• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 하계학술대회 논문집
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• pp.725-728
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• 2001

We have fabricated thin films using the DC/RF magnetron sputtering of 74wt%Ni-l8wt%Cr-4wt%Al-4wt%Cu alloy target and studied the effect of the process parameters on the electrical properties for low TCR(Temperature Coefficient of Resistance) films. In sputtering process, pressure, power and substrate temperature, are varied as controllable parameter. The films are annealed to 400$^{\circ}C$ in air and nitrogen atmosphere. The sheet resistance, TCR of the films increases with increasing annealing temperature. It abruptly increased as annealing temperature increased over 300$^{\circ}C$ in air atmosphere. From XRD, it is found that these results are due to the existence of NiO on film surface formed by annealing. As a results of them, TCR can be controlled by variation of sputter process parameter and annealing of thin film.

• 한국자동차공학회논문집
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• 제12권5호
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• pp.25-31
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• 2004

In order to prepare for the large power diesel vehicle, the current trend of advanced nations is to shift from the aluminum alloy piston to the steel piston. In this research, a steel forging piston which replaces the aluminum alloy piston is developed to improve the power performance of the diesel engine. The three dimensional flow and combustion analysis of the target engine is conducted. Using the result of the analysis, the piston is optimized, and a prototype of the articulated steel forging piston is built. The reliability of the piston has been evaluated through durability test using a Hydropuls Test Machine for 300,000 km.

• Smart Structures and Systems
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• 제5권6호
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• pp.645-662
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• 2009

Adaptive wings are capable of properly modifying their shape depending on the current aerodynamic conditions, in order to improve the overall performance of a flying vehicle. In this paper is presented the concept design of a small-scale compliant wing rib whose outline may be distorted in order to switch from an aerodynamic profile to another. The distortion loads are induced by shape memory alloy actuators placed within the frame of a wing section whose elastic response is predicted by the matrix method with beam formulation. Genetic optimization is used to find a wing rib structure (corresponding to the first airfoil) able to properly deforms itself when loaded by the SMA-induced forces, becoming as close as possible to the desired target shape (second airfoil). An experimental validation of the design procedure is also carried out with reference to a simplified structure layout.

• 한국진공학회지
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• 제8권4A호
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• pp.438-444
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• 1999

The characterization of the reactively sputtered ITO layer on the PET film has been studied. The PEM device has been used to determine the optimum stoichimetry through control of the amount of oxygen incorporated into the alloy target and the optimum operation conditions to produce films with the highest electrical conductivity and visible transparency. The PEP film was pre-treated under the plasma discharge condition to remove the adsorbed gases and to modify the surface morphology. The results revealed that by adjusting the flow rate of oxygen with the spectral intensity of indium target, the composition of plasma gas can be kept constant during the entire deposition period. The resistivity of ITO film obtained was fond to be about 37$\Omega\Box$, and the transmittance of visual range was about 86%.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1997년도 추계학술대회 논문집
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• pp.510-514
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• 1997

The thin film that is electrically conductive and optically transparent is called conductive transparent thin film. ITO(Indium-Tin Oxide) which is a kind of conductive transparent thin film has been widely used in solar cell, transparent electrical heater, selective optical filter, FDP(Flat Display Panel) such as LCD(Liquid Crystal Display), PDP(Plasma Display Panel) and so on. Especially in PDP, ITO films is used as a transparent electrode in order to maintain discharge and decrease consumption power through the improvement of cell structure. In this study, we prepared ITO by reactive r.f. sputtering with indium-tin(Sn 10wt%) alloy target instead of indium-tin oxide target. The ITO films deposited at low temperature 15$0^{\circ}C$ and 8% $O_2$. Partial pressure showed about 3.6 Ω/$\square$. At the end of firing, the resistance of ITO was decreased, the optical transparence was improved above 90%.

• 한국표면공학회지
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• 제54권5호
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• pp.285-293
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• 2021

High-entropy TiAlCrSiN nano-composite coating was designed to improve mold life for high temperature liquid molding. Alloy design, powder fabrication and single alloying target fabrication for the high-entropy nano-composite coating were carried out. Using the single alloying target, an arc ion plating method was applied to prepare a TiAlCrSiN nano-composite coating had a 30 nm TiAlCrSiN layers are deposited layer by layer, and form about 4 ㎛-thickness of multi-layered coating. TiAlCrSiN nano-composite coating had a high hardness of about 39.9 GPa and a low coefficient of friction of less than about 0.47 in a dry environment. In addition, there was no change in the structure of the coating after the dissolution loss test in the molten metal at a temperature of about 1100 degrees.

• 열처리공학회지
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• 제8권4호
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• pp.333-339
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• 1995

The reduction and diffusion process(R-D process) is an economical way to produce the functional materials which contain rare-earth elements and has been applied to the production of rare-earth magnet meterials($SmCo_5$, $Nd_{15}Fe_{77}B_8$), magneto-optical(MO) target materials and hydrogen storage alloy, etc. However, because of difficult to control of the final composition, the R-D process has not been applied to production of the 2-17 type rare earth permanent magnet materials which contain several elements. Therefore, this work was as a basic study for the production of the 2-17 type rare earth permanent materials with composition $Sm(Co_{0.72}Fe_{0.21}Cu_{0.05}Zr_{0.03})_{7.9}$ by the R-D process, the following were mainy examined ; the amount of metallic calcium as a reductant, homogenization condition of the alloy after the R-D reaction, masuring of magnetic properties of the sample after step aging. The sample prepared by the R-D process contained a little more oxygen than that prepared by the melting method, however, showed almost the same magnetic properties.

• 한국재료학회지
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• 제9권4호
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• pp.341-344
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• 1999

We reported compositional separation(CS) into Co-enriched and Cri-enriched components inside the grains of Co-Cr based thin films prepared by rf sputtering. CS strongly depends on the sputtering conditions of substrate temperature and target composition. Tuning the microstructure of the Co-Cr films is important in order to employ the CS for high-density magnetic recording. We investigated the origin of CS from thermodynamic viewpoint. We employ a spinodal decomposition-like model to describe the origin of the CS in Co-Cr films. We consider the total free energy of the Co-Cr films as the sum of several free energies of; 1) thermodynamic mixing entropy of a binary solid solution, 2) magnetic ordering interaction(MOI) energy below the Curie temperature, and 3) excess interaction energy(XS) caused by the sputtering process as a function of temperature and composition. Those energies distorted the total free energy like the spinodal decomposition and caused the compositionally separated fine microstructure inside the grains. If the second derivative of the total free energy with respect to Cr composition becomes negative at a given substrate temperature, we may observe a metastable compositional separation inside the Co-Cr alloy films. We expect to exploit the microstructure of CS for ultra-high density magnetic recording.

• 한국수소및신에너지학회논문집
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• 제19권6호
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• pp.482-489
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• 2008

Ti-Cr alloys consist of BCC solid solution, C36, C14 and C15 Laves phase at high temperature. Among others, the BCC solid solution phase was reported to have a high hydrogen storage capacity. However, activation, wide range of hysteresis at hydrogenation/dehydrogenation, and degradation of hydrogen capacity due to hydriding/dehydriding cycles must be improved for its application. In this study, to improve such problems, we added a Nb. For attaining target materials, Ti-10Cr-xNb(x=1, 3, 5wt.%) specimens were prepared by arc melting. The arc melting process was carried out under argon atmosphere. As-received specimens were characterized using XRD(X-ray diffraction), SEM(Scanning Electron Microscopy) with EDX(Energy Dispersive X-ray) and TG/DSC(Thermo Gravimetric Analysis/Differential Scanning Calorimetry). In order to examine hydrogenation behavior, the PCI(pressure-Composition-Isotherm) was performed at 293, 323, 373 and 423K.

• 한국재료학회지
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• 제4권5호
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• pp.535-540
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• 1994

Thin film magnet was fabricated by radio frequency magnetron sputtering using $Nd_13/(Fe.Co)_{70}B_{17}$ alloy target and magnetic properties were investigated according to sputtering conditions from the metallurgical point of view. we could obtain the best preferred orientation of $Nd_2Fe_{14}B$ phase at substrate temperatures between $450^{\circ}C$ and $460^{\circ}C$ with the input power 150W, and thin films had the anisotropic magnetic properties. But, as the thickness of thin film increased, the c-axis orientation gradually tended to be disordered and magnetic properties also become isotropic. Just like Nd-Fe-B meltspun ribbon, the microstructure of thin film magnet was consisted of very find cell shaped $Nd_2Fe_{14}B$ phase and the second phase along grain boundary. While, domain structure showed maze patterns whose magnetic easy axis was was perpendicular to film plane of thin film. It was concluded from these results that the perpendicualr anisotropy in magnetization was attributed to the perpendicular alignment of very find $Nd_2Fe_{14}B$ grains in thin film.