• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.605-608
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• 1997

In this paper, the case study of reducing rotational errors is done for a grinding spindle with an active magnetic bearing system. The rotational errors acting on the magnetic bearing spindle are due to mass unbalance of rotor, runout, grinding excitation and ed nonlinear dynamics of electromagnets. For the most case, the electrical runout of sensor target is big even in well-finished surface; this runout can cause a rotation error amplified by feedback control system. The adaptive feedforward method based on LMS algorithm is discussed to compensate this kind of runout effects, and investigated its effectiveness by numerical simulation and experimental analysis. The rotor orbit size in both bearings is reduced about to 5 pin due to lX rejection by feedforward control up to 50,000 rpm.

• 한국공작기계학회논문집
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• 제10권5호
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• pp.31-38
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• 2001

This paper deals with the micro turning property of setting angle using diamond tool. The bed of the system has used the granite which has the thermal and vibrational characteristics superior to the cast iron bed for the common machine tool. To minimize the inner and outer vibration of the fuming system, an air pad system was manufactured and tested. The aero-static spindle system which has the excellent rotation accuracy was designed and manufactured. As a result of the micro-cutting test on aluminum alloy, tool setting angel have effected on surface roughness. From the results, the micro-cutting conditions hope to provide the useful actual data using in industrial fields.

• 한국생산제조학회지
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• 제19권4호
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• pp.576-581
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• 2010

As a super high speed small-sized centrifugal separator which is operated by the center inputting method has solved two difficulty problems, it can be made use of developing the new composition through the making of Nano particle (50~100nm) by high speed revolution and alleviation of unbalanced shapes inside the disk continuously throwing slurry in the central part. Uses the air spindle and the centrifugal machine production will be able to manufacture the Roh class fine particle under boil.

• 한국정밀공학회지
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• 제18권2호
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• pp.96-101
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• 2001

This paper shows the temperature characteristics of a high speed angular contact ball gearing which is 7004C type with ISO P2 tolerance class. A built-in motor type high speed spindle which adopts an oil-air lubrication system was used to measure the temperature rise up to 60,000rpm. The gearing temperature was measured using thermocouples that were attached to the outside surfaces of the outer rings. The result showed that the continuous test method which was suggested in this paper is more effective than on and off method and the lubrication oil supply rate should be reduced in high speed rolling bearings as long as the seizure does not occur. And the result were confirmed that the bearings packed with ceramic balls are superior to those with steel balls in temperature characteristics.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 춘계학술대회
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• pp.1082-1086
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• 2004

In silicon wafer manufacturing process, the grinding process has been adopted to improve the flatness of wafer. The grinding of wafer is usually used by the infeed grinding machine. The infeed grinding machine has been depended on imports. Therefore, it is necessary to develop the infeed grinding machine because the demand of the infeed grinding machine is increasing more and more. This paper describes the technologies of infeed grinding machine and intend to introduce the studies in the development of the intelligent grinding system for grinding of wafer. The air bearing spindle for the infeed grinding machine was developed by domestic technologies and the grinding part design of the intelligent grinding system for wafer grinding was completed.

• 소음진동
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• 제10권6호
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• pp.977-984
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• 2000

Vibration of disk drive spindle is one of the major limiting factors in achieving higher track densities in hard disk drives. Vibration of a BLDC motor is a coupled phenomenon between mechanical characteristics and magnetic origins through the motor air-gap. In this paper, radial magnetic forces for symmetric and asymmetric BLDC motor are calculated with respect to the various rotor eccentricity using analytic method. Based on the results of the radial magnetic forces, transient whirl responses of the spindle motor are analyzed using finite element and transfer matrices. Results show that an asymmetric motor has a worse effects on unbalanced magnetic forces and vibration when mechanical and magnetic coupling exists.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 춘계학술대회 논문집
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• pp.143-144
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• 2007

• 한국산학기술학회논문지
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• 제12권12호
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• pp.5412-5419
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• 2011

산업의 발달에 따른 각종기기 장치들의 고속화, 소형화, 정밀화로 인해 고속 스핀들의 필요성은 점점 커지고 있다. 또한 공기동압베어링은 스테이지 모션에 대해서 무마찰 실현을 위해서 웨이퍼 생산용 광학 리소그래피 분야에도 적용된다. 공기동압베어링은 마찰에 의한 동력손실과 열 발생이 적어 고속회전에 유리하고 고정밀 회전이 가능하기 때문에 고속 고정밀 스핀들 시스템 및 하드 디스크 드라이브에 사용될 수 있다. 본 연구에서는 축 하중 지지를 위해 헤링본 홈 형상을 가지는 공기동압베어링의 성능에 대한 수치해석을 수행하였다. 또한 본 연구에서는 공기동압베어링을 제작하기 위해서 기존의 기계 가공방법과는 다른 비접촉식 초정밀 가공 방법인 마이크로 전기화학가공에 의한 방법으로 마이크로 그루브 가공을 수행하였고, 수치해석 프로그램을 이용하여 전극의 간극, 전해용액 농도, 가공시간 등 이론적인 수치를 시뮬레이션 하였다.

• 한국정밀공학회지
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• 제31권5호
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• pp.381-387
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• 2014

This paper introduces a system to machine micro-sized patterns effectively on surface based on micro-milling process using tools with simultaneous rotation and oscillation, oscillation micro milling. To review the effectiveness of proposed concept, we integrated a micro-spindle supported by active magnetic bearings with a precision 3-axis air bearing stage using double-wedge mechanism, and tested this oscillation milling. Two types of oscillation milling were tested, which are linear oscillation milling with a flat end mill and elliptical oscillation milling with a ball end mill with 0.3 mm of diameter. The spindle was rotating 110 krpm and workpiece was moving constant speed of 2~8 mm/sec during the oscillation milling. As the results, multiple oval shape dimples were generated in regular spacing, and the variation of elliptical motion made different shapes of patterns. The results showed that proposed oscillation milling can be successfully used for machining repeated micro-patterns.

• Journal of Mechanical Science and Technology
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• 제18권8호
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• pp.1401-1417
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• 2004

Experimental and computational studies were performed to determine the effects of different blade designs on a flow pattern inside a double-spindle counter rotating mower deck. In the experimental study, two different blade models were tested by measuring air velocities using a forward-scatter LDV system. The velocity measurements were taken at several different azimuth and axial sections inside the deck. The measured velocity distributions clarified the air flow pattern caused by the rotating blades and demonstrated the effects of deck and blade designs. A high-speed video camera and a sound level meter were used for flow visualization and noise level measurement. In the computational works, two-dimensional blade shapes at several arbitrary radial sections have been selected for flow computations around the blade model. For three-dimensional computation applied a non-inertia coordinate system, a flow field around the entire three-dimensional blade shape is used to evaluate flow patterns in order to take radial flow interactions into account. The computational results were compared with the experimental results.