• 제목/요약/키워드: Amorphous Boron Nitride

검색결과 9건 처리시간 0.029초

$BCl3-NH3-Ar$계의 플라즈마화학증착공정을 이용한 질화붕소막의 합성 (Synthesis of Boron-Nitride Film by Plasma Assisted Chemical Vapor Deposition Using $BCl3-NH3-Ar$ Mixed Gas)

  • 박범수;백영준;은광용
    • 한국세라믹학회지
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    • 제34권3호
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    • pp.249-256
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    • 1997
  • 100-500KHz범위의 주파수전원을 인가하여 발생한 플라즈마를 이용하여 질화붕소(boron nitride)막의 합성시 육방정상(hexagonal phase)과 입방정상(cubic phase)의 생성거동을 관찰하였다. BCl3와 NH3를 붕소와 질소의 공급기체로 선택하였고 Ar과 수소를 carrier기체로 사용하였다. 합성변수로는 플라즈마전원의 전압, 기판의 bias, 합성압력, 기체의 조성, 기판의 온도이었는데, 합성된 박막은 FT-IR결과로부터 육방정과 입방정의 혼합상으로 나타났고, 각 상의 분률은 변수의 크기에 의존하였다. TEM분석결과 육방정으로만 구성된 박막은 비정질상으로 이루어졌으며, 입방정과 육방정의 혼합상의 경우는 비정질기지상에 수십 nanometer크기의 입방정입자가 분산된 구조를 하고 있었다.

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비정질합금 박판 제조용 노즐 재료의 내구성평가 (Durability of Nozzle Materials for Strip Casting of Amorphous Alloys)

  • 강복현;김기영
    • 한국주조공학회지
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    • 제31권5호
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    • pp.267-273
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    • 2011
  • Erosion and thermal shock resistance of several refractory materials have been investigated, which are expected to be used as nozzles in a planar flow casting equipment for amorphous alloys. The test was conducted on five materials; graphite, boron nitride, fused silica, alumina and zirconia. Test specimens were preheated and dipped into the melt of carbon steel and amorphous alloys. Some test specimens were rotated to develop high erosion and to shorten the test periods. Fused silica and boron nitride specimens showed the excellent erosion and thermal shock resistance irrespective of the kind of melt and melting atmosphere.

Synthesis of Cubic Boron Nitride by Al-Mg Solvents

  • Park, Jong-Ku;Park, S.T.;S.K. Singhal;S. J. Cui;K. Y. Eun
    • The Korean Journal of Ceramics
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    • 제3권3호
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    • pp.187-190
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    • 1997
  • The aluminum-magnesium (Al-Mg) aklloys have been proved to be an effective solvent for synthesis of cubic-phase boron nitride (cBN) from hexagonal-phase boron nitride (hBN) at the conditions of high pressures and high temperatures (HP/HT). Various kinds of hBN powders having different crystallinity have been tested for cBN synthesis with Al-Mg solvents. The conversion ratio from hBN to cBN and the shape of synthesized cBN crystals appeared to be affected strongly by chemical composition and added amount of Al-Mg solvents as well as crystallinity of BN powders. As the magnesium content increased in the Al-Mg solvents, the conversion ratio increased and the size of cBN crystals became larger. The crystal facets developed well in the specimens with solvents having high Mg content. It was observed that a hBNlongrightarrowcBN transformation occurred more easily in the specimens having well crystallized hBN powders. Amorphous BN having much $B_2O_3$ impurity exhibited a low threshold temperature for transformation to cBN, which was attributed to crystallization of amorphous BN to well crystallized hBN prior to transformation into cBN with help of $B_2O_3$.

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Hexagonal Boron Nitride의 합성에 있어서 MgB6 첨가의 효과 (Effect of MgB6 Addition on Synthesis of Hexagonal Boron Nitride)

  • 이대진;지미정;최병현;이미재;조남희;차미선
    • 한국세라믹학회지
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    • 제46권1호
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    • pp.53-57
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    • 2009
  • The h-BN powder was synthesized by amorphous $B_2O_3$ and activated carbon at $1550^{\circ}C$ in nitrogen atmosphere, whose properties were examined according to $MgB_6$ addition. Amount of $MgB_6$ addition was varied in the range of $0{\sim}$10\;wt% of the initial mixture. It was observed that $MgB_6$ addition led to an increase in the amount and the grain size of h-BN and decrease in the amount of $B_4C$ forming. When $MgB_6$ added 5 wt%, the amount and crystallinity of h-BN increased as the holding time at the synthesis temperature was prolonged. It was also confirmed that the regularity of three-dimensional ordering of h-BN increases.

탄소 나노튜브 위에 붕소 및 탄소 질화 박막이 코팅된 이종접합 구조 미세팁의 전자방출 특성 (Electron Emission Properties of Hetero-Junction Structured Carbon Nanotube Microtips Coated With BN And CN Thin Films)

  • 노영록;김종필;박진석
    • 전기학회논문지
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    • 제59권4호
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    • pp.743-748
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    • 2010
  • Boron nitride (BN) and carbon nitride (CN) films, which have relatively low work functions and commonly exhibit negative electron affinity behaviors, were coated on carbon nanotubes (CNTs) by magnetron sputtering. The CNTs were directly grown on metal-tip (tungsten, approximately 500nm in diameter at the summit part) substrates by inductively coupled plasma-chemical vapor deposition (ICP-CVD). The variations in the morphology and microstructure of CNTs due to coating of the BN and CN films were analyzed by field-emission scanning electron microscopy (FE-SEM). The energy dispersive x-ray (EDX) spectroscopy and Raman spectroscopy were used to identify the existence of the coated layers (CN and BN) on CNTs. The electron-emission properties of the BN-coated and CN-coated CNT-emitters were characterized using a high-vacuum field emission measurement system, in terms of their maximum emission currents ($I_{max}$) at 1kV and turn-on voltage ($V_{on}$) for approaching $1{\mu}A$. The results showed that the $I_{max}$ current was significantly increased and the $V_{on}$ voltage were remarkably reduced by the coating of CN or BN films. The measured values of $I_{max}-V_{on}$ were as follows; $176{\mu}A$-500V for the 5nm CN-coated emitter and $289{\mu}A$-540V for the 2nm BN-coated emitter, respectively, while the $I_{max}-V_{on}$ of the as-grown (i.e., uncoated) emitter was $134{\mu}A$-620V. In addition, the CNT emitters coated with thin CN or BN films also showed much better long-term (up to 25h) stability behaviors in electron emission, as compared with the conventional CNT emitter.

탄소 나노튜브에 대한 비정질 질화막의 코팅 및 전계방출 특성 (Coating of amorphous nitrides on carbon nanotubes and field emission properties)

  • 노영록;김종필;박진석
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2009년도 제40회 하계학술대회
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    • pp.1244_1245
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    • 2009
  • Coating of amorphous nitride thin layers, such as boron nitride (BN) and carbon nitride (CN), has been performed on carbon nanotubes (CNTs) for the purpose of enhancing their electron-emission performances because those nitride films have relatively low work functions and commonly exhibit negative electron affinity behavior. The CNTs were directly grown on metal-tip (tungsten, approximately 500 nm in diameter at the summit part) substrates by inductively coupled plasma-chemical vapor deposition (ICP-CVD). Sharpening of the tungsten tips were carried out by electrochemical etching. Morphologies and microstructures of BN and CN films were analyzed by field-emission scanning electron microscopy (FE-SEM), energy dispersive x-ray (EDX) spectroscopy, and Raman spectroscopy. The electron-emission properties (such as maximum emission currents and turn-on fields) of the BN-coated and CN-coated CNT-emitters were characterized in terms of the thickness of BN and CN layers.

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보론 도우핑된 비정질 실리콘 박막 트랜지스터의 열에 의한 준안정성 연구 (Thermally Induced Metastability in Boron-Doped Amorphous Silicon Thin Film Transistor)

  • 이이상;추혜용;장진
    • 대한전자공학회논문지
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    • 제26권3호
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    • pp.130-136
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    • 1989
  • 보론이 도우핑된 수소화된 비정질 실리콘을 이용한 박막 트랜지스터를 플라즈마 CVD 방법으로 제작하여 트랜지스터의 특성 및 준안정성에 관한 연구를 수행하였다. 보론이 도우핑된 비정질 실리콘 ambipolar 트랜지스터를 열평형 온도 이상에서 급냉하면, active dopants가 증가하고 경계면 상태밀도가 감소하여 정공채널에 의한 드레인 전류가 증가하고 전자채널의 드레인 전류는 급냉 온도에 따라 증가하다 감소되는 현상을 측정하였다. 이런 급냉 효과는 실리콘내에 있는 수소의 운동과 밀접한 관계가 있고 active dopants, 댕글링 본드 및 경계면 상태밀도의 변화로 해석된다.

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티타늄 이소프로폭사이드를 이용한 졸-겔법에 의한 TiN 코팅 cBN 분말 합성 (Synthesis of TiN-Coated cBN Powder by Sol-Gel Method Using Titanium (IV) Isopropoxide)

  • 이윤성;김선욱;이영진;이지선;신동욱;김세훈;김진호
    • 한국전기전자재료학회논문지
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    • 제33권5호
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    • pp.373-379
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    • 2020
  • In this study, TiN-coated cBN (cubic-structure boron nitride) powders were successfully synthesized by a sol-gel method using titanium (IV) isopropoxide (TTIP) and by controlling the heat treatment conditions. After the sol-gel process, amorphous nano-sized TiOx was uniformly coated on the surface of cBN powder particles. The obtained TiOx-coated cBN powders were heated at 1,000~1,300℃ for 1 or 6 h in a flow of 95%N2-5%H2 mixed gas. With increasing temperature, the chemical composition of the TiOx coating layer changed in the order of TiO2→Ti6O11→Ti4O7→TiN due to reduction of the Ti ions. The TiN coating layer was observable in the samples heated at 1,200℃ and appeared as the main phase in the sample heated at 1,300℃. The resulting thickness of the TiN coating layer of the sample heated at 1,300℃ was approximately 45~50 nm.

NANO-SIZED COMPOSITE MATERIALS WITH HIGH PERFORMANCE

  • Niihara, N.;Choa, H.Y.;Sekino, T.
    • 한국분말야금학회:학술대회논문집
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    • 한국분말야금학회 1996년도 추계학술강연 및 발표대회 강연 및 발표논문 초록집
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    • pp.6-6
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    • 1996
  • Ceramic based nanocomposite, in which nano-sized ceramics and metals were dispersed within matrix grains and/or at grain boundaries, were successfully fabricated in the ceramic/cerarnic and ceramic/metal composite systems such as $Al_2O_3$/SiC, $Al_2O_3$/$Si_3N_4$, MgO/SiC, mullite/SiC, $Si_3N_4/SiC, $Si_3N_4$/B, $Al_2O_3$/W, $Al_2O_3$/Mo, $Al_2O_3$/Ni and $ZrO_2$/Mo systems. In these systems, the ceramiclceramic composites were fabricated from homogeneously mixed powders, powders with thin coatings of the second phases and amorphous precursor composite powders by usual powder metallurgical methods. The ceramiclmetal nanocomposites were prepared by combination of H2 reduction of metal oxides in the early stage of sinterings and usual powder metallurgical processes. The transmission electron microscopic observation for the $Al_2O_3$/SiC nanocomposite indicated that the second phases less than 70nm were mainly located within matrix grains and the larger particles were dispersed at the grain boundaries. The similar observation was also identified for other cerarnic/ceramic and ceramiclmetal nanocornposites. The striking findings in these nanocomposites were that mechanical properties were significantly improved by the nano-sized dispersion from 5 to 10 vol% even at high temperatures. For example, the improvement in hcture strength by 2 to 5 times and in creep resistance by 2 to 4 orders was observed not only for the ceramidceramic nanocomposites but also for the ceramiclmetal nanocomposites with only 5~01%se cond phase. The newly developed silicon nitride/boron nitride nanocomposites, in which nano-sized hexagonal BN particulates with low Young's modulus and fracture strength were dispersed mainly within matrix grains, gave also the strong improvement in fracture strength and thermal shock fracture resistance. In presentation, the process-rnicro/nanostructure-properties relationship will be presented in detail. The special emphasis will be placed on the understanding of the roles of nano-sized dispersions on mechanical properties.

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