Errects of $SiH_4/WF_6$ Ratio on the Electrical Properties of LPCVD W Films for Contact Metal
(Contact Barrier metal용 LPCVD W막의 전기적 특성에 대한 $SiH_4/WF_6$ 비의 효과)
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- Korean Journal of Materials Research
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- v.3 no.6
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- pp.661-667
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- 1993