• Title/Summary/Keyword: Air Levitation

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Development of the Air Floating Conveyor System for the Large Glass Sheet (대평판 글라스 이송용 공기 부상 이송장치의 개발)

  • Lee, Tae Geol;Yu, Jin Sik;Jung, Hyo Jae;Kim, Jong-Hyeong;Kim, Joon Hyun
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.22 no.4
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    • pp.635-642
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    • 2013
  • We have prepared a DEMO conveyor device for conveying a large 8G class glass sheet using ahorizontal air-cushion system. This device consists of the body frame and the driving frame that are combined to realize a frame for conveying glass without any contact.The driving frame comprises an air flotation table (bed), drive roller supported at both ends, and ASU. Part of the ASU serves to control the airflow as the chamber consists of a porous pad and fan. Fiber filters replace the porous pad and axial fans serve as an air compressor. In addition, to determine the appropriate glass levitation from the air table, this study examined the design specifications of the applied filter (discharge speed of HEPA and ULPA filters, and flow rate) as well as the height of the and the proper supporting roller height (14mm). Then, after adjusting the position of the ASU and the number of ASUs required to configure the UNIT air floating C/V, we analyzed the height and flatness of the glass and derived the appropriate layout (1140-mm distance between ASUs).

An Electro-magnetic Air Spring for Vibration Control in Semiconductor Manufacturing (반도체 생산에서 진동 제어를 위한 전자기 에어 스프링)

  • Kim, Hyung-Tae;Kim, Cheol-Ho;Lee, Kang-Won;Lee, Gyu-Seop;Son, Sung-Wan
    • Transactions of the Korean Society for Noise and Vibration Engineering
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    • v.20 no.12
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    • pp.1128-1138
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    • 2010
  • One of the typical problems in the precise vibration is resonance characteristics at low frequency disturbance due to a heavy mass. An electro-magnetic(EM) air spring is a kind of vibration control unit and active isolator. The EM air spring in this study aims at removing the low frequency resonance for semiconductor manufacturing. The mechanical and electronic parts in the active isolator are designed to operate under a weight of 2.5 tons. The EM spring is floated using air pressure in a pneumatic elastic chamber and actuated by EM levitation force. The actuator consists of a EM coil and a permanent magnetic plate which are installed inside of the chamber. An air mount was constructed for the experiment with a stone surface plate, 4 active air springs, 4 gap sensors, a DSP controller, and a multi-channel power amp. A PD control method and operating logic was applied to the DSP. Simulation using 1/4 model was carried out and compared with the experiments. The time duration and maximum peak at resonance frequency can be reduced sharply by the proposed system. The results show that the active system can avoid the resonance caused by the natural frequency of the passive system.

Development of a Noncontacting 6 DOF Micro-Postioner Driven by Magnetic Force-Design, Modeling and Control- (자기력을 이용한 비접촉 6자유도 미소위치결정 기구의 개발-설계, 모델링 및 제어-)

  • Choi, Kee-Bong;Park, Kyi-Hwan;Kim, Soo-Hyun;Kwak, Yoon-Keun
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.20 no.4
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    • pp.1164-1176
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    • 1996
  • A magnetically levitated micro-positioner is implemented to avoid mechanical friction and increase precision. Since magnetic levitation system is inherently unstable, most concern is focused on a magnetic circuit design to increase the system dynamic stability. For this, the proposed levitation system is constructed by using an antagonistic structure which permits a simple design and robust stability. From the dynamic equations of motion, it is verified that the proposed magnetically levitated system is decoupled in 6 degree-of-freedom motion. Experimental results are presented in terms of time response and accuracy.

Decoupling of Thrust Force and Levitation Force of Transverse Flux Linear Induction Motor by the Active Compensation of Magnetic force across the Air-Gap (공극력의 능동적 보상을 통한 횡자속 선형 유도 구동기의 추력과 부상력의 비연성화)

  • 정광석;백윤수
    • Journal of the Korean Society for Precision Engineering
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    • v.21 no.11
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    • pp.91-98
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    • 2004
  • TFLIM(Transverse Flux Linear Induction Motor), making its closed magnetic path with the direction of the traveling field orthogonal, had been developed to decrease an edge effect of the general induction motor. To control the levitation force and the thrust force on the secondary part of TFLIM independently, the various methodologies have been presented. When we try to achieve the independent control using only the multi-phase inputs assigned in the stator coils as an approach, in which condition we can minimize the coupling effect between two forces\ulcorner In this paper, we show the qualitative influence of a slip frequency, an ac magnitude, a dc offset superposed in the ac power, and a major parameter of TFLIM on the couple through the computer simulation. And to realize the independent motions between levitation and thrust motion without any auxiliary means fur isolation of the secondary part of TFLIM, the decouple compensator is suggested, including the experimental results.

The Design Simulation of the Levitation Magnet for the Urban Transit Maglev as the Running Vehicle on Curved Line(60mR) (자기부상열차의 곡선주로(60mR) 주행 시를 고려한 부상용 전자석 설계 Simulation)

  • Kim, Bong-Seop
    • Proceedings of the KIEE Conference
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    • 2002.07b
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    • pp.682-684
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    • 2002
  • There is much room for consideration that the magnet design of UTM. When the vehicle runs 60mR curved line on test track, the ratio of cross section area changed to cross the magnet pole and rail. The ratio is reduced about 20% of the total magnet on one bogie. Therefor, magnet current is increased about 3.5A to maintain constant air gap. This paper suggest to margin of the magent design is 1.1 rather than rated levitation force.

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Development Status and Test Results of the 3 way Switch for the Urban Maglev (도시형 자기부상열차 3방향 분기기 개발현황 및 시험결과)

  • Lee, Jong-Min;Han, Hyung-Suk;Kim, Chang-Hyun;Shin, Hyeon-Jae;Suh, Sung-Ho
    • Proceedings of the KSR Conference
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    • 2011.05a
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    • pp.1742-1749
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    • 2011
  • The 3 way segmented Maglev switch is developed for the urban Maglev vehicle, which is scheduled to debut at the middle of 2013 in Incheon International Airport. The 3 way switch is composed of 3 moving girders, 4 fixed girders, driving units, moving units, clamping units and articulated angle relieving equipment etc. In this paper, the measured results on the interaction between vehicle and switch are discussed. The measured results are following; First, continuous moving test and natural frequency for girder and levitation rail. Second, levitation and lateral air gap of the bogies running on the curved switch. Third, noise of moving mechanical parts of the 3 way segmented switch. Forth, thermal displacement of the girder due to temperature change. With over the measured results, more reliability and stability of the 3 way segmented switch are secured.

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Design and Analysis of an Axial Flux Magnet for Magnetic Levitation System. (자기부상용 증축형 전자석의 설계 및 특성 해석)

  • Kang, Do-Hyun;Shin, Pan-Seok;Kim, Yong-Joo;Cho, Yun-Hyun;Park, Do-Young
    • Proceedings of the KIEE Conference
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    • 1990.11a
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    • pp.63-67
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    • 1990
  • An axial flux magnet for a magnetic levitation system is designed and analysed by finite element simulations. The results are compared with those of experiment in order to verify the analysing method. Lift force, air gap flux density and temperature characteristics of the magnet showed fairly good agreement with each other.

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