• 제목/요약/키워드: Amorphous Structure

검색결과 977건 처리시간 0.024초

열처리 온도에 따라서 절연체, 반도체, 전도체의 특성을 갖는 GZO 박막의 특성연구 (Study on GZO Thin Films as Insulator, Semiconductor and Conductor Depending on Annealing Temperature)

  • 오데레사
    • 한국재료학회지
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    • 제26권6호
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    • pp.342-346
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    • 2016
  • To observe the bonding structure and electrical characteristics of a GZO oxide semiconductor, GZO was deposited on ITO glasses and annealed at various temperatures. GZO was found to change from crystal to amorphous with increasing of the annealing temperatures; GZO annealed at $200^{\circ}C$ came to have an amorphous structure that depended on the decrement of the oxygen vacancies; increase the mobility due to the induction of diffusion currents occurred because of an increment of the depletion layer. The increasing of the annealing temperature caused a reduction of the carrier concentration and an increase of the bonding energy and the depletion layer; therefore, the large potential barrier increased the diffusion current dna the Hall mobility. However, annealing temperatures over $200^{\circ}C$ promoted crystallinity by the defects without oxygen vacancies, and then degraded the depletion layer, which became an Ohmic contact without a potential barrier. So the current increased because of the absence of a potential barrier.

실리콘의 이중증착에 의한 산화막 신뢰성 향상 (Reliability Improvement of Thin Oxide by Double Deposition of Silicon)

  • 박진성;양권승
    • 한국세라믹학회지
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    • 제31권1호
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    • pp.74-78
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    • 1994
  • Degradation of thin oxide by doped poly-Si and its improvement were studied. The gate oxide can be degraded by phosphorous in poly-Si doped POCl3. The degradation is increased with the decrement of sheet resistance and poly-Si thickness. Oxide failures of amorphous-Si are higher than those of poly-Si. In-situ double deposition of amorphous-Si, 54$0^{\circ}C$/30 nm, and poly-Si, 6$25^{\circ}C$/220 nm, forms the mismatch structure of grain boundary between amorphous-Si and poly-Si, and suppresses the excess phosphorous on oxide surface by the mismatch structure. The control of phosphorous through grain boundary improves the oxide reliability.

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제작 조건에 따른 Se박막의 결정구조 및 표면형상에 관한 연구 (A Study on Crystal Structure and Surface Morphology of Se Thin Film by Fabrication Condition)

  • 박계춘;임영삼;정해덕;이진;정인성;김종욱;구할본
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1998년도 추계학술대회 논문집
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    • pp.331-334
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    • 1998
  • Crystal structure and surface morphology of Se thin film fabricated by EBE method had been studied. Se thin film was deposited with amorphous structure until substrate temperature of l00$^{\circ}C$. But Se thin film was grown with monoclinic structure at substrate temperature af over 150$^{\circ}C$, and its lattice constant of a, b and c was 12.76${\AA}$, 9.15${\AA}$ and 10.41${\AA}$ respectively. Also, after heat-treatment at 150。 for 15 min with substrate temperature of l00。, amorphous Se was proved to be hexagonal structure, and its lattice constant of a and c was 4.27${\AA}$ and 4.83${\AA}$ respectively.

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$SnO_2$-$Sb_xS_{1-x}$-Sn 구조에서의 광기전력 효과 (Photovoltaic Effects of $SnO_2$-$Sb_xS_{1-x}$-Sn Structure)

  • 박태영;김화택
    • 대한전자공학회논문지
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    • 제16권4호
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    • pp.32-35
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    • 1979
  • SnO2- amorphous Sb 5 thin film-Sn structure에서 SnO2 창으로 photon을 입사시켰을 때 photo-voltaic 효과를 발견했으며 photon의 energy에 따라 photowltage의 부호가 반전 되었다. 이러한 현상은 SnO2- Sb S 사이에서 n-n heterojunction이, Sb S Sn사이에서 schottky junction이 형성되기 때문인 것으로 여겨진다.

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Changes in the Modulation Amplitude and the Particle Sizes of Co/Pd Multilayers During Stress Release and Interdiffusion

  • Kim, Jai-Young;Evetts, Jan-E
    • Journal of Magnetics
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    • 제3권1호
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    • pp.21-30
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    • 1998
  • An artificially modulated magnetic Co/Pd multilayer is one of the promising candidates for high density magneto-optic (MO) recording media, due to large Kerr rotation angle in the wavelength of a blue laser beam. however, since multilayer structure, as well as amorphous structure, is a non-equilibrium state in terms of free energy and MO recording is a kind of thermal recording which is conducted aound Curie temperature (Tc) of the recording media, when the multilayer is used for the MO recording media, changes in the multilayer structure are occurred as the amorphous structure do. Therefore, the assessment of the structural stability in the Co/Pd multilayer is crucially important both for basic research and applications. As the parameter of the structural stability in this research, modulation amplitude and particle size of the Co/Pd multilayer are measured in terms of Ar sputtering pressure and heat treatment temperature. From the results of the research, we find out that the magnetic exchange energy in the structural changes of a magnetic multilayer structure and suggest the operating temperature range for MO recording in the Co/Pd multilayer for the basic research and applications, respectively.

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Atomic structure of amorphous carbon deposited by various incidence angles -MD simulation study

  • 조민웅;이광렬
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
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    • pp.52-52
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    • 2010
  • Amorphous carbon films have a variety of potential applications. In most such applications film properties are crucial and highly dependent on the film growth conditions. We here investigate the atomic structure of the films, which is generated at various incidence angles, using the classical molecular dynamics. Varying incidence angle of the deposited carbon atoms, different level of sp hybridization and porosity of the film are captured in our model. As the incidence angle becomes glancing, subplantation of the deposited carbon in vertical direction is significantly reduced, rather bouncing back of the incident carbon with slight modification of surface structure is mainly occurred at the early stage of the film growth. As the surface becomes rougher, shadowing effect at these glancing incidences also becomes more significant, which tends to cause asymmetrical and columnar structure. We describe incidence angle dependence of the evolution of the atomic structure of the film and its corresponding properties.

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수정된 유사체액 내에서 티타늄에 생성된 아파타이트의 고분해능 전자현미경에 의한 분석 (HRTEM Analysis of Apatite Formed on Bioactive Titanium in Modified-SBF)

  • 김현욱;김우정;이갑호;홍순익
    • 한국재료학회지
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    • 제17권8호
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    • pp.408-413
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    • 2007
  • Process of the hydroxyapapite(HA) precipitation on bioactive titanium metal prepared by NaOH in a modified-simulated body fluid(mSBF) was investigated by high resolution transmission electron microscope (HRTEM) attached with energy dispersive X-ray spectrometer(EDX). The amorphous titanate phase on titanium surface is form by NaOH treatment and an amorphous titanate incorporated calcium and phosphate ions in the liquid to form an amorphous calcium phosphate. With increasing of soaking time in the liquid, the HA particles are observed in amorphous calcium phosphate phase with a Ca/P atomic ratio of I.30. The octacalcium phosphate (OCP) structure is not detected in HRTEM image and electron diffraction pattern. After a long soaking time, the HA particles grow as needle-like shape on titanium surface and a large particle-like aggregates of needle-like substance were observed to form on titanium surface within needle-like shape. A long axis of needle parallels to c-direction of the hexagonal HA structure.

Al-Ni-Y 합금 비정질 리본의 열적 특성 및 리본 압출재의 고온변형 특성 (Thermal Properties of Al-Ni-Y Alloy Amorphous Ribbons and High Temperature Deformation Behavior of Al-Ni-Y Alloy Extrudates Fabricated with Amorphous Ribbons)

  • 고병철;유연철
    • 소성∙가공
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    • 제7권4호
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    • pp.333-339
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    • 1998
  • Hot torsion tests were conducted to investigate the high temperature deformation behavior of $Al_{85}Ni_{10}Y_5$ alloy extrudates fabricated with amorphous ribbons. The powder metallurgy routes, hot pressing and hot extrusion were used to fabricate the extrudates. Thermal properties of amorphous ribbons with different thickness as a function of aging temperature were studied by thin film x-ray dif-fraction (XRD) and differential scanning calorimetry(DSC). The Al phase crystallite firstly formed in the amorphous ribbons and its crystallization temperature($T_x$)Was ~210${\circ}C$ During the processings of consolidation and extrusion, nano-grained structure(~100 nm) was formed in the Al85Ni10Y5 alloy extrudates. The as-extrudated Al85Ni10Y5 alloy and the $Al_{85}Ni_{10}Y_5$ alloy annealed at 250${\circ}C$ for 1 hour showed a flow curve of DRV(dynamic recovery) during hot deformation at 400-550${\circ}C$. On the other hand, the $Al_{85}Ni_{10}Y_5$ alloy annealed at 400${\circ}C$ for 1 hour showed a flow curve of DRX(dynamic recrys-tallization) during hot deformation at 450-500${\circ}C$. Also the flow stress and flow strain of the $Al_{85}Ni_{10}Y_5$ alloy extrudate annealed at 400${\circ}C$ were higher than those at 250${\circ}C$.

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CMOS IC와 집적 가능한 비정질 p-i-n 광 수신기 제작에 관한 연구 (A study on the amorphous s-i-n photodiode integrated with CMO IC)

  • 곽철호;유회준;장진;문병연
    • 한국광학회지
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    • 제8권6호
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    • pp.500-505
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    • 1997
  • 광 수신기를 전자 논리 소자에 집적하기 위하여 발생되는 여러 문제점들을 개선하기 위하여 a-Si:H p-i-n 구조를 사용하여 CMOS IC위에 비정질 광 수신기를 제작하였다. 비정질 물질인 a-Si:H을 도입함으로써 PECVD와 같이 저온 공정을 진행하는 장비를 사용할 수 있도록 하여 이미 제작된 IC의 특성이나 구조 특히 금속 배선을 파괴하지 않으면서 집적할 수 있게 하였다. CMOS IC 위에 제작된 비정질 p-i-n 광 수신기는 양호한 순방향 전압 특성을 가지고 있었으며 누설 전류는 약 0.1$\mu\textrm{A}$ 정도, 항복 전압 -20V 이하의 특성을 보였다. 또한 레이저 다이오드 광 신호에 대한 광 수신기의 광 반응 특성을 실험하여 광 신호 검출을 조사함으로써 1V 이하의 작은 전압 스위칭을 통하여 광 검출의 On/Off를 제어할 수 있음을 관찰하였다. 이러한 특성을 이용하면 현재 광 도파로에서 빛 신호를 스위칭 하거나 modulation 할 때 발생하는 고전압 관련 문제점들을 해결할 수 있기 때문에 광 스위치로도 유용하게 이용될 수 있을 것으로 생각되며 나아가서는 광 interconnection에 매우 유용할 것으로 사료된다.

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Cu계 및 Ni계 비정질 합금 분말을 이용한 비정질기지 복합재의 제조 및 특성 (Synthesis and Properties of Amorphous Matrix Composites using Cu-based/Ni-based Amorphous Powders)

  • 김택수;이진규;김휘준;배정찬
    • 한국분말재료학회지
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    • 제12권6호
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    • pp.406-412
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    • 2005
  • This work is to present a new synthesis of metallic glass (MG)/metallic glass (MG) composites using gas atomization and spark plasma sintering (SPS) processes. The MG powders of $Cu_{54}Ni_6Zr_{22}Ti_{18}$ (CuA) and $Ni_{59}Zr_{15}Ti_{13}Nb_7Si_3Sn_2Al_1$(NiA) as atomized consist of fully amorphous phases and present a different thermal behavior; $T_g$ (glass transition temperature) and $T_x$ (crystallization temperature) are 716K and 765K for the Cu base powder, but 836K and 890K for the Ni base ones, respectively. SPS process was used to consolidate the mixture of each amorphous powder, being $CuA/10\%NiA\;and\;NiA/10\%CuA$ in weight. The resultant phases were Cu crystalline dispersed NiA matrix composites as well as NiA phase dispersed CuA matrix composites, depending on the SPS temperatures. Effect of the second phases embedded in the MG matrix was discussed on the micro-structure and mechanical properties.