• 제목/요약/키워드: Al Film

검색결과 2,134건 처리시간 0.031초

화학적인 용액 코팅방법에 의한 박막형 고온초전도체에 사용되는 SUS310 금속모재의 평탄화 연구 (Planarization of SUS310 Metal Substrate Used for Coated Conductor Substrate by Chemical Solution Coating Method)

  • 이종범;이현준;김병주;권병국;김선진;이종수;이철영;문승현;이희균;홍계원
    • Progress in Superconductivity
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    • 제12권2호
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    • pp.118-123
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    • 2011
  • The properties of $2^{nd}$ generation high temperature superconducting wire, coated conductor strongly depend on the quality of superconducting oxide layer and property of metal substrate is one of the most important factors affecting the quality of coated conductor. Good mechanical and chemical stability at high temperature are required to maintain the initial integrity during the various process steps required to deposit several layers consisting coated conductor. And substrate need to be nonmagnetic to reduce magnetization loss for ac application. Hastelloy and stainless steel are the most suitable alloys for metal substrate. One of the obstacles in using stainless steel as substrate for coated conductor is its difficulties in making smooth surface inevitable for depositing good IBAD layer. Conventional method involves several steps such as electro polishing, deposition of $Al_2O_3$ and $Y_2O_3$ before IBAD process. Chemical solution deposition method can simplify those steps into one step process having uniformity in large area. In this research, we tried to improve the surface roughness of stainless steel(SUS310). The precursor coating solution was synthesized by using yttrium complex. The viscosity of coating solution and heat treatment condition were optimized for smooth surface. A smooth amorphous $Y_2O_3$ thin film suitable for IBAD process was coated on SUS310 tape. The surface roughness was improved from 40nm to 1.8 nm by 4 coatings. The IBAD-MgO layer deposited on prepared substrate showed good in plane alignment(${\Delta}{\phi}$) of $6.2^{\circ}$.

2원전자빔 증착법에 의한 티타늄붕화물($\textrn{TiB}_{x}$) 박막의 성장특성 (Growth characteristics of titanium boride($\textrn{TiB}_{x}$) thin films deposited by dual-electron-beam evaporation)

  • 이영기;이민상;임철민;김동건;진영철
    • 한국결정성장학회지
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    • 제11권1호
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    • pp.20-26
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    • 2001
  • Ti와 B을 각각의 증발원으로 한 2원 전자빔 증착법으로 500$^{\circ}$의 기판온도에서 (100) Si 기판 위에 티타늄 붕화물 (${TiB}_{x}$) 박막을 증착시켰다. 이 방법은 여러 가지 boron-to-totanium ratio ($0{\le}B/Ti \le 2.5$)를 가지는 비당량 (${TiB}_{x}$ 박막의 표면 조도 역시 B/Ti비에 의존하여 변화되었다. 그리고 Pure Ti 박막은 (002)면의 우선 성장거동을 나타내었으나, $B/Ti{\ge}1.0$의 경우 (111)면의 우선 성장거동을 보이는 단일상의 TiB 박막이 성장되었다. 그러나 B농도가 더욱 증가됨에 따라 육방정계의 ${TiB}_{2}$상이 형성되기 시작하여 $B/Ti{\ge}2.0$ 의 조성비를 가지는 박막에서는 단일상의 ${TiB}_{2}$ 화합물을 나타내었다. 그리고 Si 기판상에 증착된 ${TiB}_{x}$ 박막의 잔류응력은 B/Ti비에 의존하나, 2원 전자빔 증착법으로 성장된 모든 박막에서 3~$20{\times}^9$dyn/$\textrm{cm}^2$ 정도의 인장응력을 나타내었다.

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비아 크기가 솔더범프 형성에 미치는 영향 (Via-size Dependance of Solder Bump Formation)

  • 김성진;주철원;박성수;백규하;이상균;송민규
    • 마이크로전자및패키징학회지
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    • 제8권1호
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    • pp.33-38
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    • 2001
  • 5인치 실리콘 기판위에 수 회 코팅기술을 이용하여 두꺼운 감광막을 얻은 후, 전기도금 법으로 솔더범프를 형성하고, 비아크기의 변화에 따른 리플로 전과, 후의 솔더범프 형성에 미치는 영향을 조사하였다. 리플로 전의 범프바닥 (bump bottom) 직경은 리플로 후에도 거의 변화가 없는 반면, 솔더범프 모양은 패턴된 비아직경 크기에 크게 의존했다. 비아직경이 클수록 높은 도금효율을 보였다. 비아직경이 작을수록 리플로 후의 범프는 리플로 전의 범프높이와 비교하여 크게 낮아졌지만, aspect ratio는 크다는 것을 알았다. 고밀도와 고aspect ratio를 갖는 범프를 얻기 위하여 비아직경과 범프피치를 줄여야하지만, 과도금 (overplating), 또는 리플로를 할 때 최인접 간 범프끼리 맞닿을 수 있기 때문에 최인접 간 범프거리 확보는 중요하다. 비아높이(film두께)를 높게 하여 과도금을 하지 않고 비아높이가지만 도금하여 과도금으로 인한 최인접 범프끼리의 맞닿음을 없애는 방법과 범프배열을 zig-zag로 하는 방법을 혼용하면 과도금, 또는 리플로를 할 때 최인접 범프 간에 맞닿는 문제는 어느 정도 해결할 수 있다.

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Poly(p-phenylenevinylene)s Derivatives Containing a New Electron-Withdrawing CF3F4Phenyl Group for LEDs

  • Jin, Young-Eup;Kang, Jeung-Hee;Song, Su-Hee;Park, Sung-Heum;Moon, Ji-Hyun;Woo, Han-Young;Lee, Kwang-Hee;Suh, Hong-Suk
    • Bulletin of the Korean Chemical Society
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    • 제29권1호
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    • pp.139-147
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    • 2008
  • New PPV derivatives which contain electron-withdrawing CF3F4phenyl group, poly[2-(2-ethylhexyloxy)-5-(2,3,5,6-tetrafluoro-4-trifluoromethylphenyl)-1,4-phenylenevinylene] (CF3F4P-PPV), and poly[2-(4-(2-etylhexyloxy)-phenyl)-5-(2,3,5,6-tetrafluoro-4-trifluoromethylphenyl)-1,4-phenylenevinylene] (P-CF3F4P-PPV), have been synthesized by GILCH polymerization. As the result of the introduction of the electron-withdrawing CF3F4phenyl group to the phenyl backbone, the LUMO and HOMO energy levels of CF3F4P-PPV (3.14, 5.50 eV) and P-CF3F4P-PPV (3.07, 5.60 eV) were reduced. The PL emission spectra in solid thin film are more red-shifted over 50 nm and increased fwhm (full width at half maximum) than solution conditions by raising aggregation among polymer backbone due to electron withdrawing effect of 2,3,5,6-tetrafluoro-4-trifluoromethylphenyl group. The EL emission maxima of CF3F4P-PPV and P-CF3F4P-PPV appear at around 530-543 nm. The current density-voltage-luminescence (J-V-L) characteristics of ITO/PEDOT/polymer/Al devices of CF3F4P-PPV and P-CF3F4P-PPV show that turn-on voltages are around 12.5 and 7.0 V, and the maximum brightness are about 82 and 598 cd/m2, respectively. The maximum EL efficiency of P-CF3F4P-PPV (0.51 cd/A) was higher than that of CF3F4P-PPV (0.025 cd/A).

A STUDY ON MECHANICAL PROPERTIES OF TiN, ZrN AND WC COATED FILM ON THE TITANIUM ALLOY SURFACE

  • Oh, Dong-Joon;Kim, Hee-Jung;Chung, Chae-Heon
    • 대한치과보철학회지
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    • 제44권6호
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    • pp.740-750
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    • 2006
  • Statement of problems. In an attempt to reduce screw loosening, dry lubricant coatings such as pure gold or tefron have been applied to the abutment screw. However, under repeated tightening and loosening procedures, low wear resistance and adhesion strength of coating material produced free particles on the surface of abutment screw and increased frictional resistance resulting in screw tightening problems. Purpose. The aim of this study was to compare friction coefficient, adhesion strength, vickers hardness and evaluate coating surface of titanium alloy specimens coated with TiN(titanium nitride), ZrN(zirconium nitride) and WC(tungsten carbide). Material and method. Titanium alloy(Ti-6Al-4V) discs of 12mm in diameter and 1mm in thickness divided into 4 groups. TiN, ZrN and WC was coated for the specimens of 3 groups respectively, and those of 1 group were not coated. Each group was made up of 4 specimens. In this study, sputtering method was used among the PVD(Physical Vapor Deposition) techniques available for TiN, ZrN and WC coatings. Friction coefficient, adhesion strength, vickers hardness and coating surface of 4 groups were measured. Results. 1. For all three coating conditions, friction coefficient was significantly decreased. Especially, ZrN coated surface showed the lowest value. $TiN(0.39{\pm}0.02)$, $ZrN(0.24{\pm}0.01)$, $WC(0.31{\pm}0.03)$. 2. TiN coating showed the highest adhesion strength, however ZrN coating had the lowest value. $TiN(25.3N{\pm}1.6)$, $ZrN(14.8N{\pm}0.6)$, $ WC(18.4N{\pm}0.7)$. 3. Vickers hardness of all three coatings was remarkably increased as compared with that of none coated specimen. TiN coating had the highest Vickers hardness, however WC coating showed the lowest value. $TiN(1865.2{\pm}33.8)$, $ZrN(1814.4{\pm}18.6)$, $WC(1008.5{\pm}35.9)$. 4. The ZrN or WC coated specimen showed a homogeneous and smooth surface, however the rough surface with defects was observed for TiN coating. Conclusions. When TiN, ZrN and WC coating applied to the abutment screw, frictional resistance would be reduced, as a result, the greater preload and prevention of the screw loosening could be expected.

복원력이 좋은 정어리 단백질 농축물의 가공 -1. 정어리 단백질 농축물의 가공 및 제품의 품질 특성- (A Study on the Processing of Sardine Protein Concentrate with Good Rehydration Capacity -1. Processing and Product Quality of Sardine Protein Concentrate-)

  • 이승원;주동식;김진수;김풍호;이응호
    • 한국수산과학회지
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    • 제24권2호
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    • pp.137-143
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    • 1991
  • 정어리를 비교적 간단한 방법으로 식품가공용 중간소재로 이용하기 위한 일련의 연구로서 정어리육을 채취하여 autoclave$(121^{\circ}C,\;15Lbs)$에서 처리한 다음 압착 및 알칼리용액을 분무시킨 후 이를 건조 및 분쇄하여 정어리 어육 농축 단백질을 제조하였다. 고온가압처리 시간은 $121^{\circ}C$에서 1분, pH는 7.8로 하여 제조하는 것이 가장 적당하였다. 이렇게 제조된 제품의 단백질함량은 $74.4\%$, 지방함량은$9.1\%$였다. 또한 수율은 $40.0\%$로 자숙처리한 제품이나 에탄올 처리한 제품보다 높았고, 유화성 및 보수력은 각각 $48.7\%,\;50.0\%$ 였다 포말성을 $44\%$로 낮았으며, 포말안정성도 $1{\~}2$시간으로 낮았다. 소화율은 $78.2\%$로 자숙처리제품(B) 및 에탄올처리제품(C)와 큰 차이가 없었으나, 소화된 성분의 관능검사 결과 고온가압처리제품(A)가 감칠맛이 가장 강한 것으로 나타났다.

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Structural and Electrical Properties of Fluorine-doped Zinc Tin Oxide Thin Films Prepared by Radio-Frequency Magnetron Sputtering

  • Pandey, Rina;Cho, Se Hee;Hwang, Do Kyung;Choi, Won Kook
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.335-335
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    • 2014
  • Over the past several years, transparent conducting oxides have been extensively studied in order to replace indium tin oxide (ITO). Here we report on fluorine doped zinc tin oxide (FZTO) films deposited on glass substrates by radio-frequency (RF) magnetron sputtering using a 30 wt% ZnO with 70 wt% SnO2 ceramic targets. The F-doping was carried out by introducing a mixed gas of pure Ar, CF4, and O2 forming gas into the sputtering chamber while sputtering ZTO target. Annealing temperature affects the structural, electrical and optical properties of FZTO thin films. All the as-deposited FZTO films grown at room temperature are found to be amorphous because of the immiscibility of SnO2 and ZnO. Even after the as-deposited FZTO films were annealed from $300{\sim}500^{\circ}C$, there were no significant changes. However, when the sample is annealed temperature up to $600^{\circ}C$, two distinct diffraction peaks appear in XRD spectra at $2{\Theta}=34.0^{\circ}$ and $52.02^{\circ}$, respectively, which correspond to the (101) and (211) planes of rutile phase SnO2. FZTO thin film annealed at $600^{\circ}C$ resulted in decrease of resistivity $5.47{\times}10^{-3}{\Omega}cm$, carrier concentration ~1019 cm-3, mobility~20 cm2 V-1s-1 and increase of optical band gap from 3.41 to 3.60 eV with increasing the annealing temperatures and well explained by Burstein-Moss effect. Change of work function with the annealing temperature was obtained by ultraviolet photoemission spectroscopy. The increase of annealing temperature leads to increase of work function from ${\phi}=3.80eV$ (as-deposited FZTO) to ${\phi}=4.10eV$ ($600^{\circ}C$ annealed FZTO) which are quite smaller than 4.62 eV for Al-ZnO and 4.74 eV for SnO2. Through X-ray photoelectron spectroscopy, incorporation of F atoms was found at around the binding energy of 684.28 eV in the as-deposited and annealed FZTO up to 400oC, but can't be observed in the annealed FZTO at 500oC. This result indicates that F atoms in FZTO films are loosely bound or probably located in the interstitial sites instead of substitutional sites and thus easily diffused into the vacuum from the films by thermal annealing. The optical transmittance of FZTO films was higher than 80% in all specimens and 2-3% higher than ZTO films. FZTO is a possible potential transparent conducting oxide (TCO) alternative for application in optoelectronics.

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RF 마그네트론 스퍼터링을 이용한 p 타입 투명전도 산화물 SrCu2O2 박막의 제조 (Fabrication of P-type Transparent Oxide Semiconductor SrCu2O2 Thin Films by RF Magnetron Sputtering)

  • 석혜원;김세기;이현석;임태영;황종희;최덕균
    • 한국재료학회지
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    • 제20권12호
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    • pp.676-680
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    • 2010
  • Most TCOs such as ITO, AZO(Al-doped ZnO), FTO(F-doped $SnO_2$) etc., which have been widely used in LCD, touch panel, solar cell, and organic LEDs etc. as transparent electrode material reveal n-type conductivity. But in order to realize transparent circuit, transparent p-n junction, and introduction of transparent p-type materials are prerequisite. Additional prerequisite condition is optical transparency in visible spectral region. Oxide based materials usually have a wide optical bandgap more than ~3.0 eV. In this study, single-phase transparent semiconductor of $SrCu_2O_2$, which shows p-type conductivity, have been synthesized by 2-step solid state reaction at $950^{\circ}C$ under $N_2$ atmosphere, and single-phase $SrCu_2O_2$ thin films of p-type TCOs have been deposited by RF magnetron sputtering on alkali-free glass substrate from single-phase target at $500^{\circ}C$, 1% $H_2$/(Ar + $H_2$) atmosphere. 3% $H_2$/(Ar + $H_2$) resulted in formation of second phases. Hall measurements confirmed the p-type nature of the fabricated $SrCu_2O_2$ thin films. The electrical conductivity, mobility of carrier and carrier density $5.27{\times}10^{-2}S/cm$, $2.2cm^2$/Vs, $1.53{\times}10^{17}/cm^3$ a room temperature, respectively. Transmittance and optical band-gap of the $SrCu_2O_2$ thin films revealed 62% at 550 nm and 3.28 eV. The electrical and optical properties of the obtained $SrCu_2O_2$ thin films deposited by RF magnetron sputtering were compared with those deposited by PLD and e-beam.

일시다획성 적색육어류를 이용한 중간식품소재 개발에 관한 연구 2. 저염 고등어 Fillet의 가공 (Processing of Ready-to-Cook Food Materials with Dark Fleshed Fish 2. Processing of Ready-to-Cook Low Salt Mackerel Fillet)

  • 이병호;이강호;유병진;서재수;정인학;최병대;지영애
    • 한국수산과학회지
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    • 제18권5호
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    • pp.409-416
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    • 1985
  • In previous paper (Lee et al., 1983) processing method of sardine meat "surimi" was described as a part of the wort to develop new types of ready-to-cook food materials with dark fleshed fishes. As the other part of the work, processing of low salt mackerel fillet was investigated, in this paper, in which fresh mackerel was filleted, salted in brine or with dry salt for an adequate time until the expected salt concentration reached, washed, air dried (3 m/sec, 15 to $20^{\circ}C$), and finally packed individually in K-flex film bag by vacuum or $N_2$ gas substitution. Salting time and salt concentration of brine was decided by the salt level penetrated into the fillet. As the final salt level was fixed to 4 to $5\%$, salting for 20 hours with $10\%$ dry salt or in $15\%$ brine at $5^{\circ}C$ was enough to get that level of salt. If the final salt level was set 5 to $6\%$, salting for 20-24 hours with $15\%$ dry salt or in $20\%$ brine was adequate. Salt penetration, however, was not much influenced by salting method and temperature. Changes in VBN and salt soluble protein occurred more rapidly in cases of salting with dry salt at $20^{\circ}C$ than salted in brine at $5^{\circ}C$, although it was not significant in the period of 20 to 24 hours. Oxidation of lipid and histamine formation during salting at $20^{\circ}C$ could not be neglected if it was delayed loger than 25 hours. Insolubilizing the salt soluble proteins during the storage of salted fillet occurred rapidly regardless of storage temperature. Browning and histamine formation, however, was depended on temperature and packing condition. In case of air pack, deterioration by browning and rancid was deeply developed but not the case for the packs by vacuum or $N_2$ gas substitution. The shelf-life of the salted mackerel fillet based on panel scores of brown color and rancidity, appeared 21 days for the air packed, and more than 30 days for vacunm or $N_2$ gas packed fillet at $20^{\circ}C$.

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TFA-MOD법으로 제조된 YBCO 박막의 습도분압 효과 (The humidity effect of YBCO film by TFA-MOD process)

  • 장석헌;임준형;윤경민;이승이;김규태;이창민;주진호;나완수;이희균;홍계원
    • Progress in Superconductivity
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    • 제8권1호
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    • pp.65-70
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    • 2006
  • We fabricated $YBa_2Cu_33O_{7-x}$(YBCO) films on(00l) $LaAlO_3$ substrates prepared by metal organic deposition(MOD) method using trifluoroacetate(TFA) solution and evaluated the effects of the humidity on the microstructure, phase purity, and critical properties. The films calcined at $430^{\circ}C$ were fired at $775^{\circ}C$ at 0%, 4.2%, 12.1%, and 20.0% humidified As gas mixed with 0.1% $O_2$. We observed that the amount of $BaF_2$ phase was effectively reduced and that a sharp and strong biaxial texture formed under a humidified atmosphere, leading to increased critical properties. For the films fired at 0% humidity, the $T_c\;and\;I_c$ were undetectably small. When the humidity was increased to 4.2%, the corresponding $T_c$(onset) and $I_c$ were increased to 90.5 K and 8 A/cm-width, respectively. For the films at the humidity range of 12.1-20.0%, the $I_c$ was found to be 35 A/cm-width. According to the results of the XRD, pole-figure, and SEM, these improved critical properties are probably attributed to the formation of a purer YBCO phase, larger grain size, and stronger c-axis orientation.

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