• Journal of Korean Society for Atmospheric Environment
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• v.26 no.6
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• pp.683-689
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• 2010

Reforming of methane with carbon dioxide has been carried out using a bipolar pulse driven elongated arc reactor operating at atmospheric pressure and non-equilibrium regime. This plasma reactor is driven by two kinds of power supply, characterized by different voltage-current characteristics under the same operating power and frequency. Varying the $CO_2/CH_4$ ratio and the discharge power, the conversion rate, yield, and reforming efficiency for the two power supplies are investigated in conjunction with the static and dynamic behaviors of voltage and current. It is found that not only the values of voltage and current but also their shapes give an influence on the reforming performances. Finally, a better electrical operation regime for the efficient plasma reforming is proposed based on the relationship between the voltage-current characteristics and the reforming performance.

• 한국전산유체공학회:학술대회논문집
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• 2005.10a
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• pp.311-317
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• 2005

It has been the most progressive interruption technique to use the ablation gas from the surface of PTFE nozzle driven by arc plasma during switching process in $SF_6$ gas circuit breakers. This advanced interruption technique can reduce the required mechanical energy to compress and blow the gas for extinguishing the arc plasma between the electrodes due to using the ablation effect instead. In order to consider the phenomena during calculation of switching process, it is required to confirm the principles of ablation from PTFE nozzle as well as of arc plasma during switching process. In this study, we have calculated the switching process considered the ablation of PTFE nozzle driven by arc plasma using multidisciplinary simulation technique and compared the results with the data without the ablation effect. More $50\%$ difference of pressure rise inside expansion chamber has been found from the results and it should be indispensable for this type of computational work to consider and include the ablation effect of PTFE nozzle. Further study on turbulence and radiation will be followed.

• Journal of Korean Vacuum Science & Technology
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• v.6 no.2
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• pp.55-57
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• 2002

Metal-vapor-vacuum-arc ion source is an ideal source for both high current metal ion implanter and high current plasma thin-film deposition systems. It uses the direct evaporation of metal from surface of cathode by vacuum arc to produce a very high flux of ion plasmas. The MEVVA ion source, the high-current metal-ion implanter and high-current magnetic-field-filtered plasma thin-film deposition systems developed in Beijing Normal University are introduced in this paper.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.96-97
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• 2012

In nitride and oxide film deposition, sputtered metals react with nitrogen or oxygen gas in a vacuum chamber to form metal nitride or oxide films on a substrate. The physical properties of sputtered films (metals, oxides, and nitrides) are strongly influenced by magnetron plasma density during the deposition process. Typical target power densities on the magnetron during the deposition process are ~ (5-30) W/cm2, which gives a relatively low plasma density. The main challenge in reactive sputtering is the ability to generate a stable, arc free discharge at high plasma densities. Arcs occur due to formation of an insulating layer on the target surface caused by the re-deposition effect. One current method of generating an arc free discharge is to use the commercially available Pinnacle Plus+ Pulsed DC plasma generator manufactured by Advanced Energy Inc. This plasma generator uses a positive voltage pulse between negative pulses to attract electrons and discharge the target surface, thus preventing arc formation. However, this method can only generate low density plasma and therefore cannot allow full control of film properties. Also, after long runs ~ (1-3) hours, depends on duty cycle the stability of the reactive process is reduced due to increased probability of arc formation. Between 1995 and 1999, a new way of magnetron sputtering called HIPIMS (highly ionized pulse impulse magnetron sputtering) was developed. The main idea of this approach is to apply short ${\sim}(50-100){\mu}s$ high power pulses with a target power densities during the pulse between ~ (1-3) kW/cm2. These high power pulses generate high-density magnetron plasma that can significantly improve and control film properties. From the beginning, HIPIMS method has been applied to reactive sputtering processes for deposition of conductive and nonconductive films. However, commercially available HIPIMS plasma generators have not been able to create a stable, arc-free discharge in most reactive magnetron sputtering processes. HIPIMS plasma generators have been successfully used in reactive sputtering of nitrides for hard coating applications and for Al2O3 films. But until now there has been no HIPIMS data presented on reactive sputtering in cluster tools for semiconductors and MEMs applications. In this presentation, a new method of generating an arc free discharge for reactive HIPIMS using the new Cyprium plasma generator from Zpulser LLC will be introduced. Data (or evidence) will be presented showing that arc formation in reactive HIPIMS can be controlled without applying a positive voltage pulse between high power pulses. Arc-free reactive HIPIMS processes for sputtering AlN, TiO2, TiN and Si3N4 on the Applied Materials ENDURA 200 mm cluster tool will be presented. A direct comparison of the properties of films sputtered with the Advanced Energy Pinnacle Plus + plasma generator and the Zpulser Cyprium plasma generator will be presented.

• Proceedings of the KIEE Conference
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• 1995.07c
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• pp.1404-1406
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• 1995

In this paper, argon gas was used for numerical analysis of an arc in a cutting plasma torch driven by constant current. We established nozzle-constricting type torch domain and calculated steady state characteristics of argon arc plasma using the control volume method(CVM). For simplicity, we assumed that the flow field is laminar and the local thermodynamic equilibrium(LTE) prevails in all domain regions. We also neglected cathode-fall and anode-fall effects. Considering magnetic pinch effect and viscosity effect, we solved the momentum equation. Voltage drop in the arc column due to input current was calculated from the temperature field obtained by the energy balance equation.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.12
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• pp.44-51
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• 2004

In a micro-EDM, it is well known that an RC circuit is suitable as a discharge circuit because of its low pulse width and relatively high peak current. To increase machining speed without changing unit discharge energy, charge resistance should be decreased. But, when the resistance is very low, continuous (or normal) arc discharge occurs, electrode wear increases and machining speed is reduced remarkably. In this paper, an RC circuit with transistors is used in a micro-EDM. Experimental results show that the RC circuit with transistors can cut off a continuous (o. normal) arc discharge effectively if the duty factor and switching period of the transistor are set up optimally. Through experiments with varying charge resistances, it is shown that the RC circuit with transistors has about two times faster machining speed than that of an RC circuit.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.54 no.2
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• pp.76-82
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• 2005

In this paper, a method for analyzing the thermal recovery characteristics of the nozzle of gas circuit breaker was described. In order to obtain thermal recovery characteristics, the transient simulation of SF6 arc plasma within the nozzle was carried out. In particular, the nozzle ablation was taken into account by simultaneously solving the PTFE concentration equation with the governing equations such as continuity, momentum and energy equation. After that, post arc current calculation was performed with the rate of rise of recovery voltage changed. From the calculated post arc current, it was possible to suggest the thermal recovery characteristics of the nozzle of gas circuit breaker.

• 한국전산유체공학회:학술대회논문집
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• 2010.05a
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• pp.201-207
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• 2010

In this study, we calculated arc discharges happened in high-voltage circuit breakers for understanding the complex physics and the probability of thermal breakdown. The four main parts of arc model for this virtual-reality are radiation, PTFE abaltion, Cu evaporation and turbulence. Among these important parts the turbulence model can be critical to the reliability of computation results during high-current period because the plasma flow is affected by high eat energy and mass momentum. Two kinds of turbulence model, zero-equation model and two-equation model, are applied for these calculations and are compared with the measured pressure data inside a chamber.

• Proceedings of the Korean Society of Marine Engineers Conference
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• 2006.06a
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• pp.71-72
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• 2006

This paper introduces the results of the development of a new mobile Digital DC-arc Welding Machine (DDWM). A simple PI controller is applied to the DDWM to control the output welding current tracking the constant setting current. Furthermore, a hot-start function, an anti-stuck function, a standby mode and an intelligential circuit breaker (ICB) are included in the DDWM. The DDWM increases welding quality and saves more power energy than a conventional welding machine. Because the DDWM is changed from ready mode into the standby mode automatically after 2 minutes interval from this unload start. Then the DDWM is changed into ready mode automatically since it is reused to weld. Mover, the DDWM increases welding qualify, productivity and reduces costs of welding. So, the DDWM can have a great of contribution to the mobile welding industries. The effectiveness of the DDWM was proven by the experimental results and durable test.

• The Transactions of the Korean Institute of Electrical Engineers B
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• v.54 no.11
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• pp.527-532
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• 2005

During the last ten years the new interruption techniques, which use the arc energy itself to increase the pressure inside a chamber by the PTFE nozzle ablation, have displaced the puffer circuit breakers due to reduced driving forces and better maintainability. In this paper, we have investigated the thermal flow characteristics inside a thermal puffer type gas circuit breaker by solving the Wavier-Stokes equations coupled with Maxwell's equations for considering all instabilities effects such as turbulence and Lorentz forces by transient arc plasmas. These relative inexpensive computer simulations might help the engineer research and design the new interrupter in order to downscale and uprating the GIS integral.