• Transactions of the Korean Society of Mechanical Engineers A
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• v.20 no.8
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• pp.2501-2507
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• 1996

In this paper actively controlled air bearing is investigated to overcome the defects of air bearing such as low stiffness and damping coefficients. The actively controlled air beairng is composed of an air bearing, a gap sensor, a controller, and a piezo actuator. By controlling the position of air bearing with piezo actuator, the position of floating object is controlled. In this study the proportional-Integral-Derivative controller is employed. Active air bearing is investigated numerically and experimentally. There is good agreement between the simulation and the experimental results. It is shown that the stiffness and damping characteristics and positioning experimental results. It is shown that the stiffness and damping characteristics and positioning accuracy of air bearing can be improved by means of adopting actively controlled air bearing.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.24 no.3 s.174
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• pp.543-549
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• 2000

Results of theoretical investigations of the stability characteristics of an actively controlled externally pressurized air journal bearing are presented. Proportional control and derivative control are used for the control algorithm of active air bearing. The stability characteristics of the actively controlled bearing operating at zero steady-state eccentricity is investigated with the step jump method. The speed at onset of instability is raised for both proportional control and derivative control of bearing. Proportional control increased the stability threshold without affecting the whirl ratio. But for derivative control of bearing, stability threshold increase is accompanied by a parallel reduction of the whirl ratio. Results show active control of bearing can be adopted for the stability improvement of air journal bearing.

• International Journal of Precision Engineering and Manufacturing
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• v.3 no.2
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• pp.87-94
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• 2002

This paper presents the synchronous vibration control of a rotor system using an Active Air Bearing(AAB). In order to suppress the synchronous vibration, it is necessary to actively control the air film pressure or the air film thickness. In this study, active pads are used to control the air film thickness. Active pads are supported by the pivots containing piezoelectric actuators and their radial positions can be actively controlled by applying voltage to the actuators. Disturbances and various kinds of external forces can cause the shaft vibration as well as the change of the air film thickness. The dynamic behaviors of a rotary system supported by two tilting-pad gas bearings and its active stabilization using the tilting-pads as actuators are investigated numerically. The PID controller is applied to the tilting-pad gas bearing system with three pads, two of which contain piezoelectric actuators. To test the validity of the theoretical method, the performance of this control method is evaluated through experiments. The experimental results show the effectiveness of the control system for suppressing the unbalanced response of the rigid modes.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.8
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• pp.32-39
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• 2001

This paper presents the synchronous vibration control of a rotor system using an Active Air Bearing(AAB). In order to suppress the synchronous vibration, it is necessary to actively control the air film pressure or the air film thickness. In this study, active pads are used to control the air film thickness. Active pads are supported by the pivots containing piezoelectric actuators and their radial positions can be actively controlled by applying voltage to the actuators. Disturbances and various kinds of external force can cause the shaft vibration as well as the change of the air film thickness. The dynamic behaviors of a rotary system supported by two tilting-pad gas bearings and its active stabilization using the tilting-pads as actuators are investigated numerically. The PID controller is applied to the tilting-pad gas bearing system with three pads, two of which contain piezoelectric actuators. To test the vapidity of the theoretical method, the performance of this control method is evaluated through experiments. The experimental results show the effectiveness of the control system for suppressing the unbalanced response of the rigid modes.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.135-136
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• 2006

A precise linear motion stage supported by magnetically preloaded air bearings is introduced where preloading magnetic actuators are combined with permanent magnets and coils to adjust air bearing clearance by controlling magnetic force actively. Each of the magnetic actuators has a permanent magnet generating nominal magnetic flux for required preload and a coil to perturb the magnetic force resulting adjustment of air-bearing clearance. The characteristics of porous aerostatic bearing are analyzed by numerical analysis, and analytic magnetic circuit model is driven for magnetic actuator to calculate nominal preload and variation of force due to current. A 1-axis linear stage motorized with a coreless linear motor and a linear encoder is built for verifying this design concept. With the active magnetic preloading actuators controlled with DSP board and PWM power amplifiers, the active on-line adjusting tests about the vertical, pitching and rolling motion were performed, and the result shows very good linearity.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.10a
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• pp.73-74
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• 2009

• Journal of the Korean Society for Precision Engineering
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• v.25 no.6
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• pp.134-142
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• 2008

In this paper, we propose a precise linear motion stage supported by magnetically preloaded air bearings. The eight aerostatic bearings with rectangular carbon porous pads were located only one side of vertical direction under the platen where four bearings are in both sides of horizontal direction as wrap-around-design, and this gives simpler configuration than which constrained by air bearings for all direction. Each of the magnetic actuators has a permanent magnet generating static magnetic flux far required preload and a coil to perturb the magnetic farce resulting adjustment of air- bearing clearance. The characteristics of porous aerostatic bearing are analyzed by numerical analysis, and analytic magnetic circuit model is driven for magnetic actuator to calculate preload and variation of force due to current. A 1-axis linear stage motorized with a coreless linear motor and a linear encoder was designed and built to verify this design concept. The load capacity, stiffness and preload force were examined and compared with analysis. With the active magnetic preloading actuators controlled with DSP board and PWM power amplifiers, the active on-line adjusting tests about the vertical, pitching and rolling motion were performed. It was shown that motion control far three DOF motions were linear and independent after calibration of the control gains.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.2
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• pp.119-125
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• 2001

This paper presents an experimental study on active control of self-excited vibration for a high speed turbomachinery. In order to suppress the self-excited vibration, it is necessary to actively control the air film pressure or the air film thickness. In this study, active pads are used to control the air film thickness. Active pads are supported by pivots containing piezoelectric actuators and their radial position can be actively controlled by applying voltage to the actuators. The transfer characteristics from actuator inputs to shaft vibration outputs are experimentally investigated. In a tilting-pad gas bearing (TPGB), a shaft is supported by the pressurized air film. Four gap sensors were used to measure the vibration of the shaft and PID was used in the feedback control of the shaft vibration. The experimental results show that the self-excited vibration of the rotor can be effectively suppressed if the PID controller gains are properly chosen. As a result we find that the feedback control is effective for suppressing the self-excited vibration of a rotor system using stack-type PZT actuators.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.9
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• pp.84-91
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• 2003

This paper concerns on one-DOF non-rotating active magnetic bearing (AMB) system subject to base motion. In such a system, it is desirable to retain the axis within the predetermined air-gap while the base motion forces the axis to deviate from the desired air-gap. Motivated from this, an optimal acceleration feedforward control is proposed to reduce the base motion response without deteriorating other feedback control performances. Experimental results demonstrate that the proposed optimal feedforward control reduces the standard deviation of the air-gap to 29％ that by feedback control alone.

• Journal of the Korean Society for Precision Engineering
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• v.30 no.12
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• pp.1321-1325
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• 2013

In this paper, we proposed an air bearing stage with active magnetic preloads in vertical directions compensating motion errors and attenuating vibrations to improve dynamic characteristics. This preloaded design gives simpler configuration of the stage, and active control of preload can be used for compensating motion errors by feedforward method. To improve dynamic characteristics, vibration of the table is monitored by an accelerometer, and controlled by a DSP based digital controller with integrator and band pass filters for suppressing roll and pitch vibration modes. The modes were evaluated by measuring frequency response functions, and compared with compensated responses. This showed effective results for suppressing poorly damped regenerative vibration of air bearings.