• Journal of the Korean Society for Precision Engineering
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• v.25 no.1
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• pp.138-144
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• 2008

Micro-machining of a brittle material such as glass, silicon, etc., is important in micro fabrication. Particularly, micro-abrasive jet machining (${\mu}-AJM$) has become a useful technique for micro-machining of such materials. The ${\mu}-AJM$ process is mainly based on the erosion of a mask which protects brittle substrate against high velocity of micro-particle. Therefore, fabrication of an adequate mask is very important. Generally, for the fabrication of a mask in the ${\mu}-AJM$ process, a photomask based on the semi-conductor fabrication process was used. In this research a rapid mask fabrication technology has been developed for the ${\mu}-AJM$. By scanning the focused UV laser beam, a micro-mask pattern was fabricated directly without photolithography process and photomask. Two kinds of mask patterns were fabricated using SU-8 and photopolymer (Watershed 11110). Using fabricated mask patterns, abrasive-jet machining of Si wafer were conducted successfully.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1175-1178
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• 2005

Brittle materials, especially single-crystal silicon wafer, are widely used for sensors, IC industry, and MEMS applications. e general machining process of crack easy materials is by chemical agents, but it is hazardous and time consuming. Also, it is difficult to get high aspect ratio micro structure. As an alternative tool, an AJM(Abrasive jet machining) is promising method in terms of high aspect ratio and production cost. In this study, to get more precise detail compared to general AJM, photo polymer mask, SU-8, used in photolithography was applied in AJM. Process parameters such as abrasive diameter, air pressure, nozzle diameter, flow rate of abrasive in AJM and a variety of conditions in spin coating were decided. Finally, micro channel and mixer was fabricated to see the efficiency of the AJM with photo polymer mask.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.25 no.1
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• pp.83-88
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• 2016

Because of the increasing tool cost for cutting hard-to-cut materials, abrasive water jet (AWJ) milling recently has been regarded as a potential alternative machining method. However, it is difficult to control the depth and width of cut in AWJ milling because they vary depending on many AWJ cutting parameters. On 27 conditions within a limited range of pressure, feed rate, and abrasive flow rate, AWJ cutting was conducted on titanium, and depth profiles were measured with a laser sensor. From the depth profile data, depth and width of cut were acquired at each condition. The relationships between depth and parameters and between width and parameters were derived through regression analysis. The former can provide proper cutting conditions and the latter the proper pick feed necessary to generate a milled surface. It is verified that pressure mostly affects depth, whereas abrasive flow rate mostly affects width.

• Nuclear Engineering and Technology
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• v.55 no.11
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• pp.3940-3955
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• 2023

A new method of numerical simulating prediction and decontamination effect evaluation for abrasive jet decontamination to radioactively contaminated metal is proposed. Based on the Computational Fluid Dynamics and Discrete Element Model (CFD-DEM) coupled simulation model, the motion patterns and distribution of abrasives can be predicted, and the decontamination effect can be evaluated by image processing and recognition technology. The impact of three key parameters (impact distance, inlet pressure, abrasive mass flow rate) on the decontamination effect is revealed. Moreover, here are experiments of reliability verification to decontamination effect and numerical simulation methods that has been conducted. The results show that: ⁶⁰Co and other homogeneous solid solution radioactive pollutants can be removed by abrasive jet, and the average removal rate of Co exceeds 80%. It is reliable for the proposed numerical simulation and evaluation method because of the well goodness of fit between predicted value and actual values: The predicted values and actual values of the abrasive distribution diameter are Ф57 and Ф55; the total coverage rate is 26.42% and 23.50%; the average impact velocity is 81.73 m/s and 78.00 m/s. Further analysis shows that the impact distance has a significant impact on the distribution of abrasive particles on the target surface, the coverage rate of the core area increases at first, and then decreases with the increase of the impact distance of the nozzle, which reach a maximum of 14.44% at 300 mm. It is recommended to set the impact distance around 300 mm, because at this time the core area coverage of the abrasive is the largest and the impact velocity is stable at the highest speed of 81.94 m/s. The impact of the nozzle inlet pressure on the decontamination effect mainly affects the impact kinetic energy of the abrasive and has little impact on the distribution. The greater the inlet pressure, the greater the impact kinetic energy, and the stronger the decontamination ability of the abrasive. But in return, the energy consumption is higher, too. For the decontamination of radioactively contaminated metals, it is recommended to set the inlet pressure of the nozzle at around 0.6 MPa. Because most of the Co elements can be removed under this pressure. Increasing the mass and flow of abrasives appropriately can enhance the decontamination effectiveness. The total mass of abrasives per unit decontamination area is suggested to be 50 g because the core area coverage rate of the abrasive is relatively large under this condition; and the nozzle wear extent is acceptable.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.1 s.190
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• pp.71-78
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• 2007

Abrasive jet machining (AJM) has been traditionally used for removing rusts or paints. Nowadays, this is promising technology for micro bulk machining where brittle substrate materials are used. In order to get accurate details, masks such as metal, polymer or elastomer is inevitable. Among them, photo polymer which is sensitive to the light has been attractive for it's high accuracy using photolithography. In this research, SU-8 as a photo polymer is used since it is adequate for making thick mask. So, this paper describes how to make AJM masks using SU-8 with a photolithography process, and investigates the characteristics of SU-8 masks during AJM process. Also, an example of fabrication using AJM was shown.

• Journal of Welding and Joining
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• v.6 no.3
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• pp.37-42
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• 1988

The Hole Drilling Method(HDM) is widely used to measure residual stresses in the welded structures. The purpose of this study is to evaluate the accuracy fo measuring residual stresses when drilling the hole by Air-abrasive Jet machine(AJM). Simulated residual stresses wre introduced by applying known stresses to steel bars. These known streses were then compared with measured stresses relaxed from hole drilling. the obtained results are summarized as follows; 1) It was possible to obtain well defined holes with the nozzle designed for this study. 2) If the hole shape is not cylindrical, critical may occur. 3) In the uniaxial strain field, the measurement error of the maximum principal stress was within .+-.10 percent. The orientation angle of the maximum principal stress was within 8.deg. from the given directioin. 4) meausrements were made varying hole depths. Little or no change of stresses occurs since holse were drilled more than the depth of the 0.6 times diameter. 5) The air-abrasive jet machining for drilling holse does not cause appreciable apparent stresses which si critical to measure residual stresses.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1995.10a
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• pp.24-29
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• 1995

A recently developed finishing process using rotating magnetic field is known to be very efficient for the finishing of parts such as vacuum tube, sanitary tube, etc., which are difficult to be finished by the conventional finishing methods as they are generally curbed tubes. But, the finishing system using rotating magnetic field have the defect that is the cross section of workpiece only circle because of internal rotating tool. Therefore, new finishing process of the workpieces which cross section are not circle is important and required. magnetic abrasive jet machining is a new concept finishing process. It is the precision internal finishing method using working fluid mixed with magnetic abrasives, which is jetted into the internal surface of tube. And magnetic poles are equipped on external surface of tube. In this study new concept finishing process or, magnetic abrasive jet machining system was developed. machining condition was predicted using simulation and some characteristics of the finishing process was analyzed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.488-491
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• 2005

Abrasive Jet Micromachining (AJM) is a process that uses high pressure air with micron-sized particles to erode a substrate. It has been considered as the most economic and appropriate technique to pattern glass surfaces for the flat panel applications. To accelerate the industrialization of AJM, it is necessary to understand the erosion mechanisms thoroughly. Thus, this paper introduces a new method to model the erosion mechanism in AJM. The model is developed by using the concept of the accumulation of the microdeformation caused by each particle. And this paper proposes the model added the effects of second impact. The developed model is used to simulate the erosion profile, and is compared with the model considered only first impact. It can be concluded that the proposed model predicts the erosion profile more accurately.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.21 no.5
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• pp.761-766
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• 2012

Abrasive fluid jet polishing processes have been used for the polishing of optical surfaces with complex shapes. However, unstable and unpredictable polishing spots can be generated due to the fundamental property of an abrasive fluid jet that it begins to lose its coherence as the jet exits a nozzle. To solve such problems, MR fluid jet polishing has been suggested using a mixture of abrasives and MR fluid whose flow properties can be readily changed according to imposed magnetic field intensity. The MR fluid jet can be stabilized by imposed magnetic fields, thus it can remain collimated and coherent before it impinges upon the workpiece surface. In this study, MR fluid jet polishing characteristics of fused silica glass were investigated according to injection time and magnetic field intensity variations. Material removal rates and 3D profiles of the generated polishing spots were investigated. From the results, it can be confirmed that the developed MR fluid polishing system can be applied for stable and predictable precise polishing of optical parts.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.5
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• pp.389-394
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• 2014

In this paper, we report a new manufacturing method for friction reduction using micro-AAJ (abrasive air-jet) machining. AAJ machining employs compressed air to accelerate a jet of high-speed particles to mechanically machine features, including micro-channels and micro-holes, into glass, metal, or polymer substrates for use in microfluidics, MEMS (micro electromechanical systems). And we introduce the micro-AAJ machining system, which consists of a micro-AAJ nozzle and a five-axis positioning system. Various micro-AAJ nozzles can be used, depending on the required surface structure, and three-dimensional machining is possible. We machined samples under six different conditions and describe machining results obtained while using it. We also measured the coefficient of friction of micro-textured surfaces. We report the coefficient of friction of micro-textured surfaces patterned using micro-AAJ machining for engine piston ring.