• 한국전자파학회논문지
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• 제28권8호
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• pp.646-652
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• 2017

큰 부피의 플라즈마를 발생시키기 위하여 플라즈마 층을 포함하는 유전체 장벽 방전 구조(dielectric barrier discharge)를 제안하고, 발생기 동작 유무에 따른 모노스태틱 레이다 단면적(mono-static radar cross section)을 측정함으로써 대기압 플라즈마가 전자기파에 미치는 영향을 분석하였다. 다수의 전극을 평면으로 평행 배열함으로써 플라즈마 층의 부피를 증가시켰으며, 전극 배열과 수직인 방향의 전기장을 포함하는 전자기파를 입사시킴으로써 발생기와의 원치 않는 커플링을 최소화 시켰다. 실험 결과, 모노스태틱 레이다 단면적을 2 GHz부터 25 GHz까지 측정하였을 때, K band에서 최대 8 dB까지 감소하는 것을 확인하였다. 또한, 고전압 발생기의 인가 전압을 최대 20 kV까지 변화시킴으로써 원하는 주파수에서 플라즈마로 인한 감소치를 유연하게 조절 가능함을 보였다.

• 한국진공학회지
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• 제21권6호
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• pp.312-321
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• 2012

한 쌍의 대기압 플라즈마 제트 장치의 전극에 인가하는 교류 전압의 극성에 따라서 발생되는 플라즈마 칼럼의 전위를 고전압 프로브를 사용하여 계측하였다. 고전압이 인가되는 플라즈마 제트 장치에서 발생되는 플라즈마 칼럼은 고전압 인가측의 전위는 높고 플라즈마 칼럼을 따라서 선형적으로 전위가 감소한다. 이러한 플라즈마 칼럼은 단위 길이당 저항이 수 $M{\Omega}/m$에서 수십 $M{\Omega}/m$의 저항체이다. 한 쌍의 플라즈마 제트 장치의 전극에 극성이 다른 전압으로 발생되는 플라즈마 전위의 극성은 인가전압의 극성과 동일하다. 따라서 서로 다른 극성의 전압을 인가한 한 쌍의 플라즈마 제트 장치에서 방출되는 플라즈마의 대기 중의 병합점에서 상호 인력이 작용하며, 병합점의 전위는 수십 V로 낮다. 동일한 극성의 전압을 인가하여 방출되는 한 쌍의 플라즈마 제트는 상호 동일한 극성의 전위에 의하여 상호 척력이 작용하며, 병합점에서의 전위는 수백 V로 높다. 이러한 한 쌍의 플라즈마 제트에서 방출되는 플라즈마를 인체에 조사하는 경우는 전기적인 충격이나 열적인 손상은 플라즈마의 전위와 전류의 곱인 플라즈마 전력의 크기에 비례한다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.140.1-140.1
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• 2015

Currently, As Plasma application is expanded to the industrial and medical industrial, Low temperature plasma characteristics became important. Especially in Medical industrial, Low temperature plasma directly adapted to human skin, so their plasma parameter is important. One of the plasma parameters is electron density, some kinds of method to measuring electron density are Thomson scattering spectroscopy and Millimeter-wave transmission measurement. But most methods is expensive to composed of experiment system. Heterodyne interferometer system is cheap and simple to setting up, So we tried to measuring electron density by Laser heterodyne interferometer. To measuring electron density at atmospheric pressure, we need to obtain the phase shift signal. And we use a heterodyne interferometer. Our guiding laser is Helium-Neon laser which generated 632 nm laser. We set up to chopper which can make a laser signal like a pulse. Chopper can make a 4 kHz chopping. We used Needle jet as Ne plasma sources. Interference pattern is changed by refractive index of electron density. As this refractive index change, phase shift was occurred. Electron density is changed from Townsend discharge's electron bombardment, so we observed phenomena and calculated phase shift. Finally, we measured electron density by refractive index and electron density relationship. The calculated electron density value is approximately 1015~1016 cm-3. And we studied electron density value with voltage.

• 한국대기환경학회지
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• 제23권6호
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• pp.727-733
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• 2007

In this study, a newly developed biotrickling system, combined with a non-thermal plasma reactor, was investigated to effectively treat gaseous contaminants such as VOCs (Volatile Organic Compounds). Three kinds of non-thermal plasmas (NTPs) such as a rod type dielectric barrier discharge (DBD) plasma, a packed bead type DBD plasma and a gliding arc (GA) plasma, were tested and compared in terms of power consumption. The rod type DBD plasma was selected as one for integration with biotrickling system due to its relatively high VOC removal efficiency, low power consumption and low pressure drop. Toluene and xylene as representatives of VOCs were used as test gases. The experiment results showed that the efficiency of biotrickling system was especially very low at the high gas concentration and high flow rate and the removal efficiencies of VOCs were considerably enhanced in the biotrickling system, when the DBD plasma was worked in front of that even at the high gas concentration and high flow rate.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.20-20
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• 2011

It has been known that, under certain conditions, application of low-temperature atmospheric-pressure plasmas can enhance proliferation of cells. In this study, conditions for optimal cell proliferation were examined for various cells relevant for orthopaedic applications. Plasmas used in our experiments were generated by dielectric barrier discharge (DBD) with a helium flow (of approximately 3 litter/min) into ambient air at atmospheric pressure by a 10 kV~20 kHz power supply. Such plasmas were directly applied to a medium, in which cells of interest were cultured. The cells examined in this study were human synoviocytes, rat mesenchymal stem cells derived from bone marrow or adipose tissue, a mouse osteoblastic cell line (MC3T3-E1), a mouse embryonic mesenchymal cell line (C3H-10T1/2), human osteosarcoma cells (HOS), a mouse myoblast cell line (C2C12), and rat Schwann cells. Since cell proliferation can be enhanced even if the cells are not directly exposed to plasmas but cultured in a medium that is pre-treated by plasma application, it is surmised that long-life free radicals generated in the medium by plasma application stimulate cell proliferation if their densities are appropriate. The level of free radical generation in the medium was examined by dROMs tests and correlation between cell proliferation and oxidative stress was observed. Other applications of plasma medicine in orthopaedics, such as plasma modification of artificial bones and wound healing effects by direct plasma application for mouse models, will be also discussed. The work has been done in collaboration with Prof. H. Yoshikawa and his group members at the School of Medicine, Osaka University.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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• pp.337-337
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• 2011

Application of plasma technology on microbial sterilization has been frequently studied. In spite of accumulating number of studies, many have been focused on bacteria. Reports on eukaryotic yeasts and filamentous fungi are limited. In addition, mechanism of plasma effect still needs to be clarified. In this study, we analyzed the effect of non-thermal atmospheric pressure plasma on the budding yeast, Saccharomyces cerevisiae using DBD-type device. When yeast cells were exposed to plasma (at 2 mm distance) and then cultured on YPD-agar plate, number of cells survived (shown as colony) were reduced proportionally to exposure time. More than 50% reduction in number of colonies were observed after twice exposure of 5min. each. Colonies much smaller than those of control (no plasma exposure) were appeared after twice exposure of 5 min. each. It seems that small colonies are resulted from delayed cell growth due to the damage caused by plasma treatment. Microscopic analysis demonstrates that yeast cells treated with plasma for 5 min. twice have more rough and shrinked shape compared to oval shape with smooth surface of control.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 춘계학술대회 논문집 센서 박막재료
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• pp.32-34
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• 2001

we have quantitatively investigated the possibility of feeding oxygen radical in air environment. The oxygen radical generation from the plasma was verified and its efficiency was found to be dependent on the cathode material by the analysis with optical emission spectroscopy as well as by the quartz crystal micro-balance method.

• 한국전기전자재료학회논문지
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• 제33권5호
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• pp.344-349
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• 2020

Modern thin film deposition processes require high deposition rates, low costs, and high-quality films. Atmospheric pressure plasma-enhanced chemical vapor deposition (AP-PECVD) meets these requirements. AP-PECVD causes little damage on thin film deposition surfaces compared to conventional PECVD. Moreover, a higher deposition rate is expected due to the surface heating effect of atomic hydrogens in AP-PECVD. In this study, polycrystalline silicon thin film was deposited at a low temperature of 100℃ and then AP-PECVD experiments were performed with various plasma powers and hydrogen gas flow rates. A deposition rate of 15.2 nm/s was obtained at the VHF power of 400 W. In addition, a metal foam showerhead was employed for uniform gas supply, which provided a significant improvement in the thickness uniformity.

• 한국대기환경학회지
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• 제22권1호
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• pp.43-51
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• 2006

Nonthermal plasma-driven catalysis (PDC) was investigated for the decomposition of benzene and toluene as model compounds of volatile organic compounds (VOCs) at atmospheric pressure and low temperature. Two types of catalysts Ag/$TiO_{2}$ and Pt/$\gamma-Al_{2}O_{3}$ were tested in this study. The amount of catalysts packed in the PDC reactor did not influence on the decomposition efficiency of benzene. The type of catalysts also had no influence on the decomposition efficiency of toluene and carbon balance. The Ag/$TiO_{2}$ catalyst showed constant $CO_{2}$ selectivity of about $73\%$ regardless of the specific input energy. However, the selectivity of $CO_{2}$ was greatly enhanced with the Pt/$\gamma-Al_{2}O_{3}$ catalysts, and reached $97\%$ at 205 J/L. Two test runs with 20 fold difference in the gas flow clearly indicated that lab-scale data can be successfully applied for the scaling-up of PDC system.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.530-531
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• 2013

3 MeV protonirradiated SrTiO3 (STO) single crystal exhibits a blue and green mixed luminescence. However, the same proton irradiated STO deposited with very thin Pt layer does not show any luminescence. This Pt layer involved in preventing the damage caused by arcingthat comes from tens of kV surface voltage build-up due to secondary electron induced charge up at the surface of insulator during ion beam irradiation. It implies that luminescence of ion irradiated STO originated from the modified STO surface layer caused by arcing rather than direct ion beam irradiation effect. Atmospheric pressure plasma, a simple and cost-effective method, treated STO also exhibits the same kind of blue and green mixed luminescence as the ion beam treated STO, because this plasma also creates a surface damage layer by arcing.