. From the result of gas analysis using FT-IR, nitric oxide was not detected and trimethylamine was decomposed to $H_2O\; and \;CO_2$. And trimethylamine removal efficiency was 95%. These experimental results indicate that photocatalytic plasma air cleaning unit is a potential method in removing the pollutants.

• Journal of Advanced Marine Engineering and Technology
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• v.40 no.10
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• pp.888-893
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• 2016

In this study, the solution plasma process was utilized with the aim of degrading synthetic dyes in water at atmospheric pressure. The experiments were conducted in a batch-type reactor consisting of a symmetric wire-wire electrode configuration with rhodamine B (RhB) as the target synthetic dye. The effects of the plasma treatment time and initial dye concentration on the RhB degradation were investigated by monitoring the change in absorbance of RhB solutions. The RhB solutions turned lighter in color and finally colorless with prolonged plasma treatment time, indicating the destruction of dye molecules. The RhB solutions were found to have degraded, following the first-order kinetic process. However, for high initial RhB concentrations, another kinetic process or factor seems to play a dominant role at the initial degradation stage. The fitted first-order rate constant decreased as the initial concentration increased. This result suggests that the degradation behavior and kinetic process of the RhB solution strongly depends on its initial concentration. The RhB degradation is considered to be due to a combination of factors, including the formation of chemically oxidative species, as well as the emission of intense UV radiation and high-energy electrons from the plasma. We believe that the solution plasma process may prove to be an effective and environment-friendly method for the degradation or remediation of synthetic dye in wastewater.

• Journal of the Korean Society of Safety
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• v.15 no.3
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• pp.66-70
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• 2000

In order to cope with environmental problems caused by harmful gases emitted from various industrial sources, a new technology which employs discharge plasma formed in ordinary atmospheric pressure has been intensively investigated in many industrialized nations. Although a plenty of useful outcomes and suggestions have been made public by scientists in this field, few commercial products which effectively decompose pollutant gases have appeared as yet. This is partly because that the energy efficiency of a most effective plasma reactor has not reached a satisfactory level in comparison with those of devices using conventional technologies. In an attempt to solve the problem mentioned above, we noticed to combine heterogeneous electrical discharges. This concepts is based on that each plasma reactor has its specific spatial region in which chemical reaction are active and by electrically affected with another reactor of different type, the activated region would increase - which may lead to cutting down the energy consumption. To prove this concept experimentally, two different discharge equipments, a plane ceramic-based surface discharge electrode and a corona electrode with tungsten needle may, are selected and combined to fabricate a hybrid plasma reactor. The results are summarized as follows; (1) Ozone concentration generated in the plasma region drastically increases when the positive corona discharge is added to the surface discharge. The rate of increase of ozone depends on the frequency of the surface discharge. The negative corona, however, does not contribute to the improvement of the ozone generation. (2) NO(nitrogen monoxide) decomposition rate also improves by simultaneously applying the surface and the positive corona discharges. The effect of the corona superposition is more evident when the level of the surface discharge is moderate. (3) By adjusting the corona level, the net energy efficiency during NO decomposition improves in comparison with the simple surface discharge reactor.

• Journal of Surface Science and Engineering
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• v.54 no.6
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• pp.365-370
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• 2021

In this research, we proceeded with research on plasma resistance of the cleaning process of APS(Atmospheric Plasma Spray)-Y₂O₃ coated parts used for semiconductor and display plasma process equipment. CF₄, O₂, and Ar mixed gas were used for the plasma environment, and respective alconox, surfactant, and piranha solution was used for the cleaning process. After APS-Y₂O₃ was exposed to CF₄ plasma, the surface changed from Y₂O₃ to YF₃ and a large amount of carbon was deposited. For this reason, the plasma corrosion resistance was lowered and contamination particles were generated. We performed a cleaning process to remove the defect-inducing surface YF₃ layer and carbon layer. Among three cleaning solutions, the piranha cleaning process had the highest detergency and the alconox cleaning process had the lowest detergency. Such results could be confirmed through the etching amount, morphology, composition, and accumulated contamination particle analysis results. Piranha cleaning process showed the highest detergency, but due to the very large thickness reduction, the base metal was exposed and a large number of contaminated particles were generated. In contrast, the surfactant cleaning process exhibit excellent properties in terms of surface detergency, etching amount, and accumulated contamination particle analysis.

• Composites Research
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• v.24 no.6
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• pp.18-24
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• 2011

The effect of surface treatments with the atmospheric pressure flame plasma (APFP) and epoxy silane (ES) is experimentally investigated to yield the best mechanical properties of silica ($V_f=40%$) reinforced elastomeric composites. The tensile strength of the composites is increased significantly with decrease the mean diameter. When the diameter is $2.2{\mu}m$, that of the composite is increased about 1.4 times compared to the matrix (2.52 MPa). Also, the tensile strength of silica reinforced composites with APFP and ES treated is increased 8.8~13.3%, 9.9~12.5%, respectively. When the diameter is $26.6{\mu}m$, the tensile modulus of the composite is increased about 2 times compared to the matrix (0.88MPa), and the tensile modulus of silica reinforced composites with APFP and ES treated is increased 15.6~22.8%, 21.1~5.8%, respectively. Conventional silane coupling agent treatment have a few disadvantages because of using organic solvents. However APFP treatment is a fast, economic and eco-friendly method to improve the mechanical properties.