• 한국결정성장학회지
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• 제6권3호
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• pp.463-470
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• 1996

알파 알루미나와 철이 첨가된 티타니아 최종층으로 구성된 세라믹 여과막을 졸-겔방법으로 제조하였다. 철이 첨가된 지지 티타니아 복합여과막은 지지체를 혼합졸에 침지하여 제조하였다. 복합여과막을 $550^{\circ}C$에서 $850^{\circ}C$까지 열처리온도에 따르는 미세구조 변화를 주사전자현미경으로 조사하였다. $650^{\circ}C$에서 1시간 소결한 경우, 철이 첨기된 티타니아 복합여과막의 평균입자 크기는 약 40 nm이었다. 철이 첨가된 티나니아 복합여과막은 티타니아 복합여과막보다 열적 저항성이 우수하였다. 철이 첨가된 티타니아 복합여과막은 $650^{\circ}C$까지 균열이 없는 미세구조와 좁은 입도분포를 유지하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.257-257
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• 2016

최근에 메모리의 초고속화, 고집적화 및 초절전화가 요구되면서 resistive random access memory (ReRAM), ferroelectric RAM (FeRAM), phase change RAM (PRAM)등과 같은 차세대 메모리 기술이 활발히 연구되고 있다. 다양한 메모리 중에서 특히 resistive random access memory (ReRAM)는 빠른 동작 속도, 낮은 동작 전압, 대용량화와 비휘발성 등의 장점을 가진다. ReRAM 소자는 절연막의 저항 스위칭(resistance switching) 현상을 이용하여 동작하기 때문에 SiOx, AlOx, TaOx, ZrOx, NiOx, TiOx, 그리고 HfOx 등과 같은 금속 산화물에 대한 연구들이 활발하게 이루어지고 있다. 이와 같이 다양한 산화물 중에서 AlOx는 ReRAM의 절연막으로 적용되었을 때, 우수한 저항변화특성과 안정성을 가진다. 하지만, AlOx 박막을 형성하기 위하여 기존에 많이 사용되어지던 PVD (physical vapour deposition) 또는 CVD (chemical vapour deposition) 방법에서는 두께가 균일하고 막질이 우수한 박막을 얻을 수 있지만 고가의 진공장비 사용 및 대면적 공정이 곤란하다는 문제점이 있다. 한편, 용액 공정 방법은 공정과정이 간단하여 경제적이고 대면적화가 가능하며 저온에서 공정이 이루어지는 장점으로 많은 관심을 받고 있다. 본 연구에서는 sputtering 방법과 용액 공정 방법으로 형성한 AlOx 기반의 ReRAM에서 메모리 특성을 비교 및 평가하였다. 먼저, p-type Si 기판 위에 습식산화를 통하여 SiO2 300 nm를 성장시킨 후, electron beam evaporation으로 하부 전극을 형성하기 위하여 Ti와 Pt를 각각 10 nm와 100 nm의 두께로 증착하였다. 이후, 제작된 AlOx 용액을 spin coating 방법으로 1000 rpm 10 초, 6000 rpm 30 초의 조건으로 증착하였다. Solvent 및 불순물 제거를 위하여 $180^{\circ}C$의 온도에서 10 분 동안 열처리를 진행하였고, 상부 전극을 형성하기 위해 shadow mask를 이용하여 각각 50 nm, 100 nm 두께의 Ti와 Al을 electron beam evaporation 방법으로 증착하였다. 측정 결과, 용액 공정 방법으로 형성한 AlOx 기반의 ReRAM에서는 기존의 sputtering 방법으로 제작된 ReRAM에 비해서 저항 분포가 균일하지는 않았지만, 103 cycle 이상의 우수한 endurance 특성을 나타냈다. 또한, 1 V 내외로 동작 전압이 낮았으며 104 초 동안의 retention 측정에서도 메모리 특성이 일정하게 유지되었다. 결론적으로, 간단한 용액 공정 방법은 ReRAM 소자 제작에 많이 이용될 것으로 기대된다.

• Journal of Welding and Joining
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• 제31권6호
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• pp.96-106
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• 2013

In this study, the effect of laser source($CO_2$ and Nd:YAG) on the microstructure and tensile properties of laser welded Al-Si coated boron steel(1.2mmt) was investigated with before and after hot-stamping. In case of as welds condition, fracture occurred in base metal unrelated to the laser source. It could be explained that tensile strength of fusion zone composed of martensite and bainite is higher than that of base metal that contains a lot of ferrite despite dilution of Al and Si from coating layer to fusion zone. In case of hot-stamping condition, the fracture occurred in fusion zone irrelevant to laser source and the tensile strength was lower than hot stamped base metal. In the $CO_2$ laser welds, $Fe_3$(Al,Si) formed near the bond line was transformed into ferrite during hot-stamping. Therefore tensile strength of bond line is lower than that of base metal and center of fusion zone and the fracture occurred in the bond line. On the other hand, in the Nd:YAG laser welds, the higher concentration of Al formed the ferrite in the fusion zone during hot-stamping treatment. Also, the thickness of centerline was thinner than that of base metal. Therefore, it is considered that fracture occurred in centerline of fusion zone due to effect of concentration stress, and it leaded to a lower tensile strength and elongation.

• Corrosion Science and Technology
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• 제23권2호
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• pp.104-112
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• 2024

Al-Zn-Mg-Si alloy coatings have been developed to inhibit corrosion of cold rolled steel sheets, and an understanding of the alloy system helps prevent coating defects. We used a Bridgman furnace to characterise the nature and formation mechanisms of the phases present in the quaternary system with 0.4 wt% Fe. In the directional solidification experiments we imposed steep temperature gradients and varied the pull rate. After the samples were quenched in the furnace, detailed characterization of the samples was carried out by electron microscopy (SEM/EDS). From the dT/dt vs T plots of the cooling curves of the alloys, the solidification path was determined to be $Liquid{\longrightarrow[80]^{544-558}}{\alpha}-Al{\longrightarrow[80]^{453-459}}Al/Mg_2Si{\longrightarrow[80]^{371-374}}Al/Zn{\longrightarrow[80]^{331-333}}Zn/mgZn_2$. The formation mechanisms of the Mg and Zn containing phases and their morphology was discussed together with the effects of the cooling rate. Key findings include the lengthening of the mushy zone in directionally solidified samples remelted against a positive temperature gradient, as well as an enrichening of the α-Al phase by Zn through remelting. Mg₂Si and other Si based phases were observed to adopt a much finer faceted microstructure in favour of a script-like microstructure when exposed to the higher cooling rate of coolant quenching.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2016년도 추계학술대회 논문집
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• pp.199-199
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• 2016

Commercially pure titanium (cp-Ti) and Ti alloys (typically Ti-6Al-4V) display excellent corrosion resistance and biocompatibility. Although the chemical composition and topography are considered important, the mechanical properties of the material and the loading conditions in the host have, conventionally. Ti and its alloys are not bioactive. Therefore, they do not chemically bond to the bone, whereas they physically bond with bone tissue. The electrochemical deposition process provides an effective surface for biocompatibility because large surface area can be served to cell proliferation. Electrochemical deposition method is an attractive technique for the deposition of hydroxyapatite (HAp). However, the adhesions of these coatings to the Ti surface needs to be improved for clinical used. Plasma electrolyte oxidation (PEO) enables control in the chemical com position, porous structure, and thickness of the $TiO_2$ layer on Ti surface. In addition, previous studies h ave concluded that the presence of $Ca^{+2}$ and ${PO_4}^{3-}$ ion coating on porous $TiO_2$ surface induced adhesion strength between HAp and Ti surface during electrochemical deposition. Silicon (Si) in particular has been found to be essential for normal bone and cartilage growth and development. Zinc (Zn) plays very important roles in bone formation and immune system regulation, and is also the most abundant trace element in bone. The objective of this work was to study electrochemical characteristcs of Zn and Si coating on Ti-6Al-4V by PEO treatment. The coating process involves two steps: 1) formation of porous $TiO_2$ on Ti-6Al-4V at high potential. A pulsed DC power supply was employed. 2) Electrochemical tests were carried out using potentiodynamic and AC impedance methoeds. The morphology, the chemical composition, and the micro-structure an alysis of the sample were examined using FE-SEM, EDS, and XRD. The enhancements of the HAp forming ability arise from $Si/Zn-TiO_2$ surface, which has formed the reduction of the Si/Zn ions. The promising results successfully demonstrate the immense potential of $Si/Zn-TiO_2$ coatings in dental and biomaterials applications.

• 한국결정성장학회지
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• 제31권6호
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• pp.276-281
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• 2021

반도체 회로를 제조하기 위해서 에칭, 세척, 증착 등의 공정들이 반복적으로 진행된다. 따라서 이러한 공정이 진행되면 진공장비 내부는 부식성이 높은 가혹한 플라즈마 환경에 노출되게 된다. 따라서 반도체 공정 장비의 내부를 플라즈마 노출에 강한 재료를 사용하여 코팅층의 에칭과 오염 입자의 생성을 최소화하여야 한다. 본 연구에서는 고상합성법에 의해 Y₂O₃와 YF₃ 분말을 원료물질로 옥시불화이트륨(YOF)를 성공적으로 합성하였다. Y₂O₃와 YF₃ 분말의 혼합비율은 1.0:1.0에서 1.0:1.6까지 조절하였으며, 혼합비율이 합성된 YOF 분말의 결정구조와 미세구조에 미치는 영향을 XRD와 FE-SEM으로 조사하였다. 합성된 YOF 분말을 이용하여 알루미늄 기판에 플라즈마 스프레이법으로 성공적으로 코팅하였다.

• Corrosion Science and Technology
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• 제10권2호
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• pp.43-46
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• 2011

Zinc consumption in a continuous galvanizing line is one of the highest operating cost items in the facility and minimizing zinc waste is a key economic objective for any operation. One of the primary sources of excessive loss of zinc is through the formation of top dross and skimmings in the coating pot. It has been reported that the top skimmings, manually removed from the bath, typically consist of more than 80% metallic zinc with the remainder being entrained dross particles ($Fe_2Al_5$) along with some oxides. Depending on the drossing practices and bath management, the composition of the removed top skimmings may contain up to 2 wt% aluminum and 1 wt% iron. On-going research efforts have been aimed at in-house recovery of the metallic zinc from the discarded top skimmings prior to selling to zinc recycling brokers. However, attempting to recover the zinc entrapped in the skimmings is difficult due to the complex nature of the intermetallic dross particles and the quality and volume of the recycled zinc is highly susceptible to fluctuations in processing parameters. As such, an efficient method to extract metallic zinc from top skimmings has been optimized through the use of a specialized thermo-mechanical process enabling a continuous galvanizing facility to conserve zinc usage on-site. Also, through this work, it has been identified that filtration of discrete dross particles has been proven effective at maintaining the cleanliness of the zinc. Future efforts may progress towards expanded utilization of filters in continuous galvanizing.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2017년도 춘계학술대회 논문집
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• pp.154-154
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• 2017

Ti-6Al-4V alloys are widely used as metal-lic biomaterials in dentistry and orthopedics due to its excellent biocompatibility and me-chanical properties. However, because of low biological activity, it is difficult to form bone growth directly on the surface of titanium implants. For this reason, surface treatment of plasma electrolytic oxidation(PEO) was used for dental implants. To enhance bioac-tivity on the surface, strontium(Sr) and sili-con(Si) ions can be added to PEO treated sur-face in the electrolyte containing these ions. The presence of Sr in the coating enhances osteoblast activity and differentiation, where-as it inhibits osteoclast production and prolif-eration. And Si has been found to be essen-tial for normal bone, cartilage growth, and development. In this study, electrochemical characteristics of Ca, P, Sr, and Si ions from PEO-treated Ti-6Al-4V alloy surface was re-searched using various experimental instruments. DC power is used and Ti-6Al-4V al-loy was subjected to a voltage of 280 V for 3 minutes in the electrolyte containing 5, 10, 20M% Sr ion and 5M% Si ion. The morphol-ogies of PEO-treated Ti-6Al-4V alloy by electrochemical anodization were examined by field-emission scanning electron micro-scopes (FE-SEM), energy dispersive x-ray spectroscopy (EDS), x-ray diffraction (XRD) and corrosion analysis using AC impedance and potentiodynamic polarization test in 0.9% NaCl solution at similar body tempera-ture using a potentiostat with a scan rate of 1.67mV/s and potential range from -1500mV to + 2000mV.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2018년도 춘계학술대회 논문집
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• pp.74-74
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• 2018

Ti-6Al-4V alloys have been widely used as orthopedic materials because of their excellent corrosion resistance and mechanical properties. However, it does not bind directly to the bone, so it requires a surface modification. This problem can be solved by nanotube and micropore formation. Plasma electrolytic oxidation (PEO) treatment for micropore, which combines high-voltage spark and electrochemical oxidation, is a new way of forming a ceramic coating on light metals such as titanium and its alloys. This method has excellent reproducibility and can easily control the shape and size of the Ti alloy. In this study, formation of bioactive surface by PEO-treatment after $2^{nd}$ ATO technique of Ti-6Al-4V alloy was invesgated by various instrument. Nanotube oxide surface structure was formed on the surface by anodic oxidation treatment in 0.8 wt.% NaF and 1M $H_3PO_4$ electrolytes. After nanotube formation, nanotube layer was removed by ultrasonic cleaning. PEO-treatment was carried out at 280V for 3 minutes in the electrolytic solution containing the bioactive substance (Mg, Zn, Mn, Sr, and Si). The surface of Ti-6Al-4V alloy was observed by field emission scanning electron microscopy (FE-SEM, S-4800 Hitachi, Japan). An energy dispersive X-ray spectrometer (EDS, Inca program, Oxford, UK) was used to analyze the spectra of physiologically active Si, Mn, Mg, Zn, and Sr ions. The PEO film formed on the Ti-6Al-4V alloy surface was characterized using an X-ray diffractometer (TF-XRD, X'pert Philips, Netherlands). It is confirmed that bioactive ions play an essential role in the normal bone growth and metabolism of the human skeletal tissues.

• 한국표면공학회지
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• 제55권6호
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• pp.448-459
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• 2022

Generally, steel is the most commonly used in the industry because of good strength, processability and cost-effectiveness. Steel can be surface-treated such as coating or used as an alloy by adding elements such as Cr, Ni, Zr, and Al to increase corrosion resistance. However, even if steel is used in same environment corrosion resistance is sharply lowered when it is exposed to a high temperature for a fixed or extended period of time due to an overload or other factors. In particular, the use of hot-dip aluminized plated steel, which is used in high-temperature atmospheres, is increasing due to the surface Al₂O₃ oxide film. This steel necessitates an urgent solution as issues of corrosion resistance limitations often appear. It is an important issue that not only cause analysis but also the research for the surface treatment method that can be solved. Thus, in this study, Cr in which it is expected to be effective in corrosion resistance and heat resistance attempted to deposit on hot dip aluminized plated steel with PVD sputtering. And it was possible to present the surface treatment application of various types of industrial equipment exposed to high temperature and basic design guidelines for use by confirming the corrosion resistance of hot dip Al-Si plated steel with Cr film deposited at high temperature.