• 제목/요약/키워드: Aligned thin film

검색결과 115건 처리시간 0.027초

Simulation of Modeling Characteristics of Pumping Design Factor on Vacuum System

  • Kim, Hyung-Taek;Cho, Han-Ho
    • International journal of advanced smart convergence
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    • 제5권2호
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    • pp.1-7
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    • 2016
  • Recently, with the development of advanced thin film devices comes the need for constant high quality vacuum as the deposition pressure is more demanding. It is for this reason our research seeks to understand how the variable design factors are employed in such vacuum systems. In this study, the effects of design factor applications on the vacuum characteristics were simulated to obtain the optimum design modeling of variable models on an ultra high vacuum system. The commercial vacuum system simulator, $VacSim^{(multi)}$, was used in our investigation. The reliability of the employed simulator was verified by the simulation of the commercially available models of ultra high vacuum system. Simulated vacuum characteristics of the proposed modeling aligned with the observed experimental behavior of real systems. Simulated behaviors showed the optimum design models for the ideal conditions to achieve optimal pressure, pumping speed, and compression ratio in these systems.

Monolithic Integration of Arrays of Single Walled Carbon Nanotubes and Sheets of Graphene

  • 홍석원
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2012년도 춘계학술발표대회
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    • pp.68.2-68.2
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    • 2012
  • We present a scheme for monolithically integrating aligned arrays of single walled carbon nanotubes (SWNTs) with sheets of graphene, for use in electronic devices. Here, the graphene and arrays of SWNTs are formed separately, using chemical vapor deposition techniques onto different, optimized growth substrates. Techniques of transfer printing provide a route to integration, yielding two terminal devices and transistors in which patterned structures of graphene form the electrodes and the SWNTs arrays serve as the semiconductor. Electrical testing and analysis reveal the properties of optically transparent transistors that use this design, thereby giving insights into the nature of contacts between graphene and SWNTs.

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Fabrication of Functional Nanomaterials by Peptide Self-Assembly

  • 박찬범
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2009년도 춘계학술발표대회
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    • pp.8.1-8.1
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    • 2009
  • The self-assembly of peptide-based building blocks into nanostructures is an attractive route for fabricating novel materials because of their capacity for molecular recognition and functional flexibility as well as the mild conditions required in the fabrication process. Among various peptide-based building blocks forming nanostructures, the simplest building blocks are aromatic dipeptides like diphenylalanine, which can readily self-assemble into nanotubes in aqueous solutions at ambient conditions. Recently, we have developed a high-temperature solid-phase self-assembly process for diphenylalanine. Through this novel process, we succeeded in the growth of vertically well-aligned, uniform nanowires from amorphous peptide thin film. To demonstrate the versatility of our approach, we also fabricated a micropattern of peptide nanowires by combining our solid-phase growth method and simple soft lithographic techniques. We believe that our studies on peptide self-assembly will provide a new horizon for peptide-based nanofabrication.

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동시증착에 의한 $Cd_{1-x}Zn_xS$ 박막제작 및 특성에 관한 연구 (Growth and Properties of the $Cd_{1-x}Zn_xS$ Thin Film by Co-evaporation)

  • 이재형;이호열;박용관;송우창;신성호;신재혁;박광자
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1997년도 하계학술대회 논문집 C
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    • pp.1283-1285
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    • 1997
  • In this paper, structural, optical and electrical properties of $Cd_{1-x}Zn_xS$ thin films prepared by co-evaporation method were studied. The crystal structure of $Cd_{1-x}Zn_xS$ films deposited at a substrate temperature of $150^{\circ}C$ was hexagonal with the c axis aligned perpendicular to the substrate. As increasing composition parameter x, the intensity of (002) peak decreased, which means poor crystalline and decreasing of preferential orientation. The optical bandgap of $Cd_{1-x}Zn_xS$ films varies from 2.41eV for CdS to 3.48eV for ZnS with x. The resistivity of the $Cd_{1-x}Zn_xS$ films increased with x.

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수평형 CVD 장치에서 기판 위치에 따른 단일벽 탄소나노튜브의 합성 수율 및 직경 분포 고찰 (Investigation of Synthesis Yield and Diameter Distribution of Single-Walled Carbon Nanotubes Grown at Different Positions in a Horizontal CVD Chamber)

  • 조성일;정구환
    • 한국표면공학회지
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    • 제52권6호
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    • pp.357-363
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    • 2019
  • We investigated a synthesis yield and diameter distribution of single-walled carbon nanotubes (SWNTs) with respect to the growth position in a horizontal chemical vapor deposition (CVD) chamber. Thin films and line-patterned Fe films (0.1 nm thickness) were prepared onto ST-cut quartz substrates as catalyst to compare the growth behavior. The line-patterned samples showed higher growth density and parallel alignment than those of the thin film catalyst samples. In addition, line density of the aligned SWNTs at central region of the chamber was 7.7 tubes/㎛ and increased to 13.9 tubes/㎛ at rear region of the CVD chamber. We expect that the enhanced amount of thermally decomposed feedstock gas may contribute to the growth yield enhancement at the rear region. In addition, the lamina flow in the chamber also contribute to the perfect alignment of the SWNTs based on the value of gas velocity, Reynold number, and Knudsen coefficient we employed.

Cu(Mg) alloy의 산화방지막 형성에 영향을 미치는 인자 (Factors affecting passivation of Cu(Mg) alloy film)

  • 조흥렬;조범석;이원희;이재갑
    • 한국진공학회지
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    • 제9권2호
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    • pp.144-149
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    • 2000
  • Cu(4.5at.% Mg) target을 이용하여 sputtering에 의해 증착된 Cu(Mg) alloy박막의 열처리시 형성되는 산화 방지막 MgO의 박막 특성에 영향을 주는 인자에 대해 살펴보았다. MgO 박막의 산화방지 능력 및 막질에 영향을 주는 인자로는 열처리 온도, $O_2$ 압력, Mg 농도 등으로 나타났다. MgO 박막의 두께는 열처리 온도가 증가함에 따라 증가하다 $500^{\circ}C$ 이상에서는 150 $\AA$ 정도의 성장한계두께를 나타내었다. 표면에 형성되는 MgO 박막은 $O_2$압력이 낮을수록, Mg의 농도가 높을수록 치밀한 MgO가 형성되어 산화방지에 우수한 특성을 보였으며 전 열처리 과정인 진공 열처리 공정은 1at.%정도의 낮은 Mg 농도에서도 치밀한 MgO형성에 매우 효과적임이 확인되었다. 본 연구에서 Cu(Mg) alloy박막의 열처리를 통해 낮은 저항의 Cu박막의 형성과 동시에 산화방지에 우수한 특성을 보이는 MgO 박막을 열처리 온도, $O_2$ 압력, Mg 농도 등의 최적조건을 이용하여 얻어질 수 있음을 확인하였다.

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이온빔 조사를 사용한 탄탈륨 산화막에서의 액정 배향에 대한 조사 (Research of Liquid Crystal Alignment on Tantalum Oxide by Using Ion Beam Irradiation)

  • 임지훈;오병윤;이원규;이강민;나현재;박홍규;서대식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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    • pp.300-300
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    • 2008
  • In this study, the advanced DuoPIGatron-type ion beam (IB) system was applied to inorganic thin film for aligning liquid crystal (LC). LC alignment on $Ta_2O_5$ via IB irradiation was embodied. As a result of IB irradiation, the homogeneously aligned liquid crystal display (LCD) on $Ta_2O_5$ was observed with low pretilt angles. The $Ta_2O_5$ were deposited on indium-tin-oxide coated Coming 1737 glass substrates by rf magnetron sputtering at $200^{\circ}C$. The deposition process resulted in forming very uniform thin film on glass substrates without any defects. To confirm the application of the inorganic alignment on modem display optical devices, we fabricated twisted nematic LCD and measured optical property and response time. As a result of the experiment, the electro optical characteristics of the LCD fabricated by using IB irradiation on $Ta_2O_5$ alignment layer were similar with the other LCD fabricated by using rubbing process.

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Liquid Crystal Alignment Effects on Nitrogen-doped Diamond like Carbon Layer by Ion Beam Alignment Method

  • Han, Jeong-Min;Choi, Sung-Ho;Kim, Byoung-Yong;Han, Jin-Woo;Kim, Jong-Hwan;Kim, Young-Hwan;Hwang, Jeoung-Yeon;Lee, Sang-Keuk;Ok, Chul-Ho;Seo, Dae-Shik
    • Transactions on Electrical and Electronic Materials
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    • 제8권1호
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    • pp.46-50
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    • 2007
  • We have studied the nematic liquid crystal (NLC) alignment effects on a nitrogen-doped diamond-like carbon (NDLC) thin film layer with ion beam irradiation. The pretilt angle for NLC on the NDLC surface with ion beam exposure was observed below 1 degree. Also, we had the good LC alignment characteristics on the NDLC thin films with ion beam exposure of 1800 eV. In thermal stability experiments, the alignment defect of the NLC on the NDLC surface with ion beam irradiation above annealing temperature of $250^{\circ}C$ can be observed. Therefore, the good thermal stability and LC alignment for NLC by ion beam aligned NDLC thin films can be achieved.

유기 분자선 증착법(OMBD)에 의한 $alpha-sexithiophene$ 박막의 제조와 특성 (The preparation of $alpha-sexithiophene$ thin films by organic molecular beam deposition method and their characteristics)

  • 권오관;김영관;손병청;박주상;변대현;신동명;최종선
    • 한국진공학회지
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    • 제7권4호
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    • pp.361-367
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    • 1998
  • 유기 박막 트렌지스터의 활성층으로 사용하기 위하여 공액성 소중합체인 $\alpha$ -sexithiophene($\alpha$-6T)이라는 시료를 가지고 유기 분자선 증착법(OMBD)을 이용하여 박막 을 제작하였으며 $\alpha$-6T박막의 성막 조건에 따른 박막의 분자 배향, 결정구조 그리고 표면 특성을 알아보기 위해 angle-resolved UV/visible absorption spectroscopy, X-ray diffractometry(XRD) 그리고 atomic force microscopy(AFM)를 이용하였으며 그 분석 결과 성막 조건에 관계없이 모두 monoclinic한 결정구조를 갖으나, 초고진공, 낮은 성막 속도, 기 판의 온도가 높은 조건일 경우 $\alpha$-6T 분자들이 기판에 수직적으로 배열한다는 것을 확일할 수 있었다.

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레이저에 의해 생성된 Si 박막의 주기적 표면 구조에서의 도파모드 공진 연구 (Guided-mode Resonances in Periodic Surface Structures Induced on Si Thin Film by a Laser)

  • 이지혁;이윤주;홍현;조은솔;박지영;김주현;강민진;황의선;정병호
    • 한국광학회지
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    • 제34권6호
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    • pp.241-247
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    • 2023
  • 본 연구에서는 355 nm 파장의 나노초 레이저를 비정질 실리콘 박막에 조사하여 형성된 주기적 laser-induced periodic surface structure (LIPSS) 구조의 분광학적 특성을 연구하였다. 지름 196 ㎛의 가우시안 빔을 단위면적당 레이저 펄스 190-280회, 레이저 빔의 세기는 100-130 mJ/cm2 범위에서 'ㄹ' 자 형태로 2차원 스캔하였다. 그 결과 Si 박막 표면에 ~300 nm 주기의 LIPSS 구조가 레이저 편광에 수직 방향으로 정렬되었다. 시료의 투과율 스펙트럼을 측정하여 transverse-electric 편광과 transverse-magnetic 편광에 대해서 각각 700 nm, 500 nm 근방에서 dip이 관측되었다. 이 현상을 설명하기 위해 1차원 격자구조 모델을 이용하여 rigorous coupled-wave analysis를 이용한 시뮬레이션을 하여 편광에 따른 도파모드 공진에 의한 특성임을 규명하였다.