Etching characteristics of gold thin films using inductively coupled $Cl_2/Ar$ plasma
($Cl_2/Ar$ 유도 결합 플라즈마에 의한 gold 박막의 식각특성)
-
- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
- /
- 2002.05b
- /
- pp.7-11
- /
- 2002