• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.37-37
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• 2008

에어로졸데포지션법을 이용하여 집적화 기판을 위한 $Al_2O_3$-PMMA 복합체 후막을 상온에서 구리 기판 위 에 제조하였다. XRD, FT-IR 분석을 통해 코팅된 막은 $Al_2O_3$와 PMMA의 혼합물로 존재함을 확인하였으며 성막 중 $Al_2O_3$. PMMA의 상호작용과 PMMA 파우더의 거동에 대한 분석을 통해 $Al_2O_3$-PMMA 복할체 후막의 성막 양상을 확인할 수 있었다. 또한 기판 거칠기에 따라 초기 계면의 양상이 달라질 수 있음을 확인하였고 이러한 초기 계면의 상태가 $Al_2O_3$-PMMA 복합체 후막의 제조에 있어 매우 중요함을 알 수 있었다. 본 연구에서는 에어로졸데포지션법을 이용한 $Al_2O_3$-PMMA 복합체 후막의 성막 양상을 통해 세라믹-폴리머 복합체의 제조에 있어서의 주요 변수들을 알아보고 $Al_2O_3$-PMMA 복합체 후막의 전기적인 특성을 확인하였다.

• Progress in Superconductivity
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• v.12 no.1
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• pp.68-73
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• 2010

Y123 films have been deposited on $LaAlO_3$ (100) single-crystal and IBAD substrates by spray pyrolysis method using nitrate precursors. Ultrasonic atomization was adopted to decrease the droplet size, spraying angle and its moving velocity toward substrate for introducing the preheating tube furnace in appropriate location. A small preheating tube furnace was installed between spraying nozzle and substrate for fast drying and enhanced decomposition of precursors. C-axis oriented films were obtained on both LAO and IBAD substrates at deposition temperature of around $710{\sim}750^{\circ}C$ and working pressures of 10~15 torr. Thick c-axis epitaxial film with the thickness of $0.3{\sim}0.6\;{\mu}m$ was obtained on LAO single-crystal by 10 min deposition. But the XRD results of the film deposited on IBAD template at same deposition condition showed that the buffer layers of the IBAD metal substrate was affected by long residence of metal substrate at high temperature for YBCO deposition.

• Particle and aerosol research
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• v.11 no.4
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• pp.93-98
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• 2015

Particles which generated from plasma enhanced chemical vapor deposition (PECVD) during thin film deposition process can affect to the process yield. By using light extinction method, ISPM can measure particles in the large-diameter pipe (${\leq}300mm$). In our research, in-situ particle monitor (ISPM) sensor was installed at the 300 mm diameter exhaust-line to count the particles in each size. In-house flange for mounting the transmitting and receiving parts of ISPM was carefully designed and installed at a certain point of exhaust line where no plasma light affect to the light extinction measurement. Measurement results of trend changes on particle count in each size can confirm that ISPM is suitable for real-time monitoring of vacuum process.

• Transactions of the Korean hydrogen and new energy society
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• v.22 no.6
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• pp.759-764
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• 2011

Mixed-conducting oxide powders, $BaCe_{0.9}Y_{0.1}O_{2.95}$ (BCY) and $SrCe_{0.9}Y_{0.1}O_{2.95}$ (SCY) powders have been prepared by a solid-state reaction method. Xray diffraction patterns of the prepared powders showed the sharp peaks of the $BaCe_{0.9}Y_{0.1}O_{2.95}$ and $SrCe_{0.9}Y_{0.1}O_{2.95}$ phases. The oxide powders that were prepared by attrition milling showed rather large particles and severe necking between particles in FE-SEM images as well as residual reactant ($BaCO_3$) and secondary phases ($SrCeO_3$ and $CeO_2$) in XRD patterns. The oxide powders prepared using ball milling showed particles under approximately 500 nm and typical XRD patterns of the $BaCe_{0.9}Y_{0.1}O_{2.95}$ and $SrCe_{0.9}Y_{0.1}O_{2.95}$ phases. Ceramic membranes of the $BaCe_{0.9}Y_{0.1}O_{2.95}$ and $SrCe_{0.9}Y_{0.1}O_{2.95}$ phases were fabricated by the aerosol deposition method using the oxide powders synthesized.

• Asian Journal of Atmospheric Environment
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• v.7 no.1
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• pp.1-7
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• 2013

To establish the method for investigating the behavior of aerosol particles deposited on the leaf surface against fog water under natural conditions, scanning electron microscopy with energy-dispersive X-ray (SEM-EDX) analysis and wash water analysis by ion chromatography after the washing treatment were performed using leaves of white birch collected from low part of the tree crown and the top of the tree in Sapporo City, Hokkaido, northern Japan. Each of collected leaves was divided into two parts according to the treatment performed: leaf surface (adaxial side) was 1) untreated, and 2) washed with deionized water with a pipette. In untreated samples, many particles of various shapes, including soil particles and organic debris, were deposited on the surface. Particles containing S were found on the surface of samples collected from only low part of the tree crown. After the washing treatment, SEM-EDX analysis revealed that soil particles and particles containing S had been washed off with water, although some particles such as soil particles and organic debris still remained on the leaf surface. The major anion such as $SO{_4}^{2-}$ was detected in wash water of all samples, although the peak of S in X-ray spectra was not detected from samples collected at top of the tree. The combination of SEM-EDX analysis with wash water analysis indicated that $SO{_4}^{2-}$ was deposited on the leaf surface in dissolved state and/or in state of submicron particles. These results suggested that fog water could remove soil particles and particles containing S and $SO{_4}^{2-}$ from the leaf surfaces, but not all particles. There was no difference in sampling position in the tree crown. Our study suggested that combination with SEM-EDX analysis and wash water analysis would be effective for investigation of the behavior of particles on the leaf surface against fog water.

• Korean Journal of Materials Research
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• v.29 no.11
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• pp.684-689
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• 2019

Single crystals, which have complexed composition, are fabricated by solid state grain growth. However, it is hard to achieve stable properties in a single crystal due to trapped pores. Aerosol deposition (AD) is suitable for fabrication of single crystals with stable properties because this process can make a high density coating layer. Because of their unique features (nano sized grains, stress inner site), it is hard to fabricate single crystals, and so studies of grain growth behavior of AD film are essential. In this study, a $BaTiO_3$ coating layer with ${\sim}9{\mu}m$ thickness is fabricated using an aerosol deposition method on (100) and (110) cut $SrTiO_3$ single crystal substrates, which are adopted as seeds for grain growth. Each specimen is heat-treated at various conditions (900, 1,100, and $1,300^{\circ}C$ for 5 h). $BaTiO_3$ layer shows different growth behavior and X-ray diffraction depending on cutting direction of $SrTiO_3$ seed. Rectangular pillars at $SrTiO_3$ (100) and laminating thin plates at $SrTiO_3$ (110), respectively, are observed.

• Proceedings of the KIEE Conference
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• 1989.07a
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• pp.319-322
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• 1989

Using pyrosol method, based on the pyrolysis of an aerosol produced by ultrasonic spraying, the deposition of transparent conducting oxides (TCO) such as $In_2O_3$ : Sn, $SnO_2$ : Sb and $SnO_2$ : F on glass substrates was studied. The electrical, optical and structural properties as functions of substrate temperature, dopant concentration, substrate type and carrier gas type were investigated.

• The Korean Journal of Nuclear Medicine
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• v.28 no.2
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• pp.192-199
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• 1994

Diffuse pahbronchiolitis(DPB) is a relatively new, chronic, nonspecific, inflammatory disease of the lung that typically involves the airways in the "transitional" zone of the lung. Clinically, DPB strongly resembles chronic obstructive pulmonary disease (COPD) and the distinction between the two is crucial because the former is often fatal, requiring different therapeutic strategies. This study was prospectively carried out to assess diagnostic usefulness of radioaerosol scan(RAS) in DPB. RAS findings were analyzed with respect to the location and extent of abnormal aerosol deposition in the lung divided into the central, intermediary, and transitional airways and the peripheral airspaces. RAS showed mottled aerosol deposits characteristically in the transitional and intermediary airways with peripheral airspace defects. Such a deposition pattern contrasted sharply with central aerosol deposition of COPD. In conclusion, RAS appears to be a convenient, noninvasive, and useful diagnostic method of DPB.

• Korean Journal of Materials Research
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• v.9 no.5
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• pp.478-483
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• 1999

The effects of the composition on the consolidation temperature and refractive index of the glass thin film fabricated by aerosol flame deposition method in SiO$_2$-B$_2$O$_3$-CaO-P$_2$O\ulcorner system were investigated. When the amount of CaO was constant in SiO$_2$-B$_2$O$_3$-CaO system the consolidation temperature of glass thin film decreased with increasing the amount of B$_2$O$_3$. Also, when the amount of SiO$_2$ and B$_2$O$_3$ was constant the consolidation temperature of glass thin film increased with increasing the amount of CaO. P$_2$O\ulcorner was added to 72.5SiO$_2$-25B$_2$O$_3$-2.5CaO in order to decrease its consolidation temperature. As the amount of P$_2$O\ulcorner increased its consolidation temperature decreased and the refractive index linearly increased from 1.4649 to 1.4684. When the amount of CaO and P$_2$O\ulcorner was constant in SiO$_2$-B$_2$O$_3$-CaO-P$_2$O\ulcorner system the consolidation temperature of glass thin film decreased with increasing the ratio of SiO$_2$/B$_2$O$_3$.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.23 no.5
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• pp.670-677
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• 1999

An analysis of generation and growth of multicomponent particles has been carried out to predict the size and composition distributions of particles generated in the Modified Chemical Vapor Deposition(MCVD) process. In MCVD process. scale-up of sintering and micro-control of refractive index may need the Information about the size and composition distributions of $SiO_2-GeO_2$ particles that are generated and deposited. The present work solved coupled steady equations (axi-symmetric two dimensions) for mass conservation, momentum balance. energy and species(such as $SiCl_4$, $GeCl_4$, $O_2$, $Cl_2$) conservations describing fluid flow. heat and mass transfer in a tube. Sectional method has been applied to obtain multi-modal distributions of multicomponent aerosols which vary in both radial and axial directions. Chemical reactions of $SiCl_4$ and $GeCl_4$ were included and the effects of variable properties have also been considered.