• Title/Summary/Keyword: Aluminum substrate

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Effect of Aluminum Fence-type electrode Design on Characteristics of AC-PDP

  • Lee, Seog-Young;Lee, Dong-Heon;Kim, Yong-Seog
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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    • pp.408-411
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    • 2008
  • In an attempt to enhance luminance efficiency and to reduce discharge delays of test panels with aluminum fence-electrodes, various designs of the electrodes were prepared by chemically etching the aluminum foils bonded to soda-lime glass substrate via anodic bonding process. The effects of fence design on luminance and discharge characteristics were investigated and compared with conventional ac-PDPs. These results showed a possibility of using fence-type aluminum electrode at front plates of ac-PDDs without sacrificing its performance.

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화상처리용 마이크로 미러의 동특성 측정기술 (Dynamic Characteristics Measurement of Micro Mirror for Image Display)

  • 이은호;김규로
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1997년도 춘계학술대회 논문집
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    • pp.371-376
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    • 1997
  • A 100*100.mu.m$^{2}$ aluminum micro mirror is designed and fabricated using a thick photoresist as a sacrificial layer andas a mold for nickel electroplating. The micro mirror is composed of aluminum mirror plate, two nickel support posts, two aluminum hinges, two address eletrodes, and two landing electrodes. The aluminum mirror plate,which is supported by two nickel support posts, is overhung about 10.mu.m from the silicon substrate. THe aluminum mirror plate is actuated like a seesaw by electrostatic force generated by electic potential difference applied between the mirror plate and the address electrode. This paper presents some methods to measure the optical and the dynamic characteristics of the fabricated micro mirror.

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기판스테이지 온도에 관한 연구 (A Study on Substrate Stage Temperature)

  • 김선기;이우영;강흥석
    • 반도체디스플레이기술학회지
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    • 제5권4호
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    • pp.35-40
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    • 2006
  • This paper shows that the effect of exposing on the top area and a solution which using a water circulation system. Semiconductor substrate stage is made from Aluminum and is repeated the sequence of exposing (150), turning OFF shutter, taking 30 sec. interval at the top area of stage. So the temperature of substrate temperature rises continuously. On this, we made a waterway at the inner part of the substrate stage and operated a water circulation system. We measured the temperature of a substrate stage surface with a thermocouple attached to the substrate stage. To analyze the top area's temperature, we used Analysis Program ANSYS for analysis and 3D CAD program Solid-Works for modeling.

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알루미늄 양극산화를 이용한 육각구조로 규칙적으로 배열된 금 나노구조 제조 (Fabrication of Hexagonally Assembled Gold Nonodots Based on Anodization of Aluminum)

  • 이준호;이한섭;최진섭
    • 공업화학
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    • 제20권2호
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    • pp.191-194
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    • 2009
  • 양극산화(anodization)에 의해 얻어지는 다공성 알루미나는 균일한 규칙성의 나노 구조를 지니며, 이를 제어하는 공정이 비교적 쉽고 경제적이어서 최근 연구가 광범위하게 진행되고 있다. 본 연구에서는 1차로 옥살산(oxalic acid)을 이용하여 양극 산화를 한 산화물 만들고, 이 산화물을 선택적으로 제거한 뒤 생기는 알루미늄 표면의 벌집모양의 패턴에 붕산(boric acid)을 이용하여 2차 양극산화를 하여 알루미늄 산화물 나노 돗(nanodot)을 형성하였다. 정렬된 정육면체의 모서리에 20 nm 높이의 나노 돗이 배열되어 있는 구조를 형성하기 위한 최적의 조건을 조사하였다. 알루미늄 산화물 나노 돗 층에 금을 코팅하여 육각벌집모양으로 배열된 금 나노 돗 층을 형성하였다. 이 표면은 향후 바이오센서에 적용될 것으로 기대된다.

표시소자 응용을 위한 copper, aluminum 박막의 성장과 특성 (Copper, aluminum based metallization for display applications)

  • 김형택;배선기
    • E2M - 전기 전자와 첨단 소재
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    • 제8권3호
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    • pp.340-351
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    • 1995
  • Electrical, physical and optical properties of Aluminum(Al), Copper(Cu) thin films were investigated in order to establish the optimum sputtering parameters in Liquid Crystal Display (LCD) panel applications. DC-magnetron sputtered film on coming 7059 samples were fabricated with variations of deposition power densities, deposition pressures and substrate temperatures. Low resistivity films(AI;2.80 .mu..ohm.-cm, Cu:1.84 .mu..ohm-cm),which lower than the reported values, were obtained under sputtering parameters of power density(250W), substrate temperature(450-530.deg. C) and 5*10$\^$-3/ Torr deposition pressure. Expected columnar growth and stable grain growth of both films was observed through the Scanning Electron Microscope(SEM) micrographs. Dependency of the applicable defect-free film density upon depositon power and temperature was also characterized. Not too noticable variations in X-ray diffraction patterns were remarked under the alterations of sputtering parameters. High optical reflectivities of Al, Cu films, approximately 70-90 %, showed high degree of surface flatness.

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알루미늄 양극산화 피막의 상전이에 미치는 수화처리의 영향 (Effects of Hydration Treatments on the Phase Transition of Anodic Aluminum Oxide Layers)

  • 주은균;김성수;오한준;조수행;지충수
    • 한국재료학회지
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    • 제12권7호
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    • pp.540-544
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    • 2002
  • Hydration treatments were performed on the pure aluminum substrate at $100^{\circ}C$ followed by anodizing and heat treatments on the layers. The transformation behaviors of the oxide layers according to the hydration treatment were studied using TEM, XRD, RBS etc. Above $90^{\circ}C$ the hydrous oxide film could be formed, which were turned out to be hydrous oxides(AlOOH $nH_2$O). The anodization on the hydrous oxide film was more effective for the transition of amorphous anodic oxides to the crystalline $\Upsilon-Al_2$ $O_3$ comparing with the case for anodizing on the aluminum substrate without hydration treatment And additional heat treatments were also helpful for the acceleration of the transformation of the hydrous oxide to $\Upsilon-Al_2$ $O_3$. During the heat treatment the interface between $\Upsilon-Al_2$ $O_3$and the hydrous oxide layers migrated to the outer side of hydrous layer.

Effect of substrate temperature on the properties of aluminum doped zinc oxide by DC magnetron sputtering

  • Koo, Hong-Mo;Kim, Se-Hyun;Moon, Yeon-Keon;Park, Jong-Wang;Jeong, Chang-Ho
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.II
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    • pp.1542-1545
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    • 2005
  • Transparent conducting aluminum-doped zinc oxide (AZO) thin films have been deposited on corning 1737 glass by DC magnetron sputter. The structural, electrical and optical properties of the films were investigated as a function of various substrate temperatures. AZO thin films were fabricated by dc magnetron sputtering with AZO ceramic target $(Al_2O_3: 2wt %)$. The obtained films were poly crystalline with a hexagonal wurtzite structure and preferentially oriented in the (002) crystallographic direction. The lowest resistivity is $6.0{\times}10^{-4}$ Ocm with the carrier concentration of $2.694{\times}10^{20}\;cm^{-3}$ and Hall mobility of $20.426cm^2/Vs$. The average transmittance in the visible range was above 90%.

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DC Magnetron Sputtering에 의해 증착된 알루미늄 박막의 특성 (The Characteristics of Aluminum Thin Films using DC Magnetron Sputtering)

  • 표재확;연충규;황기웅
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1993년도 정기총회 및 추계학술대회 논문집 학회본부
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    • pp.258-260
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    • 1993
  • Aluminum thin films were deposited on glass substrate using DC Magnetron Sputtering. Deposition rate, specular reflectance, and resistivity were investigated as a function of the input power, pressure, substrate temperature, and deposition time. Reflectance was reduced with increasing power, also with prolonging deposition time. Topography of the surface, which influences the properties such as electromigration, was observed from scanning electron microscope (SEM) and there was a close relation between the topography and measured reflectance.

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Alumina Templates on Silicon Wafers with Hexagonally or Tetragonally Ordered Nanopore Arrays via Soft Lithography

  • Park, Man-Shik;Yu, Gui-Duk;Shin, Kyu-Soon
    • Bulletin of the Korean Chemical Society
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    • 제33권1호
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    • pp.83-89
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    • 2012
  • Due to the potential importance and usefulness, usage of highly ordered nanoporous anodized aluminum oxide can be broadened in industry, when highly ordered anodized aluminum oxide can be placed on a substrate with controlled thickness. Here we report a facile route to highly ordered nanoporous alumina with the thickness of hundreds-of-nanometer on a silicon wafer substrate. Hexagonally or tetragonally ordered nanoporous alumina could be prepared by way of thermal imprinting, dry etching, and anodization. Adoption of reusable polymer soft molds enabled the control of the thickness of the highly ordered porous alumina. It also increased reproducibility of imprinting process and reduced the expense for mold production and pattern generation. As nanoporous alumina templates are mechanically and thermally stable, we expect that the simple and costeffective fabrication through our method would be highly applicable in electronics industry.

아크 용사법에 의한 강재표면에의 Aluminum침수 및 내식, 경화성 피막형성에 관한 연구 (A study on the Al cementation and formation of corrosion-resisting, hardening layer on the steel surface by the arc spray method)

  • 김영식;배차헌;오재환;문경만
    • Journal of Advanced Marine Engineering and Technology
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    • 제13권2호
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    • pp.64-77
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    • 1989
  • In this study, the experiments were carried out for the purpose of establishment of aluminium cementation to steel surface by diffusible heat treatment after making the coated film onto the substrate by arc spray method. Also, the microstructure and mechanical properties of the cementation layer produced by this study were inspected for various heat treatment and spraying conditions. Main results obtained are as follow ; 1. The coating film characteristics which have excellent errosion-resistance, high temperature oxidation-resistance are obtained by aluminium penetration heat treatment after making the sprayed aluminum coating film onto the steel substrate. 2. Aluminium diffusion penetration takes place at higher temperature than 660.deg.C, and the more heat treatment time and the higher heat treatment temperature adopted, the deeper diffusion layer obtained. 3. Insert gas arc spraying using argon gas as the carrier gas higher improvement of mechanical property than that of compressed air environment. 4. The coating film characteristics appeared to be improvement of adhesive property, porosity plugging effect by heat treatment in air environment.

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