• Transactions of the Korean Society of Mechanical Engineers
• /
• v.18 no.5
• /
• pp.1169-1181
• /
• 1994

Vibration isolation of mechanical systems, in general, is achieved through passive or active vibration isolators. Passive vibration isolator has an inherenrt performance limitation. Whereas, active vibration isolator provides significantly superior vibration-isolation performance at the cost of energy sources and sensors. Recently, in many cases, such as suspension system, precision machinery ... etc, active isolation system outweighs its limitation. Therefore, many studies, researches, and applications are carried out in this field. In this study, vibration-isolation characteristics of an active vibration control system using electromagnetic force actuator are investigated. Several control algorithms including optimal, feedforward are used for active vibration isolation. From the experimental results of each algorithm, effective control algorithms for this active vibration-isolation system are proposed.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2001.10a
• /
• pp.179-183
• /
• 2001

Vibration isolation of mechanical systems, in general is achieved through either passive or active vibration control system. Although passive vibration isolators offer simple and reliable means to protect mechanical system from vibration environment, passive vibration isolator has inherent performance limitation. Whereas, active vibration isolator provide significantly superior vibration-isolation performance. Recently, many studied and applications are carried out in this field. In this study, vibration-isolation characteristics of active vibration control system using electromagnetic force actuator are investigated. Some control algorithms. Optimal Feedforward are used for active vibration isolation. Form the experimental results of each control algorithms, active vibration isolation characteristics are investigated.

• Journal of the Semiconductor & Display Technology
• /
• v.5 no.4 s.17
• /
• pp.41-45
• /
• 2006

Micro vibration isolation, typically originated from ground, is always a prime concern for the nano-measurement instruments such as Atomic Force Microscopes. A four mount active vibration isolation system is proposed in this paper. Modeling and control of such a four mount system was analyzed. Combined active-passive isolation principle is used for vibration isolation by mounting the instrument on a passively damped isolation system made of Elastomer along with the active stage in parallel that consists of very soft actuation system, the Voice Coil Motor. The active stage works in combination with the passive stage for working as a very low frequency vibration attenuator.

• Transactions of the Korean Society for Noise and Vibration Engineering
• /
• v.17 no.7 s.124
• /
• pp.565-571
• /
• 2007

In the process of accurate manufacture and measurement, it is necessarily required to isolate external or internal vibration due to external disturbance and internal actuators. The higher vibration isolation system gets damping around resonance, the better it is generally. This paper analyzes the performance of an existing passive air-spring for vibration isolation table by using experiment and simulation. Optimal design for a passive air spring can be obtained by tuning the size of the orifice. Also design for an active isolation system is carried out by applying PID controller and considering non-linearity of pneumatic characteristics with help of look-up table. We have developed the active vibration isolation table with the better isolation performance.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2006.05a
• /
• pp.831-836
• /
• 2006

In the process of accurate manufacture and measurement, it is necessarily required to isolate external or internal vibration due to external disturbance and internal actuators. The higher vibration isolation system gets damping around resonance, the better it is generally. This paper analyzes the performance of an existing passive air-spring for vibration isolation table by using experiment and simulation. Optimal design for a passive air spring can be obtained by tuning the size of the orifice. Also design for an active isolation system is carried out by applying PID controller and considering non-linearity of pneumatic characteristics with help of look-up table. We have developed the active vibration isolation table with the better isolation performance.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
• /
• 2006.10a
• /
• pp.150-153
• /
• 2006

Micro vibration isolation, typically originated from ground, is always a prime concern for the nano-measurement instruments such as Atomic Force Microscopes. A four mount active vibration isolation system is proposed in this paper. Modeling and control of such a four mount system as analyzed. Combined active-passive isolation principle is used for vibration isolation by mounting the instrument on a passively damped isolation system made of Elastomer along with the active stage in parallel that consists of very soft actuation system, the Voice Coil Motor. The active stage works in combination with the passive stage for working as a very low frequency vibration attenuator.

• Journal of KSNVE
• /
• v.2 no.4
• /
• pp.281-292
• /
• 1992

Two types of vibration problems are encountered in industrial field: active isolation and passive isolation. In a passive type of vibration isolation, a foundation of a delicated machinery such as TEM, SEM, inspection- probe test, photolithograph, etc. is designed to have a vibration amplitude lower than an acceptable limit. In an active type, the isolation is focused on the vibration reduction caused by the machine itself(pump, motor, press, compressor, etc.). The foundation for such a machine should be so designed as to reduce the transmitted vibration below the permissible level prescribed. At any case, a transmissibility and stability must to be considered. Since an active isolation type is aimed for a vibration source, it is useful to isolate the transmitted vibrations energy from a major vibration source at the specific location. In this paper, a designed methodology of double anti-vibration system has been examined in order to have low transmissibility and reliable stability. Also experiment of scale model behavior has been conducted. Finally, the experiment output of the transfer function is compared to the analytical data.

• Transactions of the Korean Society for Noise and Vibration Engineering
• /
• v.21 no.9
• /
• pp.858-867
• /
• 2011

As applying an active control technique to a pneumatic vibration isolation system, the settling time for the payload excitation could be remarkably reduced as well as the improvement of isolation performance for the ground vibration. Some previous researches were dealt with the settling time through the simulation or experiment but, the discussion on the simulation or experimental results including moving parts, such as a XY-stage, on the isolation table rarely exists. As considering the moving part, the dynamic model could be time varying system and in such a case the force imposed on pneumatic vibration isolation table could be described by inertial forces of moving parts according to Newton's 3rd law, the action and reaction law. In this paper, the simulation procedure of the 3-DOF active pneumatic vibration isolation system including moving parts by TDC(time delay control) technique is proposed and the effectiveness through simulation results are also shown.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2002.05a
• /
• pp.477-482
• /
• 2002

This research is concerned with the study of an active vibration absorber using piezoelectric actuators and Isolation pad. The active isolation system consists of 4-pairs of PZT actuators bonded on the surface of an aluminum plate and a passive damping material. The active system is connected to the passive system in series. The Signals of the accelerometers are fed into the PZT actuator through the controller. We proposed a new control technique which can deal with the shock as well as the base excitation in this study. The Positive Acceleration Feedback(PAE) tuned to the natural frequency of the vibration isolation system is used to suppress the vibrations caused by the shock using the top accelerometer signal. The Negative Acceleration Feedback (NAF) based on the base acceleration signal is used to counteract the base motion. Experimental results show that the proposed active vibration isolation system can suppress vibrations.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2004.11a
• /
• pp.647-650
• /
• 2004

The modeling of an active vibration isolation system is accomplished by using the equivalent spring constant, mass and rotational Inertia of each component. The detailed model of the actuation module is successful for describing its frequency-domain performance but also too complicated to implement it to actual system for control so that the order of the model is reduced up to the degree that preserves its characteristic in the low frequency range. The reduced model is suitable for identifying the unknown system parameters such as damping constants of components. The overall isolation system is described by using the reduced model of the actuation module. The accurate model ing and system parameter identification that is essential for the control of the active vibration isolation system is attained successfully.