• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.07a
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• pp.651-653
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• 2000

In this study, a distance-measurement system was proposed by using principle of the Michelson Interferometer and a fundamental research was carried out. In case of the rnichelson interferometer, relativity distance was measured by relativity-difference of two course of light. But wavelength of light source were changed in this system in order to use interference phenomenon of michelson interferometer in measuring absolutely distance. Wavelength of input signal were changed periodically and were interfered electrically. So absolute distance can be calculated by using $\Delta\lambda$ and measuring $\eta\Delta$ in electric interference. Nose by a external factor was small in this system because a absolutely distance was measured by phase difference. And a dispersion of noise was small in pulse-echo response because a error was occurred in range of phase difference of signal. Also very wide range can be measured by only single system because informations of distance were acquisited in wavelength level.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.06a
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• pp.249-250
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• 2009

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.369-370
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• 2007

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.11a
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• pp.39-40
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• 2007

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.195-198
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• 2002

Demand for high precision measurement of large area is increasing in many industrial fields. White-light Scanning Interferometer(WSI) is a well-known method for 3D profile measurement. However WSI has some limitations in a measurement range because of the sensing mechanism. Therefore, in this paper we use a heterodyne laser interferometer to get over the limitations of a short measurement range in WSI, We suggest a new WSI system combined with heterodyne laser interferometer. This system is aimed at eliminating Abbe error with measuring the focus point directly. With the use of triggering functionality of WSI, we can use this system as a probe of a precision stage such as a probe of CMM. The suggested system gives a repeatability of 87 nm in the absolute distance measurement test under the laboratory environment.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.268-271
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• 2003

The Volumetric Interferometer using two spherical wavefronts emitted from the ends of two single mode fibers has been suggested to measure 3-dimensional absolute coordinates. In this paper, we try to improve the performance of the volumetric interferometer using multi-CCDs. We get coordinates matching matrixes between CCDs and can obtain more information in the space with multi-CCDs. Also we find out the best arrangement of multi-CCDs by computer simulations. In the simulation we can know that it will be better to increase the distance between CCDs to improve performance. For the performance test, we do a repeatability test, a comparison test with 2-D stage and the self-calibration using artifact.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.387-390
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• 2002

In this paper, we accomplish uncertainty evaluation and performance test of the volumetric interferometer using two spherical wavefronts emitted from the ends of two single mode fibers. We verify that the volumetric interferometer has the volume uncertainty of 690nm through the error analysis and it has the resolution of 0.1 0.1$\mu\textrm{m}$ for x axis which is the same order of repeatability for x axis. Also, we obtain the systematic error of $1\mu\textrm{m}$ for $60\times 60\times 20 mm^3$ working volume using self-calibration with an artifact plate.

• Transactions of the Korean Society of Mechanical Engineers
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• v.17 no.6
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• pp.1431-1440
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• 1993

This paper presents a new NC machine performance test and calibration system. In order to measure NC machine erros in simpler, and less time-comsuming way, some indirect measuring systems such as circular disk system and double ball bar system have been developed instead of laser interferometer. But these indirect measuring systems have shown their limits in identifying each of NC machine error sources in absolute numerical value. Therefore, we developed an unique NC machine error measurement system which provides a simple measuring process like other conventional indirect methods and still can indentify each of NC machine error sources in absolute numerical value.

• Journal of Institute of Control, Robotics and Systems
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• v.12 no.9
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• pp.856-860
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• 2006

A CCD camera is used to determine the position of the point sources that influence the measurement accuracy in the absolute interferometer. The principle of determination method is based on the GPS in which the position is determined by more than 3 distance information from the known positions. Two-dimensional array of photo-detectors in the CCD camera is used as known positions. Performing optimization of the cost function constructed with phase values measured at each pixel on the CCD camera, the position coordinates of each source is precisely determined.

• Proceedings of the Optical Society of Korea Conference
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• 2005.07a
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• pp.244-245
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• 2005