• 한국정밀공학회지
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• 제20권6호
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• pp.27-36
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• 2003

The Electro-Rheological (ER) fluid has been used to the ultraprecision polishing of single crystal silicon as new polishing slurry whose properties such as yield stress and particle structure changed with the application of an electric field. In this work, it is aimed to find the effective parameters in the ER fluid on material removal in the polishing system whose structure is similar to that of the simple hydrodynamic bearing. The generated pressure in the gap between a moving wall and a workpiece, as well as the electric field-induced stress of the mixture of ER fluid-abrasives, is evaluated experimentally, and their influence on the polishing of single crystal silicon is analyzed. Moreover, the behavior of abrasive and ER particles is described.

• International Journal of Precision Engineering and Manufacturing
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• 제5권2호
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• pp.32-38
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• 2004

The electrorheological(ER) fluid has been used to the ultraprecision polishing of single crystal silicon as new polishing slurry whose properties such as yield stress and particle structure changed with the application of an electric field. In this work, it is aimed to find the effective parameters in the ER fluid on material removal in the polishing system whose structure is similar to that of the simple hydrodynamic bearing. The generated pressure in the gap between a moving wall and a workpiece, as well as the electric field-induced stress of the mixture of ER fluid-abrasives, is evaluated experimentally, and their influence on the polishing of single crystal silicon is analyzed. Moreover, the behavior of abrasive and ER particles is described.

• 한국정밀공학회지
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• 제20권8호
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• pp.47-53
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• 2003

It was already proven experimentally that the laminated grinding wheel is superior to the general grinding wheel in the productivity of grinding. However, it can't be guaranteed when the workpiece material is cemented carbide. Because of its extreme hardness, the grinding wheels made up of super-abrasives are used for grinding it. So, to investigate the performance in extremely hard materials grinding using super-abrasive grinding wheels, the surface roughness characteristics of cemented carbide ground by the laminated diamond wheels are studied experimentally. Through this study, it is found that the similar surface roughness characteristics, those were found in the studies on the laminated aluminum oxide wheels, are still available.

• International Journal of Precision Engineering and Manufacturing
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• 제1권2호
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• pp.61-66
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• 2000

In this paper, we discuss the machining characteristics of HDD glass. Glass is now being used globally as a data storage device, Such glasses are usually machined by lapping by this technique requires a long machining time, resulting in low productivity, For this reason, we examine the possibility of EILD grinding in HDD glass workpieces, A move to ELID grinding may result in substantial cost reduction. Our purpose is to investigate the grinding characteristics of HDD glass in ELID grinding. The bonding materials for fixing the abrasives of cast iron, cobalt and bronze are applied, and grinding conditions such as rotation speed and feeding are varied. Results show that with the use of ELID, mirror surfaces can be achieved with high efficiency.

• 한국세라믹학회지
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• 제47권4호
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• pp.290-295
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• 2010

This study has been focused on properties of mirror surface grinding technology by ELID(Electrolytic In-process Dressing) for structural ceramics using in high precision structural parts as like semi-conductor manufacturing processes. The experimental studies have been carried out to get mirror surface for grinding of structural ceramics, SiC, $Al_2O_3$ and AlN. Grinding process of the ceramics is carried out with varying mesh type, depth of cut and feed rate using diamond wheel. The machining result of the surface roughness and condition of ground surface, have been analyzed by use of surface roughness tester, SEM, AFM and three dimensional surface profiler measurement system.

• 한국기계가공학회지
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• 제2권4호
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• pp.25-32
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• 2003

In this study, the grinding characteristics of CBN wheels, such as grinding force and surface roughness, have been compared and analyzed from various working conditions of spindle speed and depth of cut. To actualize high efficient grinding at ceramic and silicon nitride material, electrolytic in-process dressing (ELID) method has been applied at metal bonded diamond and CBN wheels. Super precision grinding using ductile mode at difficult-ta-cut materials could be performed.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1995년도 추계학술대회 논문집
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• pp.24-29
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• 1995

A recently developed finishing process using rotating magnetic field is known to be very efficient for the finishing of parts such as vacuum tube, sanitary tube, etc., which are difficult to be finished by the conventional finishing methods as they are generally curbed tubes. But, the finishing system using rotating magnetic field have the defect that is the cross section of workpiece only circle because of internal rotating tool. Therefore, new finishing process of the workpieces which cross section are not circle is important and required. magnetic abrasive jet machining is a new concept finishing process. It is the precision internal finishing method using working fluid mixed with magnetic abrasives, which is jetted into the internal surface of tube. And magnetic poles are equipped on external surface of tube. In this study new concept finishing process or, magnetic abrasive jet machining system was developed. machining condition was predicted using simulation and some characteristics of the finishing process was analyzed.

• 한국기계가공학회지
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• 제4권1호
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• pp.7-12
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• 2005

An internal finishing process by the application of magnetic abrasive finishing has been developed as a new technology to obtain a fine inner surface of pipe. In this paper, another method of magnetic abrasive machining in which the N and S magnetic poles are vibrated and a workpiece is rotated only is tried in a non-ferromagnetic pipe(SUS304), and its finishing characteristics is experimently investigated by various effective factors such as vibrating frequency and amplitude. From the experimental results, it is found that the vibration effects of magnetic poles on the finishing characteristics are large in internal finishing.

• 한국재료학회지
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• 제9권2호
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• pp.111-116
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• 1999

The microstructure of vitreous bonded abrasives, which are used as the essential materials in the precise grinding, was investigated theoretically using two particle model. In this paper, a general equation applicable for a case in which there is a gap between abrasive grits is suggested. As a result, it was known that both the volume ratio of grit to glassy bond(V\ulcorner/V\ulcorner) and porosity(V\ulcorner) are the function of $\alpha$(the ratio of distance between grit to diameter of grit) and $\theta$(the angle from the center of pore to that of grit). Because the value $\alpha$ and $\theta$ can be get easily by using these suggested equations, the microstructure could be explained quantitatively. Also the raised error with the increasing amount of bond was modified by the simple assumption. As a result, in that case, both V\ulcorner/V\ulcorner and V\ulcorner were known to be the function of $\alpha$ and $\theta$(the ratio diameter of pore to that of grit).

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.1
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• pp.378-381
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• 2003

The chemical mechanical polishing (CMP) has been widely accepted for the global planarization of multi-layer structures in semiconductor manufacturing However, cost of ownership (COO) and cost of consumables (COC) were relatively increased because of expensive slurry. In this paper, the effects of different slurry composition on the oxide CMP characteristics were investigated to obtain the higher removal rate and lower non-uniformity. We prepared the various kinds of slurry. In order to save the costs of slurry, the original slurry was diluted by de-ionized water (DIW). And then, alunima abrasives were added in the diluted slurry in order to promote the mechanical force of diluted slurry.