• Title/Summary/Keyword: Al-P

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A Study on the pH-, pNa- and pK-Sensing Properties of K and Al Coimplanted SiO$_2$ Thin Films (K 및 Al 이중이온주입된 SiO$_2$ 박막의 pH, pNa 및 pK 농도 감지특성에 관한 연구)

  • 김병수;신백균;이붕주;이덕출
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.52 no.7
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    • pp.293-297
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    • 2003
  • Silicon dioxide (SiO$_2$) layers were fabricated on Si$_3$N$_4$/SiO$_2$/Si layer structures by low pressure chemical vapor deposition (LPCVD). Potassium and aluminum were then coimplanted by implanting potassium ions with the energy of 100 [keY] and dose of 5x10$^{16}$ [cm ̄$^2$] and 1x10$^{17}$ [cm ̄$^2$] into an aluminum buffer layer on the SiO$_2$Si$_3$N4/SiO$_2$/Si structure. The pH, pNa, and pK ion sensitivities of the resulting layers were investigated and compared to those of as-deposited silicon dioxide layer. The pK-sensitivity of the silicon dioxide was enhanced by the K and Al coimplantation. On the contrary, the pH and pNa-sensitivities of the coimplanted silicon dioxides were quite lower than that of the as-deposited silicon dioxide.

Study of Selective Etching of GaAs-based Semiconductors using High Density Planar Inductively Coupled $BCl_3/CF_4$ Plasmas (고밀도 평판형 유도결합 $BCl_3/CF_4$ 플라즈마에 의한 GaAs 계열반도체의 선택적 식각에 관한 연구)

  • Choi, Chung-Ki;Park, Min-Young;Jang, Soo-Ouk;Yoo, Seung-Ryul;Lee, Je-Won;Song, Han-Jung;Jeon, Min-Hyon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.07a
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    • pp.46-47
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    • 2005
  • 이번 연구는 $BCl_3/CF_4$ 플라즈마를 사용하여 반도체소자 제조 시 널리 이용되는 GaAs 계열반도체 중 대표적인 재료인 GaAs/AlGaAs 및 GaAs/InGaP 구조를 선택적으로 건식 식각한 후 분석한 것이다. 공정변수로는 ICP 소스파워를 0-500W, RIE 파워를 0-50W 그리고 $BCl_3/CF_4$ 가스 혼합비를 중점적으로 변화시켰다. $BCl_3$ 플라즈마만을 사용한 경우 (20$BCl_3$, 20W RIE power, 300W ICP source power, 7.5mTorr) 는 GaAs:AlGaAs의 선택비가 0.5:1 이었으며 이때 GaAs의 식각률은 ~2200${\AA}/min$ 이었으며 AlGaAs의 식각률은 ~4500${\AA}/min$ 이었다. 식각 후 표면의 RMS roughness은 < 2nm로 깨끗한 결과를 보여주었다. 15% $CF_4$ 가스가 혼합된 $17BCl_3/3CF_4$, 20W RIE power, 300W ICP source power, 7.5mTorr의 조건에서 3분 동안 공정한 결과 순수한 $BCl_3$ 플라즈마만을 사용한 경우보다 표면은 다소 거칠었지만 (RMS roughness: ~8.4) GaAs의 식각률 (~980nm/min)과 AlGaAs와 InGaP에 대한 GaAs의 선택도 (GaAs:AlGaAs=16:1, GaAs:InGaP=38:1)는 크게 증가하였다. 그리고 AlGaAs 및 InGaP의 경우 식각 시 나타난 휘발성이 낮은 식각 부산물 ($AlF_3:1300^{\circ}C$, $InF_3:1200^{\circ}C$)로 인하여 50nm/min 이하의 낮은 식각률을 보였고, 62.5%의 $CF_4$가 혼합된 $7.5BCl_3/12.5CF_4$플라즈마의 조건에서는 AlGaAs 및 InGaP에 대한 GaAs의 선택도가 각각 280:1, 250:1을 나타내었다.

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Seasonal changes in soil acidity and related properties in ginseng artificial bed soils under a plastic shade

  • You, Jiangfeng;Liu, Xing;Zhang, Bo;Xie, Zhongkai;Hou, Zhiguang;Yang, Zhenming
    • Journal of Ginseng Research
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    • v.39 no.1
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    • pp.81-88
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    • 2015
  • Background: In Changbai Mountains, Panax ginseng (ginseng) was cultivated in a mixture of the humus and albic horizons of albic luvisol in a raised garden with plastic shade. This study aimed to evaluate the impact of ginseng planting on soil characteristics. Methods: The mixed-bed soils were seasonally collected at intervals of 0-5 cm, 5-10 cm, and 10-15 cm for different-aged ginsengs. Soil physico-chemical characteristics were studied using general methods. Aluminum was extracted from the soil solids with $NH_4Cl $(exchangeable Al) and Na-pyrophosphate (organic Al) and was measured with an atomic absorption spectrophotometer. Results: A remarkable decrease in the pH, concentrations of exchangeable calcium, $NH_4^+$, total organic carbon (TOC), and organic Al, as well as a pronounced increase in the bulk density were observed in the different-aged ginseng soils from one spring to the next. The decrease in pH in the ginseng soils was positively correlated with the $NH_4^+$ (r=0.463, p<0.01), exchangeable calcium (r=0.325, p<0.01) and TOC (r= 0.292, p < 0.05) concentrations. The $NO_3^-$ showed remarkable surface accumulation (0-5 cm) in the summer and even more in the autumn but declined considerably the next spring. The exchangeable Al fluctuated from $0.10mg\;g^{-1}$ to $0.50mg\;g^{-1}$ for dry soils, which was positively correlated with the $NO_3^-$ (r=0.401, p < 0.01) and negatively correlated with the TOC (r=-0.329, p < 0.05). The Al saturation varied from 10% to 41% and was higher in the summer and autumn, especially in the 0-5 cmand 5-10 cm layers. Conclusion: Taken together, our study revealed a seasonal shift in soil characteristics in ginseng beds with plastic shade.

Prevalence and extension of the anterior loop of the mental nerve in different populations and CBCT imaging settings: A systematic review and meta-analysis

  • Hadilou, Mahdi;Gholami, Leila;Ghojazadeh, Morteza;Emadi, Naghmeh
    • Imaging Science in Dentistry
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    • v.52 no.2
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    • pp.141-153
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    • 2022
  • Purpose: This study aimed to identify the prevalence and extension of the anterior loop (AL) of the mental nerve in different populations and according to different cone-beam computed tomography (CBCT) imaging settings. Materials and Methods: Medline/PubMed, Embase, Scopus, Web of Science, and ProQuest were searched. The main inclusion criterion was ALs evaluated in CBCT images. The quality of studies was assessed with the Joanna Briggs Institute risk of bias checklist. Subgroup analyses were conducted for sex, side, continent, voxel size, field of view, and type of CBCT-reconstruction images with a random-effects model. Results: Sixty-three studies with 13,743 participants (27,075 hemimandibles) were included. An AL was found in 40.6% (95% CI: 32.8%-48.9%, P<0.05) of participants and 36.0% (95% CI: 27.5%-45.5%, P<0.05) of hemimandibles, in 34.9% (95% CI: 25.1%-46.2%, P<0.05) of males and 34.5% (95% CI: 23.5%-47.4%, P<0.05) of females. The average length of ALs was 2.39 mm (95% CI: 2.07-2.70 mm, P<0.05). Their extension was 2.13 mm (95% CI: 1.54-2.73 mm, P<0.05) in males and 1.85 mm (95% CI: 1.35-2.36 mm, P<0.05) in females. Significant differences were observed regarding the prevalence and length of ALs among continents and for its measured length on different CBCT-reconstruction images, but not between other subgroups. Conclusion: AL was a relatively common finding. The voxel size and fields of view of CBCT devices were adequate for assessing AL; however, a 2-mm safety margin from anatomical structures(such as the AL) could be recommended to be considered when using CBCT imaging.

Fire and explosion risk of metal particles with the same mean diameter (동일 입경 조건에서의 금속분진의 화재.폭발위험성)

  • Han, Ou-Sup;Lee, Keun-Won
    • Proceedings of the Korea Institute of Fire Science and Engineering Conference
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    • 2011.04a
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    • pp.376-377
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    • 2011
  • 최근 Mg, Mg-Al합금, Al은 전자제품의 케이스, 차량의 휠 등의 신소재로서 활용성이 높아 사회적 수요가 급격히 늘고 있다. 이러한 수요 증가와 함께 관련 사업장에서는 취급 과정에서 폭발사고 위험성이 높아지고 있는데, 2010년도에는 국내 사업장에서 금속 분진에 의한 폭발사고가 4건이 발생하여 인명 및 재산피해가 발생하였다. Mg-Al합금의 폭발사고로 사망 1명과 부상 2명이 발생하였으며, Al분진의 폭발사고는 3건이 발생하여 사망 2명과 부상 3명의 인명피해로 이어졌다. 사고조사를 통하여 사업장에서의 금속분진에 대한 위험인식이 매우 낮은 것이 유사 사고가 반복되고 있는 가장 큰 이유로 알려지고 있는데, 이는 금속분진에 대한 부족한 안전기술정보와 밀접한 관련이 있다. 본 연구에서는 Mg, Mg-Al합금, Al등을 취급하는 관련 사업장에서 폭발사고 예방대책을 위하여 활용할 수 있는 폭발특성에 관한 안전기술정보 제공을 목적으로 하고 있다. 보다 구체적으로는 사고 다발 금속분진에 대한 위험성 이해에 도움을 될 수 있도록 동일 입경분포 조건에서의 위험성을 정량적으로 평가하였으며, 이를 위하여 각 금속분진의 동일 입경 조건에서 최대폭발압력, 폭발하한계 등의 폭발위험성 데이터를 실험적으로 조사 하였다. 조사한 시료는 평균입경 200 mesh의 Al, Mg, Mg-Al(60:40 wt%)로서 입도분석기(Beckman Coulter LSI 3320)를 사용하여 측정한 결과 평균입경은 약 $155{\mu}m$로 나타났다. Al분진의 농도변화에 따른 폭발압력을 조사한 결과, 최대폭발압력(Pmax)은 7.9 bar였으며 최대폭발압력상승속도 (dt/dP)max는 농도 $1500[g/m^3]$에서 322 [bar/s]로 최대가 되었으며 폭발 하한계(LEL)는 $70[g/m^3]$가 얻어졌다. 반면에 순수한 Mg의 LEL은 $30[g/m^3]$였으며 Pmax는 6.4 bar, (dP/dt)max는 100 [bar/s]가 얻어졌다. 이러한 결과로부터 LEL이 낮은 Mg는 Al보다 연소성이 큰 것으로 나타났으며, Al은 화염을 유지하는데 필요한 최저 열분해 가스농도를 확보하는데 Mg보다도 고농도의 분진이 필요함을 알 수 있었다. 또한 Mg-Al(60:40 wt%)의 LEL은 $50g/m^3$이었으며 Pmax는 9.4 bar, (dP/dt)max는 472 [bar/s]가 얻어졌다. 이러한 결과로부터 Mg-Al(60:40 wt%)합금의 연소성을 살펴보면 착화하기 쉬운 정도는 Mg와 Al의 성분비에 의해 변화하지만 Mg와 Al의 중간 정도로 나타나는 반면, Pmax는 Mg 또는 Al의 단독 물질 성분보다도 매우 큰 것을 알 수 있었다. 본 연구를 통하여 단일 성분의 Mg와 Al보다도 Mg와 Al이 일정 비율로 구성된 Mg-Al합금의 경우가 화재폭발 위험성이 증가한다는 사실을 알 수 있었으며, 이와 같은 폭발위험특성 자료를 활용하여 분진의 보관, 취급, 폐기 등의 지속적 관리가 필요하며 사업장 특성에 적합한 안전대책을 통한 사고예방대책이 요구된다.

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Microstructure and Mechanical Properties of $SiC_p/6061$ Al Composites Fabricated by Indirect Squeeze Casting (간접 용탕단조법에 의하여 제조한 $SiC_p/6061$ Al 복합재료의 조직과 기계적 성질)

  • Seo, Young-Ho;Kang, Chung-Gil
    • Journal of Korea Foundry Society
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    • v.18 no.4
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    • pp.373-382
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    • 1998
  • Particulate reinforced aluminum alloys produced by indirect squeeze casting are difficult to shape by cutting or milling. Therefore near net shape forming of complex shapes is of high economic and technical interest. The complex shape products of $SiC_p/6061$ Al composites are fabricated by the melt-stirring and indirect squeeze casting process. The mold temperatures are $200^{\circ}C$ and $300^{\circ}C$ and applied pressures are 70, 100, and 130 MPa. The volume fractions of the reinforcements are in the range of 5 vol% to 15 vol%. The reinforcement dispersion state are observed using on optical microscope. By employing observed results systematically a correlation is demonstrated among the microstructure, particles behavior, mechanical properties and processing parameters for an optimum melt-stirring(compocasting) and indirect squeeze casting process of MMCs. A procedure to establish the optimum squeeze casting of Al-MMCs is proposed.

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Characteristics of Alumina Film Prepared by MOCVD (MOCVD법으로 제조된 알루미나 박막의 특성)

  • 최두진;임공진;정형진;송한상;김창은
    • Journal of the Korean Ceramic Society
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    • v.27 no.6
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    • pp.790-798
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    • 1990
  • Al2O3 film was chemically deposited by pyrolytic decom,positio of the Al-tri-isopropoxide/N2 system at 350$^{\circ}C$, 30 and 1.86torr. FTIR analysis showed a deposited film was a hydrated alumina and transformed to an anhydrous one after heat treatment(1hr, >800$^{\circ}C$ or 4hr, >500$^{\circ}C$) in N2 atmosphere. This transformation influenced on the CV-hysteresis of Si-Al2O3 structure. Also, a pH sensitivity of EIS(Electrolyte-Insulator-Semiconductor)structure using Si-Al2O3/SiO2 film was 50mV/pH in the range of pH 3 to 7.

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Effect of Volume Fraction on Mechanical and Fatigue Crack Growth Properties of SiC Particle Reinforced AL Alloy Composites (체적비가 $SiC_{p}$/AL 복합재료의 기계적 및 피로균열진전 특성에 미치는 영향)

  • Gwon, Jae-Do;An, Jeong-Ju;Mun, Yun-Bae
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.20 no.4
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    • pp.1301-1308
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    • 1996
  • In order to save the energy and protect the environment, it were studied about ecomaterials with the developed countries as central figure. In the Metal Matrix Composites(MMCs), this trends appeared the development of the MMCs which had excellent mechanical properties in spite of the low volume fraction of reinforcement. Therefore, in this study, fatigue crack growth test, tensile and hardness test were conducted in order to investigate the mechanical and fatigue properties of 5 %, and 10 % $SiC_{p}$/Al composites. As the results, in the tensile and hardness test, tensile strength and hardness increased but fatigue crack growth rate decreased with $SiC_{p}$/Al volume fraction. And in the view of fatigue failured surface through the SEM, fatigue crack initiated around the SiC particle and in low $\Delta{K}$ regions, fatigue creck detoured the SiC particle but crack propagated through the SiC particle in the high $\DeltaK$ regions.

A Study on the Synthesis of High-Purity ${\alpha}-Al_2O_3$ Ultra-Fine Powders by Wet Chemical Method (습식 합성법에 의한 고순도 ${\alpha}-Al_2O_3$ 미세분말의 합성 연구)

  • Jin-Ho Choy;Jong-Seok Yoo;Yang-Su Han;Joon Kim;Hyeon-Kook Lee;Hyuk-Nyun Kim
    • Journal of the Korean Chemical Society
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    • v.35 no.3
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    • pp.275-279
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    • 1991
  • Ultra-fine alumina, ${\alpha}-Al_2O_3$, with ${\phi}$ = 0.1∼0.5 ${\mu}$m was obtained from pure ammonium aluminum sulfate(alum) as the thermal decomposition product. Pure alum(> 99.7%) could be prepared by the precepitation and the successive recrystallization in an acidic aqueous solution at pH = 1.5∼2.5, which was theoretically predicted by only considering the concentrations of hydroxide and carbonate for aluminum and sodium in the solution, and also experimentally confirmed as the optimum precepitation condition for alum without forming any impurities like aluminum hydroxide or sodium one.

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The Electrical properties of Al/TiN/Ti Contact at Submicron contact(1) (Al/TiN/Ti 전극의 Submicron contact에서의 전기적특성(1))

  • Lee, Cheol-Jin;Eom, Moon-Jong;Ra, Yong-Choon;Sung, Man-Young;Sung, Yung-Kwon
    • Proceedings of the KIEE Conference
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    • 1995.07c
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    • pp.1013-1015
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    • 1995
  • The electrical properties of Al/TiN/Ti contact according to post anneal ins conditions are investigated at submicron contacts. $N^+$ contact resistance increases with increasing alloy temperature while $P^+$ contact resistance slightly decreases. The contact tentage current increases wi th increasing alloy temperature for both $N^+$ and $P^+$ contacts. The contact resistance and leakage current of $N^+$ contact increases with increasing alloy tide. $P^+$ contact resistance decreases with increasing alloy time but $P^+$ contact tentage current increases. The contact resistance and contact leakage current increases with increasing alloy cycles for both $N^+$ and $P^+$ contacts.

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