• 한국정밀공학회지
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• 제24권8호통권197호
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• pp.89-96
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• 2007

In this paper, a new air bearing stage with magnetic preload and a linear motor has been developed for the small precision machine systems. The new air bearing stage is unique in the sense that permanent magnets attached bottom of the iron core of table are used not only for preloading air bearings in vertical direction but also for generating thrust force by current of the coil at base. The characteristics of air bearings using porous pads were analyzed with numerical method, and the magnetic circuit model was derived for linear motor for calculating required preload force and thrust force. A prototype of single axis miniature stage with size of $120(W){\times}120(L){\times}50(H)\;mm^3$ was designed and fabricated and examined its performances, vertical stiffness, load capacity, thrust force and positioning resolution.

• 대한기계학회논문집A
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• 제26권10호
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• pp.1997-2007
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• 2002

Composite air spindles are appropriate for the high-speed and the high-precision machining as small hole drilling of printed circuit board (PCB) or wafer cutting for manufacturing semiconductors because of the low rotational inertia, the high damping ratio and the high fundamental natural frequency of composite shaft. The axial load and stiffness of composite air spindles fur drilling operation are determined by the thrust ben ring composed of the air supply part mounted on the housing and the rotating part mounted on the rotating shaft. At high-speed rotation, the rotating part of the thrust bearing should be designed considering the stresses induced by centrifugal force as well as the axial stiffness and the natural frequency of the rotating shaft to void the shaft from failure due to the centrifugal force and resonant vibration. In this work, the air supply part of the thrust bearing was designed considering the bending stiffness of the bearing and the applied load. The rotating part of the thrust bearing was designed through finite element analysis considering the cutting forces during manufacturing as well as the static and dynamic characteristics under both the axial and con trifugal forces during high-speed rotation.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2000년도 제32회 추계학술대회 정기총회
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• pp.353-362
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• 2000

Herringbone groove journal bearing (HGJB) is developed to improve the static and dynamic performances of hydrodynamic journal bearing. In this study, static and dynamic compressible isothermal lubrication problems are analyzed by the finite element method together with the Newton-Raphson iterative procedure. This analysis is introduced for prediction of the static and dynamic characteristics of air lubricated HGJB for various bearing configurations. The bearing load characteristics and dynamic characteristics are dependent on geometric parameters such as asymmetric ratio, groove depth ratio, groove width ratio and groove angle.

• Tribology and Lubricants
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• 제15권3호
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• pp.257-264
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• 1999

Recently as electronics and semi-conductor industry develop, ultra-precision machine tools that use air-spindle with externally pressurized air bearing appear in need of ultra-precision products which demand high precision property. Effects of air compressibility absorbs the vibration of shaft, this is called averaging effect, however, the higher running accuracy is demanded by degrees, the more important factor is machining errors that affect running accuracy of shaft. Actually, it would be very important in the view points of running accuracy to understand effects of machining errors on the running accuracy of the spindle system quantitatively to design and manufacture precision spindle system in the aspect that efficiency in manufacturing spindle system and performance in operation. So fu, there are some researches on the effects that machining error affect running accuracy. However, because these researches deal with one bearing of spindle system, these results aren't enough to explain how much machining errors affect running accuracy in the typical spindle system overall. In this study, we investigate the effects of the perpendicularity error of bearing and shaft on running accuracy of spindle system that consists of journal and thrust bearing theoretically, and suggest design guideline about shape tolerances.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2000년도 추계학술대회논문집 - 한국공작기계학회
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• pp.466-470
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• 2000

Externally pressurized air journal bearing has been widely used in high-speed spindle system and precision machinery because of its characteristics such as substantially low frictional loss, low heat generation and averaging effect leading better running accuracy. But air journal bearing have a disadvantage of the low load capacity due to the low viscosity. In this paper, The air journal bearing design to overcome the defects of air bearing such as low stiffness and dimping coefficients was investigated theoretically.

• 한국유체기계학회 논문집
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• 제14권1호
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• pp.5-10
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• 2011

MTG(Micro turbine generator) operating at 400,000 rpm is under development and the impact test rig to measure the dynamic stiffness and damping coefficient of air foil bearing for high speed rotor is presented in this study. The stiffness and damping coefficient of air foil bearing depending on the rotational speed can be measured easily and effectively by using the simple configuration of impact test rig which is composed of air gun, gap sensors and high speed motor. The estimation results of stiffness and dampling coefficient using least square estimation method is presented as well.

• Tribology and Lubricants
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• 제22권1호
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• pp.40-46
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• 2006

This paper presents the influence coefficient method to predict the deflection of bump foil precisely in the sub-structure of AFB(air foil bearing). Heshmat has introduced the simple compliance model to calculate the deflection of bump foil. But this approach can not consider the deflection of bump foil at the edge of AFB, so elasto-hydrodynamic model is insufficient to analyze in case that the eccentricity ratio is greater than 1. Peng has used the average pressure and film thickness, but this approach is not also a realistic model. Influence coefficients of a bump is calculated by finite element method, and introduced in bump deflection equations of the performance analysis of air foil bearing. The effects of the influence coefficient on the bearing performance is discussed in detail for appropriate foil design.

• 한국정밀공학회지
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• 제24권9호
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• pp.103-109
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• 2007

LCD (Liquid Crystal Display) is widely used electronic product. It needs too many processes such as PECVD (Plasma Enhanced Vapor Deposition), Sputtering, Photo-lithography, Dry etch. Each process is important but inspection process is more important because most companies emphasis on the six sigma. Recently, LCD inspection system is composed with inlet, inspector, outlet air pads. LCD is inspected on air pad which is shooting air from air hole. This paper studies on pad design of air bearing for LCD inspection to minimize LCD fluctuation. This design is able to reduce fluctuation and then satisfies CCD inspectional range. Also inspection pad needs to adequate stable area.

• Tribology and Lubricants
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• 제13권4호
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• pp.40-46
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• 1997

The externally pressurized air journal bearings which have two circumferential grooves with inherently compensated restrictors are analyzed. Two circumferential grooves with restrictors are made on the bearing surface in order to increase the stiffness and damping coefficients. In this paper, the dynamic characteristics such as stiffness and damping coefficients of this type of bearings are calculated. As a result of theoretical analysis, it is verified that there exist the groove depth and the distance between two grooves which generate the maximum stiffness at the given bearing dimensions.

• 대한기계학회논문집
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• 제12권2호
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• pp.231-240
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• 1988

본 연구에서는 외압을 받는 공기윤활 저어널 베어링의 정적인 경우에 대해 증분법과 유한요소법을 적용하고 유량계수는 실험을 근거로 하여 포켓에서 베어링 내부로 유입될 때의 유압손실을 고려한 Pink와 Stout의 값을 이용하였다.