• Title/Summary/Keyword: Al films

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Preparation of $Al_2O_3$-based Polyimide Composite Thick Films without Sintering for Integrated Substrates Employing Aerosol Deposition Method (Aerosol Deposition Method를 이용한 적층 기판용 무소성 알루미나-폴리이미드 복합체 후막의 제조)

  • Kim, Hyung-Jun;Yoon, Young-Joon;Kim, Jong-Hee;Nam, Song-Min
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.347-347
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    • 2008
  • 본 연구에서는 별도의 소결과정 없이 상온에서 치밀한 복합체 후막의 제조가 가능한 Aerosol Deposition Method (ADM)를 이용하여 SOP를 실현시키기 위한 기판 재료로서 알루미나 기반의 알루미나-폴리이미드 복합체를 제조하고 그 특성에 대한 평가를 진행하였다. SEM 관찰결과 기공이 거의 없고 치밀한 구조의 복합체가 상온에서 성공적으로 형성되었음이 확인되었다. XRD 와 FT-IR 분석 결과 알루미나와 폴리이미드 모두가 복합체에 존재함을 확인할 수 있었다. 또한 XRD 분석결과 출발 원료에 폴리이미드 함량이 증가할수록 ADM으로 제조된 복합체 내부의 알루미나의 결정자 크기가 증가하는 결과를 보였다. 복합체의 알루미나 충진율을 확인하기 위한 간접적인 방법으로 복합체 후막을 연마하여 복합체 내부를 노출시킨 후 폴리이미드의 용매인 Methyl Ethyl Ketone으로 폴리이미드를 식각시켜 남아있는 알루미나 영역을 관찰한 SEM 분석결과 알루미나가 60% 이상 복합체의 대부분을 이루고 있다는 사실을 관찰할 수 있었다. 복합체의 미세구조를 확인하기 위하여 TEM 분석결과 기존에 보고된 ADM으로 제조된 알루미나 후막의 결정자 크기인 10~20 nm 보다 큰 100 nm 범위의 결정자 크기를 관찰 할 수 있었다. 유전특성평가 결과 유전율과 tan$\delta$는 1 MHz에서 각각 9.0, 0.0072로서 알루미나만을 원료로 성막시킨 후막의 유전 특성을 크게 떨어뜨리지 않으며 알루미나 후막과 유사한 결과를 보였다. 추후 복합체의 균일성 향상 및 고주파 영역의 유전 특성 향상을 통하여 세라믹의 취성 및 가공성이 개선된 3 차원 적층 기판재료로의 응용이 기대될 것으로 전망된다.

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A Study on the Various Organic Electroluminescent Devices Using Lanthanide Chelate Metal Complexes (란탄계 금속 착화합물을 이용한 다양한 유기 전기 발광 소자의 연구)

  • 표상우;김윤명;이한성;김정수;이승희;김영관
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.13 no.5
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    • pp.437-443
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    • 2000
  • In this study several lanthanide complexes such as Eu(TTA)$_3$(Phen), Tb(ACAC)$_3$-(Cl-Phen) were synthesized and the white-light electroluminescence(EL) characteristics of their thin films were investigated where the devices having structures of anode/TPD/Tb(ACAC)$_3$(Cl-Phen)/Eu(TTA)$_3$(Phen)/Alq$_3$or Bebq$_2$/cathode and the low work function metal alloy such as Li:Al was used as the electron injecting electrode(cathode). Device structure of glass substrate/ITO/TPD(30nm)/Tb(ACAC)$_3$(Phen)(30nm)/Eu(TTA)$_3$(Phen)(6nm)/DCM doped Alq$_3$(10nm)/Alq$_3$(20nm)/Li:Al(100nm) was also fabricated and their EL characteristics were investigated where Eu(TTA)$_3$(Phen) and DCM doped Alq$_3$were used as red light-emitting materials. It was found that the turn-on voltage of the device with non-doped Alq$_3$was lower than that of the devices with doped Alq$_3$and the blue and red light emission peaks due to TPD and Eu(TTA)$_3$(Phen) with non-doped Alq$_3$were lower than those with DCM doped Alq$_3$Details on the white-light-emitting characteristics of these device structures were explained by the energy and diagrams of various materials used in these structure where the energy levels of new materials such as ionization potential(IP) and electron affinity(EA) were measured by cyclic voltametric method.

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Gas Sensing Characteristics of $SnO_{2}$ added with $TiO_{2},\;Pd,\;Pt$ and in for Trimethylamine Gas (Trimethylamine Gas 측정을 위한 $TiO_{2},\;Pd,\;Pt$ 및 In이 첨가된 $SnO_{2}$가스 센서의 특성)

  • Lee, Chang-Seop;Jung, Soon-Boon;Jun, Jae-Mok;Lee, In-Sun;Lee, Hyeong-Rag;Park, Young-Ho;Choi, Sung-Woo
    • Journal of the Korean Institute of Gas
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    • v.11 no.1 s.34
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    • pp.29-33
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    • 2007
  • This study investigates the use of $TiO_{2},\;Pd,\;Pt$, and In which greatly improves a sensitivity to trimethylamine gas. The metal-$SnO_{2}$ thick films were prepared by screen-printing method onto $Al_{2}O_{3}$ substrates with platinum electrode. The sensing characteristics were investigated by measuring the electrical resistance of each sensor in a test box as a function of detecting gas concentration. This was then used to detect trimethylamine, dimethylamine, and ammonia vapours within the concentration range of 100-1000ppm. The gas sensing properties of metal-$SnO_{2}$ mixed thick films depended on the content and variety of metal. It was found that sensitivity and selectivity of the films dopped with 1 wt% Pd and 10 wt% $TiO_{2}$ for trimethylamin gas showed the best result at $250^{\circ}C$.

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The Low-field Tunnel-type Magnetoresistance Characteristics of Thin Films Deposited on Different Substrate (기판 효과에 따른 저 자장 영역에서의 자기저항 효과에 관한 연구)

  • Lee, Hi-Min;Shim, In-Bo;Kim, Chul-Sung
    • Journal of the Korean Magnetics Society
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    • v.12 no.2
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    • pp.41-45
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    • 2002
  • The low-field tunnel-type magnetoresistance (MR) properties of sol-gel derived $La_{0.7}Pb_{0.3}MnO_3(LPMO)$ thin film deposited on different substrate have been investigated. Polycrystalline thin films were fabricated by spin-coating on $SiO_2/Si(100)$ substrate and that with yttria-stabilized zirconia (YSZ) buffer layer, while c-axis-oriented thim film was grown on $LaAlO_3(001)$ (LAO) single crystal substrate. The full width half maximum (FWHM) of the rocking curve scan of LPMO/LAO film is $0.32^{\circ}$. Tunnel-type MR ratio is 0.52 % in $LPMO/SiO_2/Si$(100) film and that of $LPMO/YSZ/SiO_2/Si$(100) film is as high as 0.68 %, whereas that of LPMO/LAO(001) film is less than 0.4 % under the applied field of 500 Oe at 300 K. Well-pronounced MR hysteresis was registered with an MR peak in the vicinity of the coercive field. The low-field tunnel-type MR characteristics of thin films deposited on different substrates originates from the behavior of grain boundary properties.

Improving the Efficiency of SnS Thin Film Solar Cells by Adjusting the Mg/(Mg+Zn) Ratio of Secondary Buffer Layer ZnMgO Thin Film (2차 버퍼층 ZnMgO 박막의 Mg/(Mg+Zn) 비율 조절을 통한 SnS 박막 태양전지 효율 향상)

  • Lee, Hyo Seok;Cho, Jae Yu;Youn, Sung-Min;Jeong, Chaehwan;Heo, Jaeyeong
    • Korean Journal of Materials Research
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    • v.30 no.10
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    • pp.566-572
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    • 2020
  • In the recent years, thin film solar cells (TFSCs) have emerged as a viable replacement for crystalline silicon solar cells and offer a variety of choices, particularly in terms of synthesis processes and substrates (rigid or flexible, metal or insulator). Among the thin-film absorber materials, SnS has great potential for the manufacturing of low-cost TFSCs due to its suitable optical and electrical properties, non-toxic nature, and earth abundancy. However, the efficiency of SnS-based solar cells is found to be in the range of 1 ~ 4 % and remains far below those of CdTe-, CIGS-, and CZTSSe-based TFSCs. Aside from the improvement in the physical properties of absorber layer, enormous efforts have been focused on the development of suitable buffer layer for SnS-based solar cells. Herein, we investigate the device performance of SnS-based TFSCs by introducing double buffer layers, in which CdS is applied as first buffer layer and ZnMgO films is employed as second buffer layer. The effect of the composition ratio (Mg/(Mg+Zn)) of RF sputtered ZnMgO films on the device performance is studied. The structural and optical properties of ZnMgO films with various Mg/(Mg+Zn) ratios are also analyzed systemically. The fabricated SnS-based TFSCs with device structure of SLG/Mo/SnS/CdS/ZnMgO/AZO/Al exhibit a highest cell efficiency of 1.84 % along with open-circuit voltage of 0.302 V, short-circuit current density of 13.55 mA cm-2, and fill factor of 0.45 with an optimum Mg/(Mg + Zn) ratio of 0.02.

Improvement in $AI_2O_3$ dielectric behavior by using ozone as an oxidant for the atomic layer deposition technique (ALD법으로 제조된 $AI_2O_3$막의 유전적 특성)

  • 김재범;권덕렬;오기영;이종무
    • Journal of the Korean Vacuum Society
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    • v.11 no.3
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    • pp.183-188
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    • 2002
  • In the present study AI$(CH_3)_3)$films were deposited by the ALD technique using trimethylaluminum(TMA) and ozone to improve the quality of the AI$(CH_3)_3)$ films, since the $OH^-$ radicals existing in the AI$(CH_3)_3)$ films deposited using TMA and $H_2O$ degrade the physical and the dielectric properties of the AI$(CH_3)_3)$ film. The XPS analysis results indicate that the $OH^-$ radical concentration in the AI$(CH_3)_3)$film deposited using $O_3$is lower than that using $H_2O$. The etch rate of the AI$(CH_3)_3)$film deposited using $O_3$is also lower than that using $H_2O$, suggesting that the chemical inertness of the former is better than the latter. The MIS capacitor fabricated with the TiN conductor and the $Al_2$O$_3$dielectrics formed using $O_3$offers lower leakage current, better insulating property and smaller flat band voltage shift $({\Delta}V_{FB})$.

Effect of Interlayer on TiN and CrN Thin Films of STS 420 Hybrid-Deposited by AlP and DC Magnetron Sputtering (AIP 와 스퍼터링으로 복합증착된 420 스테인리스강의 TiN과 CrN 박막에 미치는 중간층의 영향)

  • Choi, Woong-Sub;Kim, Hyun-Seung;Park, Burm-Su;Lee, Kyung-Ku;Lee, Doh-Jae;Lee, Kwang-Min
    • Korean Journal of Materials Research
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    • v.17 no.5
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    • pp.256-262
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    • 2007
  • Effects of interlayer and the combination of different coating methods on the mechanical and corrosion behaviors of TiN and CrN coated on 420 stainless steel have been studied. STS 420 specimen were tempered at $300^{\circ}C$ for 1 hr in vacuum furnace. The TiN and CrN thin film with 2 ${\mu}m$ thickness were coated by arc ion plating and DC magnetron sputtering following the formation of interlayer for pure titanium and chromium with 0.2 ${\mu}m$ thickness. The microstructure and surface analysis of the specimen were conducted by using SEM, XRD and roughness tester. Mechanical properties such as hardness and adhesion also were examined. XRD patterns of TiN thin films showed that preferred TiN (111) orientation was observed. The peaks of CrN (111) and $Cr_2N$ (300) were only observed in CrN thin films deposited by arc ion plating. Both TiN and CrN deposited by arc ion plating had the higher adhesion and hardness compared to those formed by magnetron sputtering. The specimen of TiN and CrN on which interlayer deposited by magnetron sputtering and thin film deposited by arc ion plating had the highest adhesion with 22.2 N and 19.2 N. respectively. TiN and CrN samples shown the most noble corrosion potentials when the interlayers were deposited by using magnetron sputtering and the metal nitrides were deposited by using arc ion plating. The most noble corrosion potentials of TiN and CrN were found to be approximately -170 and -70 mV, respectively.

Effects of Passivation Thin Films by Spray Coatings on Properties of Flexible CIGS Solar Cells (스프레이코팅법에 의한 패시베이션 박막이 플렉시블 CIGS 태양전지의 특성에 미치는 영향)

  • Lee, Sang Hee;Park, Byung Min;Kim, Ki Hong;Chang, Young Chul;Pyee, Jaeho;Chang, Ho Jung
    • Journal of the Microelectronics and Packaging Society
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    • v.23 no.3
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    • pp.57-61
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    • 2016
  • In order to protect the solar cells from the moisture and oxygen, we evaluated the electrical and optical properties for the $Cu(In,Ga)Se_2$ (CIGS) solar cells which were prepared by the spray coating method. Generally, the EVA (ethylene-vinyl acetate) films are laminated to protect the CIGS flexible solar cells, which results in a high cost process due to complicated devices. In this study, we tried to prepare the protection layers of the flexible CIGS flexible solar cells by using spray coating method instead of conventional laminating films in order to reduce the device weight as well as the process time. The CIGS solar cells with spray coating method showed an enhanced efficiency than the before treated sample (2.77% to 2.93%) and relatively proper water vapor transmission rate of the solar cells about 62.891 gm/[$m^2-day$].

High rate deposition of poly-si thin films using new magnetron sputtering source

  • Boo, Jin-Hyo;Park, Heon-Kyu;Nam, Kyung-Hoon;Han, Jeon-Geon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.186-186
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    • 2000
  • After LeComber et al. reported the first amorphous hydrogenated silicon (a-Si: H) TFT, many laboratories started the development of an active matrix LCDs using a-Si:H TFTs formed on glass substrate. With increasing the display area and pixel density of TFT-LCD, however, high mobility TFTs are required for pixel driver of TF-LCD in order to shorten the charging time of the pixel electrodes. The most important of these drawbacks is a-Si's electron mobiliy, which is the speed at which electrons can move through each transistor. The problem of low carier mobility for the a-Si:H TFTs can be overcome by introducing polycrystalline silicon (poly-Si) thin film instead of a-Si:H as a semiconductor layer of TFTs. Therefore, poly-Si has gained increasing interest and has been investigated by many researchers. Recnetly, fabrication of such poly-Si TFT-LCD panels with VGA pixel size and monolithic drivers has been reported, . Especially, fabricating poly-Si TFTs at a temperature mach lower than the strain point of glass is needed in order to have high mobility TFTs on large-size glass substrate, and the monolithic drivers will reduce the cost of TFT-LCDs. The conventional methods to fabricate poly-Si films are low pressure chemical vapor deposition (LPCVD0 as well as solid phase crystallization (SPC), pulsed rapid thermal annealing(PRTA), and eximer laser annealing (ELA). However, these methods have some disadvantages such as high deposition temperature over $600^{\circ}C$, small grain size (<50nm), poor crystallinity, and high grain boundary states. Therefore the low temperature and large area processes using a cheap glass substrate are impossible because of high temperature process. In this study, therefore, we have deposited poly-Si thin films on si(100) and glass substrates at growth temperature of below 40$0^{\circ}C$ using newly developed high rate magnetron sputtering method. To improve the sputtering yield and the growth rate, a high power (10~30 W/cm2) sputtering source with unbalanced magnetron and Si ion extraction grid was designed and constructed based on the results of computer simulation. The maximum deposition rate could be reached to be 0.35$\mu$m/min due to a high ion bombardment. This is 5 times higher than that of conventional sputtering method, and the sputtering yield was also increased up to 80%. The best film was obtained on Si(100) using Si ion extraction grid under 9.0$\times$10-3Torr of working pressure and 11 W/cm2 of the target power density. The electron mobility of the poly-si film grown on Si(100) at 40$0^{\circ}C$ with ion extraction grid shows 96 cm2/V sec. During sputtering, moreover, the characteristics of si source were also analyzed with in situ Langmuir probe method and optical emission spectroscopy.

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Biodegradation effect of cross-cultivated fungi and edible mushrooms on plastic films (식용버섯과 진균 교차 배양을 활용한 플라스틱 필름의 생물학적 분해효과)

  • Doo-Ho Choi;Eunji Lee;Gi-Hong An;Kang-Hyo Lee
    • Journal of Mushroom
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    • v.22 no.1
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    • pp.31-36
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    • 2024
  • Plastics are widely used in industries in human society and because of their structural stability, degradation is a serious global issue. To estimate the degradation of plastic, 31 edible mushrooms were cultured with the selected plastic films (polyethylene [PE], polystyrene [PS], and poly(ethylene terephthalate) [PET]) for 3 months at 25 ℃. Measuring the weight of the films showed that four species of mushrooms, namely Porostereum spadiceum, Ganoderma lucidum, Coprinellus micaceus, and Pleurotus ostreatus, exhibited the highest degrees of plastic degradation. In addition, the mushrooms and fungi that exhibited the most significant plastic degradation were cross-cultured to promote this degradation. As a result, cross-cultivation of G. lucidum and Aspergillus niger showed a weight loss of 2.49% for the PET film. For the PS film, Aspergillus nidulans showed a weight loss of 4.06%. Cross-cultivation of A. nidulans and C. micaceus, which showed a weight loss of 2.95%, was noted as an alternative for PS biodegradation, but is harmful to humans. These bio-degradation effects of edible mushroom will contribute to the development of alternatives for eco-friendly plastic degradation.