• Tribology and Lubricants
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• 제24권1호
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• pp.34-43
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• 2008

In this paper, an actively controlled aerostatic bearing is studied to overcome the defects of air bearing such as low stiffness and damping coefficients. The actively controlled aerostatic bearing is composed of aerostatic bearings, non-contact type of displacement sensors, piezoelectric actuators and controllers. The cylindrical capacitance sensor (CCS) is used as the displacement sensor. The reason for using CCS instead of the commercial gap sensor is that it can give us the pure error motion of the spindle because it removes the roundness error or the geometric errors in the spindle. The controller is designed by the state space equation and quadratic optimal control theory. The characteristic data of the actively controlled aerostatic bearing system in the frequency domain are presented and the stiffness and damping coefficients of the bearing are mentioned. This paper shows the possibility to reduce the motion error up to 6000 rpm.

• 한국복합재료학회:학술대회논문집
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• 한국복합재료학회 1999년도 추계학술발표대회 논문집
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• pp.134-138
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• 1999

For the stable operation of high speed aerostatic spindle, the low rotational inertia and high damping ratio of spindle shafts as well as high fundamental natural frequency are indispensable. Conventional steel spindles are not appropriate for very high speed operation because of their high rotational inertia and low damping ratio. In this study, the composite spindles with aerostatic bearing were designed and manufactured with carbon fiber/epoxy composite. The fundamental natural frequency of the composite spindle was evaluated through the modal testing.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 춘계학술대회 논문집
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• pp.427-428
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• 2012

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 추계학술대회 논문집
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• pp.495-496
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• 2012

• 한국정밀공학회지
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• 제32권2호
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• pp.135-140
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• 2015

It is an important thing for a designer to simulate and predict the performance of a spindle and a rotary table. In addition to the general performance such as static stiffness, the error motion performance information is beneficial to the designer in many cases. However for an aerostatic bearing the fluid film physical status should be calculated in order to simulate those performances and the calculation time is another obstacle for a simple performance simulation. In this paper the investigation on experiment and simulation is performed in order to find a more effective simulation method for the rotational error motion.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.269-275
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• 2005

This article describes the development on a new style active hybrid bearing system including both merits of an aerostatic bearing system and a magnetic bearing system. The developed active hybrid bearing system has several advantages: exact rotation, robust controller against the variation of a disturbance, improvement of stiffness and a damper of the system at a high-speed operation, and constraints of the heat generated by a bias current. In order to measure a rotating error due to the change of a cutting force and the variation of a system parameter, a CCS (Cylindrical Capacity displacement Sensor) was used.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2005년도 ICCAS
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• pp.123-128
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• 2005

A novel tri-mode ultraprecision positioning system for machine tools and measuring machine is proposed. The basic coarse mode uses a Twist-roller Friction Drive (abbr. TFD), and controls several tens of millimeters of the machine-table travel with nanometer order of positioning resolution. The fine mode also utilizes the TFD with a fine adjusting mechanism. The resolution of the fine mode is in the range of sub-nanometer. For realizing picometer positioning, the ultra-fine mode is executed by using an active aerostatic guideway. On the bearing surface of this active guideway, several Active Inherent Restrictors (abbr. AIRs) are embedded for controlling the table position. An AIR unit consists of a piezoelectric actuator having a through hole, one end of the hole on the bearing surface acts as an inherent restrictor. Owing to the aerostatic mechanism of the AIR, the deformation of the piezoelectric actuator in the AIR unit causes much reduced table displacement. Such motion reduction is effective for ultraprecision positioning. Current positioning resolution of the ultra-fine mode is 50pm, however the final goal of the positioning resolution is expected to be in the order of picometer.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.117-118
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• 2010

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2007년도 추계학술대회논문집
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• pp.48-52
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• 2007

A lot of researches have been done in order to investigate the dynamic characteristics of the aerostatic porous bearing, most of them used analytical approaches and only a few used experimental approaches. However the experimental condition used in the previous experimental approaches was not realistic, where the porous bearing has been fixed and only the mass supported by the bearing was allowed to move vertically. The dynamic stiffness obtained by those experimental setups may be different with the real case where the mass and the bearing move together in horizontal direction. In this paper, the dynamic characteristics of the horizontally moving aerostatic circular porous air bearings are investigated by the experimental approach. The experimental apparatus was designed to realize its real operating condition used in most industrial applications. The experimental results were compared with the previous experimental ones.

• 한국정밀공학회지
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• 제25권6호
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• pp.134-142
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• 2008

In this paper, we propose a precise linear motion stage supported by magnetically preloaded air bearings. The eight aerostatic bearings with rectangular carbon porous pads were located only one side of vertical direction under the platen where four bearings are in both sides of horizontal direction as wrap-around-design, and this gives simpler configuration than which constrained by air bearings for all direction. Each of the magnetic actuators has a permanent magnet generating static magnetic flux far required preload and a coil to perturb the magnetic farce resulting adjustment of air- bearing clearance. The characteristics of porous aerostatic bearing are analyzed by numerical analysis, and analytic magnetic circuit model is driven for magnetic actuator to calculate preload and variation of force due to current. A 1-axis linear stage motorized with a coreless linear motor and a linear encoder was designed and built to verify this design concept. The load capacity, stiffness and preload force were examined and compared with analysis. With the active magnetic preloading actuators controlled with DSP board and PWM power amplifiers, the active on-line adjusting tests about the vertical, pitching and rolling motion were performed. It was shown that motion control far three DOF motions were linear and independent after calibration of the control gains.