A numerical study on the optimum operation condition for axial oxygen concentration in 8 inch silicon growth by cusp MCZ (8인치 실리콘성장을 위한 커스프 MCZ계에서 축방향 산소분포에 대한 연구)
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- Journal of the Korean Crystal Growth and Crystal Technology
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- v.7 no.3
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- pp.406-417
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- 1997