• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.1
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• pp.382-385
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• 2003

Chemical mechanical polishing(CMP) is an essential process in the production of copper-based chips. On this work, the stability of Hydrogen Peroxide($H_2O_2$) as oxidizer of Cu CMP slurry has been investigated. $H_2O_2$ is known as the most common oxidizer in Cu CMP slurry. Copper slowly dissolves in $H_2O_2$ solutions and the interaction of $H_2O_2$ with copper surface had been studied in the literature. Because hydrogen peroxide is a weak acid in aqueous solutions, a passivation-type slurry chemistry could be achieved only with pH buffered solution.[1] Moreover, $H_2O_2$ is so unstable that its stabilization is needed using as oxidizer. As adding KOH as pH buffering agent, stability of $H_2O_2$ decreased. However, stability went up with putting in small amount of BTA as film forming agent. There was no difference of $H_2O_2$ stability between KOH and TMAH at same pH. On the other hand, $H_2O_2$ dispersion of TMAH is lower than that of KOH. Furthermore, adding $H_2O_2$ in slurry in advance of bead milling lead to better stability than adding after bead milling. Generally, various solutions of phosphoric acids result in a higher stability. Using Alumina C as abrasive was good at stabilizing for $H_2O_2$; moreover, better stability was gotten by adding $H_3PO_4$.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 춘계학술대회 논문집 센서 박막재료 반도체 세라믹
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• pp.45-48
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• 2003

The polishing mechanism of W-CMP process has been reported as the repeated process of passive layer formation by oxidizer and abrasion action by slurry abrasives. Thus, it is important to understand the effect of oxidizer on tungsten passivation layer in order to obtain higher removal rate (RR) and very low non-uniformity (NU%) during W-CMP process. In this paper, we investigated the effects of oxidizer on W-CMP process with three different kinds of oxidizers, such as $H_2O_2$, $Fe(NO_3)_3$, and $KIO_3$. In order to compare the removal rate and non-uniformity of three oxidizers, we used alumina-based slurry of pH 4. According to the CMP tests, three oxidizers showed different removal mechanism on tungsten surface. Also, the microstructures of surface layer by AFM image were greatly influenced by the slurry chemical, composition of oxidizers. The difference in removal rate and roughness of tungsten surface are believed to caused by modification in the mechanical behavior of $Al_2O_3$ abrasive particles in CMP slurry. Our stabilized slurries can be used a guideline and promising method for improved W-CMP process.

• 한국분말재료학회지
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• 제22권6호
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• pp.438-442
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• 2015

Porous thick film of alumina which is fabricated by freeze tape casting using a camphene-camphor-acrylate vehicle. Alumina slurry is mixed above the melting point of the camphene-camphor solvent. Upon cooling, the camphene-camphor crystallizes from the solution as particle-free dendrites, with the $Al_2O_3$ powder and acrylate liquid in the interdendritic spaces. Subsequently, the acrylate liquid is solidified by photopolymerization to offer mechanical properties for handling. The microstructure of the porous alumina film is characterized for systems with different cooling rate around the melting temperature of camphor-camphene. The structure of the dendritic porosity is compared as a function of ratio of camphene-camphor solvent and acrylate content, and $Al_2O_3$ powder volume fraction in acrylate in terms of the dendrite arm width.

• 공업화학
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• 제8권4호
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• pp.704-707
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• 1997

카올린에서 추출된 황산알루미늄 용액을 이용하여 정밀화학 분야에서 많은 이용이 기대되고 있는 알루미나 졸의 제조에 대하여 연구하였다. 교반을 하면서 황산알루미늄용액에 암모니아수를 첨가하여 비정질의 일수산화알루미늄(AlO(OH))를 제조하고, 제조된 입자의 표면에 전기이중층을 형성하기 위해서 초산($CH^3COOH$)을 투입하여 안정한 알루미나 졸을 제조하였다. 안정한 알루미나 졸의 제조에 미치는 반응온도, 반응시간, 초산의 농도 등의 영향을 조사하였다. 반응온도 $50{\sim}90^{\circ}C$, A/C(건조된 알루미나 량/첨가된 초산의 량) 1.6 (몰비)에서 안정한 졸의 합성이 가능하였으며, 반응시간에는 거의 영향을 받지않았다. 또한, 알루미나의 함량이 1~5vol%까지의 범위에서 안정한 졸이 제조되었고, 이때 졸의 입자크기는 약 5~10nm 정도이었다.

• 한국세라믹학회지
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• 제36권1호
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• pp.89-96
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• 1999

석고몰드의 단점을 극복할 수 있는 다공질 알루미나 몰드의 제조저건을 확립하였다. 다공질 알루미나 몰드의 제조를 위해 활성탄의 질량비에 따라 조성비를 달리하여 첨가한 후, ESA와 유동특성 등을 조하삼으로써 안정된 이상 슬러리를 제조하였으며, 이를 석고몰드에 캐스팅하여 얻은 원통형 알루미나 몰드를 사용하여 활성탄의 양과 소결온도에 따른 수축율 변화와 마모에 대한 저항성을 측정하였다. 다공질 알루미나 몰드의 소결에서는 비수축 소결구인 표면확산에 의해 입자간 넥 강도의 증진을 통한 몰드의 강도 증진을 도모하는 것이 바람직하며, 이를 위해 1,00$0^{\circ}C$이하에서 유지시간의 변화에 따른 열역학적 방법, 1,00$0^{\circ}C$이상의 온도에서 알루미나의 수축을 억제하면서 빠른 승온속도를 열처리온도에 따른 동역학적 방법과 이 두가지 방법을 혼합하는 방법 등으로 구분하여 다동질 알루미나 몰드의 소결조건을 분석하였다. 위 방법들에 대한 다공질 알루미나 몰드의 캐스팅 특성을 분석한 결과, 복합 소결법이 최적임을 알수 있었다. 제조된 다공질 알루미나 몰드의 비교적 높은 강도를 보였으며, 석고몰드레 비해 빠른 건조시간, 산, 염기에 대한 내식성 및 캐스팅 특성이 우수하였다.

• 한국분말재료학회지
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• 제26권4호
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• pp.327-333
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• 2019

In this study, a process is developed for 3D printing with alumina ($Al_2O_3$). First, a photocurable slurry made from nanoparticle $Al_2O_3$ powder is mixed with hexanediol diacrylate binder and phenylbis(2,4,6-trimethylbenzoyl) phosphine oxide photoinitiator. The optimum solid content of $Al_2O_3$ is determined by measuring the rheological properties of the slurry. Then, green bodies of $Al_2O_3$ with different photoinitiator contents and UV exposure times are fabricated with a digital light processing (DLP) 3D printer. The dimensional accuracy of the printed $Al_2O_3$ green bodies and the number of defects are evaluated by carefully measuring the samples and imaging them with a scanning electron microscope. The optimum photoinitiator content and exposure time are 0.5 wt% and 0.8 s, respectively. These results show that $Al_2O_3$ products of various sizes and shapes can be fabricated by DLP 3D printing.

• 대한기계학회논문집A
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• 제24권1호
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• pp.1-6
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• 2000

As dies and molds have become more and more complicated in the recent years, the demand for lower cost and shorter production time is also growing stronger. Rapid prototyping and Tooling technologies are expected to be used for more rapid and lower cost tool fabrication. However the rapid tooling methods have not yet reached the level of application to the manufacturing of metallic dies and molds which require high dimensional accuracy. As the rapid tooling technology, there are the slurry casting, the powder casting, the direct laser sintering, and so on. Generally, in the slurry casting, the alumina powder and the water soluble phenol were mainly used. However, the mechanical properties of the phenol were not good enough to apply to molds directly. In this study, pure epoxy and two types of aluminium powder reinforced resin are applied to the slurry casting. The mechanical and thermal properties are better than phenol because the epoxy is the thermosetting resin. And mechanical characteristics such as shrinkage rate, hardness, surface roughness are measured for the sake of comparison. Metal powder reinforced resin molds are better than the resin tool form the viewpoint of shrinkage rate and hardness. Finally, it has been shown that the application possibility of this process is high, because the manufacturing time and cost savings are significant.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2009년도 추계학술발표대회
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• pp.18.2-18.2
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• 2009

Ceramics have some properties that are unmatched by other kind of materials like metals or polymers. The ability of high thermal and chemical resistance and in case of being superior in specific mechanical properties makes the ceramic materials suitable for arange of applications. The microstructure and morphology of a material arguably permit the use of many advanced application otherwise difficult to achieve.Porous structures have some important applications in biomedical and environmental field. For human hard tissue reconstruction and augmentation procedure suitable biomaterials are used with a desirable porosity. A range of porous bioceramics were fabricated with tailored design to meet the demand of specific applications. Channeled and interconnected porosity was introduced in alumina, zirconia, and hydroxyapatite or tri calcium phosphate ceramics by different methods like multi-pass extrusion process, bubble formation in viscous slurry,slurry dripping in immiscible liquid, sponge replica method etc. The detailed microstructural and morphological investigations were carried out to establish the unique features of each method and the developed systems. For environmental filters the porous structures were also very important. We investigated a range of channeled and randomly porous silicon based ceramic composites to enhance the material stability and filtration efficiency by taking advantage of the material chemistry of the element. Detailed microstructural and mechanical characterizations were carried out for the fabricated porous filtration systems.

• 대한기계학회논문집A
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• 제27권12호
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• pp.2085-2091
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• 2003

An ultrasonic machining process has been known as efficient and economical means fer precision machining of glass or ceramic materials. However, because of its complexity, the mechanism of the machining process is still not well understood. Therefore, it is hard to optimize the process parameters effectively. The conventional ultrasonic machining which uses the abrasive slurry only, furthermore, is time-consuming and gives the relatively rough surface. In order to increase the material removal rate and improve the integrity of the machined surface, we have introduced the novel ultrasonic machining technique, Chemical-assisted UltraSonic Machining(CUSM). The desktop-style micro ultrasonic machine has been developed and the z-axis feed is controlled by the constant load control algorithm. To obtain the chemical effects, the low concentration HF(hydrofluoric acid) solution, which erodes glass, added to alumina slurry. Through various experiments and comparison with conventional results, the superiority of CUSM is verified. MRR increases over 200%, the surface roughness is improved and the machining load decreases dramatically.

• 한국세라믹학회지
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• 제50권6호
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• pp.460-465
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• 2013

Plate-shaped inorganic particles are coated onto a stainless steel substrate by the electrophoretic deposition of a precursor slurry which includes the inorganic particles of $Al_2O_3$ and polymer resin in mixed solvents to mimic the abalone shell structure, which is a composite of plate-shaped inorganic particles and organic interlayer binding materials with a layered orientation. The process parameters of the electrophoretic deposition include the voltage, coating time, and conductivity of the substrate. In addition, the suspension parameters are the particle size, concentration, viscosity, conductivity, and stability. We prepared an organic-inorganic composite coating with a high inorganic solid content by arraying the plate-shaped $Al_2O_3$ particles and electrophoretic resin via an electrophoretic deposition method. We analyzed the effect of the slurry composition and the electrophoretic deposition process parameters on the physical, mechanical and thermal properties of the coating layer, i.e., the thickness, density, particle orientation, Young's modulus and thermogravimetric analysis results.