• 제목/요약/키워드: Air Bearings

검색결과 214건 처리시간 0.027초

다공질 공기 베어링을 적용한 반도체 웨이퍼 연마용 스핀들 개발 (Development of Wafer Grinding Spindle with Porous Air Bearings)

  • 이동현;김병옥;전병찬;허균철;김기수
    • Tribology and Lubricants
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    • 제39권1호
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    • pp.28-34
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    • 2023
  • Because of their cleanliness, low friction, and high stiffness, aerostatic bearings are used in numerous applications. Aerostic bearings that use porous materials as means of flow restriction have higher stiffness than other types of bearings and have been successfully applied as guide bearings, which have high motion accuracy requirements. However, the performances of porous bearings exhibit strong nonlinearity and can vary considerably depending on design parameters. Therefore, accurate prediction of the performance characteristics of porous bearings is necessary or their successful application. This study presents a porous bearing design and performance analysis for a spindle used in wafer polishing. The Reynolds and Darcy flow equations are solved to calculate the pressures in the lubrication film and porous busing, respectively. To verify the validity of the proposed analytical model, the calculated pressure distribution in the designed bearing is compared with that derived from previous research. Additional parametric studies are performed to determine the optimal design parameters. Analytical results show that optimal design parameters that obtain the maximum stiffness can be derived. In addition, the results show that cross-coupled stiffness increases with rotating speed. Thus, issues related to stability should be investigated at the design stage.

터보 블로워용 고속 유도전동기의 새로운 기동방법 (Novel Starting Method of High Speed Induction Motor for Turbo Blowers)

  • 이진우
    • 전력전자학회:학술대회논문집
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    • 전력전자학회 2016년도 전력전자학술대회 논문집
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    • pp.253-254
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    • 2016
  • This paper proposes a novel starting method of a high speed induction motor with air bearings for turbo blowers. The friction of air bearings varies according to rotating speed, operating temperature and usage time. Specially, friction torque at initial starting state under low bearing temperature usually results in starting failures of the conventional V/F control method. Therefore, this paper proposes a new starting method, which consists of an initial I/F control mode and smooth transition method to V/F control mode to overcome the starting failure. The experimental results are shown to verify the analysis and the usefulness of the proposed method.

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초고속용 PMSM 센서리스 속도제어시의 기동정지방법 (Starting and Stopping Method for the Sensorless Speed Control of a Super-High Speed PMSM)

  • 이진우;바이사;류지수
    • 전력전자학회:학술대회논문집
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    • 전력전자학회 2011년도 전력전자학술대회
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    • pp.103-104
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    • 2011
  • This paper suggests a new starting and stopping method appropriate for the sensorless PMSM drive with air bearings. The proposed method based on the sensorless control algorithm of PMSM uses additional d-axis current control to cope with the limitation of the adopted back-emf based sensorless algorithm in the low speed region. The experimental results show that the proposed method drives appropriately the PMSM with air bearings.

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300HP급 초고속 전동기용 회전체의 동력학적 해석 및 설계 (Design and Dynamic Analysis of Rotor for 300HP Class Super High-Speed Motor)

  • 이용복;이희섭;김승종;김창호
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2007년도 춘계학술대회 논문집 전기기기 및 에너지변환시스템부문
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    • pp.16-18
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    • 2007
  • The Super High-Speed Motor is a turbo machine which operates at high speed, so air foil bearings suit their purpose as bearing elements. The rotordynamic stability was predicted using the numerical analysis of air foil bearings. From this study, the stability of rotor of the Super High-Speed Motor was confirmed by campbell diagram and logarithmic decrement.

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이단 압축기의 동력학적 설계 및 운전 특성에 관한 연구 (Design and Operation Characteristics of A Two-Stage Compressor)

  • 이용복;이남수;김태호;김창호;최동훈
    • 유체기계공업학회:학술대회논문집
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    • 유체기계공업학회 2001년도 유체기계 연구개발 발표회 논문집
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    • pp.469-474
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    • 2001
  • The feasibility of a oil-free motor-driven two-stage centrifugal compressor supported by air bump bearings is investigated. This centrifugal compressor is driven by 75kW motor at an operating speed of 39,000RPM md a pressure ratio of the compressor is up to 4. The analysis is performed, based upon bearing equilibrium position, bearing stiffness, Campbell diagram, unbalance response and stability. It is demonstrated in this paper that air bump bearings can be adopted well to a oil-free motor-driven centrifugal compressor.

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Heat Generation of Angular Contact Ball Bearings

  • Rhim, Yoon-Chul;Na, Hee-Hyeong
    • Tribology and Lubricants
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    • 제11권5호
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    • pp.122-127
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    • 1995
  • The heat generations of angular contact ball bearings are studied experimentally with numerical simulations. The temperature variations of inner and outer races and the temperature increase distributions are measured by using thermocouples for the spindle rotational speeds, preloads, viscosity of oils, and lubrication methods. The measured values from experiments are used to estimate the heat generation rates. The heat generation is focused mainly on the dominant sources which are robbings due to spin and gyro-moments of bearing balls, applied load and viscous friction. Oil-jet and oil-air lubrication methods are adopted using oils with different viscosities.

고속 앵귤러 컨택트 볼 베어링의 온도특성 (Temperature Characteristics of High Speed Angular Contact Ball Bearing)

  • 현준수;박태조
    • 한국정밀공학회지
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    • 제18권2호
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    • pp.96-101
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    • 2001
  • This paper shows the temperature characteristics of a high speed angular contact ball gearing which is 7004C type with ISO P2 tolerance class. A built-in motor type high speed spindle which adopts an oil-air lubrication system was used to measure the temperature rise up to 60,000rpm. The gearing temperature was measured using thermocouples that were attached to the outside surfaces of the outer rings. The result showed that the continuous test method which was suggested in this paper is more effective than on and off method and the lubrication oil supply rate should be reduced in high speed rolling bearings as long as the seizure does not occur. And the result were confirmed that the bearings packed with ceramic balls are superior to those with steel balls in temperature characteristics.

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공기포일베어링에 지지된 마이크로가스터빈의 회전체동역학적 설계 (Rotordynamic Design of the Micro Gas Turbine Supported by Air Foil Bearings)

  • 김영철;한정완;김경웅;김수용
    • 유체기계공업학회:학술대회논문집
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    • 유체기계공업학회 2003년도 유체기계 연구개발 발표회 논문집
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    • pp.662-667
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    • 2003
  • This paper presents a performance analysis of the 1st generation bump foil journal bearings for the micro gas turbine TG75. Static performances such as load capacity and attitude angle are estimated by using soft elasto-hydrodynamic analysis technique, and dynamic performances such as stiffness and damping coefficients are estimated by perturbation method. Rotordynamic analysis for TG75 is performed by using the bearing analysis results. TG75 rotor has 2 horizontal and vertical directional natural modes due to the bearing stiffness characteristics. TG75 rotor will be stably operated between the 1st bending mode at 33000cpm and the 2nd bending mode at 85500cpm. Unbalance response analysis results satisfy the API vibration criteria.

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고온초전도 벌크 베어링을 사용한 유도 전동기의 특성 시험 (Performance Tests of an Induction Motor with Hexahedron HTS Bulk Bearing)

  • 임형우;이광윤;박명진;차귀수;이지광
    • 대한전기학회논문지:전기기기및에너지변환시스템부문B
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    • 제52권6호
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    • pp.286-290
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    • 2003
  • The high temperature superconducting bulk can be used as the bearing of induction motors. This paper presents the fabrication and test results of an induction motor with superconducting bearings using HTS bulks. The bearing had eight hexahedron type YBCO bulks. Height, width and thickness of the HTS bulk were 30mm, 30mm and 10mm, respectively. Single phase induction motor was used to drive the shaft made of aluminum and the rotor of a conventional induction motor. To estimate the performance of the HTS bulk magnetic bearing, no load test, load test and Impact test were carried out. Load tests were performed by using air resistance caused by the shaft-mounted thin cylinder with buckets. Impact tests by axial direction and vertical direction impact showed that the vibration of the shaft gradually decayed. The induction motor with HTS bulk magnetic bearing rotated silently and smoothly throughout the tests. According to the test results, conventional bearings can be replaced with superconducting magnetic bearings made of HTS bulks.

마찰을 고려한 포일저널베어링의 동특성해석: 회전불균형 응답 (The Dynamic Performance Analysis of Foil Journal Bearings Considering Coulomb Friction: Rotating Unbalance Response)

  • 김경웅;이동현;김영철
    • Tribology and Lubricants
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    • 제23권5호
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    • pp.219-227
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    • 2007
  • The dynamic performance of air foil bearings relies on a coupling between a thin air film and an elastic foil structure. A number of successful analytical techniques to predict dynamic performance have been developed. However, the evaluation of its dynamic characteristic is still not enough because of the mechanical complexity of the foil structure and strong nonlinear behavior of friction force. This work presents a nonlinear transient analysis method to predict dynamic performance of foil bearings. In this method, time dependent Reynolds equation is used to calculate pressure distribution and a finite element method is used to model the bump foil structure. The analysis is treated with a direct implicit integration technique that can handle nonlinear problems and the stick-slip algorithm is used to consider friction force. Using this method the response to the mass unbalance excitation is investigated for various design parameters and operating conditions. The results of analysis show that foil bearing is very effective on the restriction of vibration at the resonance frequency compared to the rigid surface bearings and the effectiveness depends on the operating conditions, static load and a amount of mass unbalance. In addition, there exist optimum values of friction coefficient, bump foil stiffness and number of circumferential slit with regards to minimizing dynamic response at the resonance frequency. These optimum values are system dependent.