• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.53-53
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• 2011

As the dimension of Cu interconnects has continued to reduce, its resistivity is expected to increase at the nanoscale due to increased surface and grain boundary scattering of electrons. To suppress increase of the resistivity in nanoscale interconnects, alloying Cu with other metal elements such as Al, Mn, and Ag is being considered to increase the mean free path of the drifting electrons. The formation of Al alloy with a slight amount of Cu broadly studied in the past. The study of Cu alloy including a very small Al fraction, by contrast, recently began. The formation of Cu-Al alloy is limited in wet chemical bath and was mainly conducted for fundamental studies by sputtering or evaporation system. However, these deposition methods have a limitation in production environment due to poor step coverage in nanoscale Cu metallization. In this work, gap-filling of Cu-Al alloy was conducted by cyclic MOCVD (metal organic chemical vapor deposition), followed by thermal annealing for alloying, which prevented an unwanted chemical reaction between Cu and Al precursors. To achieve filling the Cu-Al alloy into sub-100nm trench without overhang and void formation, furthermore, hydrogen plasma pretreatment of the trench pattern with Ru barrier layer was conducted in order to suppress of Cu nucleation and growth near the entrance area of the nano-scale trench by minimizing adsorption of metal precursors. As a result, superconformal gap-fill of Cu-Al alloy could be achieved successfully in the high aspect ration nanoscale trenches. Examined morphology, microstructure, chemical composition, and electrical properties of superfilled Cu-Al alloy will be discussed in detail.

• 공업화학
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• 제35권1호
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• pp.1-7
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• 2024

NO, CO 및 CH₄의 동시 산화를 위한 4 종의 Mn-M/Al₂O₃ (M = Cu, Fe, Co, Ce) 촉매를 제조하여 산화 활성을 비교하고, 동시 산화활성이 가장 높은 Mn-Cu/Al₂O₃ 촉매에 대해 XRD, Raman, XPS, O₂-TPD 분석을 수행하였다. XRD 분석 결과, Mn-Cu/Al₂O₃ 촉매에서는 담지된 Mn과 Cu는 복합산화물로 존재하였다. Raman 및 XPS 분석을 통해 Mn-Cu/Al₂O₃ 촉매는 Mn-O-Cu 결합의 형성 과정에서 Mn 이온과 Cu 이온 간의 전자 수수가 일어남을 알 수 있었다. XPS O 1s 및 O₂-TPD 분석을 통해 Mn-Cu/Al₂O₃ 촉매는 Mn/Al₂O₃ 촉매에 비해 이동성이 우수한 흡착산소 종이 증가했음을 알 수 있었다. Mn-Cu/Al₂O₃ 촉매의 높은 동시 산화 활성은 이러한 결과에 기인한다고 판단된다. Mn-Cu/Al₂O₃ 촉매 상에서 NO는 CO와 CH₄ 산화를 촉진하지만, NO 산화는 억제되었다. 이는 NO로부터 산화된 NO₂가 CO 및 CH₄의 산화제로 사용되었기 때문이라고 추측된다. CO와 CH₄의 산화 반응은 경쟁하지만 촉매 활성 온도가 다르기 때문에 그 효과가 두드러지지 않았다.

• 한국분말재료학회지
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• 제16권4호
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• pp.280-284
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• 2009

The pressureless sintering behavior of $Al_2O_3$/Cu powder mixtures, prepared from $Al_2O_3$/CuO and $Al_2O_3$/Cu-nitrate, has been investigated. Microstructural observation revealed that $Al_2O_3$ powders with nano-sized Cu particles could be synthesized by hydrogen reduction method. The specimens, pressureless-sintered at $1400^{\circ}C$ for 4 min using infrared heating furnace with the heating rate of $200^{\circ}C$/min, showed the relative density of above 90%. Maximum hardness of 16.1 GPa was obtained in $Al_2O_3$/MgO/Cu nanocomposites. The nanocomposites exhibited the enhanced fracture toughness of 4.3-5.7 $MPa{\cdot}m^{1/2}$, compared with monolithic $Al_2O_3$. The mechanical properties were discussed in terms of microstructural characteristics.

• 소성∙가공
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• 제7권5호
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• pp.465-473
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• 1998

The effect of alloying elements of Ag-Cu-Zr-X brazing alloy on the microstructure and the bond strength of $Al_2O_3/Ni-Cr$ brazed steel joint was investigated. The reaction layer, $ZrO_2$ (a=5.146 ${\AA}$ , b=5.213 ${\AA}$ , c=5.311 ${\AA}$ )was formed at the interface of $Al_2O_3/Ni-Cr$ steel joint by the redox reaction between alumina and Zr. The addition of An and Al to the Ag-Cu-Zr brazing alloy gave rise to changes in the thickness of the reaction product layer and the morphology of the brazement. Sn caused the segregation of Zr was decreased b Al the $ZrO_2$ layer formed at the Ag-Cu-Zr-Al alloy was thinner than that of $ZrO_2$ formed at the Ag-Cu-Zr-An alloy. The fracture shear strength was strongly dependent on the microstructure of the brazement. Brazing with Ag-Cu-Zr-Sn alloy resulted in a better bond strength than with Ag-Cu-Zr or Ag-Cu-Zr-Al alloy.

• 열처리공학회지
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• 제20권5호
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• pp.243-249
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• 2007

The age hardening behavior and mechanical properties of an extruded Al-Zn-Mg-(Cu)-0.1 wt.%Sc alloy were investigated with the Sc addition and ageing temperature. The results showed that the $Al_3Sc$ compounds were formed by Sc addition and distributed preferentially along the extrusion direction. The age hardening of Al-Zn-Mg-Cu-0.1 wt.%Sc alloy which was treated by T6 process was more significant than that of Al-Zn-Mg-0.1 wt.%Sc alloy. The tensile property of Al-Zn-Mg-Cu+0.1 wt.%Sc alloy was also higher than that of Al-Zn-Mg-0.1 wt.%Sc alloy, which is 691 MPa and 584 MPa in strength and 9% and 11% in elongation, respectively.

• 열처리공학회지
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• 제14권2호
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• pp.96-102
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• 2001

$Al_2O_3$-copper alloy has been successfully made by gas atomization, mechanical alloying and hot pressing. In order to investigate microstructure and phase, it has been studied by using scanning electron microscope, transmission electron microscope and X-ray diffractometor. Mechanical properties have been examined using hardness tester and compressive tester according to annealing temperature. Although comparatively large Cu-Al powders are milled, the reaction between Cu-Al and $Cu_2O$ occurs and very fine $Al_2O_3$ particles in the matrix particles (5-10nm) are obtained. Compressive strength of this alloy is more than that of GlidCop Al60.

• 수산해양교육연구
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• 제15권1호
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• pp.115-122
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• 2003

Generally, material for radiator of automobile is composed of Al-alloy, but part of radiator material is still composed of Cu. Specially, Al-alloy replaces Cu and Cu-alloy as cooling and heating system material for light weight. Therefore, galvanic electronic cell is formed between Al-alloy and Cu for automobile radiator material, and Al-alloy corrosion is accelerated. So, in this study, galvanic corrosion test of Al-alloy coupling with Cu was carried out in distilled water, tap water, polluted environment and non-freezing solution. And thus corrosion potential and galvanic currrent density of Al-alloy coupling with Cu is investigated.

• 한국세라믹학회지
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• 제32권1호
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• pp.106-112
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• 1995

In order to examine the effect of CuO and Al2O3 addition on the electrical conductivity of ZnO, both Al2O3 (0, 1, 2, 5, 10at.%) and CuO (1, 5at.%) were added to ZnO. Al2O3 addition (~2at.% Al) increased the total electrical conductivity of ZnO which was already decreased by CuO doping effect Above solid solubility of Al (~2at.%), ZnAl2O4 formed and the total electrical conductivity decreased due to the decrease of sintered density. Impedance measurements were used to know the reason and degree of contribution of three resistive elements, ZnO grain, ZnO/CuO, and ZnO/ZnO grain boundaries, to the total electrical conductivity changed.

• 한국분말재료학회지
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• 제20권2호
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• pp.114-119
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• 2013

In the DBC (direct bonding of copper) process the oxygen partial pressure surrounding the AlN/Cu bonding pairs has been controlled by Ar gas mixed with oxygen. However, the direct bonding of Cu with sound interface and good adhesion strength is complicated process due to the difficulty in the exact control of oxygen partial pressure by using Ar gas. In this study, we have utilized the in-situ equilibrium established during the reaction of $2CuO{\rightarrow}Cu_2O$ + 1/2 $O_2$ by placing powder bed of CuO or $Cu_2O$ around the Cu/AlN bonding pair at $1065{\sim}1085^{\circ}C$. The adhesion strength was relatively better in case of using CuO powder than when $Cu_2O$ powder was used. Microstructural analysis by optical microscopy and XRD revealed that the interface of bonding pair was composed of $Cu_2O$, Cu and small amount of CuO phase. Thus, it is explained that the good adhesion between Cu and AlN is attributed to the wetting of eutectic liquid formed by reaction of Cu and $Cu_2O$.

• 열처리공학회지
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• 제7권2호
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• pp.96-102
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• 1994

The present work was aimed to examine the changes of the shape and particle size distribution(PSD) of ${\delta}^{\prime}$ particles on ageing in Al-Li-(Cu, Zr) alloys which had low density, high specific strength and stiffness, Increasing ageing time and temperature resulted in particles whose aspect ratio tended toward 1. The aspect ratio of ${\delta}^{\prime}$ particles was not dependent upon the ageing temperature and time in Al-Li-Cu alloy but was dependent upon them in Al-Li-Zr alloy. The PSD of ${\delta}^{\prime}$ particles in Al-Li-Zr alloy skewed to the right hand compared with that in Al-Li-Cu alloy, because $Al_3Zr$ phase in Al-Li-Zr alloy formed before ageing promoted the precipitation and growth of ${\delta}^{\prime}$ phase. Therefore, the PSD of the ${\delta}^{\prime}$ particles was found to be affected by the presence of $Al_3Zr$ particles. The growth rate of ${\delta}^{\prime}$ phase was not affected by the existence of the third transition phase $T_1$ formed by the addition of Cu in Al-Li alloy but was affected by the existence of $Al_3Zr$ formed by the addition of Zr in Al-Li alloy.