• 제목/요약/키워드: Al impurity

검색결과 124건 처리시간 0.024초

열처리된 ZnO:Al 투명도전막의 전기적 및 광학적 특성 (Electrical and Optical Properties of Heat Treated ZnO:Al Transparent Conductive Films)

  • 유권규;김정규;박기철
    • 센서학회지
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    • 제8권2호
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    • pp.189-194
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    • 1999
  • 고주파 마그네트론 스퍼터링법으로 증착된 순수한 ZnO 박막 및 Al이 포핑된 ZnO(AZO) 박막의 열처리온도 및 열처리분위기에 따른 전기적 및 광학적 특성을 4점 측정법 및 Hall 효과 측정법을 통한 비저항의 측정과 광투과도의 측정을 통하여 조사하였다. 대기중에서 열처리된 ZnO 박막 및 ZnO:Al 박막은 각각 $200^{\circ}C$$300^{\circ}C$에서 비저항이 현저하게 증가하였으며 수소 플라즈마 분위기에서 열처리된 ZnO 박막은 $500^{\circ}C$의 열처리온도에서 약 1승 정도 비저항이 증가하였으나 ZnO:Al 박막은 열처리온도에 무관하게 비저항이 거의 일정하였다. 550 nm 에서 측정된 광투과도는 90% 정도로 시편의 불순물도핑, 열처리온도 및 열처리분위기에 무관하게 일정한 것으로 나타났다.

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Properties of ZnO:Al Films Prepared by Spin Coating of Aged Precursor Solution

  • Shrestha, Shankar Prasad;Ghimire, Rishi;Nakarmi, Jeevan Jyoti;Kim, Young-Sung;Shrestha, Sabita;Park, Chong-Yun;Boo, Jin-Hyo
    • Bulletin of the Korean Chemical Society
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    • 제31권1호
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    • pp.112-115
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    • 2010
  • Transparent conducting undoped and Al impurity doped ZnO films were deposited on glass substrate by spin coat technique using 24 days aged ZnO precursor solution with solution of ethanol and diethanolamine. The films were characterized by UV-Visible spectroscopy, X-ray diffraction (XRD), scanning electron microscope (SEM), electrical resistivity ($\rho$), carrier concentration (n), and hall mobility ($\mu$) measurements. XRD data show that the deposited film shows polycrystalline nature with hexagonal wurtzite structure with preferential orientation along (002) crystal plane. The SEM images show that surface morphology, porosity and grain sizes are affected by doping concentration. The Al doped samples show high transmittance and better resistivity. With increasing Al concentration only mild change in optical band gap is observed. Optical properties are not affected by aging of parent solution. A lowest resistivity ($8.5 \times 10^{-2}$ ohm cm) is observed at 2 atomic percent (at.%) Al. With further increase in Al concentration, the resistivity started to increase significantly. The decrease resistivity with increasing Al concentration can be attributed to increase in both carrier concentration and hall mobility.

고에너지 볼밀링 방법에 의해 얻어진 초미립 AlN 분말의 치밀화 및 미세구조 (Densification and Microstructure of Ultrafine-sized AlN Powder Prepared by a High Energy Ball Milling Process)

  • 박해룡;김영도;류성수
    • 한국분말재료학회지
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    • 제19권1호
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    • pp.25-31
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    • 2012
  • In this study, a high energy ball milling process was employed in order to improve the densification of direct nitrided AlN powder. The densification behavior and the sintered microstructure of the milled AlN powder were investigated. Mixture of AlN powder doped with 5 wt.% $Y_2O_3$ as a sintering additive was pulverized and dispersed up to 50 min in a bead mill with very small $ZrO_2$ beads. Ultrafine AlN powder with a particle size of 600 nm and a specific surface area of 9.54 $m^2/g$ was prepared after milling for 50 min. The milled powders were pressureless-sintered at $1700^{\circ}C-1800^{\circ}C$ for 4 h under $N_2$ atmosphere. This powder showed excellent sinterability leading to full densification after sintering at $1700^{\circ}C$ for 4 h. However, the sintered microstructure revealed that the fraction of yitttium aluminate increased with milling time and sintering temperature and the newly-secondary phase of ZrN was observed due to the reaction of AlN with the $ZrO_2$ impurity.

복합주조용 Al-Si-Mg합금의 미세조직 및 인장성질에 미치는 Fe 및 Cu 첨가의 영향 (Effects of Fe and Cu Addition on the Microstructure and Tensile Properties of Al-Si-Mg Alloy for Compound Casting)

  • 김정민;정기채;김채영;신제식
    • 한국주조공학회지
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    • 제41권1호
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    • pp.3-10
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    • 2021
  • 알루미늄 합금과 주철의 복합주조 공정 중에는 주철로부터 철 성분이 용해되어 알루미늄 용탕에 혼입될 수 있으므로 다양한 Fe함유 금속간 화합물이 형성되며, 이로 인해 알루미늄 합금의 인장 특성이 크게 저하 될 수 있다. 반면 불순물로 첨가되는 Fe와 는 달리 Cu의 경우 알루미늄 합금의 기계적 물성을 향상시키기 위해 첨가되는 합금원소이다. 본 연구에서는 Fe와 Cu의 첨가로 인한 알루미늄 합금의 미세조직 및 인장특성의 변화를 조사하였다. 첨가된 Fe 함량이 1% 이상일 경우 조대한 Al5FeSi 상과 같은 Fe 함유 화합물들이 다량 형성되어 인장 특성이 현저히 감소하는 것으로 나타났다. Cu가 첨가 된 알루미늄 합금의 경우 Al2Cu 상이 추가로 형성되었으며, 인장 강도가 뚜렷하게 향상되는 결과를 보였다.

$MgAl_{2}O_{4}$ 기판위에 GaN의 HVPE 성장조건에 따른 광루미네센스 특성 (Photoluminescence Properties of GaN on $MgAl_{2}O_{4}$ Substrate with HVPE Growth Conditions)

  • 김선태;이영주
    • 한국재료학회지
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    • 제8권8호
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    • pp.667-671
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    • 1998
  • 이 연구에서는 HVPE법으로 $MgAl_{2}O_{4}$ 기판 위에 GaN를 서로 다른 조건에서 성장시키고, 성장된 GaN의 PL특성을 조사하였다. $MgAl_{2}O_{4}$ 기판위에 성장된 GaN는 $MgAl_{2}O_{4}$ 기판으로부터 Mg의 out-diffusion에 의한 auto-doping 효과에 의하여 불순물이 첨가된 GaN의 PL 성질을 나타내었다. Mg과 관련된 발광 강도는 GaN의 성장온도가 증가함에 따라 GaN의 표면에서 Mg의 재증발에 의하여 감소하였으며, GaN의 두께에 대하여 지수 함수적으로 감소하였다. 두 개의 무한 고체 사이에서 농도 차에 의한 확산현상을 고려하여 구한 GaN 내에서 Mg 원자의 확산계수는 D= 2$\times$$lO^{-10}\textrm{cm}^2/sec. 이었다.

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규산나트륨으로부터 Tetrahydrofuran으로 추출된 규산을 이용한 Mullite 전구체 제조 (Preparation of Mullite Precursor Using Silicic Acid Extracted by Tetrahydrofuran from Sodium Silicate)

  • 노재성;홍성수;이범재;이병기;박은희;정홍호
    • 한국세라믹학회지
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    • 제33권8호
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    • pp.915-920
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    • 1996
  • 콜로이드 졸-겔법에 의해 초미립자 mullite 분말을 제조하였다. Al2O3의 출발 물질로 aluminum isopropoxide $[Al(i-OC_3H_7)_3]$을, $SiO_2$ 출발 물질로 규산 나트륨으로부터 tetrahydrofuran(이후 THF로 약기함)으로 추출한 규산을 사용하였다. 규산 나트륨은 규산을 생성시키기 위하여 묽은 황산으로 산성화시킨 다음 THF로 추출하였다. Mullite 분말은 졸-겔법에 의해서 Si 추출율와 Na 제거율을 조사한 규산과 aluminum isopropoxide로 부터 합성되었다. THF로 추출한 규산의 불순물 함량은 0.04% 이하이었다. 합성된 mullite 분말은 $3Al_2O_3{\cdot}2SiO_2$ 조성을 갖고 불순물의 함량은 0.0462% 이하의 직경 $0.05{\mu}m$ 정도의 결정상이었다. EDS, XRD, TG/DSC, SEM, FT-IR, ICP, TEM등으로 mullite 분말의 특성을 조사하였다.

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용매열 합성법을 통하여 알루미늄을 도핑한 니켈옥사이드의 제조와 그 결정구조적, 전기적 특성 (Preparation of Al-doped NiO via Solvothermal Synthesis and its Crystal Structural and Electrical Properties)

  • 홍선기;지미정;이민진;정성헌;설광희;최병현
    • 한국재료학회지
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    • 제22권11호
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    • pp.631-635
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    • 2012
  • Nickel oxide was doped with a wide range of concentrations (mol%) of Aluminum (Al) by solvothermal synthesis; single-phased nano powder of nickel oxide was generated after calcination at$900^{\circ}C$. When the concentration of Al dopant was increased, the reduced intensity was confirmed through XRD analysis. Lattice parameters of the synthesized NiO powder were decreased after treatment of the dopant; parameters were increased when the concentration of Al was over the doping limit (5 mol% Al). The binding energy of $Ni^{2+}$ was chemically shifted to $Ni^{3+}$ by doping $Al^{3+}$ ion, as confirmed by the XPS analysis. The tilted structure of the synthesized NiO with 5 mol% Al dopant and the polycrystalline structure of the $Ni_{0.75}Al_{0.25}O$ were observed by HR-TEM analysis. The electrical conductivity of the newly synthesized NiO was highly improved by Al doping in the conductivity test. The electrical conductivity values of the commercial NiO and the synthesized NiO with 5 mol% Al dopant ($Ni_{0.95}Al_{0.05}O$) were 1,400 s/cm and 2,230 s/cm at $750^{\circ}C$, respectively. However, the electrical conductivity of the synthesized NiO with 10 mol% Al dopant ($Ni_{0.9}Al_{0.1}O$) decreased due to the scattering of free-electrons caused by the large number of impurity atoms; the electrical conductivity of $Ni_{0.9}Al_{0.1}O$ was 545 s/cm at $750^{\circ}C$.

태양 전지용 CaAl2Se4: Co 단결정 박막 성장과 태양 전지로의 응용 (Growth of CaAl2Se4: Co Single Crystal Thin Film for Solar Cell Development and Its Solar Cell Application)

  • 방진주;홍광준
    • 한국태양에너지학회 논문집
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    • 제38권1호
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    • pp.25-36
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    • 2018
  • The stoichiometric mixture of evaporating materials for the $CaAl_2Se_4$: Co single crystal thin film was prepared from horizontal furnace. Using extrapolation method of X-ray diffraction patterns for the polycrystal $CaAl_2Se_4$, it was found orthorhomic structure whose lattice constant $a_0$, $b_0$ and $c_0$ were 6.4818, $11.1310{\AA}$ and $11.2443{\AA}$, respectively. To obtain the $CaAl_2Se_4$: Co single crystal thin film, $CaAl_2Se_4$: Co mixed crystal was deposited on throughly etched Si (100) by the HWE (Hot Wall Epitaxy) system. The source and substrate temperature were $600^{\circ}C$ and $440^{\circ}C$ respectively. The crystalline structure of $CaAl_2Se_4$: Co single crystal thin film was investigated by the double crystal X-ray diffraction (DCXD). Hall effect on this sample was measured by the method of Van der Pauw and studied on carrier density and mobility depending on temperature. From Hall data, the mobility was likely to be decreased by impurity scattering in the temperature range 30 K to 100 K and by lattice scattering in the temperature range 100 K to 293 K. The temperature dependence of the energy band gap of the $CaAl_2Se_4$: Co obtained from the absorption spectra was well described by the Varshni's relation, $E_g(T)=3.8239eV-(4.9823{\times}10^{-3}eV/K)T_2/(T+559K)$. The open-circuit voltage, short current density, fill factor, and conversion efficiency of $p-Si/p-CaAl_2Se_4$: Co heterojunction solar cells under $80mW/cm^2$ illumination were found to be 0.42 V, $25.3mA/cm^2$, 0.75 and 9.96%, respectively.

Ion Implantation으로 Ca를 첨가된 단결정 $Al_2$O$_3$의 Crack-Like Pore의 Healing 거동-III: Stability of Crack-Like Pore (Effects of Ca Implantation on the Sintering and Crack Healing Behavior of High Purity $Al_2$O$_3$ Using Micro-Lithographic Technique-III: Stability of Crack-Like Pore)

  • 김배연
    • 한국세라믹학회지
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    • 제36권9호
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    • pp.887-892
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    • 1999
  • The inner crack-like pore with controlled amount of Ca impurity in the high purity alumina single crystal sapphire had been created by micro-fabrication technique which includes ion implanation photo-lithography Ar ion milling and hot press technique. The crack-like pores in two-hour hot pressed specimen were extremely stable even after heat treating at 1,80$0^{\circ}C$ for 5 hours almost no healing was observed. But the crack-like pores in one-hour hot pressed specimen at 1,30$0^{\circ}C$ were healed by heat treatment and the amount of healing was increased with the heat treatment time and temperature and the amount of Ca addition. The edges of crack-like pore parallel to <1100> direction in (001) basal plane were stable but the edges normal to this direction in (00101) plane <1120> direction were unstable to facetting This means that the surface energy of alumina along the <1100> direction in (0001) basal plane in much lower than <1120> direction.

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열처리 효과에 따른 AZOB 투명 전도막의 특성 (Influence of Annealing treatment on the properties of B doped ZnO:Al transparent conduction films)

  • 이종환;이규일;유현규;이태용;강현일;정규원;송준태
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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    • pp.194-194
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    • 2008
  • Boron doped ZnO:Al(AZOB) thin films were prepared on glass substrates by dc magnetron sputtering. Influence of the annealing treatment on the electrical and optical properties of AZOB thin films were investigated. The lowest resistivity of $1.6\times10^{-3}\Omega$-cm was obtained at an annealing temperature of $400^{\circ}C$. The average transmittance of the films is over 80% in the visible range. It was also shown that by introducing boron impurity into AZO system improve the uniformity, the resistivity, and thermal stability of ZnO-based conducting thin films.

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