• Journal of the Korean Vacuum Society
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• v.20 no.4
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• pp.258-265
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• 2011

A zero-dimensional global model simulator for atmospheric pressure oxygen plasmas has been developed. The simulation model considers the configurations similar to that of plasma needle device. The simulation results show that those species of O, $O_3$, $O_2*$ and ${O_2}^+$ have the highest density in sequence. Electrons dissipate most of their energy through the collisions with oxygen molecules. If the input power increases, the density of most species also increases as much as three-boy collision for the creation of ozone is weakened and hence the density of ozone decreases. The body to volume ratio also affects the plasma density.

• Journal of Korean Society for Atmospheric Environment
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• v.26 no.6
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• pp.690-696
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• 2010

Abatement of perfluorocompounds (PFCs) used in semiconductor and display industries has received an attention due to the increasingly stricter regulation on their emission. In order to meet this circumstance, we have developed a radio frequency (RF) driven plasma reactor with multiple annular shaped electrodes, characterized by an easy installment between a processing chamber and a vacuum pump. Abatement experiment has been performed with respect to $CF_4$, a representative PFCs widely used in the plasma etching process, by varying the power, $CF_4$ and $O_2$ flow rates, $CF_4$ concentration, and pressure. The influence of these variables on the $CF_4$ abatement was analyzed and discussed in terms of the destruction & removal efficiency (DRE), measured with a Fourier transform infrared (FTIR) spectrometer. The results revealed that DRE was enhanced with the increase in the discharge power and pressure, but dropped with the $CF_4$ flow rate and concentration. The addition of small quantity of $O_2$ lead to the improvement of DRE, which, however, leveled off and then decreased with $O_2$ flow rate.

• Journal of Animal Science and Technology
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• v.55 no.6
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• pp.545-549
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• 2013

The optimal conditions for applications of an atmospheric pressure plasma (APP) jet for the inactivation of Salmonella Typhimurium in chicken breast and pork loins were investigated. APP jet treatment for 10 min (versus 5 minutes) showed a higher inactivation of S. Typhimurium in an agar plate, with the best effect at a distance of 20 mm. A treatment on both sides (both-side treatment) for 2.5 + 2.5 min showed a greater inhibition on S. Typhimurium growth compared to single-side treatment for 5 min, with reduction levels of 0.66 log CFU/g in chicken breast and 1.33 log CFU/g in pork loin, respectively. However, there was no significant difference between single-side treatment for 10 min and both-side treatment for 5 + 5 min in chicken breasts and pork loin samples. In conclusion, APP jet treatment conditions, including distance, time, and direction, may affect the inactivation efficiency of S. Typhimurium. In this experiment, distance of 20 mm and both-side treatment were the best conditions. Therefore, the optimal APP jet treatment conditions were evaluated to maximize its practical efficiency.

• Food Science of Animal Resources
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• v.32 no.5
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• pp.561-570
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• 2012

The objective of this study was to evaluate the effects of an atmospheric pressure plasma (APP) jet on L. monocytogenes inactivation, quality characteristics, and genotoxicological safety of cooked egg white and yolk. APP treatment using He gas resulted in a 5 decimal reduction in the number of L. monocytogenes in cooked egg white, whereas that using $He+O_2$, $N_2$, and $N_2+O_2$ decreased the number further, and to undetectable levels. All treatments of cooked egg yolk resulted in undetectable levels of inoculated L. monocytogenes. There were no viable cells of total aerobic bacteria after APP treatment on day 0 while the control showed approximately 3-4 Log CFU/g. On day 7, the numbers of total aerobic bacteria had increased by approximately 3 log cycles in cooked egg white, but there were no viable cells in cooked egg yolk after 2 min of APP jet. APP treatment decreased the $L^*$-values of cooked egg white and yolk significantly on day 0. No significant sensory differences were found among the cooked egg white samples, whereas significant reductions in flavor, taste, and overall acceptability were found in cooked egg yolks treated with APP jets. SOS chromotest did not reveal the presence of genotoxic products following APP treatments of cooked egg white and yolk. Therefore, it can be concluded that APP jets can be used as a non-thermal means to enhance the safety and extend the shelf-life of cooked egg white and yolk.

• The Bulletin of The Korean Astronomical Society
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• v.34 no.1
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• pp.156-156
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• 2009

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.175.1-175.1
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• 2016

In recent, tract infections such as atopic dermatitis, allergic rhinitis and a respiratory disease are increasing, giving rise to the atmospheric pollution, inflow of micro-size dust and side effect of humidifier disinfectant. In this context, the environment-friendly technology is required to eliminate airborne pathogens. We propose solution of the previous problems, making use of Radical Mist Generator (RMG). Existing technologies of air purification using a gas discharge produce harmful substances such as ozone, NOx, etc. However, the RMG uses a pure water as a plasma forming material. The RMG sprays the water mist, which contains reactive radicals to sterilize microorganisms. RMG is comprised of a power supply, plasma electrodes and a nozzle. In order to analyze the electrical characteristic and concentrations of reactive radicals, we employ an oscilloscope and a titration method. To test the sterilization effect of RMG, we used E.coli. We confirmed that E.coli was killed over 90%. Eventually, we expect that RMG can be promising tool for a purified system.

• Textile Coloration and Finishing
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• v.26 no.3
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• pp.201-208
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• 2014

The high value-added functionality for synthetic fiber can be considered through a plasma enhanced treatment. In this study, PET(Polyethyleneterephthalate) was treated with a glow plasma and corona treatment. Surface characteristics of treated fabric were investigated using electron scanning microscopy(SEM), contact angle, X-ray photoelectron spectroscopy(XPS), tensile and adhesion strength. It was found that the contact angle showed $85.5^{\circ}$ for untreated fabric, $0^{\circ}$ for plasma and corona treatment at the condition of 200W for 7min. By XPS analysis, atomic ratio of O 1s/C 1s was increased from 0.27 to 0.43 by glow plasma and 0.27 to 0.41 by corona treatment at 200W for 7min, respectively. Glow plasma and corona treatment did not significantly change the tensile strength of PET fabric. Adhesion strength showed a substantial enhancement for the surface treated with the glow plasma, while corona treatment was adversely affected.

• Journal of Surface Science and Engineering
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• v.45 no.2
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• pp.89-94
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• 2012

A study to replace a high temperature thermal carbonization process with microwave plasma process is carried for PAN fiber as a starting material. Near atmospheric pressure microwave plasma (1 Torr~45 Torr) was used to control to get the fiber temperature up to $1,000^{\circ}C$. Even argon is an inert gas, its plasma state include high internal energy particles; ion (15.76 eV) and metastable (11.52 eV). They are very effective to lower the necessary thermal temperature for carbonization of PAN fiber and the resultant thermal budget. The carbonization process was confirmed by both EDS (energy dispersive spectroscopy) of plasma treated fibers and OES (optical emission spectroscopy) during processing step as a real time monitoring tool. The same trend of decreasing oxygen content was observed in both diagnostic methods.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.697-698
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• 2010

• 한국정보디스플레이학회:학술대회논문집
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• 2003.07a
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• pp.421-424
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• 2003

An AP plasma technology has been developed for the application of dry cleaner, PR ashing and PI rework in the large glass size. The technology is cost effective, environment friendly, and best fits for coming generation LCD production since the design is easily scalable to bigger size glasses. Surface cleaning results based on the contact angle study has been presented for $5^{th}$ generation LCD bare glass. PR ashing results and various parametric studies have been also presented.