Electrical and optical properties of ZnO:Al thin films prepared by microwave magnetron sputtering (마이크로웨이브 magnetron sputtering법으로 제막된 ZnO:Al 박막의 전기광학적 특성)
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- Journal of the Korean Crystal Growth and Crystal Technology
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- v.8 no.4
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- pp.587-591
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- 1998