• Proceedings of the KSR Conference
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• 2011.10a
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• pp.1335-1341
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• 2011

Conserving clean air and removing contaminants and particular matters accumulated in the ventilation system of the subway stations are key issue for green railway environment. There is no national guideline or industrial regulations to sustain clean duct and ventilation system, which requires rapid reformation of cleaning procedure and system. In fact, accumulated various particular matters and dusts can occur secondary air contamination and become a primary health harm factor for subway passengers. This study investigates various duct cleaning technologies and trends. In additon, effective cleaning method with an automated robot device is proposed. In particular, current dust cleaning technologies and duct cleaning robots are analyzed based on their functions and feasibilities. The proposed design of automated device is expected to save the operating cost of subway HVAC system and sustain clean air environment.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.3413-3417
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• 2007

In recent semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseous contaminants such as $NH_3$, SOx and organic gases from the outdoor air introduced into clean room. In the present study, an experiment was carried out to examine the improvement of removal efficiency for the gaseous contaminants. In order to improve the gas removal efficiency, a hot water contact heat exchanger was installed upstream of the air washer to heat and humidify the incoming outdoor air before entering the air washer.

• Proceedings of the SAREK Conference
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• 2006.06a
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• pp.442-447
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• 2006

In semiconductor manufacturing clean rooms, it becomes important to remove airborne molecular contaminants as well as particulate contaminant in outdoor air introduced into clean rooms. One suitable control technique for these chemical contaminants is air washing by water in an outdoor air handling unit. In order to enhance the removal efficiency of chemical contaminants the effect of adding a heating and humidifying process before an air washer was examined.

• Journal of Korean Society for Atmospheric Environment
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• v.25 no.5
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• pp.410-419
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• 2009

Generally, air pollutant emission at workplace is estimated by two methods: indirect methods using emission factors and direct methods based on CEMS (Continuous Emission Monitoring System). CAPSS (Clean Air Policy Support System) is a representative indirect method and the national air pollutant database of Korea. However, characteristics of some workplaces may create a gap between CAPSS and CEMS data. For improving of emission data accuracy, emission data of CEMS (named CleanSYS) equipped at 138 target workplaces were compared with those of CAPSS. As a result, $SO_x$ and $PM_{10}$ emission levels obtained by CAPSS were lower than those of CleanSYS. $SO_x$ and $PM_{10}$emission ratios were 61.5% and 71.2% lower respectively, showing the biggest gaps. On the other hand, $NO_x$ emission of CAPSS was higher by 10.4%. $SO_x$ showed the biggest difference in 'Energy industry combustion' and $NO_x$ did in 'Production Process' within the SCC category. $PM_{10}$ presented a large gap in 'Manufacturing industry combustion.' The differences in $SO_x$ between the two systems occurred because some large-size facilities lack pollution controllers or efficient pollution controllers. Based on this study, CAPSS emission database of Korea will improve accuracy through adopting CEMS emission system, which enables more efficient national atmospheric policies and workplace management.

• KIEAE Journal
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• v.4 no.3
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• pp.187-194
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• 2004

In many other buildings, hospital is very important because of its function and purpose. A proper building service systems including heating, cooling, ventilation and plumbing systems is required in hospial. Besides, a special systems like medical gas, vacuum cleaning systems are required to prevent contamination as well as cure a patient in hospital. Ventilation is very important method to keep the indoor pressure and clean class. There are some specific rooms to consider clean class and indoor pressure in the general hospital. In this article, specific rooms were set to operating room, laboratory, ICU, isolation unit, and sterilizer room. In this case study, design factors of ventilation system, including air changes of OA and TA, indoor pressure, clean class, filter, and material of system, of specific rooms in hospital were proposed through a literature research and a design examples review.

• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.25 no.2
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• pp.202-210
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• 2015

Objectives: The purpose of this study was to examine clean room(C/R) structure, air conditioning and contamination control systems and to provide basic information for identifying a correlation between the semiconductor work environment and workers' disease. Methods: This study was conducted at 200 mm and 300 mm semiconductor wafer fabrication facilities. The C/R structure and air conditioning method were investigated using basic engineering data from documentation for C/R construction. Furthermore, contamination parameters such as airborne particles, temperature, humidity, acids, ammonia, organic compounds, and vibration in the C/R were based on the International Technology Roadmap for Semiconductors(ITRS). The properties of contamination control systems and the current status of monitoring of various contaminants in the C/R were investigated. Results: 200 mm and 300 mm wafer fabrication facilities were divided into fab(C/R) and sub fab(Plenum), and fab, clean sub fab and facility sub fab, respectively. Fresh air(FA) is supplied in the plenum or clean sub fab by the outdoor air handling unit system which purifies outdoor air. FA supply or contaminated indoor air ventilation rates in the 200 mm and 300 mm wafer fabrication facilities are approximately 10-25%. Furthermore, semiconductor clean rooms strictly controlled airborne particles(${\leq}1,000{\sharp}/ft^3$), temperature($23{\pm}0.5^{\circ}C$), humidity($45{\pm}5%$), air velocity(0.4 m/s), air change(60-80 cycles/hr), vibration(${\leq}1cm/s^2$), and differential pressure(atmospheric pressure$+1.0-2.5mmH_2O$) through air handling and contamination control systems. In addition, acids, alkali and ozone are managed at less than internal criteria by chemical filters. Conclusions: Semiconductor clean rooms can be a pleasant environment for workers as well as semiconductor devices. However, based on the precautionary principle, it may be necessary to continuously improve semiconductor processes and the work environment.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.35 no.12
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• pp.1249-1255
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• 2011

In modern large-scale semiconductor manufacturing clean rooms, the energy consumed by the outdoor air-conditioning system during heating, humidification, cooling, and dehumidification of the incoming outdoor air represents about 45% of the total air-conditioning load required to maintain a clean-room environment. In particular, the energy required for humidification of the outdoor air in winter is very high. Therefore, evaluation and comparison of the energy consumption in key humidification systems, viz., steam-humidification and water-spray-humidification systems, used in outdoor air-conditioning systems would be useful to reduce the outdoor air-conditioning load in clean rooms. In the present study, an experiment with an outdoor air flow of 1000 $m^3$/h was conducted to compare the air-conditioning process and energy consumption in outdoor air-conditioning systems with electrodeboiler steam humidifiers and air-washer water spray humidification systems. The experimental results showed that the water-spray-humidification-type outdoor air-conditioning system consumed less electrical power than did the steam-humidification-type system and was more energy efficient during winter.

• Fire Science and Engineering
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• v.18 no.4
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• pp.78-85
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• 2004

This research analyzes Clean Room accidents, and presents research Clean Room, major fire prevention standards of Clean Room (FM, IRI, and NFPA Code), various results from Fire Simulation of analysis. The results are : the smoke diffusion is very quick coupled with the Heating, Ventilating, and Air Conditioning (HVAC) systems under fire ; the possibility of getting the result and the possibility the role of the Sprinkler systems to reduce the diffusion of the smoke. We learn about the importance to stop operating Heating, Ventilating, and Air Conditioning (HVAC) systems and to operate the Sprinkler system for securing safety with fire detection. Therefore, This research will be contributing to secure safety of Clean Room.

• Journal of Korean Society of Industrial and Systems Engineering
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• v.19 no.40
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• pp.341-349
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• 1996

In this paper, we deal with the problem of maintenance policies for an air filter system in clean room. Two types of maintenance policies are considered, one based on the reliability of equipment and the other one determined by the total cost including minimal repair cost. For these models, we obtain the structure of the optimal maintenance Policy which minimize the total cost. Finally we give the numerical example.

• Proceedings of the KSR Conference
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• 2009.05a
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• pp.919-929
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• 2009

2008, Seoulmetro transports an average of 3,952,000 passengers every day with a 0.8% increase of the daily ridership compared to last year.(Korean Economics '09.01.21) Seoul subway systems ridden by a considerable number of Seoul citizens place their top priority on swiftness, safety and clean underground air quality so as to meet the customer satisfaction. One of the most important problems is to eliminate minute dust(PM10) among the pollutants such as the gas attributable to air pollution and floating particulate matter defined by the ordinance of the Ministry of Environment. Seoulmetro install and operate many kinds of air filtration facilities, however we've launched a research on "Standardization Plan on Underground Air Filtration Facility" for the installation and improvement of optimum standardized air filtration system. As a preliminary study, we're going to consider ventilation system and air filter to supply filtered metropolitan outdoor air aimed at ensuring clean underground environment.