• 제목/요약/키워드: Anti-Reflection(AR)

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레이저 다이오드 Mirror면의 Anti-Reflection 코팅 박막 제작 및 특성 분석 (The Manufacture and Properties Analysis of Anti-Reflection Coating Thin Film of Laser Diode Mirror)

  • 기현철;김선훈;김상택;김효진;김회종;홍경진;민용기;조재철;구할본
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 추계학술대회 논문집 광주전남지부
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    • pp.103-106
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    • 2006
  • Semiconductor laser diode has a reflective facet in a both-ends side fundamentally. Laser performance for improving, Anti-Reflection and High-reflection coating on the facet of semiconductor laser diode. To prevent internal feedback from both facets for realizing superluminescent diode and reducing the reflection-induced intensity noise of laser diode, it's key techniques are AR/HR coatings. In the study AR coating film were manufactured by Ion-Assisted Deposition(IAD) system. Then manufactured coating film measurement electrical properties(L-I-V, Se, Resistor) and Optical properties (wavelength FFP)

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반응성 스퍼터링으로 제작된 SixOy-SixNy 적층구조의 반사방지 코팅 응용 (Anti-Reflection Coating Application of SixOy-SixNy Stacked-Layer Fabricated by Reactive Sputtering)

  • 김창조;이붕주;신백균
    • 한국진공학회지
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    • 제19권5호
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    • pp.341-346
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    • 2010
  • 본 논문에서는 반응성 스퍼터링(Reactive Sputtering) 공정으로 $Si_xO_y$ 박막과 $Si_xN_y$ 박막을 4층 구조로 적층하고 400~700 [nm]의 가시광 영역에서 빛의 반사를 줄이기 위한 반사방지 코팅(Anti-Reflection Coating)으로의 응용 가능성을 조사하였다. 스퍼터링 타겟으로 6 [inch] 직경의 Si 단결정을 사용하였고, 반응성 스퍼터링 가스는 $Si_xO_y$ 박막 증착에서 Ar과 $O_2$를, $Si_xN_y$ 박막 증착에서는 Ar과 $N_2$를 사용하였으며, 스퍼터링 파워로는 DC pulse를 사용하였다. 1,900 [W] DC pulse power에서 Ar:$O_2$=70:13 [sccm]의 반응성 스퍼터링으로 2.3 [nm/sec]의 증착률과 1.50의 굴절률을 보이는 $Si_xO_y$ 박막을 제작하였고, Ar:$N_2$=70:15 [sccm]의 반응성 스퍼터링으로 1.8 [nm/sec]의 증착률과 1.94의 굴절률을 보이는 $Si_xN_y$ 박막을 제작하였다. 이 두 종류의 박막을 이용해서 시뮬레이션을 통해 4층 구조의 반사방지 코팅 구조를 설계한 후, 설계결과에 따라 각 박막의 두께를 순차적으로 변화시켜 증착하였다. 4층 구조 $Si_xO_y-Si_xN_y$의 반사도 측정 결과 550 [nm] 대역에서 1.7 [%]의 반사와 400 [nm]와 650 [nm] 영역에서 1 [%]의 반사를 보였으며, 가시광 영역에서 성공적인 "W" 형태의 반사방지 코팅 특성을 보였다.

광커넥터 Multi-Type을 위한 무반사 코팅 박막 설계 (Design of Anti-Reflection Coating thin film for Multi-Type Optical Connector)

  • 기현철;김회증;조재철;홍경진
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 춘계학술대회 논문집 센서 박막재료연구회 및 광주 전남지부
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    • pp.80-81
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    • 2008
  • In this paper, we have designed the Anti-Reflection (AR) coating for 850, 1310 nm(multi type) and 1310, 1550 nm(multi type) wavelength ranges on the ferrule facet of special optical connector. The reflectance of the AR coated ferrule facet is designed under 5% for 850, 1310 nm(multi type) and 1310, 1550 nm (multi type). The average return loss of the AR coated ferrule facet is 47.1 dB.

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Anti-Reflection Properties of In-Situ Doped Spin-On Film

  • U. Gangopadhyay;Kim, Kyung-Hae;Park, J.H.;S.K. Dhungel;D. Mangalaraj;J. Yi;H. Saha;Kim, D.W.
    • Transactions on Electrical and Electronic Materials
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    • 제4권6호
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    • pp.1-4
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    • 2003
  • Anti-reflection properties of post diffusion doped spin-on source (in-situ AR coating) have been investigated in some detail. A simple experiment for reflectivity study using oblique incidence of light and necessary modification of the theory of minimum reflectivity at oblique incidence has been established. The comparative study of the in-situ AR coating with available spin-on AR film on silicon Solar Cell Surface have been investigated.

중적외선 영역의 무반사 코팅된 ZnS 기판의 설계와 광학 특성 (Design and Analysis of Optical Properties of Anti-reflection Coated ZnS Substrates in the Mid-infrared Region)

  • 박범근;백종후
    • 센서학회지
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    • 제31권4호
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    • pp.255-259
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    • 2022
  • In this study, we fabricated ZnS substrates with excellent transmittance in the mid-infrared region (3-5 ㎛) using hot pressing instead of conventional chemical vapor deposition (CVD). Diamond-like carbon (DLC) was coated on either one or both sides of the ZnS substrates to improve their mechanical properties and transmittance efficiency. To reduce the reflectance and further improve transmittance in the mid-infrared region, anti-reflection (AR) coating was designed for DLC/ZnS /AR and AR/ ZnS /AR structures. The coating structure, microstructure, and optical properties of the AR-coated ZnS substrates were subsequently investigated by employing energy dispersive X-ray spectroscopy, scanning electron microscopy, and Fourier-transform infrared (FTIR) spectroscopy. The FTIR spectroscopy results demonstrated that, in the mid-infrared region, the average transmittance of the samples with AR coating on one and both sides increased by approximately 18% and 27%, respectively. Thus, AR coating improved the transmittance of the ZnS substrates.

써모크로믹 $\textrm{VO}_2$ 박막의 anti-reflection 코팅 (Anti-reflection coating for Thermochromic Thin Films)

  • 박준;박은석;이문희
    • 한국재료학회지
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    • 제7권1호
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    • pp.3-7
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    • 1997
  • VO$_{2}$ 써모크로믹 원도우의 가시광 투과율을 높히기 위하여 내마모성이 우수한 SiO$_{2}$박막을 이용하여 AR(anti-rdflection)코팅을 하였다. 두가지 중요한 공정변수인 기판온도와 증착속도가 AR효과에 미치는 영향을 조사하였다. 그리고 SiO$_{2}$박막의 AR효과는 낮은 기판온도와 높은 증착속도에서 더 우수한 것으로 나타났으며, 이는 SiO$_{2}$AR 박막의 굴절율과 상관관계가 있는 것으로 나타났다. VO$_{2}$ 써모크로믹 유리 위에 SiO$_{2}$AR-코팅을 했을 때 약 30% 정도의 가시광 투과율의 향상이 있었다. 그리고 AR-코팅을 하지 않은 경우보다 더 뚜렷한 써모크로미즘을 나타냈다. 또한 천이온도는 7$0^{\circ}C$정도로 AR-코팅을 하지 않은 VO$_{2}$써모크로믹 유리의 경우와 같게 나타났다.

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선박통신용 다파장 광커텍터 패럴의 저반사화를 위한 설계 (Design For Low Reflection of multi-Wavelength Optical Ferryle Used In Vessel Communication)

  • 기현철;김상택;양명학;홍경진;김회종
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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    • pp.450-451
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    • 2008
  • In this paper, we have designed the Anti-Reflection (AR) coating for 850, 1310 nm(multi type) and 1310, 1550 nm(multi type) wavelength ranges on the ferrule facet of special optical connector. The reflectance of the AR coated ferrule facet is designed under 5% for 850, 1310 nm(multi type) and 1310, 1550 nm (multi type). AR thin film was deposited by ion- assisted deposition in low temperature. The average return loss of the AR coated ferrule facet is 47.1 dB.

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Zinc nitrate 용액을 이용한 염료감응형 태양전지 반사 방지막에 관한 연구 (A Study on the ZnO Anti-reflection Layer of Dye Sensitized Solar Cell using Zinc Nitrate Solution)

  • 최진호;서현웅;손민규;김수경;김병만;김희제;프라바카르;김종락
    • 전기학회논문지
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    • 제61권5호
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    • pp.705-710
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    • 2012
  • An anti-reflection layer (AR) is used in the solar cell to improve the amount of the irradiated light, resulting in the improvement of the performance of the solar cell. In this study, the zinc oxide (ZnO) AR is applied to the dye-sensitized solar cell (DSC) by using zinc nitrate solution. The conditions such as solution concentration and sintering temperature for fabricating the ZnO AR are changed to optimize the performance of the AR. As a result, the best performance is shown when the zinc nitrate solution with 100mM concentration is used and the sintering temperature is $600^{\circ}C$. And then, the ZnO AR formed with these optimal conditions is applied to the DSC. Consequently, a DSC with a ZnO AR had an increased current density up to 13.86$mA/cm^2$ and an enhanced efficiency of 6.32%.

염료감응형 태양전지의 광전변환효율 향상을 위한 무반사 박막 (Anti-Reflection Thin Film For Photoelectric Conversion Efficiency Enhanced of Dye-Sensitized Solar Cells)

  • 정행윤;기현철;홍경진
    • 한국전기전자재료학회논문지
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    • 제29권12호
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    • pp.814-818
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    • 2016
  • DSSCs (dye-sensitized solar cells) based on $TiO_2/SiO_2$ multi layer AR (anti-reflection) coating on the outer glass FTO (fluorine-doped tin oxide) substrate are investigated. We have coated an AR layer on the surface of a DSSCs device by using an IAD (ion beam-assisted deposition) system and investigated the effects of the AR layer by measuring photovoltaic performance. Compared to the pure FTO substrate, the multi layer AR coating increased the total transmittance from 67.4 to 72.9% at 530 nm of wavelength. The main enhancement of solar conversion efficiency is attributed to the reduction of light reflection at the FTO substrate surface. This leads to the increase of Jsc and the efficiency improvement of DSSCs.

태양광 모듈의 반사방지 코팅 성능 평가 (Performance Evaluation of Anti-Reflection Coating on Photovoltaic Modules)

  • 강소연;김주희;김정식;오원욱;천성일
    • 한국태양에너지학회 논문집
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    • 제36권5호
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    • pp.1-8
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    • 2016
  • In this paper, we evaluated the effect of a silica-based Anti-Reflection(AR) coating for PV modules. The coating technique can be easily applied to large-scale PV modules at room temperature with improvements of the optical properties that is qualified by the optical transmission measurements on the coated cover glass of the modules. The power improvement of the large-scale PV modules shows the increasing about 2.4% at standard condition of the coating technique on average. To improve the AR coating effect of the PV modules, we have characterized the individual PV modules by the measurements of DC power output, modified performance ratio(PRm) and the regression. The results show that the significant improvements of the AR coating effect are 6.4%, 5.5% and 4.5% of increasing of the performances by using the measurements of DC power output, modified performance ratio(PRm) and the regression, respectively.