• Proceedings of the IEEK Conference
• /
• 2000.06b
• /
• pp.290-293
• /
• 2000

Low frequency(<100Hz) weak magnetic field(<20gauss) is applied axially to an inductively coupled oxygen plasma(ICP), and its plasma characteristics are monitored by OES(Optical Emission Spectroscopy) and Langmuir probe. It is found that periodic magnetic field enhances ashing rate by 25％ and improves its uniformity upto 4.5％ over 8" wafer. From electron energy distribution function, both low and high energy electrons are identified and relative abundancy is found to be controlled by the applied frequency. Moreover, it is observed that ionization and dissociation species are varied with applied frequency. We insert an aluminium baffle in the chamber to get better uniformity and less plasma damage.

• Journal of Radiation Protection and Research
• /
• v.40 no.2
• /
• pp.101-109
• /
• 2015

Alpha spectrometry is typically used for the assessment of uranium particle concentrations and its accuracy can be directly related to the accuracy in which the radiochemical pre-treatment is conducted. Ashing and alkali fusion methods are typically used but the ashing method requires longer analysis time and the alkali fusion method is extremely costly. Therefore, a new pre-treatment method using ultrasonic cleaning was developed and its experimental result was compared against the two conventional methods in terms of pre-treatment time, convenience, cost, and recovery rate of a target material. The results that were obtained by the conventional methods(ashing and alkali fusion) and the new method were compared. Consequently, even though the shorter pre-treatment time was required, the new technique showed almost same recovery rate comparing with two conventional methods. The new method was also featured by its relatively lower cost and a simpler process than two conventional methods.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2013.02a
• /
• pp.493-493
• /
• 2013

에싱(Ashing)공정을 위한 원격 유도 결합 플라즈마(remote ICP)에서 플라즈마 균일도를 향상하는 연구를 진행하였다. 본 연구에서는 고균일도 플라즈마 발생을 위해 단면적이 다른 2개의 반응 용기를 각각 상부와 하부에 설치하여 각각의 반응 용기 외곽에 방전 코일이 위치하도록 구성하였다. 0.7~1 Torr 공정 압력 범위의 질소와 산소 혼합 기체에서 2,500 W 전력을 인가하였고, 임피던스 정합회로로부터 각각 병렬로 연결된 방전 코일에 전력이 분배되어 인가된다. 에싱 공정을 위한 플라즈마 균일도를 분석하기 위해 Wafer의 위치에서 부유 탐침법을 적용하여 중심부에서 외곽부로 지름축 위치를 변화시키며 플라즈마 밀도와 전자온도를 측정하고, 공정 조건에 따른 에싱율(Asing Rate)을 측정하였다. 동일한공정 조건에서 하나의 방전 코일을 이용한 경우의 플라즈마 균일도 대비 이중 코일 구조를 이용한 경우 플라즈마 균일도가 크게 향상됨을 보였다. 이는 상부의 유도코일이 wafer 위치에서 주로 지름방향 중심부의 플라즈마 밀도에 기여하고, 하부의 유도코일은 주로 외곽의 플라즈마 밀도에 기여해서 나타나는 현상이다. 공정용 장비에서 플라즈마 균일도의 개선으로 공정 수율을 증가 시키는 효과를 기대할 수 있다.

• Journal of Korean Society of Occupational and Environmental Hygiene
• /
• v.26 no.1
• /
• pp.48-57
• /
• 2016

Objectives: This study was conducted to evaluate the accuracy and precision of airborne metal analysis using polyvinyl chloride(PVC) membrane filter by pretreatment methods. Methods: A total of 75 spiked PVC samples for Cr, Fe and Mn ranged from 6 ug/sample to 40 ug/sample were used to evaluate recovery rates for three pretreatment methods: acid extraction, hot plate ashing and microwave digestion. For Mn, an additional 75 spiked mixed cellulose ester(MCE) membrane filters were analysed to compare the recovery rates of PVC samples. All samples were analysed with an inductively coupled plasma optical emission spectrometer(ICP-OES) and manganese samples were additionally analyzed by atomic absorption spectrometer(AAS). Results: The overall mean recovery rates of PVC samples for Cr, Fe and Mn were 90% or higher regardless of pretreatment methods, but there were statistically significant differences in recovery rates for Cr(p<0.05) and Mn(p<0.01) samples by pretreatment methods. The biases and the coefficient variations of PVC samples for three metals pretreated with three kinds of pretreatment methods ranged from 1.7% to 4.7% and from 1.6% to 6.5%, respectively. The manganese PVC samples pretreated by microwave digestion and analyzed with ICP-OES had the lowest bias at 1.9% and also showed lower bias than the bias for MCE samples, 2.7%. Conclusions: In order to accurately analyze the metals sampled with PVC membrane filters, microwave digestion and ICP-OES can be recommended.

• Journal of Korean Society on Water Environment
• /
• v.37 no.5
• /
• pp.363-368
• /
• 2021

On the assessment results of the non-point source pollutant removability of bio-block using waste sewage sludge, at the reactor's initial operation stage, the removal efficiency of COD was slightly unstable. However, after the reactor was stabilized, the COD removal efficiency was higher in the reactor filled with bio-blocks compared to the reactor filled with broken stones. In terms of nitrogen and phosphorus, their removal efficiency was unstable at the initial stage of the reactor operation. This phenomenon was investigated through the bio-block elution experiments. Results indicated that nitrogen and phosphorus were eluted from the bio-blocks affecting their removal at the initial operation. Furthermore, based on elution tests conducted after the dry ashing of the waste sewage sludge, part of the nitrogen and phosphorus was eluted similar to the bio-block elution test results, although considerable amounts of nitrogen and phosphorus were reduced compared to the sludge cake. Prior to the use of the waste sewage sludge bio-blocks as a filter medium to remove non-point source pollutants, a stabilization period of 10 days was required. After the stabilization process, results showed similar characteristics as general aggregates. Moreover, to use the bio-block as a filter medium for the non-point pollutant removal, the filling ratio of 75% was the most suitable as it resulted in the highest nitrogen removal efficiency after the stabilization. The results of this study suggested that waste sewage sludge can be suitably recycled as a mixed raw material for the bio-blocks, with satisfactory application as a filter medium in artificial wetlands, stormwater runoff problems, stream water pollutants to eliminate non-point source pollutants.

• Journal of the Mineralogical Society of Korea
• /
• v.24 no.2
• /
• pp.119-131
• /
• 2011

The asbestos contents in some representative building materials were analyzed using JIS (Japanese Industrial Standard) X-ray diffraction (XRD) method. The changes in mineral composition during analysis process and problems in JIS method were also examined. XRD analysis of some representative domestic building materials used for roof, wall, ceiling, and floor indicates that slate have the highest asbestos content having 6.87~6.93% of chrysotile. Other building materials analyzed in this study also have 1.35~3.98% of chrysotile contents. The XRD analysis results of asbestos contents in some domestic building materials are presented in this study. This method is very effective for the asbestos content evaluation of building materials according to newly modified asbestos content regulation (Law of Industrial Safety and Health, 2007-26) that limits asbestos content less than 0.1% by Ministry of Employment and Labor. Small amount of tremolite as well as chrysotile were also observed in some samples. With consideration of crystal shape, contents and geological occurrence, it is considered that tremolite is an associated mineral of chrysotile and is not intentionally added. Complemental analyses with optical microscope and SEM/EDS are also necessary because XRD method cannot distinguish asbestiform from non-asbestiform. The XRD method applied in this study is very effective in the asbestos content analysis of building materials, specially building materials showing high asbestos concentration in residues due to the high loss rate with ashing and acid dissolution procedure.