• Proceedings of the Materials Research Society of Korea Conference
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• 2009.11a
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• pp.36.2-36.2
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• 2009

Low dielectric materials have been great attention in the semiconductor industry to develop high performance interlayer dielectrics with low k for Cu interconnect technology. In our study, the dielectric properties of SiOC /SiO2 thin film derived from polyphenylcarbosilane were investigated as a potential interlayer dielectrics for Cu interconnect technology. Polyphenylcarbosilane was synthesized from thermal rearrangement of polymethylphenylsilane around $350^{\circ}C{\sim}430^{\circ}C$. Characterization of synthesized polyphenylcarbosilane was performed with 29Si, 13C, 1H NMR, FT-IR, TG, XRD, GPC and GC analysis. From FT-IR data, the band at 1035 cm-1 is very strong and assigned to CH2 bending vibration in Si-CH2-Si group, indicating the formation of the polyphenylcarbosilane. Number average of molecular weight (Mn) of the polyphenylcarbosilane synthesized at $400^{\circ}C$ for 6hwas 2, 500 and is easily soluble in organic solvent. SiOC/SiO2 thin film was fabricated on ton-type silicon wafer by spin coating using 30wt % polyphenylcarbosilane incyclohexane. Curing of the film was performed in the air up to $400^{\circ}C$ for 2h. The thickness of the film is ranged from $1{\mu}m$ to $1.7{\mu}m$. The dielectric constant was determined from the capacitance data obtained from metal/polyphenylcarbosilane/conductive Si MIM capacitors and show a dielectric constant as low as 2.5 without added porosity. The SiOC /SiO2 thin film derived from polyphenylcarbosilane shows promising application as an interlayer dielectrics for Cu interconnect technology.

• Journal of the Korean Ceramic Society
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• v.42 no.6 s.277
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• pp.437-442
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• 2005

We fabricated BSCCO-2212 (2212) bulk superconductor by melt casting process, and evaluated the dependence of the critical properties on the temperature and cooling .ate of mold and the pouring methods of melt. It was observed that the critical current (Ic) of 2212 was significantly dependent on the pre-heating temperature of the mold. At the pre-heating temperature of $500^{\circ}C$ followed by air cooling condition, Ic of 48 A at 77 K was obtained which was higher than others processed at different temperatures. In addition, the Ic improved to 132 A when tilt casting method was applied. The improved Ic is probably due to the fact that the tilt casting reduced a turbulent flow of the melt during casting causing less porosity and more homogeneous microsructure. Critical temperature was measured to be 87-89 K after the first heat treatment and it improved to 90-91 K when subsequently heat treated at $650^{\circ}C$ in a nitrogen atmosphere. This improvement was considered to be due to an optimization of the oxygen content in the range of 8.16-8.2.

• Journal of Environmental Health Sciences
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• v.34 no.1
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• pp.101-107
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• 2008

Bio-filtration utilizes microorganisms fixed to a porous medium to metabolize pollutants present in an air stream. The microorganisms grow in a bio-film on the surface of a medium or are suspended in the water phase surrounding the medium particles. Therefore, bio-filter support media play one of the most important key roles in bio-filtration of gas phase pollutants. To characterize and select the appropriate support media, gas adsorption capacity and microorganism immobilization were investigated in lab-scale experiments for the selected target support media which were compost I (compost from lab-scale process), compost II (compost from municipal facility), bark, wood chip, orchid stone and vermiculite. As odor materials, ammonia and trimethylamine were utilized. From the result of experiments, bark was superior to any other support media tested in adsorption capacity as much as 12.5 mg ammonia per 1 g bark. In trimethylamine adsorption, bark and wood chip showed a remarkable results of 21.1 and 14.1 mg/g respectively. On the other hand, microorganism fixation test determined by the count of nitrogen oxidizing microbes population, the compost II and wood chips showed the best results. Considering the characteristics of materials and the operating condition of the bio-filter, bark, wood chip, and compost II are applicable to the support media of bio-filter when they are appropriately blended on the basis of studying the media pH, packing porosity and moisture contents.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.12 no.6
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• pp.292-298
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• 2002

Densified cordierite matrixes added alumina platelets were studied as a ceramic substrate material having a low thermal expansion coefficient, low dielectric constant and proper strength. Amorphous-type cordierite powders were filled with four kinds of alumina platelet powders in various compositions. All samples were sintered at $1300^{\circ}C$ for 2 h in an air atmosphere. Improved flexural strength of about 80 MPa, low dielectric constant of 5.0 at 1 MHz and low thermal expansion coefficient of $3.5 \times 10^{-6}/^{\circ}C$ were obtained by the control of the microstructure. Isolated micropores were formed in the matrix and the porosity was dependent on the platelet content and size. In the 10 vol% of alumina platelet content, the isolated micropores were 3~8 $\mu \textrm{m}$ in size, and an increase in dielectric constant by adding alumina platelet filler was inhibited by the micropores.

• Proceedings of the Korean Society of Soil and Groundwater Environment Conference
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• 2002.04a
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• pp.66-69
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• 2002

In this work, cost effective venting is considered by comparing flow rates of 5$m\ell$/min, 10$m\ell$/min, and 20$m\ell$/min. Studies were performed on a soil artificially contaminated with diesel oil (the initial TPH(Total Petroleum Hydrocarbon) concentration of 7098mg/kg), and nutrient condition was C:N:P rate of 100:10:1. The soil has a sandy texture with pH of 6.8, 2.16 ~2.38% organic matter, a total porosity of 47~52% and field capacity 16.2~ 17.2%. The column experiments was made of glass column of 60cm length and 10cm I.D. at controlled temperature of 2$0^{\circ}C$($\pm$2.5$^{\circ}C$). The efficiency of continuous flow rate of 5, 10 and 20$m\ell$/min resulted in separately 61.3%, 58.1%, and 55% reduction of initial TPH concentration(7098mg/kg). Hydrocarbon utilizing microbial count and dehydrogenase activity in air flow of 5$m\ell$/min were higher than those of the others. The first order degradation rate of n-alkanes ranging from C10 to C28 was higher than that of pristane and phytane as isoprenoids. The $C_{17}$/pristane and $C_{18}$phytane ratios for monitoring the degree of biodegradation were useful only during the early stages of oil degradation. Degradation contributed from about 89% to 93% of TPH removal. Volatilization loss of diesel oil in contaminated soil was about 7% to 11%, which was significantly small compared to degradation.n.

• Tunnel and Underground Space
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• v.11 no.4
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• pp.352-361
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• 2001

Mode I fracture toughness ( $K_{IC}$) of the frozen rocks and that of the frozen-thawed rocks were obtained by using BDT and CCNBD specimens. The test temperatures ranged from +$25^{\circ}C$ to -16$0^{\circ}C$. Wet and air-dry specimens of granite and sandstone were used in order to investigate the effect of water and porosity on fracture toughness. The SEM images of the frozen-thawed rocks were also analysed to check the density of thermal cracks. The $K_{IC}$ of the frozen rocks increased as the test temperature went down. The rate of increase was higher in wet condition than in dry condition and the rate of increase for wet granite was higher than that for wet sandstone. The $K_{IC}$ of the frozen-thawed rocks varied within 15% from the $K_{IC}$ of the rocks at room temperature. After one freeze-thaw process, thermal crack occurred in granite but no thermal cracks occurred in sandstone. And the crack density was increased as the temperature went down.n.

• Environmental Engineering Research
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• v.13 no.1
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• pp.19-27
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• 2008

Simultaneous removal of ternary gases of $NH_3$, $H_2S$ and toluene in a contaminated air stream was investigated over 180 days in a biofilter. A commercially available inorganic/polymeric composite chip with a large void volume (bed porosity > 0.80) was used as a microbial support. Multiple microorganisms including Nitrosomonas and Nitrobactor for nitrogen removal, Thiobacillus thioparus (ATCC 23645) for $H_2S$ removal and Pseudomonas aeruginosa (ATCC 15692), Pseudomonas putida (ATCC 17484) and Pseudomonas putida (ATCC 23973) for toluene removal were used simultaneously. The empty bed residence time (EBRT) ranged from 60 - 120 seconds and the inlet feed concentration was $0.0325\;g/m^3-0.0651\;g/m^3$ for $NH_3$, $0.0636\;g/m^3-0.141\;g/m^3$ for $H_2S$, and $0.0918\;g/m^3-0.383\;g/m^3$ for toluene, respectively. The observed removal efficiency was 2% - 98% for $NH_3$, 2% - 100% for $H^2S$, and 2% - 80% for toluene, respectively. Maximum elimination capacity was about $2.7\;g/m^3$/hr for $NH_3$, > $6.4\;g/m^3$/hr for $H_2S$ and $4.0\;g/m^3$/hr for toluene, respectively. The inorganic/polymeric composite carrier required 40 - 80 days of wetting time for biofilm formation due to the hydrophobic nature of the carrier. Once the surface of the carrier was completely wetted, the microbial activity became stable. During the long-term operation, pressure drop was negligible because the void volume of the carrier was two times higher than the conventional packing materials.

• Polymer(Korea)
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• v.24 no.2
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• pp.237-244
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• 2000

Phenolic resin used as a precursor of carbonized matrix for carbon-carbon composites was modified by addition of molybdenum disilicide (MoSi$_2$) in various concentrations of 0, 4, 12 and 20% by weight to improve the anti-oxidation properties of the composites. The green body was manufactured by a prepreg method and was submitted to carbonization up to 110$0^{\circ}C$. In this work, the oxidation behavior of carbon-carbon composites with MoSi$_2$ as an oxidation inhibitor was investigated at the temperature range of 600-100$0^{\circ}C$ in an air environment. The carbon-carbon composites with MoSi$_2$ showed a significantly improved oxidation resistance due to both the reduction of the porosity formation and the formation of mobile diffusion barrier for oxygen when compared to those without MoSi$_2$. Carbon active sites should be blocked, decreasing the oxidation rate of carbon. This is probably due to the effect of the inherent MoSi$_2$ properties, resulted from a formation of the protective layer against oxygen attack in the composites studied.

• Journal of the Korean Ceramic Society
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• v.55 no.2
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• pp.153-159
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• 2018

Porous ceramic plates were prepared from Onggi clay and bamboo charcoal powder at 1100 and $1200^{\circ}C$ and their porous properties and water absorption, and the cooling effect of porous plates, were investigated to produce eco-friendly porous ceramics for a self-cooling system that relies on the evaporation of absorbed water. Porous properties were dependent on the particle size of charcoal powder pore forming additive and the firing temperature; properties were also found to be dependent on the total pore volume, average pore size and porosity, which had values of $0.103-0.243cm^3/g$, 0.81 - 2.56 mm and 20.9 - 38.2%, respectively, at $1100^{\circ}C$ and $0.04-0.18cm^3/g$, 0.33 - 2.03 mm and 10.8 - 30.9%, respectively, at $1200^{\circ}C$. Cooling temperature difference of flowing air parallel to surface of porous ceramic plates fired with two kinds of charcoal powder at $1100^{\circ}C$ was $3.5-3.6^{\circ}C$ at $26^{\circ}C$ and 60% of relative humidity in a closed box. Cooling temperature difference was dependent on the number of porous plates and the distance between porous plates. A simple and eco-friendly cooling system using porous ceramic plates fired from Onggi clay and charcoal powder was proposed.

• Journal of the Korean Ceramic Society
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• v.40 no.6
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• pp.566-571
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• 2003

Hydroxyapatite (HAp)/Polyacrylic Acid(PAA) homogeneous composites of four different composition ratio were preparation by co-precipitation process with synthetic HAp and PAA as a binder. HAP/PAA composites were molding by cold isostatic pressing and were sintering by various condition in air. Crystallinity and structure of sintered HAp/PAA composites were investigated by XRD and FT-IR. Also, the compressive strength and the fracture surface of sintered specimens were measured by UTM and SEM. HAp/PAA composites were showed phase transformation of partially ${\alpha}$, ${\beta}$-tricalcium phosphate at sintering condition of 1200$^{\circ}C$ and 3 h. The pore size and porosity of sintered body were showed the range of 0.2∼3.0 $\mu\textrm{m}$ and 0.49∼13.43%, respectively. The compressive strength of sintered specimens were appeared the range of 36.6∼58.2 MPa. From these results, the sintered HAp/PAA comosites can be accounted for the microporous HAp having a good compressive strength due to homogeneous pore morphology.