• Journal of the Korean Society for Precision Engineering
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• v.23 no.5 s.182
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• pp.103-110
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• 2006

Automatic optical alignment modules are a key technology in optical communication system. However, the optic component assembly depends highly on manual or semi-automated alignment process. In this paper, a novel alignment mechanism with minimum degree-of-freedom has been designed and theoretical models are derived from geometric optical characteristics on collimators, optical filters and optical ray alignment. The automatic alignment control algorithm has been newly developed based on the mechanism and models, and then we make fast, precise and reliable alignment through the algorithm. The reliability of developed modules has been verified with various simulations and performance evaluations.

• Journal of the Semiconductor & Display Technology
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• v.10 no.4
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• pp.79-87
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• 2011

In this paper, suggested is a hybrid-type visual alignment system to align mask and panel in 3-D space, where mask and panel are to be controlled independently by two individual positioning mechanisms in order to compensate for spatial misalignments. In the hybrid visual alignment system, the below 4-PPR parallel mechanism provides in-plain motions to pattern mask like the other conventional alignment systems while the above 4-RPS parallel mechanism is to move glass panel to achieve a complete spatial alignment. For the control of the hybrid alignment system, first, inverse kinematic solutions for the parallel mechanisms are given to determine the driving distance of each active joint, and also an efficient way to determine the spatial alignment error is developed by exploiting three in-plane cameras.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.20 no.6
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• pp.756-760
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• 2011

This paper proposed an alignment stage driven by piezo actuators for alignment process of a contact-type lithography. Among contact-type lithography processes, an UV-curable nanoimprint process is an unique process to be able to align patterns on upper and lower layers. An alignment stage of the UV-curable nanoimprint process requires nano-level resolution as well as high stiffness to overcome friction force due to contact moving. In this paper, the alignment stage consists of a compliant mechanism using flexure hinges, piezo actuators for high force generation, and capacitive sensors for high-resolution measurement. The compliant mechanism is implemented by four prismatic-prismatic compliant chains for two degree-of-freedom translations. The compliant mechanism is composed of flexure hinges with high stiffness, and it is directly actuated by the piezo actuators which increases the stiffness of the mechanism, also. The performance of the ultra-precision stage is demonstrated by experiments.

• Journal of Institute of Control, Robotics and Systems
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• v.15 no.9
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• pp.887-893
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• 2009

In this paper, a mask-panel alignment robot system is considered for IT industry applications. Two kinds of solutions are suggested which are required in constructing a control system for the alignment robot with actuation redundancy. First, the kinematic solution for the 4PPR parallel positioning mechanism is formulated for an arbitrary initial posture, which relates the mask-panel misalignment in the task space and the desired actuator displacements in the joint space. Secondly, in order to increase the stiffness of the control motion and also to avoid the mechanical lock which may happen due to the redundant actuation, a new synchronous control method is proposed which has the merit of coordinating joint control motions while not losing individual joint control performance. In addition, the engineering process to develop a visual alignment robot system is described with the results of experimental setup and GUI software. Finally, the experimental results demonstrate the effectiveness of the proposed alignment system control methodology and how much beneficial it will be in real industrial applications.

• Journal of Institute of Control, Robotics and Systems
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• v.14 no.4
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• pp.369-375
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• 2008

The kinematics and control problem of a visual alignment system is investigated, which plays a crucial role in the fabrication process of flat panel displays. The first solution is the inverse kinematics of a 4PPR parallel alignment mechanism. It determines the driving distance of each joint to compensate the misalignment between mask and panel. Second, an efficient vision algorithm for fast alignment mark recognition is suggested, where by extracting essential feature points to represent the geometry of a mark, the geometric template matching enables much faster object recognition comparing with the general template matching. Finally, the overall visual alignment process including the kinematic solution, vision algorithm, and joint control is implemented and experimental results are given.

• International Journal of Aerospace System Engineering
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• v.5 no.2
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• pp.8-15
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• 2018

For small earth observation satellites, alignment between the optical components is important for precise observation. However, satellite cameras are structurally subject to misalignment in the launch environment where vibration excitations and impacts apply, and in space environments where zero gravity, vacuum, radiant heat and degassing occur. All of these variables can cause misalignment among the optical components. The misalignment among optical components results in degradation of image quality, and a re-alignment process is needed to compensate for the misalignment. This process of re-alignment between optical components is referred to as a refocusing process. In this paper, we proposed a 3 - axis focusing mechanism to perform the refocusing process. This mechanism is attached to the back of the secondary mirror and consists of three piezoelectric inertia-friction actuators to compensate the x-axis, y-axis tilt, and de-space through three-axis motion. The fabricated focus mechanism demonstrated excellent servo performance by experimenting with PD servo control.

• 한국정보디스플레이학회:학술대회논문집
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• 2005.07a
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• pp.755-758
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• 2005

The mechanism responsible for liquid crystal (LC) alignment on solid substrates treated with mechanical rubbing or polarized UV is not understood. The results of x-ray reflectivity study of LC alignment on a large number of different alignment layers show that the anisotropy in the surface roughness of the substrate completely determines the LC alignment. The anchoring energy depends on the degree of roughness anisotropy and chemical interactions between the substrate and LC molecules.

• Polymer(Korea)
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• v.30 no.5
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• pp.417-421
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• 2006

Photo -alignment of poly (siloxane cinnamate) (PSCN) was studied to better understand the alignment mechanism of cynnamoyl groups under various process conditions. DSC and polarized microscope studies showed that the isotropic temperature oi PSCN was about $105^{\circ}C$ and the liquid crystallinity, once formed, did not completely disappear even when the temperature went into the isotropic regions. UV/Vis absorption study suggested that the photo - dimerization was the main photo alignment mechanism and it's efficiency could be enhanced through the self-alignment of PSCN. It was also found that photo-dimerization was in competition with photo-fries reaction and the photo- alignment of PSCN was interfered with the excessive UV because of the strong photo-fries reaction. However, photo - fries reaction could be suppressed by adjusting the UV wavelength.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.219-224
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• 2004

In recent years, as the demands of VBNS(Very high speed Backbone Network Service) and VDSL(Very high-data rate Digital Subscriber Line) increase, the development of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, WDM elements increase. The alignment and the attachment technology are very important to fabricate the optical elements for communication. In this paper, the mechanism of rotational stage, the contact sensing unit, and integrated control circuit for the optical alignment system are studied.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.551-554
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• 2000

Alignment system is a system to locate an object to it's accurate position in multi-d.o.f space. According to process of application, it is need to align an object in 3 or 6 d.o.f. space. And alignment system is used in various environments. Especially in PDP application, alignment process is carried out in vaccume environment. In this paper, we developed 3 d.o.f. alignment system for vaccume environment, performed kinematic analysis and improved it's positional accuracy.