• 제목/요약/키워드: Ar milling

검색결과 70건 처리시간 0.031초

$Ca^{++}$를 implant한 단결정 $Al_2O_3$에서 열처리에 의한 형태학적 변화 (Heat treatment induced morphological changes of $Ca^{++}$ implanted single crystal $Al_2O_3$)

  • 김배연
    • 한국결정성장학회지
    • /
    • 제9권3호
    • /
    • pp.327-333
    • /
    • 1999
  • Ion implantation, photo-lithography, Ar ion milling, hot press를 이용한 micro-fabrication 방법으로 고순도 단결정 알루미나 표면에 Ca를 제한된 양으로 첨가하고, 내부에 여러 가지 형태의 기공을 갖는 bi-crystal을 만들었다. 이 bi-crystal 고순도 알루미나에 미치는 Ca의 영향을 평가하기 위하여 내부 기공의 형태 변화와 결정의 성장을 열처리에 따라 광학현미경으로 관찰하였다. 열처리에 따라 inner crack-like pore의 내부표면에 dot와 육각형의 형태를 갖는 결정 입자가 생성되는 것을 관찰할 수 있었다. $1,500^{\circ}C$로 열처리한 경우에 CaO . $6Al_2O_3$로 생각되는 bar 형태의 결정이 표면에 석출되는 것이 관찰되었으며, 이 결정이 $1,600^{\circ}C$에서 열처리하면 사라지는 것으로 보아 이 온도 부근에서 알루미나에 대한 Ca의 solubility limit 또는 diffusion rate가 변화하는 것으로 생각된다.

  • PDF

Ion Implantation으로 Ca를 첨가한 단결정 $Al_2$O$_3$의 Crck-Like Pore의 Healing 거동-H. Hexagonal Ligaments and Type of Healing (Effect of Ca Implantation on the Sintering and Crack Healing Behavior of High Purity $Al_2$O$_3$ Using Micro-Lithographic Technique -II. Hexagonal Ligaments and Type of Healing)

  • 김배연
    • 한국세라믹학회지
    • /
    • 제36권8호
    • /
    • pp.813-819
    • /
    • 1999
  • Ion implantation, photo-lithography, Ar ion milling과 hot press 법을 이용한 micro-fabrication techrique을 사용하여 고순도 알루미나 단결정인 사파이어의 내부에, 조절된 Ca의 첨가량을 갖고 있는, crack과 비슷한 형태의 기공들을 형성시켰다. 이 bi-cryslal을 각각의 온도에서 열처리하여 Ca 이온이 고온에서 알루미나의 morphology와 hcaling에 미치는 영향을 관찰하였다. 열처리 온도가 올라감에 따라서 crack-like pore의 내부에 hcxagonal bridging ligaments가 생성되었는데, 열처리 온도와 Ca의 첨가량이 증가할수록 크기가 커지는 것을 관찰할 수 있었고, 생성된 hexagonal bndgmg ligaments는 열처리가 진행됨에 따라 서서히 커지면서 모서리가 둥글어지는 현상을 관찰할 수 있었다. Bicrystal 내부에 형성된 crack-like pore는 열처리가 진행되면서 edge regression. ligamcnt growth 및 flow의 3가지의 특징적인 형태로 진행되었다. 이때 edge regression은 상대적으로 저온에서부터 전체 crack-like pore에서 서서히 일어나기 시작하였으며, ligament growth는 일부 crack-like pore에서 진행되있으며, 대단히 빠른 속도로 crack healing이 진행됨을 추정할 수 있었다. Flow는 $1800^{\circ}C$ 이상의 고온에서 모든 crack-like pore에 걸쳐서 느리게 일어남을 알 수 있었다.

  • PDF

Tripod polishing을 이용한 IBAD/RABiTS 기판의 TEM 분석 (TEM analysis of IBAD/RABiTS substrates prepared by Tripod polishing)

  • 최순미;정준기;유상임;박찬;오상수;김철진
    • 한국초전도ㆍ저온공학회논문지
    • /
    • 제8권1호
    • /
    • pp.9-14
    • /
    • 2006
  • Sample preparation plays a critical role in microstructure analysis using TEM. Although TEM specimen has been usually prepared by jet-polishing or Ar-ion beam milling technique. these methods could not be applied to YBCO CC which is composed of IBAD or RABiTS substrates, several buffet layers, and YBCO superconducting layer because of big difference in mechanical strengths between the metallic phase and oxide phases. To obtain useful cross-sectional information such as interface between the phases or second phases in YBCO CC, it is prerequisite to secure the large area of thin section in the cross-sectional direction. The superconducting layer or the buffer layers are relatively weak and fragile compared to the metallic substrate such as Ni-5wt%W RABiTS of Hastelloy-based IBAD, and preferential removal of weak ceramic phases during polishing steps makes specimen preparation almost impossible. Tripod polisher and small jig were home-made and employed to sample preparation. The polishing angle was maintained <$1^{\circ}$ throughout the polishing steps using 2 micrometers attached to the tripod plate. TEM specimens with large and thin area could be secured and used for RABiTS/IBAD substrate analyses. In some cases, additional Ar-beam ion milling with low beam current and impinging angle was used for less than 30 sec. to remove debris or polishing media attacked to the specimens.

미세 볼엔드밀가공시 절삭력과 음향방출신호에 의한 공구 파손 검출 및 메커니즘 (The Mechanism and Detection of Tool Fracture using Sensor Fusion in Cutting Force and AE Signals for Small Diameter Ball-end Milling)

  • 왕덕현;김원일;임정숙
    • 한국기계가공학회지
    • /
    • 제3권3호
    • /
    • pp.24-31
    • /
    • 2004
  • A successful on-line monitoring system for conventional machining operations has the potential to reduce cost, guarantee consistency of product quality, improve productivity and provide a safer environment for the operator. In fine-shape machining, typical signs of tool problems such as vibration, noise, chip flow characteristics and visual signs are almost unnoticeable without the use of special equipment. These characteristics increase the importance of automatic monitoring in fine-shape machining, however, sensing and interpretation of signals ar more complex. In addition, the shafts of the mini-tools break before the typical extensive cutting edge of the tool gets damaged. In this study, the existence of a relationship between the characteristics of the cutting force and tool usage was investigated, and tool breakage detection algorithm by LabVIEW was developed and the following results are obtained. It was possible to use a relative error compare which mainly used in established experiment and investigated tool breakage detection algorithm in time domain which can detect AE and cutting force signals more effective and accurate.

  • PDF

카본블랙이 도핑 된 $MgB_2$ 초전도체의 Ag 첨가의 영향 (Influence of Ag Addition on Superconducting Property of Carbon-black Doped $MgB_2$ Superconductor)

  • 김효진;김현지;김찬중;박해웅
    • Progress in Superconductivity
    • /
    • 제12권1호
    • /
    • pp.1-5
    • /
    • 2010
  • In this work we synthesized both MgB2 and Carbon doped MgB2 superconductor with Ag addition via high energy milling and substituent heat treatment. Heat treatments were performed at $900\;^{\circ}C$ for 30 min in flowing Ar gas. We varied amount of Ag powder. In a range of Ag powder was 0~5wt%. The effect of Ag was correlated with superconducting properties. The results show a slight decrease in critical temperature ($T_c$) and a reduction of critical current density ($J_c$) at high fields for the Ag-doped samples as compared to the un-doped samples. Reduction of $J_c$ may be due to the formation of MgAg compound.

The synthesis and properties of point defect structure of Cu2-XZnSnS4 (x=0.1, 0.2, and 0.3)

  • Bui D. Long;Le T. Bang
    • Advances in materials Research
    • /
    • 제13권1호
    • /
    • pp.55-62
    • /
    • 2024
  • Cu-based sulfides have recently emerged as promising thermoelectric (TE) materials due to their low cost, non-toxicity, and abundance. In this research, point defect structure of Cu2-xZnSnS4 (x=0.1, 0.2, 0.3) samples were synthesized by the mechanical alloying method. Mixed powders of Cu, Zn, Sn and S were milled using high energy ball milling at a rotation speed of 300 rpm in Ar atmosphere. The milled Cu2-xZnSnS4 powders were heat-treated at 723 K for 24 h, and subsequently consolidated using spark plasma sintering (SPS) under an applied pressure of 60 MPa for 15 min. The thermal conductivity of the sintered Cu2-xZnSnS4 samples was evaluated. A well-defined Cu2-xZnSnS4 powders were successfully formed after milling for 16 h, with the particle sizes mostly distributed in the range of 60-100 nm. The lattice constants of aand cdecreased with increasing composition value x. The thermal conductivity of sintered x=0.1 sample exhibited the lowest value and attained 0.93 W/m K at 673 K.

Thermal Stability and Properties of Cu-$TiB_2$ Nanocomposites Prepared by Combustion Synthesis and Spark-plasma Sintering

  • Kwon, Dae-Hwan;Nguyen, Thuy Dang;Dudina, Dina;Kum, Jong-Won;Choi, Pyuck-Pa;Kim, Ji-Soon;Kwon, Young-Soon
    • 한국분말야금학회:학술대회논문집
    • /
    • 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part2
    • /
    • pp.1203-1204
    • /
    • 2006
  • Cu-$TiB_2$ nanocomposite powders were synthesized by combining high-energy ball-milling of Cu-Ti-B mixtures and subsequent self-propagating high temperature synthesis (SHS). Cu-40wt.%$TiB_2$ powders were produced by SHS reaction and ball-milled. The milled SHS powder was mixed with Cu powders by ball milling to produce Cu-2.5wt.%$TiB_2$ composites. $TiB_2$ particles less than 250nm were formed in the copper matrix after SHS-reaction. The releative density, electrical conductivity and hardness of specimens sintered at $650-750^{\circ}C$ were nearly 98%, 83%IACS and 71HRB, respectively. After heat treatment at 850 to $950^{\circ}C$ for 2 hours under Ar atmosphere, hardness was descedned by 15%. Our Cu-$TiB_2$ composite showed good thermal stability at eleveated temperature.

  • PDF

Gas Absorption and Release Properties of Zn(BH4)2 and MgH2-Zn(BH4)2-Ni-Ti-Fe Alloy

  • Kwak, Young Jun;Kwon, Sung Nam;Song, Myoung Youp
    • 한국재료학회지
    • /
    • 제25권1호
    • /
    • pp.43-47
    • /
    • 2015
  • $Zn(BH_4)_2$ was prepared by milling $ZnCl_2$ and $NaBH_4$ in a planetary ball mill in an Ar atmosphere, and XRD analysis, SEM observation, FT-IR analysis, DTA, and TGA were performed for synthesized $Zn(BH_4)_2$ samples. 90 wt% $MgH_2$+1.67 wt% $Zn(BH_4)_2(+NaCl)$+5 wt% Ni+1.67 wt% Ti+1.67 wt% Fe (named $90MgH_2+1.67Zn(BH_4)_2(+NaCl)$+5Ni+1.67Ti+1.67Fe) samples were also prepared by milling in a planetary ball mill in an $H_2$ atmosphere. The gas absorption and release properties of the $Zn(BH_4)_2(+NaCl)$ and $90MgH_2+1.67Zn(BH_4)_2(+NaCl)_2(+NaCl)$+5Ni+1.67Ti+1.67Fe samples were investigated. An FT-IR analysis showed that $Zn(BH_4)_2$ formed in the $Zn(BH_4)_2(+NaCl)$ samples prepared by milling $ZnCl_2$ and $NaBH_4$. At the first cycle at $320^{\circ}C$, $90MgH_2+1.67Zn(BH_4)_2(+NaCl)$+5Ni+1.67Ti+1.67Fe absorbed 2.95 wt% H for 2.5 min and 4.93 wt% H for 60 min under 12 bar $H_2$, and released 1.46 wt% H for 10 min and 4.57 wt% H for 60 min under 1.0 bar $H_2$.

The Influence of $O_2$ Gas on the Etch Characteristics of FePt Thin Films in $CH_4/O_2/Ar$ gas

  • Lee, Il-Hoon;Lee, Tea-Young;Chung, Chee-Won
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
    • /
    • pp.408-408
    • /
    • 2012
  • It is well known that magnetic random access memory (MRAM) is nonvolatile memory devices using ferromagnetic materials. MRAM has the merits such as fast access time, unlimited read/write endurance and nonvolatility. Although DRAM has many advantages containing high storage density, fast access time and low power consumption, it becomes volatile when the power is turned off. Owing to the attractive advantages of MRAM, MRAM is being spotlighted as an alternative device in the future. MRAM consists of magnetic tunnel junction (MTJ) stack and complementary metal- oxide semiconductor (CMOS). MTJ stacks are composed of various magnetic materials. FePt thin films are used as a pinned layer of MTJ stack. Up to date, an inductively coupled plasma reactive ion etching (ICPRIE) method of MTJ stacks showed better results in terms of etch rate and etch profile than any other methods such as ion milling, chemical assisted ion etching (CAIE), reactive ion etching (RIE). In order to improve etch profiles without redepositon, a better etching process of MTJ stack needs to be developed by using different etch gases and etch parameters. In this research, influences of $O_2$ gas on the etching characteristics of FePt thin films were investigated. FePt thin films were etched using ICPRIE in $CH_4/O_2/Ar$ gas mix. The etch rate and the etch selectivity were investigated in various $O_2$ concentrations. The etch profiles were studied in varying etch parameters such as coil rf power, dc-bias voltage, and gas pressure. TiN was employed as a hard mask. For observation etch profiles, field emission scanning electron microscopy (FESEM) was used.

  • PDF

Enhanced Electron Emission from Carbon Nanotube Paste after Firing

  • Kang, Sung-Kee;Choi, Jong-Hyung;Han, Jae-Hee;Yoo, Ji-Beom;Park, Chong-Yun;Nam, Joong-Woo;Jung, J.E.;Kim, J.M.
    • 한국정보디스플레이학회:학술대회논문집
    • /
    • 한국정보디스플레이학회 2003년도 International Meeting on Information Display
    • /
    • pp.849-851
    • /
    • 2003
  • After multi-walled carbon nanotubes (MWNT) powder was crushed with ball milling process, it was mixed with organic vehicles. And then CNT paste was printed on ITO coated glass substrate. The field emission characteristics of CNT pastes fired in air atmosphere was better than that of CNT paste fired in Ar ambient due to less organic residues after firing.

  • PDF