• Journal of the Korean Vacuum Society
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• v.19 no.2
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• pp.96-104
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• 2010

We suggest here a cost-effective replica fabrication method for transparent and hard molds for imprinting lithography such as NIL and S-FIL. The process starts with the use of a replica hard mold from a master, using a polymer copy as a carrier. The polymer copy as a carrier was treated by soluble process for forming anti-adhesion layer. Duplicated hard molds can eliminate direct contact between a hard master and a patterned polymer on a substrate and the generated contamination of a master during the imprinting process. The replica hard mold exhibits the glass-like properties introduced here, such as transparency and hardness, make it appropriate for nanoimprint lithography and step-and-flash imprint lithography.

• Korean Chemical Engineering Research
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• v.56 no.2
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• pp.162-168
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• 2018

UV-curable hard coating solutions were prepared by mixing organic or inorganic polysilazane with urethane acrylate. UV-cured hard coating films were also obtained by flow coating, subsequently UV-curing on polymethylmethacrylate (PMMA) sheets. The effect of types and amounts of polysilazane was investigated on properties of obtained coating films. As a result, the coatings obtained by using organic polysilazane showed a high hydrophobic property with water contact angle of $95^{\circ}$, pencil hardness of 7H and high transparency of 92% in the visible wavelength range. On the other hand, the PMMA sheets made by using inorganic polysilazane exhibited a pencil hardness of as high as 8H, good adhesion to the substrate and water contact angle of $82^{\circ}$.

• Journal of Ocean Engineering and Technology
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• v.11 no.3
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• pp.56-68
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• 1997

This work was intended to study the effect of a partial pressure ratio and a total pressure of reactive gases on the properties of TiC$_{x}$N$_{1-x}$ . coated layer. In this regard, various TiC$_{x}$N$_{1-x}$ coatings were synthesized with C2112 and N2 Mixture gas of different compositions by Arc Ion Plating process which has been highlighted for an industrial purpose. It was revealed from colors and X-ray diffraction patterns that the concentration of carbon of a TiC$_{x}$N$_{1-x}$ coating increases with a partial pressure ratio (PC$_{2}$H$_{2}$/PN$_{2}$) as well as a total pressure Of $C_{2}$H$_{2}$ and N$_{2}$ mixture gas. Accordingly, the hardness of TiC$_{x}$N$_{1-x}$ coated layer increased but the adhesion to the substrate of SKH 51 was degraded. On the other hand, the deposition rate was independent of a partial pressure ratio and a total pressure of mixture gas. It was found that a uniform gas distribution is critical for an industrial application since the composition of a coating depends strongly on the location of a substrate inside of the furnace. As a result of milling tests with different TiC$_{x}$N$_{1-x}$ coated end mills, the one which has a low carbon concentration was better than others studied in this work.d in this work.

• Journal of the Korean Institute of Gas
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• v.12 no.3
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• pp.38-42
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• 2008

Effect of polyol structure and NCO index on adhesion of PU adhesive at room ($25^{\circ}C$) and extremely low temperature ($-190^{\circ}C$) was investigated. At room temperature adhesive strength of PU adhesive tends to decrease as molecular weight of polyol increases, however, the strength at $-190^{\circ}C$ shows opposite tendency. Adhesive strength of the PU turned out to be directly proportional to the amount of MDI. PU containing aliphatic polyol was higher in shear strength at $-190^{\circ}C$ and the strength of PU with aromatic polyol was higher at room temperature.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2008.11a
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• pp.11-12
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• 2008

Micron-sized Co-alloy T800 powder was coated on Inconel718 (IN718) using high velocity oxygen fuel (HVOF) thermal spraying by the optimal coating process (OCP) determined from the best surface hardness of 16 coatings prepared by Taguchi program. The surface hardness improved 140-160 % from 399 Hv of IN718 to 560-630 Hv by the coating. Porosity of the coating was 1.0-2.7 %, strongly depending on spray parameters. Both friction coefficients (FC) and wear traces (WT) of the coating were smaller than those of IN718 substrate at both $25^{\circ}C$ and $538^{\circ}C$. FC and WT of IN718 and coating decreased with increasing the surface temperature. Tensile bond strength (TBS) and fracture location (FL) of Ti64/T800 were 8,770 psi and near middle of T800 coating respectively. TBS and FL of Ti64/NiCr/T800 were 8,740 psi and near middle of T800 coating respectively. This showed that cohesion of T800 coating was 8,740-8,770 psi, and adhesion of T800 on Ti64 and NiCr was stronger than the cohesion of T800.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05c
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• pp.33-36
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• 2003

Tungsten is widely used as a plug for the multi-level interconnection structures. However, due to the poor adhesive properties of tungsten (W) on $SiO_2$ layer, the Ti/TiN barrier layer is usually deposited onto $SiO_2$ for increasing adhesion ability with W film. Generally, for the W-CMP (chemical mechanical polishing) process, the passivation layer on the tungsten surface during CMP plays an important role. In this paper, the effect of oxidants controlling the polishing selectivity of W/Ti/TiN layer were investigated. The alumina $(Al_2O_3)$ abrasive containing slurry with 5 % $H_2O_2$ as the oxidizer, was studied. As our preliminary experimental results, very low removal rates were observed for the case of no-oxidant slurry. This low removal rate is only due to the mechanical abrasive force. However, for Ti and TiN with 5 % $H_2O_2$ oxidizer, different removal rate was observed. The removal mechanism of Ti during CMP is mainly due to mechanical abrasive, whereas for TiN, it is due to the formation of metastable soluble peroxide complex.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.27 no.8
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• pp.516-521
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• 2014

An excellent hydrophobic surface has a high contact angle over 147 degree and the contact angle hysteresis below $5^0$ was produced by using roughness combined with hydrophobic PTFE coatings, which were also confirmed to exhibit an extreme adhesion to glass substrate. To form the rough surface, the glass was etched by Ar-plasma. A very thin PTFE film was coated on the plasma etched glass surface. Roughness factors before or after PTFE coating on the plasma etched glass surface, based on Wensel's model were calculated, which agrees well with the dependence of the contact angle on the roughness factor is predicted by Wensel's model. The PTFE films deposited on glass by using a conventional rf-magnetron sputtering. The glass substrates were etched Ar-plasma prior to the deposition of PTFE. Their hydrophobicities are investigated for application as a anti-fouling coating layer on the screen of displays. It is found that the hydrophobicity of PTFE films mainly depends on the sputtering conditions, such as rf-power, Ar gas content introduced during deposition. These conditions are closely related to the deposition rate or thickness of PTFE film. Thus, it is also found that the deposition rate or the film thickness affects sensitively the geometrical morphology formed on surface of the rf-sputtered PTFE films. In particular, 1,950-nm-thick PTFE films deposited for 30 minute by rf-power 50 watt under Ar gas content of 20 sccm shows a very excellent optical transmittance and a good anti-fouling property and a good durability.

• Journal of the Korean Recycled Construction Resources Institute
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• v.7 no.4
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• pp.341-348
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• 2019

In this study, we analyzed the problems of existing construction waste shredding technology to diagnose the problems of low quality recycled aggregates and to develop a new mortar peeling technique to produce high-quality recycled coarse aggregate for concrete. The purpose of this study is to verify the effectiveness of mortar peeling technique by doing simulation prior to on-site application and to check the quality properties of recycled coarse aggregate produced by applying a mortar peeling technique. We manufactured and installed High speed Rotating Grinder on-site and analyzed the correlation between mortar adhesion amount, dry density and water absorption rate of recycled coarse aggregate.

• Journal of the Korean Vacuum Society
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• v.4 no.S2
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• pp.40-48
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• 1995

$TiB_2$-TiN double-layer coating have been prepared by ion beam enhanced deposition. AES, XRD, TEM and HRTEM were employed to characterize the $TiB_2$ layer. The microhardness of the coatings was evaluated by an ultra low-load microhardness indenter system, and the tribological behavior was examined by a ball-on-disc tribology wear tester. It was found that in a single titanium diboride layer, the composition is uniform along the depth of the film, and it is mainly composed of nanocrystalline $TiB_2$ with hexagonal structure, which resulted from the ion bombardment during the film growth. The hardness of the $TiB_2$ films increases with increasing ion energy, and approaches a maximum value of the $TiB_2$ films increases with increasing ion energy, and approaches a maximum value of 39 Gpa at ion energy of 85 keV. The tribological property of the TiB2 films is also improved by higher energy of 85keV. The tribological property of the $TiB_2$ films is also improved by higher energy ion beam bombardment. There is no major disparity in the mechanical properties of double-layer $TiB_2$/TiN coatings and TiN/$TiB_2$ coatings. Both show an improved wear resistance compared with single-layer $TiB_2$ films. The adhesion of double-layer coatings is also superior to that of single-layer films.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.393-393
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• 2010

The biocompatibility of materials used for biomedical applications depends on chemical composition, mechanical stiffness, surface energy, and roughness. The plasma treatment and etching process is a very important technology in the biomedical fields due to possibility of controlling the surface chemistry and properties of materials. In this work, $N_2/H_2$ plasma were treated on single-walled carbon nanotubes (SWCNTs) paper and characterization of treated SWCNTs paper was carried out. Also we investigated neurite outgrowth from SH-SY5Y on treated SWCNTs paper. The results indicated that $N_2/H_2$ plasma-modified SWCNTs paper enhanced neuronal cell adhesion, viability, neurite outgrowth and branching in vitro and exerted a positive role on the health of neural cells.