• Title/Summary/Keyword: Alpha phase

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The electronic states and transition state of Zr and Hf oxide as a phase shift maske for DUV lithography (DUV lithography 위상 변위 마스크용 Zr, Hf Oxide의 전자상태 및 천이 상태 연구)

  • 김성관;김양수;노광수;허성민;최성운;송정민
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2003.11a
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    • pp.215-215
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    • 2003
  • 현재 이용되고 있는 위상 변위 마스크, 즉 Cr 계열의 마스크나 MoSiON 마스크는 DUV지역에서 낮은 굴절률을 갖는다. 그 겯과 마스크의 두께가 90 nm 이상이 되고, 웨이퍼에서 패턴 형성 시 에러율이 증가하게 된다. 본 연구에서는 DUV 지역에서 굴절률이 높을 것이라고 예상되는 Zr과 Hf의 oxide를 위상 변위 마스크 물질의 선정하고 각 물질의 전자 상태와 천이 상태를 분석하여 위상변위 마스크로써의 이용가능성을 연구하자 한다. 상온에서 Zr, Hf oxide의 안정한 구조는 cubic 구조와 monoclinic 구조이다. 현재 cubic 구조의 Zr, Hf oxide에 대한 전자 상태는 연구가 많이 되어 있는 반면 monoclinic 구조에서의 전자상태 연구는 미흡하다. 본 연구에서는 monoclinic 구조를 이용하여 Zr, Hf oxide의 클러스터 모델을 제작하였다. 제작된 클러스터 모델에 대하여 DV-X$\alpha$ 계산법을 적용, 기저상태의 전자상태를 계산하였다. 그리고 각 모델에서 Zr L-edge, Hf L-edge 그리고 O K-edge의 천이상태를 연구하여, 기저 상태의 전자상태와 천이상태를 연구하여 광학 성질과의 연관성을 연구하고자 하였다.

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Interaction of Hornet Venom and its Derivatives in the Phospholipid Membrane Environment (말벌 독성 물질과 그 유도체의 인지질 막 환경에서의 상호작용)

  • 이봉헌;박홍재
    • Journal of Environmental Science International
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    • v.7 no.1
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    • pp.62-66
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    • 1998
  • Toxic Mastoparan B(MP-B) which is purified from the venom of the hornet Vespa basalis is a cationic amphlphilic tetradecapeptide. MP-B and Its Ala-substituted analogues were synthesized by solld phase method and the toxic peptide-membrane interactions were examined by circular dichroism(CD) spectra, fluorescence spectra, and leakage abilities in phospholipid membranes. In the presence of phospholipid vesicles, synthetic MP-B and its analogues formed amphiphilic -helical structures, but in the buffer soletion, those exhibited random coil conformation as measured by CD. Fluorescence spectra of MP-B and its analogues which indicated the binding affinity of peptide on phospholipid vesicles showed that the replacement of Lys at position 2 and 11 with Ala caused a remarkable effect in the blue shalt and that at position 2, in the leakage ability of the peptide.

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Effect of Microstructures on the Deformation Behavior of Ti-6Al-4V Alloy at Ultra High Strain rate (Ti-6Al-4V합금의 미세조직에 따른 초고속 변형특성)

  • 이유환;이동근;이성학;최준홍;허선무;이종수
    • Journal of the Korea Institute of Military Science and Technology
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    • v.5 no.3
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    • pp.89-97
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    • 2002
  • In this study, the effect of $\alpha$-phase morphology on the dynamic deformation behavior at ultra high strain rate was investigated by EBW(Explosive Bridge Wire) test. All of tests and analyses were conducted on three typical microstructures of Ti-6Al-4V alloy, i.e. equiaxed, widmanstatten and bimodal microstructures. The spall strength and HEL(Hugoniot Elastic Limit) of the specimens that have the thickness of 2mm and 4mm were highest with the bimodal microstructure. These results were similar with previous study which was performed by dynamic torsion test(Kolsky torsion test).

An analysis of complex permeability of Mn-Zn ferrite doped with rare earth oxide. (희토류가 첨가된 Mn-Zn ferrite의 복소투자율 분석)

  • 김성수;최우성
    • Proceedings of the Korean Institute of Navigation and Port Research Conference
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    • 2000.11a
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    • pp.93-96
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    • 2000
  • In this study, we investigated the electromagnetic properties of Mn-Zn ferrite doped with rare earth oxide (Dy$_2$O$_3$, Er$_2$O$_3$). The main composition is 52mo1% $\alpha$-Fe$_2$O$_3$, 25mo1% Mn$_3$O$_4$23mo1% ZnO and doped with them(0.05wt%~0.25wt%, step:0.05wt%). An experimental process has advanced by conventional ferrimagnetism manufacturing that was prepared by standard ceramic techniques. The XRD pattern of all doped sample were observed spinel and secondary phase. The density of sample were measured nearly constant value. As increased the additive, resistivity, initial permeability and real component of the series complex permeability increased with setting limits each other. In case of Mn-Zn ferrite excess doped with them, resistivity, initial permeability and real component of the series complex permeability decreased and magnetic loss increased in proportion to increasing the additive.

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Review of Viscosities and Phases of Biogenic Secondary Organic Aerosols (생물기원 이차유기에어로졸의 점성도와 상 규명에 관한 최근 연구 동향)

  • Song, Mijung
    • Journal of Korean Society for Atmospheric Environment
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    • v.32 no.4
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    • pp.349-359
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    • 2016
  • Researchers have traditionally assumed that aerosol particles containing secondary organic aerosols (SOAs) are to be in liquid state with low viscosity even at low relative humidity. However, recent measurements showed that SOAs can have high viscosity under certain conditions. Herein, new different techniques for measurements of viscosities of SOA particles are introduced. Moreover, laboratory studies for the viscosities and the phases of biogenic SOAs produced by ${\alpha}$-pinene, isoprene, limonene, and ${\beta}$-caryophyllene of atmospheric relevance are reviewed. Future studies for determination of the phases of atmospheric aerosol particles are also suggested.

Characterization of Fe Nanocapsules synthesized by Plasma Arc Discharge Process (플라즈마 아크방전(PAD)법으로 제조된 Fe Nanocapsules의 특성)

  • Park Woo-Young;Youn Cheol-Su;Yu Ji-Hun;Oh Young-Woo;Choi Chul-Jin
    • Journal of Powder Materials
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    • v.11 no.6 s.47
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    • pp.510-514
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    • 2004
  • Iron-carbon nanocapsules were synthesized by plasma arc discharge (PAD) process under various atmosphere of methane, argon and hydrogen gas. Characterization and surface properties were investigated by means of HRTEM, XRD, XPS and Mossbauer spectroscopy. Fe nanocapsules synthesized were composed of three phases $({\alpha}-Fe,\;Y-Fe\;and\;Fe_{3}C)$ with core/shell structures. The surface of nanocapsules was covered by the shell of graphite phase in the thickness of $4{\~}5$nm.

Microstructure and Magnetic Properties of Nanostructured Fe-Co Alloy Powders Produced by Chemical Solution Mixing and Hydrogen Reduction Methods (화학용액혼합과 수소환원법으로 제조된 나노 구조 Fe-Co 합금분말의 미세구조 및 자성 특성)

  • 박현우;이백희;이규환;김영도
    • Journal of Powder Materials
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    • v.10 no.5
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    • pp.333-336
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    • 2003
  • The purpose of this study is the fabrication of nano-sized Fe-Co alloy powders with soft magnetic properties by the slurry mixing and hydrogen reduction (SMHR) process. $FeCl_2$0 and $CoCl_2$ powders with 99.9% purities were used for synthesizing nanostructured Fe-Co alloy powder. Nano-sized Fe-Co alloy powders were successfully fabricated using SMHR, which was performed at 50$0^{\circ}C$ for 1 h in H$_2$ atmosphere. The fabricated Fe-Co alloy powders showed $\alpha$' phase (ordered body centered cubic) with the average particle size of 45 nm. The SMHR powder exhibited low coercivity force of 32.5 Oe and saturation magnetization of 214 emu/g.

Effect of the Process Parameters on the Fe Nano Powder Formation in the Plasma Arc Discharge Process (플라즈마 아크 방전법에서 Fe 나노 분말 형성에 미치는 공정변수의 영향)

  • 이길근;김성규
    • Journal of Powder Materials
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    • v.10 no.1
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    • pp.51-56
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    • 2003
  • To investigate the effect of the parameters of the plasma arc discharge process on the particle formation and particle characteristics of the iron nano powder, the chamber pressure, input current and the hydrogen volume fraction in the powder synthesis atmosphere were changed. The particle size and phase structure of the synthesized iron powder were studied using the FE-SEM, FE-TEM and XRD. The synthesized iron powder particle had a core-shell structure composed of the crystalline $\alpha$-Fe in the core and the crystalline $Fe_3O_4$ in the shell. The powder generation rate and particle size mainly depended on the hydrogen volume fraction in the powder synthesis atmosphere. The particle size increased simultaneously with increasing the hydrogen volume fraction from 10% to 50%, and it ranged from about 45nm to 130 nm.

Inclusion Compound of Flurbiprofen with Cyclodextrin (Flurbiprofen과 Cyclodextrin과의 포접화물(包接化物)에 관한 연구(硏究))

  • Paik, Wan-Sook;Young, Jae-Ick;Kim, Kil-Soo
    • Journal of Pharmaceutical Investigation
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    • v.15 no.1
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    • pp.15-21
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    • 1985
  • The inclusion of ${\alpha}-cyclodextrin$ and ${\beta}-cyclodextrin$ with flurbiprofen in aqueous phase was investigated by UV absorption and circular dichroism spectroscopies. The inclusion complex in solid powder form were made by the freeze-drying and coprecipitation methods in molar ratio 1:1. The inclusion complex formation was confirmed by infrared absorption spectroscopy. The freeze-drying method was successful in obtaining the inclusion compounds compared with the coprecipitation method. The dissolution of solid flurbiprofen inclusion complex was examined in comparison with those of flurbiprofen alone. The inclusion complex obtained by freeze-drying method increased the dissolution rate.

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Synthesis of ${\beta}-FeSi_2$ Powder by Mechanical Alloying Process (기계적 합금화법에 의한 ${\beta}-FeSi_2$ 분말 함성)

  • 이충효;조재문;김환태;권영순
    • Journal of Powder Materials
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    • v.8 no.2
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    • pp.104-109
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    • 2001
  • The semiconducting ${\beta}-FeSi_2$ compound has been recognized as a thermoelectric material with excel-lent oxidation resistance and stable characteristics at elevated temperature. In the present work, we applied mechanical alloying(MA) technique to produce ${\beta}-FeSi_2$ compound using a mixture of elemental iron and silicon powders. The mechanical alloying was carried out using a Fritsch P-5 planetary mill under Ar gas atmosphere. The MA powders were characterized by the X-ray diffraction with Cu-K $\alpha$ radiation, thermal analysis and scanning electron microscopy. The single ${\beta}-FeSi_2$ phase has been obtained by mechanical alloying of $Fe_{33}Si_{67}$ mixture powders for 120 hrs or for 70 hrs coupled with the subsequent heat treatment up to $700^{\circ}C$. The grain size of ${\beta}-FeSi_2$ powders analyzed by Hall plot method was 44nm.

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