• 제어로봇시스템학회:학술대회논문집
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• 2002.10a
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• pp.46.5-46
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• 2002

As device dimension shrinks down to sub 100nm, it is increasingly important to monitor plasma states. Plasma etching is a key means to fine patterning of thin films. Many parameters are involved in etching and each parameter has different impact on process performances, including etch rate and profile. The uniformity of etch responses should be maintained high to improve device yield and throughput. The uniformity can be measured on any etch response. The most difficulty arises when attempting to characterize etched profile. Conventionally, the profile has been estimated by measuring the slope or angle of etched pattern. One critical drawback in this measurement is that this is unable to cap...

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.14 no.4
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• pp.146-150
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• 2015

Steel is produced through the steel-making process with a desired shape by a rolling press. Scrap is removed according to the sheet edge to improve the quality of the product. This machine is called a side trimmer. This study aimed to develop a side trimmer for automatically changing the width of the trimming knife without line stopping. This machine consists of a housing opening device and a turning device. The measuring technologies of sheet width, trimming knife rotation angle, and knife gap for increasing the control accuracy. This experiment was conducted to evaluate the performance of the developed technologies. It was reduced by 10% compared with the operation time of the conventional method.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.651-654
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• 2001

In the dismantling process of nuclear spent fuels, the spent fuel rod cutting process, followed immediately by the decladding process, performs the cutting the spent fuel rods to a proper length for fast decladding operation. In this paper, we analyzed the chemical compositions, mechanical properties, and physical characteristics for SUS and zircaloy tubes in order to identify the feasibility of cutter-blade type in cutting SUS and zircaloy tubes. It is considered that material, shape and angle, and heat treatment for fabricating the highly durable cutter blade and also it is investigated that the round-shape sustenance of cross-section, amount of debris production, and fire occurrence for measuring the cutting performance on SUS and zircaloy tubes, spent fuel rod cutting device is designed to be operated automatically through the remote control system for use in Hot Cell(radioactive) area and the electro-driven mechanical parts are modularized for easy maintenance. Results from various experiments confirm the efficiency of this device.

• Proceedings of the KIEE Conference
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• 2003.07b
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• pp.1006-1008
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• 2003

Position controls are very important in semiconductor manufacturing devices, machine tools precision measuring instruments, etc. to measure the distance of movement of moving objects in minute units and the accuracy of measurement for the moving distance in these devices affect the performance of the whole devices. Therefore, in those precision instruments, a sensing device that can measure the distance of movement with high-precision resolution is required. In this paper, a novel encoder of digital and analog hybrid type is proposed. It is shown that from this experiment a high-resolution angle measurement device can be designed by a low cost incremental encoder.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.19 no.6
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• pp.65-71
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• 2019

Conventional methods of measuring ground resistance and ground resistance field measurement are used to measure voltage drop according to the resistance value of the site by applying current by installing a constant interval of measurement electrode. If the stratified structure of the site site is unique, errors in boundary conditions will occur in the event of back acid and the analysis of the critical ground resistance in the ground design will show much difference from simulation. This study utilizes the Arduino module and smart ground measurement technology in the convergent information and communication environment to develop a reliable smart land resistance measuring device even if the top layer of land is unique, to analyze the land resistance and accumulate data to predict the change in the age of the land. Considering the topographical characteristics of the site, we propose a ground resistance measuring device and its method of measuring ground resistance so that the auxiliary electrode can be installed by correctly positioning the angle and distance in measuring ground resistance. Not only is ground resistance value obtained through electrodes installed to allow accurate ground resistance values to be selected, but it can also be used as a useful material for installing electrical facilities in similar areas. Moreover, by utilizing reliable data and analyzing the large sections of the site, a precise analysis of the site, which is important in ground design as well as construction cost, is expected to be used much in ground facility design such as potential rise.

• Journal of the Semiconductor & Display Technology
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• v.7 no.4
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• pp.1-5
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• 2008

There is a need to enlarge the mother glass substrate in OLED to raise its productivity and to realize OLED TV. On the other hand, some difficulties may arise regarding the deflection of a large glass substrate during its handling operation due to its thinness $(0.5\sim0.7t)$, which is not even enough to allow it to stand its own mass. This thesis proposes a conceptual plan for the application of the clamping- and bending-end conditions to the glass substrate handler. To verify proposed plan, the non-contact 3 dimensional measuring instrument is developed. The composition of the 3 dimensional measuring instrument measures shape of the product using X-Y stage robot and laser distance sensor. X-Y stage robot and laser distance sensor are controlled by LabVIEW language. To calibrate measuring instrument, the direction conversion of the Euler angle was used. In order to confirm deflection of the glass substrate, the experiment was carried out at the bending end boundary condition and the proposed effect was verified.

• The Journal of the Convergence on Culture Technology
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• v.5 no.3
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• pp.263-269
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• 2019

In this study, the characteristics and operation of a multi-purpose loader equipped with various sensors such as a sensor capable of measuring the boom length, an angle sensor capable of measuring the tilt of the left and right sides of the boom and the loader, and a load cell capable of measuring the weight during lifting We have implemented a system that displays related data values. The configuration of the system reads the values from the sensors, sends them to the vehicle controller, and transmits the calculated results of the overturn rate and other important information to the display device using the CANOpen protocol. Also, in the calculation of the overturn ratio, the structure of the multi-purpose loader is similar to that of the crane belonging to the heavy equipment, and the crane overturn rate calculation method is used. Through this study, we can observe the condition of the heavy equipment and recognize the emergency situations such as abalone through the display device.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07a
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• pp.280-283
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• 2004

This paper discribes the design concept, fabrication process and measuring result of 2.5kV Gate Commutated Thyristor devices. Integrated gate commutated thyristors(IGCTs) is the new power semiconductor device used for high power inverter, converter, static var compensator(SVC) etc. Most of the ordinary GTOs(gate turn-off thyristors) are designed as non-punch-through(NPT) concept; i.e. the electric field is reduced to zero within the N-base region. In this paper, we propose transparent anode structure for fast turn-off characteristics. And also, to reach high breakdown voltage, we used 2-stage bevel structure. Bevel angle is very important for high power devices, such as thyristor structure devices. For cathode topology, we designed 430 cathode fingers. Each finger has designed $200{\mu}m$ width and $2600{\mu}m$ length. The breakdown voltage between cathode and anode contact of this fabricated GCT device is 2,715V.

• Journal of the Society of Naval Architects of Korea
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• v.30 no.4
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• pp.8-16
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• 1993

Auto-Pilot System uses heading angle information via the position sensor and the rudder device to control the ship direction. Most of the control logics are composed of the state estimation and control algorithms assuming that the measurement device and the actuator have no fault except the measurement noise. But such asumptions could bring the danger in real situation. For example, if the heading angle measuring device is out of order the control action based on those false position information could bring serious safety problem. In this study, the control system including improved method for processing the position information is applied to the Auto-Pilot System. To show the difference between general state estimator and F.D.F., BJDFs for the sensor and the actuator failure detection are designed and the performance are tested. And it is shown that bias error in sensor could be detected by state-augmented estimator. So the residual confined in the 2-dim in the presence of the sensor failure could be unidirectional in output space and bias sensor error is much easier to be detected.

• Journal of the Korean Society of Marine Environment & Safety
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• v.26 no.4
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• pp.429-435
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• 2020

Different methods are used for determining the output of engines to obtain the indicated horsepower by measuring the combustion pressure of cylinders, and to obtain the shaft horsepower by measuring the shaft torque. It is difficult to examine the shaft torque using the condition of the cylinder, and the most accurate method used for determining the combustion pressure involves examining the combustion state of the cylinder to evaluate the engine performance and analyze the combustion of the cylinder. During the measurement, the combustion pressure is the most important parameter used for accurately determining the cylinder angle because the cylinder pressure is indicated based on the angle of the crankshaft. In this study, an encoder was used as the crank angle sensor to measure the cylinder pressure on the generator engine of the actual operating ship. The reasons for the differences between the top dead center (TDC) recognized by the encoder (TDC_encoder) and the TDC recognized by the compression pressure (TDC_comp) were considered. The dif erences between the TDC_comp and TDC_encoder of the cylinders measured at idle running, 25 %, 50 %, and 60 % loads were analyzed to determine for the crankshaft production effect, the crankshaft torsion effect owing to the increased rotational resistance from the increased load, and the coupling damping effect between the engine and generator. It was confirmed that the TDC error occurred up to 3° crank angle as the load of the generator increased.