• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1881-1884
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• 2003

Diamond turning machines have, been used for the processing of surface like a mirror with the control scheme of minimizing shape error, Ultra-precision diamond fuming is applied to produce highly precision optical components required not only a high machining accuracy but also a good surface roughness. Al-6061 is widely used as optical parts such as laser reflector's mirror or multimedia instrument. In this study, thermal-imaged Al flat mirrors are fabricated by SPDT. The surface roughness 3.472 nm Ra, power 2 fringe(at 632.8 nm) and irregularity 1 fringe(at 632.8 nm) for form waviness of thermal-imaged Al flat mirror are very satisfied to the required specification in industry.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05b
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• pp.136-139
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• 2003

Thermal imaging system is electro-optical imaging device which can make visible the difference of infrared energy naturally emitted by objects. It is acquire the same images at any time of the day or night. There it has been readily available to the night observation such as fire control systems. In this study, we are manufacturing thermal image Al flat mirror. The surface roughness 3.539nm Ra and power 0.382 fringe(at 632.8nm), irregularity 0.835 fringe(at 632.8nm) for form waviness of thermal image Al flat mirror are very satisfied. The results will be reflected for development of the ultra precision application. And a brief review of Ultra-precision system in the field of Ultra-precision at Korea photonics technology institute (KOPTI) is present in this paper.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.48 no.11
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• pp.748-754
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• 1999

Micromirrors supported by S-shape girders were fabricated and their angular deflections were measured using a laser-based system. A micromirror consists of a $50\mum\times50\mum$ aluminum plate, posts and an S-shape girder. Two electrodes were deposited on two corners of the substrate beneath the mirror plate. $50\times50$micromirror array were fabricated using the Al-MEMS process. The electrostatic force caused by the voltage difference between the mirror plate and one of the electrodes causes the mirror plate to tilt until the girder touches the substrate. Bial voltage of the mirror plate is between 25~35V and signal pulse voltage on both electrodes is $\pm5V$. A laser-based system capable of real-time two-dimensional angular deflection measurement of the micromirror was developed. The operation of the system is based on measuring the displacement of a HeNe laser beam reflecting off the micromirror. The resonant frequency of the micromirror is 50kHz when the girder touches the substrate and it is 25 when the micromirror goes back to flat position, since the moving mass is about twice of the former case. The measurement results also revealed that the micromirror slants to the other direction even after the girder touches the substrate.