• 한국대기환경학회:학술대회논문집
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• 한국대기환경학회 2001년도 추계학술대회 논문집
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• pp.419-420
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• 2001

최근 산업설비 및 기타 시설에서 배출되는 유해가스의 배출허용 기준이 계속 강화되고 있으며 그 중에서도 NOx는 SOx와 함께 대기오염의 주된 원인으로 작용하고 있다. 국내에서도 이들 유해가스를 제거하기 위한 플라즈마 적용기술이 활발히 연구되었으며, 일부 기술은 상용화 단계에 있다. NOx 제거에 있어서 펄스 코로나 방전에 의한 전자의 생성은 유입되는 가스 및 공기에 충돌하여 반응성이 큰 다량의 이온, 원자 및 radical(N, O, OH, $O_3$등)을 생성한다. (중략)

• 한국어병학회지
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• 제33권1호
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• pp.91-95
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• 2020

Fish bacterial diseases have spread and caused serious problem for cultured marine fish in Korea. The important bacterial disease affecting mariculture such as olive flounder (Paralichthys olivaceus) are caused by Edwardsiella tarda, Vibrio scophthalmi and Streptococcus parauberis. For the bacterial disease protection in aquaculture industry, the water treatment is needed in aquaculture system. During the last decades atmospheric pressure non-thermal plasma in contact with liquids have received a lot of attention of environmental and medical application. In this study, we determined the disinfectant effect in seawater and three major fish bacterial disease pathogens by using low frequency plasma treatment. Three fish bacteria (E. tarda, V. schophthalmi, S. parauberis) were not detected within 16 min, 150 min and 270 min of 20 L, 500 L and 1 ton seawater post low frequency plasma treatment, respectively. Three major fish bacterial disease pathogens were not detected within 2 min after the low frequency plasma treatment, suggesting that the low frequency plasma possess disinfectant effectiveness.

• Korean Journal of Chemical Engineering
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• 제35권12호
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• pp.2452-2463
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• 2018

Surface treatment of sol-gel bioglass is required to increase its biomedical applications. In this study, a dielectric barrier discharge (DBD) plasma treatment in atmospheric pressure was performed on the surface of [$SiO_2-CaO-P_2O_5-B_2O_3$] sol-gel derived glass. The obtained bioglass was treated by plasma using discharge current 12 mA with an exposure period for 30 min. The type of discharge can be characterized by measuring the discharge current and applied potential waveform and the power dissipation. Apatite formation on the surface of the DBD-treated and untreated samples after soaking in simulated body fluid (SBF) at $37^{\circ}C$ is characterized by Fourier transform infrared spectroscopy (FTIR), X-Ray diffraction (XRD), inductively coupled plasma (ICP-OES) and scanning electron microscopy coupled with energy dispersive spectroscopy (SEM/EDS). We observed a marked increase in the amount of apatite deposited on the surface of the treated plasma samples than those of the untreated ones, indicating that DBD plasma treatment is an efficient method and capable of modifying the surface of glass beside effectively transforming it into highly bioactive materials.

• 한국진공학회지
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• 제22권2호
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• pp.55-65
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• 2013

본 연구에서는, 동시에 넓은 면적을 조사할 수 있는 형태의 유전체 장벽 방전을 이용한 대기압 면방전 플라즈마 발생장치를 이용하여 곰팡이의 살균 실험을 수행하였다. 실험에 사용한 면방전 플라즈마 발생장치의 파워는 사인파 교류전원을 이용하였으며, 1.4~2.3 kV의 방전전압을 가진다. 또한, 유전체 전기용량의 특성으로 인하여 전압과 전류의 위상차는 약 80도를 갖는다. 생물시료에 미치는 온도의 영향은 공랭식 쿨러를 사용하여 유전체의 열을 배출함으로써 최소화 하였으며, 시료의 온도는 온도측정장치를 사용하여 쿨러(Cooler) 작동 시 최대 10분간 플라즈마를 발생시켜도 37도가 넘지 않음을 확인하였다. 플라즈마에서 생성되는 활성종중 오존($O_3$)의 양은 플라즈마 발생부로부터 1 cm 이내에서 약 25~30 ppm이 측정되었으며, 150 cm 떨어진 지점에서도 5 ppm 정도 측정되었다. 그에 비해 일산화질소(NO)나 이산화질소($NO_2$)는 거의 검지되지 않음을 확인하였다. 증류수 속에 담긴 빵 곰팡이 포자를 면방전 플라즈마 발생장치로 처리하였을 때, 포자의 발아율은 처리시간 및 출력파워가 증가함에 따라 급격히 감소하였으며, MTT (3-(4,5-dimethy lthiazol-2yl)-2,5-diphenyl-2H-tetrazolium bromide) 측정법을 통해 분석한 미토콘드리아 활성도도 처리시간과 출력파워에 비례하여 감소함을 보았다. 반면 포자를 Vogel's minimal 배양액에 넣고 플라즈마 처리를 하면, 앞의 실험과 달리 살균효과가 미비함을 보였는데, 이를 통해 포자를 둘러싸고 있는 환경이 플라즈마의 살균효과에 영향을 미치는 것으로 보여진다. 본 연구를 통하여 유전체 장벽을 이용한 면방전 플라즈마 발생장치는 플라즈마 제트(jet)와는 달리 직접적인 접촉 없이도 미생물 살균이 가능하다는 것을 보여주었으며, 이는 면방전 플라즈마 발생장치로부터 발생하는 활성종들이 곰팡이와 같은 미생물의 비활성화에 주요역할을 하기 때문이라고 본다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.257-257
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• 2012

Fault detection was carried out in a etcher of capacitive coupled plasma with OES (Optical Emission Spectroscopy) and impedance by VI probe that are widely used for process control and monitoring at semiconductor industry. The experiment was operated at conventional Ar and Fluorocarbon plasma with variable change such as pressure and addition of N2 and O2 to assume atmospheric leak, RF power and pressure that are highly possible to impact wafer yield during wafer process, in order to observe OES and VI Probe signals. The sensitivity change on OES and Impedance by VI probe was analyzed by statistical method including PCA to determine healthy of process. The main goal of this study is to find feasibility and limitation of OES and Impedances for fault detection by shift of plasma characteristics and to enhance capability of fault detection using PCA.

• Journal of Astronomy and Space Sciences
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• 제17권1호
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• pp.99-106
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• 2000

When a deployed probe is biased by a high positive potential during a space experiment, the payload is induced to a negative voltage in order to balance the total current in the whole system. The return currents are due to the responding ions and secondary electrons on the payload surface. In order to understand the current collection mechanism, the process was simulated with a combination of resistor, inductor, and capacitor in SPICE program which was equivalent to the background plasma sheath. The simulation results were compared with experimental results from SPEAR-3 (Space Power Experiment Aboard Rocket-3). The return current curve in the simulation was compatible to the experimental result, and the simulation helped to predict the transient plasma response to a high voltage during the plasma sheath formation.

• 전력전자학회:학술대회논문집
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• 전력전자학회 2014년도 추계학술대회 논문집
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• pp.85-86
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• 2014

The paper presents a power supply of atmospheric-pressure plasma reactor based on SiC (Silicon Carbide) MOSFET resonant inverter. Thanks to the capacitive characteristic of capacitive coupling plasma reactor type, the LC series resonant inverter had been applied to take advantages of this topology with the implementation of SiC MOSFET power modules as switching power devices. Designation of gate driver for SiC MOSFET had been introduced by this paper. The 5kVp, 5kW power supply had also been verified by experimental results.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2002년도 International Meeting on Information Display
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• pp.621-624
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• 2002

In this study, outgassing characteristics of MgO films, and the plasma cleaning effects of the deposited MgO films by atmospheric pressure plasma on outgassing rate were compared. The MgO layer was heated up to 350 $^{\circ}C$ and the outgassing characteristics were observed for the heated conditions. As the main impurity species $H_2,\;H_2O,\;N_2,\;CO_2,\;and\;H_2O$ were released from this panel. Impurity species of plasma treatment panel were lower than non-treated panels for the heating temperature

• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part2
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• pp.908-909
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• 2006

The HTCC based multilayer structure plasma head unit have some difficulties in fabrication due to complicated post-processes, such as heat treatment at reduced atmosphere, re-bonding of each layer, and silver metallization. On the other hand, LTCC based technology provides relatively simple process for multilayer plasma unit except weak mechanical properties. To overcome this problem a combined scheme using both LTCC and HTCC technology has been developed in our group, recently. In this work, we report the structural design, materials selection, joining of LTCC with HTCC substrate, and co-firing process for the fabrication of multilayered atmospheric plasma head unit.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회B
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• pp.2892-2897
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• 2008

Plasma techniques have been proposed to generate a hydrogen enrich gas to investigate a feasibility of plasma techniques on a fuel reforming, we considered a dry reforming and a partial oxidation with methane in the atmospheric pressure. For these experiments, we employed an arc jet plasma reactor. The effects of input power and oxidizer in each process were investigated by product analysis, including carbon monoxide, hydrogen, ethylene, propane, and acetylene as well as methane and carbon dioxide. In both processes, input electrical power activated the reactions significantly. The increased ratio of the carbon dioxide to methane in the dry reforming doesn't affect to a methane conversion, whereas increased ratio of oxidizer to methane in the partial oxidation was very effective for the reaction. Moreover, for a simultaneous treatment of methane and carbon dioxide, a feasibility of a dry reforming combined with partial oxidation also has been investigated.